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High-Speed Optical Coherence Tomography System Using a 200-kHz Swept Light Source with a KTN Deflector
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作者 Yuichi Okabe Yuzo Sasaki +4 位作者 Masahiro Ueno Takashi Sakamoto Seiji Toyoda Junya Kobayashi Masato Ohmi 《Optics and Photonics Journal》 2013年第2期190-193,共4页
We demonstrate a high-speed swept-source optical coherence tomography (SS-OCT) system, which is based on a high-speed swept light source and a Mach-Zehnder interferometer with a high-speed photodetector. The light sou... We demonstrate a high-speed swept-source optical coherence tomography (SS-OCT) system, which is based on a high-speed swept light source and a Mach-Zehnder interferometer with a high-speed photodetector. The light source is an external-cavity laser tuned by a KTN electro-optic deflector, which exhibits a very fast response and large deflection. The scanning wavelength range is almost 80 nm up to 200 kHz with a ±400-V deflector driving voltage. The system acquires 1 mm × 1 mm images consisting of 200 × 200 pixels within few milliseconds. We present preliminary SS-OCT images of an in-vitro human nail and an in-vivo finger pad. 展开更多
关键词 Swept-Source Optical coherence TOMOGRAPHY KTN New light SOURCE
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Multiple frequency conversion via atomic spin coherence of storing a light pulse
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作者 王磊 罗梦希 +6 位作者 孙家翔 孙远航 陈怡 魏小刚 康智慧 王海华 高锦岳 《Chinese Physics B》 SCIE EI CAS CSCD 2015年第6期341-346,共6页
We experimentally demonstrate multiple frequency conversion via atomic spin coherence of storing a light pulse in a doped solid.The essence of this multiple frequency conversion is four-wave mixing based on stored ato... We experimentally demonstrate multiple frequency conversion via atomic spin coherence of storing a light pulse in a doped solid.The essence of this multiple frequency conversion is four-wave mixing based on stored atomic spin coherence.Through electromagnetically induced transparency,an input probe pulse is stored into atomic spin coherence by modulating the intensity of the control field.By using two different control fields to interact with the coherently prepared medium,the stored atomic spin coherence can be transformed into three different information channels.Multiple frequency conversion is implemented efficiently by manipulating the spectra of the control fields to scatter atomic spin coherence.This multiple frequency conversion is expected to have potential applications in information processing and communication network. 展开更多
关键词 相干性 光脉冲 自旋 原子 存储 多频 电磁感应透明 操纵控制
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Effect of Partially Coherent Light on the Contrast of Speckle Patterns Obtained Using Digital Image Processing of Speckle Photography 被引量:2
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作者 Nasser A. Moustafa Mohamad M. El-Nicklawy +1 位作者 Amin F. Hassan Amany K. Ibrahim 《Optics and Photonics Journal》 2013年第5期324-329,共6页
The paper is devoted to study theoretically, the effects of some parameters on the visibility of the speckle patterns. For this propose, a theoretical model for a periodic rough surface was considered. Using this theo... The paper is devoted to study theoretically, the effects of some parameters on the visibility of the speckle patterns. For this propose, a theoretical model for a periodic rough surface was considered. Using this theoretical model, the effects of grain height, its density, the band width and spectral distribution of the line profile (Gaussian and Lorentzian) illuminating a rough surface on the visibility of speckle pattern are investigated. An experimental setup was constructed to study the effect of surface roughness and coherence of the illuminating light beam on the contrast of speckle pattern. The general behavior of the experimental results, which agree with published data, is compatible with the new theoretical model. 展开更多
关键词 SPECKLE PATTERN Surface ROUGHNESS PARTIALLY coherENT light
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The influence of nonparaxiality on the spectral behavior in Young's experiment illuminated by partially coherent light 被引量:1
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作者 赵光普 吕百达 《Chinese Physics B》 SCIE EI CAS CSCD 2009年第8期3466-3472,共7页
Starting from the Rayleigh-Sommerfeld diffraction integral,this paper studies the spectral behavior in Young's experiment illuminated by nonparaxial partially coherent light and compares with the paraxial case,whe... Starting from the Rayleigh-Sommerfeld diffraction integral,this paper studies the spectral behavior in Young's experiment illuminated by nonparaxial partially coherent light and compares with the paraxial case,where the influence of nonparaxiality of partially coherent light on the spectral shifts and spectral switches is stressed.It is shown that there is a spectral shift in the nonparaxial case relative to the paraxial one and the critical position changes,at which the spectral switch occurs.The ratio of the waist width to the central wavelength w 0 /λ 0 and relative spatial correlation length affect the spectral difference.The smaller w 0 /λ 0 is,the larger the difference between the nonparaxial and paraxial results appears.The effect of relative spatial correlation length is relatively small. 展开更多
关键词 部分相干光 光谱行为 实验 空间相关长度 光谱开关 非傍轴 衍射积分 光谱变化
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MEASURING DISPLACEMENT FIELDS OF CURVED SURFACE BY MOIRE INTERFEROMETRY OF PARTIAL COHERENT LIGHT
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作者 钟国成 王兵 +1 位作者 蒋小林 戴福隆 《Acta Mechanica Sinica》 SCIE EI CAS CSCD 1993年第2期177-184,共8页
This paper presents a method to measure the in-plane displacement fields of curved surface bymoire interferometry of partial coherent light.The method has the following advantages:simple opticalsystem,no requirement o... This paper presents a method to measure the in-plane displacement fields of curved surface bymoire interferometry of partial coherent light.The method has the following advantages:simple opticalsystem,no requirement on vibration isolation,high sensitivity,large measuring range,high contrast of interference fringes and availability to in-situ structural testing.The present paper also gives theoretical analysis ofthe method and the formulas of light intensity and displacement field,and introduces a replication techniqueto form a high frequency reflectance grating on the curved surface.The experiments achieved the measurementof the surface displacement field of a cylindrical shell—the simultaneous circumferential,axial and 45°displacement fields.The torsional test data for surface displacement of a circular bar agree well with thetheoretical result. 展开更多
关键词 MOIRE INTERFEROMETRY partial coherENT light CIRCUMFERENTIAL DISPLACEMENT AXIAL DISPLACEMENT
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Quantum Light and Coherent States in Conducting Media
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作者 I. A. Pedrosa 《Journal of Applied Mathematics and Physics》 2020年第11期2475-2487,共13页
We present a simple description of classical and quantum light propagating through homogeneous conducting linear media. With the choice of Coulomb gauge, we demonstrate that this description can be performed in terms ... We present a simple description of classical and quantum light propagating through homogeneous conducting linear media. With the choice of Coulomb gauge, we demonstrate that this description can be performed in terms of a damped harmonic oscillator which is governed by the Caldirola-Kanai Hamiltonian. By using the dynamical invariant method and the Fock states representation we solve the time-dependent Schr<span style="white-space:nowrap;">&#246;</span>dinger equation associated with this Hamiltonian and write its solutions in terms of a special solution of the Milne-Pinney equation. We also construct coherent states for the quantized light and show that they are equivalent to the well-known squeezed states. Finally, we evaluate some important properties of the quantized light such as expectation values of the amplitude and momentum of each mode, their variances and the respective uncertainty principle. 展开更多
关键词 light Schrödinger Equation Invariant Method Fock States coherent and Squeezed States
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Optical Coherence in Astrophysics: The Powerful Alternative of Big Bang
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作者 Jacques Moret-Bailly 《Journal of Modern Physics》 2013年第8期197-206,共10页
The coherence of the interaction of light with a collisionless gas (Einstein 1917) founds the theory of gas lasers. It is, for the understanding of universe, a simpler and more powerful tool than the big bang which re... The coherence of the interaction of light with a collisionless gas (Einstein 1917) founds the theory of gas lasers. It is, for the understanding of universe, a simpler and more powerful tool than the big bang which requires questionable supplements (dark matter, MOND, etc.). The Impulsive Stimulated Raman Scattering (ISRS) redshifts gradually light pulses which cross excited atomic hydrogen H*, so that the redshift is a measure of the column density of H*. Thus, the distance of the hot stars, surrounded by much H*, is exaggerated by the use of Hubble’s law. Local exaggerated distances create voids in the maps of galaxies which become spongy. The interpretation of spectra of quasars, the periodicity of galaxy redshifts introduce an experimental “Karlsson’s constant” exactly computed by ISRS. The need for dark matter comes from the exaggeration of the distance, therefore the size of galaxies. Without dark matter, celestial mechanics provides a reliable distance of spiral galaxies. Coherence also introduces superradiance and mode competition that explain that only the limbs of Stromgren spheres are visible as circles maybe punctuated by an even number of dots: Too numerous, the figures assigned to gravitational lenses can be such limbs. The coincidence of the ignition of the rings of SNR1987A with the extinction of the star is due to a multiphoton coherent scattering of star light, which amplifies the superradiant emission of the rings. A blueshift of microwaves crossing H* resulting, between 10 and 15 AU, of the expansion of solar wind, explains the “anomalous acceleration” of Pioneer probes. All is obtained without any change in theories of standard spectroscopy. 展开更多
关键词 coherENT Interactions of light with Gas and Plasma Emission Absorption SCATTERING Nonnlinear PHENOMENA ASTROPHYSICS
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基于空间分辨法分析时间低相干光自聚焦效应
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作者 单翀 孔令豹 +7 位作者 崔勇 季来林 赵晓晖 李福建 饶大幸 赵元安 隋展 邵建达 《物理学报》 SCIE EI CAS CSCD 北大核心 2024年第9期36-45,共10页
时间低相干光由于其瞬时宽带的物理特性,在激光惯性约束聚变中得到了广泛的关注.然而其复杂的时间尖峰结构或将诱导非线性自聚焦效应的放大.同时,传统的非线性自聚焦特征数值的测试方法中,多数材料的表面损伤先于体内自聚焦成丝损伤发生... 时间低相干光由于其瞬时宽带的物理特性,在激光惯性约束聚变中得到了广泛的关注.然而其复杂的时间尖峰结构或将诱导非线性自聚焦效应的放大.同时,传统的非线性自聚焦特征数值的测试方法中,多数材料的表面损伤先于体内自聚焦成丝损伤发生,这为对比不同激光的非线性效应带来巨大影响.本文利用短焦距透镜对熔石英进行紧聚焦,通过调节入射激光能量,在避免前表面损伤的前提下,诱导熔石英产生自聚焦成丝损伤.随后通过理论计算对光束在样品体内传输过程的光斑变化进行空间分辨处理,并得到对应细分位置的非线性数值.最终将各个位置对应的非线性相位变化值进行积分,得到前表面无损条件下材料的非线性自聚焦特征数值.测试结果表明时间低相干光的非线性自聚焦效应比传统单模脉冲激光更强.本文不仅设计了一套更加精确的对比不同激光非线性效应的测试方法,同时也探明了时间相干性对于非线性自聚焦效应的影响机制,为高功率时间低相干激光器的设计提供理论依据和参考. 展开更多
关键词 惯性约束核聚变 时间低相干光 非线性自聚焦 特征数值 空间分辨法
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基于空间光调制器的激光光束宽度调节装置
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作者 糜宸坤 杨朝辉 +1 位作者 刘宏欣 王飞 《计量学报》 CSCD 北大核心 2024年第2期194-198,共5页
为了满足激光产业对光束宽度测量装置的溯源要求,提升激光光束宽度校准能力,针对400~700 nm波段的激光器不同光束宽度校准的需求,设计了一套基于空间光调制器的激光光束宽度可调节装置,用于光束质量分析仪或激光光斑测量仪的校准。实验... 为了满足激光产业对光束宽度测量装置的溯源要求,提升激光光束宽度校准能力,针对400~700 nm波段的激光器不同光束宽度校准的需求,设计了一套基于空间光调制器的激光光束宽度可调节装置,用于光束质量分析仪或激光光斑测量仪的校准。实验结果表明该装置在0.1~5.0 mm的宽度范围连续可调;利用部分相干光束抗环境扰动能力强的特点,其短期稳定性达99.5%,长期稳定性达99.1%,优于参考激光器96.8%的短期稳定性和96.3%的长期稳定性。此外,基于空间光调制器优越的光束整形能力,该装置可将输入的非规则光束输出为高斯光束。 展开更多
关键词 光学计量 激光束宽度 空间光调制器 连续可调 光束整形 部分相干光束 稳定性
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基于区域分割的枝切与最小二乘法相位解包裹融合算法
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作者 吴旭辉 刘娇娇 +2 位作者 王丙楠 刘旭东 王进卿 《激光杂志》 CAS 北大核心 2024年第4期75-80,共6页
针对纳米台阶物体的形貌测量要求,设计与搭建了部分相干光离轴像面干涉测量系统。相位解包裹作为干涉测量的关键环节,要求速度快、精度高、适应性强。分析了5种常用相位解包裹算法的特点,并结合纳米台阶的形貌特点提出了一种基于区域分... 针对纳米台阶物体的形貌测量要求,设计与搭建了部分相干光离轴像面干涉测量系统。相位解包裹作为干涉测量的关键环节,要求速度快、精度高、适应性强。分析了5种常用相位解包裹算法的特点,并结合纳米台阶的形貌特点提出了一种基于区域分割的融合算法。该算法通过光强度图与枝切线结合求解各分割区域的质量,在高、低质量区域分别用无权最小二乘法与枝切法相位展开,以满足测量实时性与精确性的要求。实验结果表明:所提算法具有较强的抗噪性,其计算耗时仅为枝切法的27.92%,对65.1纳米台阶高度样板测量相对误差仅为1.1%,对残差点具有一定抗干扰性,在纳米台阶形貌测量方面具有一定应用价值。 展开更多
关键词 相位解包裹 纳米台阶 部分相干光 区域分割
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基于空间聚类增强Lightcuts的光照计算 被引量:2
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作者 王光伟 谢国富 王文成 《计算机学报》 EI CSCD 北大核心 2013年第11期2364-2370,共7页
Lightcuts是面向多光源场景的高效绘制方法.它渐进地对光源进行聚类组织,并以二叉树进行管理,由此在绘制时可用一些光源聚类的代表光源(统称为‘光源割’)进行光照计算,以减少需要计算的光源数量.但是,当光源很多并分布复杂时,在二叉树... Lightcuts是面向多光源场景的高效绘制方法.它渐进地对光源进行聚类组织,并以二叉树进行管理,由此在绘制时可用一些光源聚类的代表光源(统称为‘光源割’)进行光照计算,以减少需要计算的光源数量.但是,当光源很多并分布复杂时,在二叉树结构中寻找光源割也要花费不少的计算.为此,有些方法提出利用绘制中的图像连贯性来减少光源割的搜寻计算,并取得了较好的效果.文中提出利用空间聚类来减少光源割的搜寻计算,即先根据位置和法向对场景中的几何位置进行聚类,为各个类的代表点寻找其光源割,以作为该类其它点搜索各自对应光源割的初始情况.实验表明,文中方法能很好地减少光源树中搜索光源割的计算,提高Lightcuts的光照计算效率,优于利用图像连贯性的加速方法,加速性能稳定,并且光源越多分布越复杂,加速效果越好. 展开更多
关键词 光照计算 lightcuts 空间聚类 多光源 真实感绘制
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At wavelength coherent scatterometry microscope using high-order harmonics for EUV mask inspection 被引量:1
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作者 Yutaka Nagata Tetsuo Harada +2 位作者 Takeo Watanabe Hiroo Kinoshita Katsumi Midorikawa 《International Journal of Extreme Manufacturing》 2019年第3期1-12,共12页
In this review,we describe our research on the development of the 13.5 nm coherent microscope using high-order harmonics for the mask inspection of extreme ultraviolet(EUV)lithography.EUV lithography is a game-changin... In this review,we describe our research on the development of the 13.5 nm coherent microscope using high-order harmonics for the mask inspection of extreme ultraviolet(EUV)lithography.EUV lithography is a game-changing piece of technology for high-volume manufacturing of commercial semiconductors.Many top manufacturers apply EUV technology for fabricating the most critical layers of 7 nm chips.Fabrication and inspection of defect-free masks,however,still remain critical issues in EUV technology.Thus,in our pursuit for a resolution,we have developed the coherent EUV scatterometry microscope(CSM)system with a synchrotron radiation(SR)source to establish the actinic metrology,along with inspection algorithms.The intensity and phase images of patterned EUV masks were reconstructed from diffraction patterns using ptychography algorithms.To expedite the practical application of the CSM,we have also developed a standalone CSM,based on high-order harmonic generation,as an alternative to the SR-CSM.Since the application of a coherent 13.5 nm harmonic enabled the production of a high contrast diffraction pattern,diffraction patterns of sub-100 ns size defects in a 2D periodic pattern mask could be observed.Reconstruction of intensity and phase images from diffraction patterns were also performed for a periodic line-and-space structure,an aperiodic angle edge structure,as well as a cross pattern in an EUV mask. 展开更多
关键词 high-order harmonics coherent EUV light EUV lithography coherent EUV scatterometry microscope synchrotron radiation EUV mask inspection
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Measurement Device Independent Quantum Key Distribution Based on Orbital Angular Momentum under Parametric Light Source
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作者 Meng Wang Hong Lai Lei Pan 《Computers, Materials & Continua》 SCIE EI 2020年第4期369-387,共19页
On the one hand,existing measurement device independent quantum key distribution(MDI-QKD)protocols have usually adopted single photon source(SPS)and weak coherent photon(WCP),however,these protocols have suffered from... On the one hand,existing measurement device independent quantum key distribution(MDI-QKD)protocols have usually adopted single photon source(SPS)and weak coherent photon(WCP),however,these protocols have suffered from multi-photon problem brought from photon splitter number attacks.On the other hand,the orbital angular momentum(OAM)-MDI-QKD protocol does not need to compare and adjust the reference frame,solving the dependency of the base in the MDI-QKD protocol.Given that,we propose the OAM-MDI-QKD protocol based on the parametric light sources which mainly include single-photon-added-coherent(SPACS)and heralded single-photon sources(HSPS).Due to the stability of OAM and the participation of parametric light sources,the performance of MDI-QKD protocol gradually approaches the ideal situation.Numerical simulation shows that compared with WCP scheme,HSPS and SPACS schemes have increased the maximum secure transmission distance by 30 km and 40 km respectively. 展开更多
关键词 Measurement device independent orbital angular momentum parametric light sources single-photon-added coherent state heralded single-photon sources
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Effects of Quantum well Size Alteration on Excitonic Population Oscillation Slow Light Devices Properties
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作者 Hassan Kaatuzian Hossein Shokri Kojori +1 位作者 Ashkan Zandi Reza Kohandani 《Optics and Photonics Journal》 2013年第2期298-304,共7页
This paper investigates the effects of quantum well size changes on center frequency and slow down factor of an slow light device. In this way, we consider the quantum well size alteration effects on oscillator streng... This paper investigates the effects of quantum well size changes on center frequency and slow down factor of an slow light device. In this way, we consider the quantum well size alteration effects on oscillator strength and binding energy of exciton. First, we investigate the variations in oscillator strength of exciton due to different quantum well size. Second, exciton binding energy level shift due to size of quantum well is investigated. According to this analysis, we have developed a new method for tuning slow light device bandwidth center frequency and slow down factor. Analysis and simulation of a basic GaAs/AlGaAs quantum wells optical slow light device based on excitonic population oscillation shows that size of quantum wells could tune both of the frequency properties and slow down factor of an optical slow light device. In our simulation with 34 quantum wells each with the width of 60?, we have received the slow down factor of more than 60,000. These achievements are useful in optical nonlinearity enhancements, all-optical signal processing applications and optical communications. 展开更多
关键词 SLOW light coherent POPULATION OSCILLATION Quantum Well EXCITON Oscillator Strength EXCITON Binding Energy
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Simulation and Characteristics Improvement of Quantum Dot Slow Light Devices by Geometrical Dimension Alteration
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作者 Bahram Choupanzadeh Hassan Kaatuzian +1 位作者 Reza Kohandani Saeed Abdolhosseini 《Optics and Photonics Journal》 2016年第8期114-119,共6页
In this paper we simulate and analyze a sample of slow light semiconducting device with quantum dot structure based on coherent population oscillation (CPO). The simulation is conducted to enhance the main parameters ... In this paper we simulate and analyze a sample of slow light semiconducting device with quantum dot structure based on coherent population oscillation (CPO). The simulation is conducted to enhance the main parameters of slow light device and a method is presented for setting the output specifications of this kind of devices. In this paper, we deal with changing the size of quantum dot to find the ideal size. The simulation results indicate that as the size of quantum dot changes properly (with reducing more than 50 percent of quantum dots both radius and height), then the slope of diagram of the real part of refractive index increases significantly so that the Slow Down Factor (SDF) predicted to be18 times greater. Analysis and simulations based on cylinderical quantum dots structure slow light devices based on exitonic cpo. 展开更多
关键词 Slow light coherent Population Oscillation Quantum Dots Slow down Factor
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Thermal vacuum state corresponding to squeezed chaotic light and its application
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作者 万志龙 范洪义 王震 《Chinese Physics B》 SCIE EI CAS CSCD 2015年第12期203-208,共6页
For the density operator(mixed state) describing squeezed chaotic light(SCL) we search for its thermal vacuum state(a pure state) in the real-fictitious space. Using the method of integration within ordered product(IW... For the density operator(mixed state) describing squeezed chaotic light(SCL) we search for its thermal vacuum state(a pure state) in the real-fictitious space. Using the method of integration within ordered product(IWOP) of operators we find that it is a kind of one- and two-mode combinatorial squeezed state. Its application in evaluating the quantum fluctuation of photon number reveals: the stronger the squeezing is, the larger a fluctuation appears. The second-order degree of coherence of SCL is also deduced which shows that SCL is classic. The new thermal vacuum state also helps to derive the Wigner function of SCL. 展开更多
关键词 双模压缩态 热真空态 应用 混沌 SCL 虚拟空间 混合状态 密度算符
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相干测风激光雷达探测效能评估研究
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作者 吴俊杰 徐足音 +2 位作者 王耀辉 杨传军 陈明 《激光技术》 CAS CSCD 北大核心 2023年第5期716-722,共7页
为了评估相干测风激光雷达在不同扫描模式下探测效能与气象要素之间的联系,使用2020-08~2021-07期间广汉机场相干测风激光雷达探测数据进行了分析验证。结果表明,方位角测量模式扫描方式下,探测距离在3 km之后,探测效能线性下降,90°... 为了评估相干测风激光雷达在不同扫描模式下探测效能与气象要素之间的联系,使用2020-08~2021-07期间广汉机场相干测风激光雷达探测数据进行了分析验证。结果表明,方位角测量模式扫描方式下,探测距离在3 km之后,探测效能线性下降,90°扫描时,500 m后探测效能开始线性下降;总体探测效能在11月最高,7月最低;11月至次年7月呈下降趋势,7~11月呈上升趋势;在日落后至日出前的探测效能较低,在午间探测效能最高;夏秋季节,激光雷达探测效能与PM 2.5质量浓度呈现正相关,与降雨量的对数呈负相关。该研究为机场激光雷达识别低空风切变准确度提供了重要的基础保障。 展开更多
关键词 激光技术 探测效能 相干测风激光雷达 PM 2.5质量浓度 降雨量
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基于LED照明的时域全场OCT成像系统设计 被引量:3
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作者 马志明 王晓玲 周哲海 《激光技术》 CAS CSCD 北大核心 2023年第2期280-285,共6页
为了进一步降低成本并提高成像的速度与精度,提出了一种基于发光二极管(LED)照明的全场时域光学相干层析成像技术(OCT)系统。用LED作光源、采用带反馈的闭环四步移相法采集信号,阐述了其成像原理,并进行了系统结构研究、理论分析和实验... 为了进一步降低成本并提高成像的速度与精度,提出了一种基于发光二极管(LED)照明的全场时域光学相干层析成像技术(OCT)系统。用LED作光源、采用带反馈的闭环四步移相法采集信号,阐述了其成像原理,并进行了系统结构研究、理论分析和实验验证。结果表明,系统的相干长度为23μm,轴向分辨率达到了11.8μm,横向分辨率为19.8μm,单幅图的采集时间为2.15 ms;与以往的OCT扫描方式相比,该方法减小了实现成本,并具有更快的扫描速率以及更高的精度,有着很大的使用价值。该研究为开发超高速、高精度的低成本OCT系统提供了参考。 展开更多
关键词 成像系统 光学相干层析 发光二极管光源 时域光学相干层析成像 全场
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基于FDTD的高深宽比沟槽结构低相干显微干涉信号仿真分析 被引量:1
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作者 赵雨晴 高志山 +3 位作者 袁群 马剑秋 孙一峰 郭珍艳 《光子学报》 EI CAS CSCD 北大核心 2023年第1期124-136,共13页
低相干垂直扫描干涉技术是微结构形貌特征参数无损检测的有效手段。但当微结构的沟槽深宽比高于5∶1时,遮挡效应以及阶跃边缘复杂的衍射效应会导致本应仅包含一个包络的垂直扫描测量干涉信号异常,形成两个甚至多个包络,继而影响形貌检... 低相干垂直扫描干涉技术是微结构形貌特征参数无损检测的有效手段。但当微结构的沟槽深宽比高于5∶1时,遮挡效应以及阶跃边缘复杂的衍射效应会导致本应仅包含一个包络的垂直扫描测量干涉信号异常,形成两个甚至多个包络,继而影响形貌检测结果。本文解析低相干垂直扫描干涉的测量过程,采用时域有限差分法对低相干显微干涉测量系统的显微成像、相干扫描测量过程进行数值仿真,计算待测微结构表面返回场及显微成像后的像面干涉场,得到低相干显微干涉信号。分别仿真了深宽比为5∶1、80∶3的硅基沟槽微结构的干涉信号,并与实验室自研的Linnik型低相干垂直扫描干涉系统对沟槽微结构的检测信号进行对比,匹配其高深宽比沟槽结构干涉信号的双包络及幅频双峰性的特征,验证所提方法的准确性。该仿真方法可应用于实测前对被测结构低相干显微干涉信号的先验性仿真计算,通过提前分析信号特征,为形貌复原算法的选取及改进指引优化方向。 展开更多
关键词 时域有限差分 光场传输 低相干垂直扫描干涉 高深宽比沟槽结构 低相干显微干涉信号
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注入光有限相干性对衰荡腔测试方法的影响及求解衰荡时间的强度积分法
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作者 黄知秋 张猛 +2 位作者 彭志敏 王振 杨乾锁 《物理学报》 SCIE EI CAS CSCD 北大核心 2023年第18期274-282,共9页
利用数值模拟和搭建的腔衰荡光谱装置,研究了注入激光有限相干性对注入光与腔纵模耦合过程的影响.注入光的有限相干性导致了频扫过程中耦合脉冲的随机性.随机性主要体现在两个方面:一是随着相干长度的减小,耦合脉冲的随机幅值范围增大.... 利用数值模拟和搭建的腔衰荡光谱装置,研究了注入激光有限相干性对注入光与腔纵模耦合过程的影响.注入光的有限相干性导致了频扫过程中耦合脉冲的随机性.随机性主要体现在两个方面:一是随着相干长度的减小,耦合脉冲的随机幅值范围增大.二是随着注入光的相干性变差,耦合脉冲由强度随机演化的单脉冲变为连续多脉冲,整体宽度随着扫频速率的降低而逐渐增大.随着相干性的变差,当使用腔体的光强来关闭注入光时,扫频速度的降低会在一个频率耦合过程中引起不止一次的注入关断和腔衰荡事件,特别是对于当利用腔体的长度进行频扫时.此外,本文提出了一种利用不同时间间隔的强度积分来估计衰荡时间的理论方法,并进行相关的实验验证.实验结果表明,与传统拟合法得到的衰荡时间相比,强度积分法对应的相对误差较小. 展开更多
关键词 腔衰荡光谱 光相干 衰荡时间 强度积分
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