This paper presents a coherent resolved heterodyne interferometer used for recognition of surfaces of optical systems with resort to a short coherence length light source and a position sensitive detection(PSD), and i...This paper presents a coherent resolved heterodyne interferometer used for recognition of surfaces of optical systems with resort to a short coherence length light source and a position sensitive detection(PSD), and its special features of surface sensitivity, high resolution and short measuring time.展开更多
文摘This paper presents a coherent resolved heterodyne interferometer used for recognition of surfaces of optical systems with resort to a short coherence length light source and a position sensitive detection(PSD), and its special features of surface sensitivity, high resolution and short measuring time.