Effect of coil and chamber structure on plasma radial uniformity in radio frequency inductively coupled plasma

Enhancing plasma uniformity can be achieved by modifying coil and chamber structures in radio frequency inductively coupled plasma(ICP)to meet the demand for large-area and uniformly distributed plasma in industrial manufacturing.This study utilized a two-dimensional self-consistent fluid model to investigate how different coil configurations and chamber aspect ratios affect the radial uniformity of plasma in radio frequency ICP.The findings indicate that optimizing the radial spacing of the coil enhances plasma uniformity but with a reduction in electron density.Furthermore,optimizing the coil within the ICP reactor,using the interior point method in the Interior Point Optimizer significantly enhances plasma uniformity,elevating it from 56%to 96%within the range of the model sizes.Additionally,when the chamber aspect ratio k changes from 2.8 to 4.7,the plasma distribution changes from a center-high to a saddleshaped distribution.Moreover,the plasma uniformity becomes worse.Finally,adjusting process parameters,such as increasing source power and gas pressure,can enhance plasma uniformity.These findings contribute to optimizing the etching process by improving plasma radial uniformity.

Noninvasive Detection of Cerebral Blood Flow and Blood Oxygen Based on Inductive Sensing Technology and Near Infrared Spectroscopy

The synchronous monitoring of cerebral blood flow and blood oxygen levels plays a pivotal role in the prevention,diagnosis,and treatment of cerebrovascular diseases.This study introduces a novel noninvasive device utilizing inductive sensing and near-infrared spectroscopy technology to facilitate simultaneous monitoring of cerebral blood flow and blood oxygen levels.The device consists of modules for cerebral blood flow monitoring,cerebral blood oxygen monitoring,control,communication,and a host machine.Through experiments conducted on healthy subjects,it was confirmed that the device can effectively achieve synchronous monitoring and recording of cerebral blood flow and blood oxygen signals.The results demonstrate the device’s capability to accurately measure these signals simultaneously.This technology enables dynamic monitoring of cerebral blood flow and blood oxygen signals with potential clinical applications in preventing,diagnosing,treating cerebrovascular diseases while reducing their associated harm.

Transient multi-physics behavior of an insert high temperature superconducting no-insulation coil in hybrid superconducting magnets with inductive coupling

A transient multi-physics model incorporated with an electromagneto-thermomechanical coupling is developed to capture the multi-field behavior of a single-pancake(SP)insert no-insulation(NI)coil in a hybrid magnet during the charging and discharging processes.The coupled problem is resolved by means of the finite element method(FEM)for the magneto-thermo-elastic behaviors and the Runge-Kutta method for the transient responses of the electrical circuits of the hybrid superconducting magnet system.The results reveal that the transient multi-physics responses of the insert NI coil primarily depend on the charging/discharging procedure of the hybrid magnet.Moreover,a reverse azimuthal current and a compressive hoop stress are induced in the insert NI coil during the charging process,while a forward azimuthal current and a tensile hoop stress are observed during the discharging process.The induced voltages in the insert NI coil can drive the currents flowing across the radial turns where the contact resistance exists.Therefore,it brings forth significant Joule heat,causing a temperature rise and a uniform distribution of this heat in the coil turns.Accordingly,a thermally/mechanically unstable or quenching event may be encountered when a high operating current is flowing in the insert NI coil.It is numerically predicted that a quick charging will induce a compressive hoop stress which may bring a risk of buckling instability in the coil,while a discharging will not.The simulations provide an insight of hybrid superconducting magnets under transient start-up or shutdown phases which are inevitably encountered in practical applications.

Numerical simulation and performance analysis of the radiofrequency inductive cathode

The radiofrequency(RF) inductive cathode has great prospects in space missions with long mission cycles, large speed increments, and rapid response requirements as the main electron source and neutralizer in Hall thrusters and ion thrusters. This paper proposes a comprehensive multi-physics RF inductive cathode model in which the RF electromagnetic field, electrostatic field for extracting electrons, flow field, plasma transport and electrochemical reaction process are all accounted for. Each physical field mentioned above can form a closed partial differential equation. The two-dimensional finite element code COMSOL is used to solve the multi-physics model. With this model, the formation process of the anode spot is exhibited and demonstrates the non-bipolar flow theory in practice. The simulation results demonstrate that the current jump in the RF inductive cathode is caused by the anode spot. Furthermore, the influences of preset discharge parameters such as RF power, bias voltage and actuating gas flow as well as structural parameters like the coil structure, discharge chamber size and ion collector area, emission hole size, distance between the anode target and the emission hole etc on the cathode performance are investigated, and some important optimal parameters are proposed.

A fast hybrid simulation approach of ion energy and angular distributions in biased inductively coupled Ar plasmas

In this work,a two-dimensional hybrid model,which consists of a bulk fluid module,a sheath module and an ion Monte-Carlo module,is developed to investigate the modulation of ion energy and angular distributions at different radial positions in a biased argon inductively coupled plasma.The results indicate that when the bias voltage amplitude increases or the bias frequency decreases,the ion energy peak separation width becomes wider.Besides,the widths of the ion energy peaks at the edge of the substrate are smaller than those at the center due to the lower plasma density there,indicating the nonuniformity of the ion energy distribution function(IEDF)along the radial direction.As the pressure increases from 1 to 10 Pa,the discrepancy of the IEDFs at different radial positions becomes more obvious,i.e.the IEDF at the radial edge is characterized by multiple low energy peaks.When a dual frequency bias source is applied,the IEDF exhibits three or four peaks,and it could be modulated efficiently by the relative phase between the two bias frequencies.The results obtained in this work could help to improve the radial uniformity of the IEDF and thus the etching process.

Orthogonal Frequency Division Multiplexing Adaptive Technology for Multinode Users of Seawater Channel Based on Inductively Coupled Mooring Chain

As an important part of buoy-type ocean monitoring systems,the inductively coupled mooring chain solves the problem of data cotransmission through the multinode sensors that it carries,which is significant for the rapid acquisition of fish,hydrology,and other information.This paper is based on a seawater channel transmission model with a depth of 300 m and a bandwidth of 2 MHz.An orthogonal frequency division multiplexing(OFDM)technology is used to overcome the multipath effect of signal transmission on a seawater medium.The adaptive technology is integrated into the OFDM,and an improved joint subcarrier and bit power allocation algorithm is proposed.This algorithm solves the problem of dynamic subcarrier allocation during the cotransmission of underwater multinode user data in seawater channels.The results show that the algorithm complexity can be reduced by 0.18126×10^(-2)s during one complete OFDM system data transmission by the improved greedy algorithm,and a total of 216 bits are transmitted by the OFDM.The normalized channel capacity can be improved by 0.012 bit s^(-1)Hz^(-1).At the bit error ratio(BER)of 10^(-3),the BER performance can be improved by approximately 6 d B.When the numbers of users are 4 and 8,the improved algorithm increases the channel capacity,and the higher the number of users,the more evident the channel capacity improvement effect is.The results of this paper have an important reference value for enhancing the transmission performance of inductively coupled mooring chain underwater multinode data.

Fluid simulation of the effect of a dielectric window with high temperature on plasma parameters in inductively coupled plasma

To maintain the high-density plasma source in inductively coupled plasma(ICP),very high radiofrequency power is often delivered to the antenna,which can heat the dielectric windows near the antenna to high temperature.This high temperature can modulate the plasma characteristics to a large degree.We thus study the effect of dielectric window temperature on plasma parameters in two different ICP structures based on COMSOL software.The distributions of various plasma species are examined at different dielectric window temperatures.The concentration of neutral gas is found to be largely modulated at high dielectric window temperature,which further affects the electron collision probability with neutrals and the electron temperature.However,the electron density profiles are barely affected by the dielectric window temperature,which is mainly concentrated at the center of the reactor due to the fixed power input and pressure.

A Comparison between Deductive and Inductive Approaches for Teaching EFL Grammar to High School Students

This study had the purpose of testingtwo methods for teaching grammar in Englishasa Foreign Language(EFL)class:the deductive and inductive approaches in terms of effectiveness and rapport.This research was conducted in a public high school in Ecuador.Seventy students enrolled in the second year of senior high school participated.One in-service teacher taught the EFL classes during the process of intervention(10 weeks),and two EFL teachers observed all of these classes and recorded the information by filling in observation sheets.The students were administered grammar pretests and post-tests in order to assess their grammar knowledge.The results of the tests showed a significant difference in the scores in favor of the inductive approach.After the statistical analysis of the data obtained from the tests and observation sheets,we concluded that the inductive approach is more effective for teaching grammar in the EFL classroom in terms of instruction and rapport.

Analytical Model and Topology Optimization of Doubly-fed Induction Generator

As the core component of energy conversion for large wind turbines,the output performance of doubly-fed induction generators (DFIGs) plays a decisive role in the power quality of wind turbines.To realize the fast and accurate design optimization of DFIGs,this paper proposes a novel hybriddriven surrogate-assisted optimization method.It firstly establishes an accurate subdomain model of DFIGs to analytically predict performance indexes.Furthermore,taking the inexpensive analytical dataset produced by the subdomain model as the source domain and the expensive finite element analysis dataset as the target domain,a high-precision surrogate model is trained in a transfer learning way and used for the subsequent multi-objective optimization process.Based on this model,taking the total harmonic distortion of electromotive force,cogging torque,and iron loss as objectives,and the slot and inner/outer diameters as parameters for optimizing the topology,achieve a rapid and accurate electromagnetic design for DFIGs.Finally,experiments are carried out on a 3MW DFIG to validate the effectiveness of the proposed method.

A Loss-model-based Efficiency Optimization Control Method for Induction Traction System of High-speed Train under Emergency Self-propelled Mode

Increasing attention has been paid to the efficiency improvement of the induction traction system of high-speed trains due to the high demand for energy saving. In emergency self-propelled mode, however, the dc-link voltage and the traction power of the motor are significantly reduced, resulting in decreased traction efficiency due to the low load and low speed operations. Aiming to tackle this problem, a novel efficiency improved control method is introduced to the emergency mode of high-speed train traction system in this paper. In the proposed method, a total loss model of induction motor considering the behaviors of both iron and copper loss is established. An improved iterative algorithm with decreased computational burden is then introduced, resulting in a fast solving of the optimal flux reference for loss minimization at each control period. In addition, considering the parameter variation problem due to the low load and low speed operations, a parameter estimation method is integrated to improve the controller's robustness. The effectiveness of the proposed method on efficiency improvement at low voltage and low load conditions is demonstrated by simulated and experimental results.

A Stable Fuzzy-Based Computational Model and Control for Inductions Motors

In this paper,a stable and adaptive sliding mode control(SMC)method for induction motors is introduced.Determining the parameters of this system has been one of the existing challenges.To solve this challenge,a new self-tuning type-2 fuzzy neural network calculates and updates the control system parameters with a fast mechanism.According to the dynamic changes of the system,in addition to the parameters of the SMC,the parameters of the type-2 fuzzy neural network are also updated online.The conditions for guaranteeing the convergence and stability of the control system are provided.In the simulation part,in order to test the proposed method,several uncertain models and load torque have been applied.Also,the results have been compared to the SMC based on the type-1 fuzzy system,the traditional SMC,and the PI controller.The average RMSE in different scenarios,for type-2 fuzzy SMC,is 0.0311,for type-1 fuzzy SMC is 0.0497,for traditional SMC is 0.0778,and finally for PI controller is 0.0997.

Coupled Numerical Simulation of Electromagnetic and Flow Fields in a Magnetohydrodynamic Induction Pump

Magnetohydrodynamic(MHD)induction pumps are contactless pumps able to withstand harsh environments.The rate of fluid flow through the pump directly affects the efficiency and stability of the device.To explore the influence of induction pump settings on the related delivery speed,in this study,a numerical model for coupled electromagnetic and flow field effects is introduced and used to simulate liquid metal lithium flow in the induction pump.The effects of current intensity,frequency,coil turns and coil winding size on the velocity of the working fluid are analyzed.It is shown that the first three parameters have a significant impact,while changes in the coil turns have a negligible influence.The maximum increase in working fluid velocity within the pump for the parameter combination investigated in this paper is approximately 618%.As the frequency is increased from 20 to 60 Hz,the maximum increase in the mean flow rate of the working fluid is approximately 241%.These research findings are intended to support the design and optimization of these devices.

Harmonics in the Squirrel Cage Induction Motor Analytic Calculation Part III: Influence on the Torque-speed Characteristic

The harmonics that appear in the squirrel cage asynchronous machine have been discussed in great detail in the literature for a long time. However, the systematization of the phenomenon is still pending, so we made an attempt to fill this gap in the previous parts of our study by elaborating formulas for calculation of parasitic torques. It was a general demand among those who work in this field towards the author to verify his formulas with measurements. In the literature, it seems,only one detailed, purposeful series of measurements has been published so far, the purpose of which was to investigate the effect of the number of rotor slots on the torque-speed characteristic curve of the machine. The main goal of this study is to verify the correctness of the formulas by comparing them with the referred series of measurements. Relying on this, the expected synchronous parasitic torques were developed for the frequently used rotor slot numbers-as a design guide for the engineer.Thus, together with our complete table for radial magnetic pull published in our previous work, the designer has all the principles, data and formulas available for the right number of rotor slots for his given machine and for the drive system. This brings this series of papers to an end.

Is Induction of Labor with Early Rupture of Membranes Associated with an Increased Rate of Clinical Chorioamnionitis?

Objective: The objective of this study was to determine if early rupture of membranes (ROM) in women undergoing induction of labor (IOL) at term is associated with an increased rate of clinical chorioamnionitis. Study Design: A retrospective cohort study was performed on women undergoing IOL. Early ROM was defined as ROM at a modified Bishop score less than 5, cervical dilation less than 4 cm, or cervical effacement less than 80%. The rate of clinical chorioamnionitis was compared between women with early and late ROM. Results: The rate of clinical chorioamnionitis was 8.6% (24/279). ROM at an effacement of less than 80% was associated with a rate of clinical chorioamnionitis of 15.4% (12/78) compared to 6.0% (12/201) at an effacement of equal to or greater than 80%, p = 0.017. The rate of cesarean delivery was higher for patients with early ROM by any definition: 32% compared to 17.5% by modified Bishop score (p = 0.031), 32.4% versus 18.2% by cervical dilation (p = 0.049), and 33.3% versus 14.9% by cervical effacement (p = 0.001). Conclusions: In patients undergoing IOL, early ROM may be associated with an increased rate of clinical chorioamnionitis when performed at a cervical effacement of less than 80% and an increased rate of cesarean delivery.

Enhanced Fuzzy Logic Control Model and Sliding Mode Based on Field Oriented Control of Induction Motor

In the context of induction motor control, there are various control strategies used to separately control torque and flux. One common approach is known as Field-Oriented Control (FOC). This technique involves transforming the three-phase currents and voltages into a rotating reference frame, commonly referred to as the “dq” frame. In this frame, the torque/speed and flux components are decoupled, allowing for independent control, by doing so, the motor’s speed can be regulated accurately and maintain a constant flux which is crucial to ensure optimal motor performance and efficiency. The research focused on studying and simulating a field-oriented control system using fuzzy control techniques for an induction motor. The aim was to address the issue of parameter variations, particularly the change in rotor resistance during motor operation, which causes the control system to deviate from the desired direction. This deviation implies to an increase in the magnetic flux value, specifically the flux component on the q-axis. By employing fuzzy logic techniques to regulate flux vector’s components in the dq frame, this problem was successfully resolved, ensuring that the magnetic flux value remains within the nominal limits. To enhance the control system’s performance, response speed, and efficiency of the motor, sliding mode controllers were implemented to regulate the current in the inner loop. The simulation results demonstrated the proficiency of the proposed methodology.

The Absence of “Perfect Induction”in the Science

The present paper is finalized to show that the Science, even if considered in its two different Phenomenological Approaches at present known, is unable to assert that: “Thinks are like that”. This is because both the two Scientific Approaches previously mentioned have not the property of “the perfect induction”. Consequently, although they can even reach an experimental confirmation of the theoretical results, and thus a “valid description” of the various phenomena of the surrounding world, such a description has not an “absolute value”. In fact, it always and only has an “operative validity”, that is, it exclusively and solely refers to an “experimental point of view”. This means that such an “operative validity” cannot represent the basis for a logical process characterized by a “perfect induction”. In addition, the Traditional Scientific Approach is also characterized by “Insoluble” Problems, “Intractable Problems”, Problems with “drifts”, which could generally be termed as “side effects”. On the other hand, the same com-possible Scientific Approach based on the Emerging Quality of Self-Organizing Systems, also presents its “Emerging Exits”. Consequently, none of the two mentioned scientific Approaches has the “gift” of “the perfect induction”. However, there are significant differences between the two. Differences that may “suggest” the most appropriate choice among them for an “operative point of view”. This conclusion will be com-proved by considering, with particular reference, both the “side effects”, which are related to the Traditional Approach and, on the other hand, the “Emerging Exits”, which specifically pertain to the new Scientific Approach based on the Emerging Quality of Self-Organizing Systems.

Functional Orientation and Practice of Inductive and Deductive Approaches to Grammar Teaching in EFL

To solve the ambiguous understanding of Grammar Teaching position,based on explicit grammatical knowledge,this paper discusses the grammar position in EFL,compares both its pros and cons between deductive and inductive approaches,and indicates that grammar teaching by either approach alone has disadvantages,should adopt a combination technique.

SOME PROPERTIES OF BOUNDED SETS IN INDUCTIVE LIMITS

Let (E,ξ）=indlim (En,ξn） be an inductive limit of a sequence of locally convex spaces,For brevity,denote by (DS) each set Bbounded in (E,ξ） is contained in some En； and (DST) each set B bounded in (E,ξ） is contained and bounded in some (En,ξn）. Theovem 1.(DS) holds provided that (i) for each n∈N,there is a neighborhood Un of o in (En,ξn） and m(n)∈ such that -↑Un^E包含于Em(n),and (ii) for any neighborhood V n of o in (En,ξn）,∞↑Un=1 Vn absorbs every bounded set in (E,ξ）. theorem 2 Let all (En,ξn） be metrizable and (DS) hold,then for each bounded set B IN (E,ξ）and each n ∈N thcrc is a neighborhood U k of o in (Ek,ξk）, 1≤k≤n ,and m(n)∈N such that ——↑(B+U1+U2+…+Un)^E包含于 Em(n). theorem 3. Let all (En,ξn） be Frechet spaces.Then (DST) holds if and only if (i) for each n ∈N,there is u neighborhood U n of in (En,ξn） and m(n)∈N such that 0↑Un^E包含于Em(n),and (ii) for each each closed ,absosed,absolutely conuex,bounded set B in (E,ξ）,∞↑Un=1(（εnB)∩Un）absorbs B,where U n is any neighborhood of o in (En,ξn） and εn is any positive number for every n ∈N。

Fountain Rockburst and Inductive Rockburst

A new test method—the load relaxation test after the peak value, was used to investigate rockburst proneness. Two new concepts—fountain and inductive rockbursts, were proposed to distinguish two kinds of rockbursts. The breaking process of rock, mutation condition and occasion of rockburst and source of kinetic energy of rockburst were discussed.