Direct current metal filtered cathodic vacuum arc （FCVA） and acetylene gas （C2H2） were wielded to synthesize Ti-containing amorphous carbon films on Si （100）. The influence of substrate bias voltage and acetylen...Direct current metal filtered cathodic vacuum arc （FCVA） and acetylene gas （C2H2） were wielded to synthesize Ti-containing amorphous carbon films on Si （100）. The influence of substrate bias voltage and acetylene gas on the microstructure and mechanical properties of the films were investigated. The results show that the phase of TiC in the （111） preferential crystallographic orientation exists in the film,and the main existing pattern of carbon is sp2. With increasing the acetylene flow rate,the contents of Ti and TiC phase of the film gradually reduce; however,the thickness of the film increases. When the substrate bias voltage reaches -600 V,the internal stress of the film reaches 1.6 GPa. The micro-hardness and elastic modulus of the film can reach 33.9 and 237.6 GPa,respectively,and the friction coefficient of the film is 0.25.展开更多
The 17th IUMRS International Conference in Asia was held in Qingdao from October 20th to 24th,2016.This conference contained 28international symposia.One of symposia,titled as Serration and Noise Behavior in Advanced ...The 17th IUMRS International Conference in Asia was held in Qingdao from October 20th to 24th,2016.This conference contained 28international symposia.One of symposia,titled as Serration and Noise Behavior in Advanced Materials,was well organized,which provided an effective platform to discuss the non-linear behavior in advanced materials including high-entropy alloys,bulk metallic glasses,and lightweight alloys,etc.Generally speaking,serration and noise phenomenon exist everywhere,such as,展开更多
文摘Direct current metal filtered cathodic vacuum arc （FCVA） and acetylene gas （C2H2） were wielded to synthesize Ti-containing amorphous carbon films on Si （100）. The influence of substrate bias voltage and acetylene gas on the microstructure and mechanical properties of the films were investigated. The results show that the phase of TiC in the （111） preferential crystallographic orientation exists in the film,and the main existing pattern of carbon is sp2. With increasing the acetylene flow rate,the contents of Ti and TiC phase of the film gradually reduce; however,the thickness of the film increases. When the substrate bias voltage reaches -600 V,the internal stress of the film reaches 1.6 GPa. The micro-hardness and elastic modulus of the film can reach 33.9 and 237.6 GPa,respectively,and the friction coefficient of the film is 0.25.
文摘The 17th IUMRS International Conference in Asia was held in Qingdao from October 20th to 24th,2016.This conference contained 28international symposia.One of symposia,titled as Serration and Noise Behavior in Advanced Materials,was well organized,which provided an effective platform to discuss the non-linear behavior in advanced materials including high-entropy alloys,bulk metallic glasses,and lightweight alloys,etc.Generally speaking,serration and noise phenomenon exist everywhere,such as,
