The ductility of thin metal films on polymer substrates reported in recent experiments has a huge disparity,ranging from less than 1 % up to more than 50 %.To reveal the underpinning origins for such a large variation...The ductility of thin metal films on polymer substrates reported in recent experiments has a huge disparity,ranging from less than 1 % up to more than 50 %.To reveal the underpinning origins for such a large variation,this paper reports a systematic computational study of two competing failure mechanisms:metal film necking and grain boundary cracking.The quantitative results suggest that strong grain boundaries and metal/polymer interfacial adhesion are keys to achieve high ductility of polymer-supported metal films.展开更多
We fabricate a series of periodic arrays of subwavelength square and rectangular air holes on gold films, and measure the transmission spectra of these metallic nanostructures. By changing some geometrical and physica...We fabricate a series of periodic arrays of subwavelength square and rectangular air holes on gold films, and measure the transmission spectra of these metallic nanostructures. By changing some geometrical and physical parameters, such as array period, air hole size and shape, and the incident light polarization, we verify that both global surface plasmon resonance and localized waveguide mode resonance are influential on enhancing the transmission of light through nanostructured metal films. These two resonances induce different behaviours of transmission peak shift. The transmission through the rectangular air-hole structures exhibits an obvious polarization effect dependent on the morphology. Numerical simulations are also made by a plane-wave transfer-matrix method and in good consistency with the experimental results.展开更多
We discuss the surface plasmon-polaritons used for ultrathin metal films with the aid of linear response theory and make comparisons with the known result given by Economou E N. In this paper we consider transverse el...We discuss the surface plasmon-polaritons used for ultrathin metal films with the aid of linear response theory and make comparisons with the known result given by Economou E N. In this paper we consider transverse electromagnetic fields and assume that the electromagnetic field in the linear response formula is the induced field due to the current of the electrons. It satisfies the Maxwell equation and thus we replace the current (charge) term in the Maxwell equation with the linear response expectation value. Finally, taking the external field to be zero, we obtain the dispersion relation of the surface plasmons from the eigenvalue equation. In addition, the charge-density and current-density in the z direction on the surface of ultrathin metal films are also calculated. The results may be helpful to the fundamental understanding of the complex phenomenon of surface plasmon-polaritons.展开更多
In light of the nanostructured surface model, where half-spherical nanoparticles grow out symmetrically from a plane metallic film, the mathematical model for the partial electrical potential around nanospheres is dev...In light of the nanostructured surface model, where half-spherical nanoparticles grow out symmetrically from a plane metallic film, the mathematical model for the partial electrical potential around nanospheres is developed when a uniform external electric field is applied. On the basis of these models, the three-dimensional spatial distribution of the partial electrical potential is obtained and given in the form of a curved surface using a numerical computation method. Our results show that the electrical potential distribution around the nanospheres exhibits an obvious geometrical symmetry. These results could serve as a reference for investigating many abnormal phenomena such as abnormal infrared effects, which are found when CO molecules are adsorbed on the surface of nanostructured transition metals.展开更多
A novel method for preparing metalllzed film has been studied.The reduction process and properties of the poly(vinyl alcohol)(PVA)were probed by several analytic means.According to the etudies,a mechanism for the poly...A novel method for preparing metalllzed film has been studied.The reduction process and properties of the poly(vinyl alcohol)(PVA)were probed by several analytic means.According to the etudies,a mechanism for the polymer surface reduction metallization was proposed and proved.展开更多
Hydride vapor phase epitaxy (HVPE) is utilized to grow nonpolar a-plane GaN layers on r-plane sapphire templates prepared by metal organic vapor phase epitaxy (MOVPE). The surface morphology and microstructures of...Hydride vapor phase epitaxy (HVPE) is utilized to grow nonpolar a-plane GaN layers on r-plane sapphire templates prepared by metal organic vapor phase epitaxy (MOVPE). The surface morphology and microstructures of the samples are characterized by atomic force microscopy. The full width at half maximum (FWHM) of the HVPE sample shows a W-shape and that of the MOVPE sample shows an M-shape plane with the degree of 0 in the high-resolution x-ray diffraction (HRXRD) results. The surface morphology attributes to this significant anisotropic. HRXRD reveals that there is a significant reduction in the FWHM, both on-axis and off-axis for HVPE GaN are compared with the MOVPE template. The decrease of the FWHM of E2 (high) Raman scat tering spectra further indicates the improvement of crystal quality after HVPE. By comparing the results of secondary- ion-mass spectroscope and photoluminescence spectrum of the samples grown by HVPE and MOVPE, we propose that C-involved defects are originally responsible for the yellow luminescence.展开更多
The study for the interface of as-grown diamond and metallic film surrounding diamond is an attractive way for understanding diamond growth mechanism at high temperature and high pressure (HTHP), because it is that th...The study for the interface of as-grown diamond and metallic film surrounding diamond is an attractive way for understanding diamond growth mechanism at high temperature and high pressure (HTHP), because it is that through the interface carbon atom groups from the molten film are transported to growing diamond surface. It is of great interest to perform atomic force microscopy (AFM) experiment; which provides a unique technique different from that of normal optical and electron microscopy studies, to observe the interface morphology. In the present paper, we report first that the morphologies obtained by AFM on the film are similar to those of corresponding diamond surface, and they are the remaining traces after the carbon groups moving from the film to growing diamond. The fine particles and a terrace structure with homogeneous average step height are respectively found on the diamond (100) and (111) surface. Diamond growth conditions show that its growth rates and the temperature gradients in the boundary layer of the molten film at HTHP result in the differences of surface morphologies on diamond planes, being rough on (100) plane and even on the (111) plane. The diamond growth on the (100) surface at HPHT could be considered as a process of unification of these diamond fine particles or of carbon atom groups recombination on the growing diamond crystal surface. Successive growth layer steps directly suggest the layer growth mechanism of the diamond (111) plane. The sources of the layer steps might be two-dimensional nuclei and dislocations.展开更多
A dispersion compensation method is introduced to correct the distorted image passing through an ultrathin metal film.An LCD-CCD system is modeled by the back propagation network and used to evaluate the transmittance...A dispersion compensation method is introduced to correct the distorted image passing through an ultrathin metal film.An LCD-CCD system is modeled by the back propagation network and used to evaluate the transmittance of the ultrathin metal film.Training samples for the network come from 729 images captured by shooting test patches,in which the RGB values are uniformity distributed between 0 and 255.The RGB value of the original image that will be distorted by the dispersion is first transformed by mapping from the LCD to the CCD,multiplied by the inverse matrix of the transmittance matrix,and finally transformed by mapping from the CCD to the LCD,then the corrected image is obtained.In order to verify the effectiveness of the proposed method,ultrathin aluminum films with different thicknesses are evaporated on glass substrates and laid between the CCD and LCD.Experimental results show that the proposed method compensates for the dispersion successfully.展开更多
How to describe surface morphology characteristic and microstructure evolution are the hottest researches of current thin film researches. But in traditional characterization of surface morphology, the roughness param...How to describe surface morphology characteristic and microstructure evolution are the hottest researches of current thin film researches. But in traditional characterization of surface morphology, the roughness parameters are scale related. And the microstructure evolution of thin film during post-treatment is usually not considered in detail, To give a better understanding of the roughness of thin films topography, fractal method is carried out. In addition, microstrueture evolution of thin films is analyzed based on the crystallography and energy theory. Cu thin films are deposited on Si (100) substrates by magnetron sputtering, and then annealed at different temperatures. Surface topography is characterized by atomic force microscope (AFM). Triangular prism surface area (TPSA) algorithm is used to calculate the fractal dimension of the AFM images. Apparent scale effect exists between the surface morphology roughness and film thickness. Relationship between the fractal dimension and roughness is analyzed by linear regression method and linear relationship exists between fractal dimension and surface roughness root mean square (RMS). Fractal dimension can be characterized as a scale independence parameter to represent the complex degree and roughness level of surface. With the increase of annealing temperature, surface roughness and fractal dimension decrease. But when the annealing temperature exceeds the recrystallization temperature, due to the agglomeration and coalescence of Cu grain, surface roughness and fractal dimension increase. Scale effect and changing regularity of grain growth and shape evolution for different film thickness under different annealing temperatures are analyzed. Based on minimum total free energy, regularity of grain growth and changing is proposed. The proposed research has some theory significance and applicative value of Cu interconnect process and development of MEMS.展开更多
A surface plasmon interference lithography assisted by a Fabry-Perot (F-P) cavity composed of subwavelength metal gratings and a thin metal fihn is proposed to fabricate high-quality nanopatterns. The calculated res...A surface plasmon interference lithography assisted by a Fabry-Perot (F-P) cavity composed of subwavelength metal gratings and a thin metal fihn is proposed to fabricate high-quality nanopatterns. The calculated results indicate that uniform straight interference fringes with high contrast and high electric-field intensity are formed in the resist under the F-P cavity. The analyses of spatial frequency spectra illuminate the physical mechanism of the formation for the interference fringes. The influence of the F-P cavity spacing is discussed in detail. Moreover, the error analyses reveal that all parameters except the metal grating period in this scheme can bear large tolerances for the device fabrication.展开更多
Numerical and experimental investigation results on the magnetohydrodynamics(MHD) film flows along flat and curved bottom surfaces are summarized in this study. A simplified modeling has been developed to study the ...Numerical and experimental investigation results on the magnetohydrodynamics(MHD) film flows along flat and curved bottom surfaces are summarized in this study. A simplified modeling has been developed to study the liquid metal MHD film state, which has been validated by the existing experimental results. Numerical results on how the inlet velocity(V), the chute width(W) and the inlet film thickness(d0) affect the MHD film flow state are obtained. MHD stability analysis results are also provided in this study. The results show that strong magnetic fields make the stable V decrease several times compared to the case with no magnetic field,especially small radial magnetic fields(Bn) will have a significant impact on the MHD film flow state. Based on the above numerical and MHD stability analysis results flow control methods are proposed for flat and curved MHD film flows. For curved film flow we firstly proposed a new multi-layers MHD film flow system with a solid metal mesh to get the stable MHD film flows along the curved bottom surface. Experiments on flat and curved MHD film flows are also carried out and some firstly observed results are achieved.展开更多
Benefiting from the induced image charge on film surface,the nanoparticle aggregating on metal exhibits interesting optical properties.In this work,a linear metal nanoparticle trimer on metal film system has been inve...Benefiting from the induced image charge on film surface,the nanoparticle aggregating on metal exhibits interesting optical properties.In this work,a linear metal nanoparticle trimer on metal film system has been investigated to explore the novel optical phenomenon.Both the electric field and surface charge distributions demonstrate the light is focused on film greatly by the nanoparticles at two sides,which could be strongly modulated by the wavelength of incident light.And the influence of nanoparticle in middle on this light focusing ability has also been studied here,which is explained by the plasmon hybridization theory.Our finding about light focusing in nanoparticle aggregating on metal film not only enlarges the novel phenomenon of surface plasmon but also has great application prospect in the field of surface-enhanced spectra,surface catalysis,solar cells,water splitting,etc.展开更多
Platinum, palladium and their alloy films on polyimide were formed by catalyst-enhanced chemical vapor deposition (CVD) in the carrier gas (N2, O2) at 220-300℃ under reduced pressure and normal pressure. The depo...Platinum, palladium and their alloy films on polyimide were formed by catalyst-enhanced chemical vapor deposition (CVD) in the carrier gas (N2, O2) at 220-300℃ under reduced pressure and normal pressure. The deposition of palladium complexes [ Pd((η3-allyl)(hfac) and Pd(hfac)2 ] gives pure palladium film, while the deposition of platinum needs the enhancement of palladium complex by mixing precursor platinum complex Pt(COD)Me2 and palladium complex in the same chamber. The co-deposition of Pd and Pt metals was used for the deposition of alloy films. During the CVD of palladium-platinum alloy, the Pd/Pt atomic ratios vary under different co-deposition conditions. These metal films were characterized by XPS and SEM, and show a good adhesive property.展开更多
In this paper, we reveal that the enhanced transmission through a perforated metal film can be further boosted up by a V-shaped nanoslit, which consists of two connected oblique slits. The maximum transmission at reso...In this paper, we reveal that the enhanced transmission through a perforated metal film can be further boosted up by a V-shaped nanoslit, which consists of two connected oblique slits. The maximum transmission at resonance can be enhanced significantly by 71.5% in comparison with the corresponding vertical slit with the same exit width. The value and position of transmission resonance peak strongly depend on the apex angle of the V-shaped slit. The optimum apex angle, at which the transmission is maximal, is sensitive to the slit width. Such phenomena can be well explained by a concrete picture in which the incident wave drives free electrons on the slit walls. Moreover, we also simply analyze the splitting of the transmission peak in the symmetry broken V-shaped slit, originating from the resonances of different parts of the V-shaped slit. We expect that our findings will be used to design the nanoscale light sources based on the metal nanoslit structures.展开更多
We report a heptad vortex array structure in the wave fields in an extremely deep Fresnel diffraction region by asymmetrical subwavelength holes in a metal film illuminated with linearly polarized light. A Mach Zehnde...We report a heptad vortex array structure in the wave fields in an extremely deep Fresnel diffraction region by asymmetrical subwavelength holes in a metal film illuminated with linearly polarized light. A Mach Zehnder interferometer with a microscopic objective is used to record the wave fields at different distance& and the phase maps are extracted by Fourier transform of the interference intensities. We study the evolutions of the heptad vortex array with distance from the sample to the object plane. To explain the formations and the evolutions of the vortex array, we calculate the diffracted wave fields with Kirchhoff's diffraction theory. The calculations are basically consistent with the experimental results, and the properties of the heptad vortex array structure are reasonably explained.展开更多
The LB film of the title complex was prepared by dropping a benzene solution of the title complex on the surfaceof water subphase at 25±1℃.The film was deposited in Z type on various hydrophilic pretreated subst...The LB film of the title complex was prepared by dropping a benzene solution of the title complex on the surfaceof water subphase at 25±1℃.The film was deposited in Z type on various hydrophilic pretreated substrates ofquartz,CaF;and electronic conductive glass for different purposes.The π-A curve of the film shows that thecross section per molecule is 125;,which indicates that the alkyl chain of the molecule is basically perpendiculalto the surface of the substrate.UV,IR spectra and transmission electronic microscopy of the film were also obtained.展开更多
The origin of ferromagnetism in epitaxial strained LaCoO_(3-x)films has long been controversial.Here,we investigated the magnetic behavior of a series of oxygen vacancy-ordered LaCoO_(3-x)films on different substrates...The origin of ferromagnetism in epitaxial strained LaCoO_(3-x)films has long been controversial.Here,we investigated the magnetic behavior of a series of oxygen vacancy-ordered LaCoO_(3-x)films on different substrates.Obvious ferromagnetism was observed in perovskite LaCoO_(3)/LSAT(LSAT=(LaAlO_(3))0.3(SrAlTaO_(6))_(0.7))and LaCoO_(3)/SrTiO_(3) films,while LaCoO_(3)/LaAlO_(3)films showed weak ferromagnetic behavior.Meanwhile,LaCoO_(2.67) films exhibited antiferromagnetic behavior.An unexpected low-temperature ferromagnetic phenomenon with a Curie temperature of~83 K and a saturation magnetization of~1.2μB/Co was discovered in 15 nm thick LaCoO_(2.5)/LSAT thin films,which is probably related to the change in the interface CoO_(6) octahedron rotation pattern.Meanwhile,the observed ferromagnetism gradually disappeared as the thickness of the film increased,indicating a relaxation of tensile strain.Analysis suggests that the rotation and rhombohedral distortion of the CoO_(6) octahedron weakened the crystal field splitting and promoted the generation of the ordered high-spin state of Co^(2+).Thus the super-exchange effect between Co^(2+)(high spin state),Co^(2+)(low spin state)and Co^(2+)(high spin state)produced a low-temperature ferromagnetic behavior.However,compressive-strained LaCoO_(2.5)film on a LaAlO_(3)substrate showed normal anti-ferromagnetic behavior.These results demonstrate that both oxygen vacancies and tensile strain are correlated with the emergent magnetic properties in epitaxial LaCoO_(3-x)films and provide a new perspective to regulate the magnetic properties of transition oxide thin films.展开更多
Cobalt (Co) thermal or plasma enhanced atomic layer deposition (PE-ALD) was investigated using a novel metal organic precursor, Co(MeCp)2, and NH3 or H2 or their plasma as a reactant. The growth characteristics,...Cobalt (Co) thermal or plasma enhanced atomic layer deposition (PE-ALD) was investigated using a novel metal organic precursor, Co(MeCp)2, and NH3 or H2 or their plasma as a reactant. The growth characteristics, electrical and microstructural properties were investigated. Especially, PE-ALD produced Co thin films at low growth temperature down to 100℃. Interestingly, the low temperature growth of Co films showed the formation of columnar structure at substrate temperature below 300℃. The growth characteristics and films properties of PE-ALD Co using bis(η-methylcyclopentadienyl) Co(II) (Co(MeCp)2) was compared with those of PE-ALD Co using other Cp based metal organic precursors, bis-cyclopentadienyl cobalt (II) (CoCp2) and cyclopentadienyl isopropyl acetamidinato-cobalt (Co(CpAMD)).展开更多
基金supported by the Ralph E. Powe Jr. Faculty Award from Oak Ridge Associated Universities,Minta-Martin Foundation and US National Science Foundation(0856540,0928278)A. J. Clark Fellowship and UMD Clark School Future Faculty Program
文摘The ductility of thin metal films on polymer substrates reported in recent experiments has a huge disparity,ranging from less than 1 % up to more than 50 %.To reveal the underpinning origins for such a large variation,this paper reports a systematic computational study of two competing failure mechanisms:metal film necking and grain boundary cracking.The quantitative results suggest that strong grain boundaries and metal/polymer interfacial adhesion are keys to achieve high ductility of polymer-supported metal films.
基金Project supported by the National Natural Science Foundation of China (Grant Nos. 10525419,60736041 and 10874238)the National Key Basic Research Special Foundation of China (Grant No. 2006CB302901)
文摘We fabricate a series of periodic arrays of subwavelength square and rectangular air holes on gold films, and measure the transmission spectra of these metallic nanostructures. By changing some geometrical and physical parameters, such as array period, air hole size and shape, and the incident light polarization, we verify that both global surface plasmon resonance and localized waveguide mode resonance are influential on enhancing the transmission of light through nanostructured metal films. These two resonances induce different behaviours of transmission peak shift. The transmission through the rectangular air-hole structures exhibits an obvious polarization effect dependent on the morphology. Numerical simulations are also made by a plane-wave transfer-matrix method and in good consistency with the experimental results.
基金supported by the Cultivation of Innovative Talents of the Colleges and Universities of Guangdong Province of China(Grant No. LYM10098)
文摘We discuss the surface plasmon-polaritons used for ultrathin metal films with the aid of linear response theory and make comparisons with the known result given by Economou E N. In this paper we consider transverse electromagnetic fields and assume that the electromagnetic field in the linear response formula is the induced field due to the current of the electrons. It satisfies the Maxwell equation and thus we replace the current (charge) term in the Maxwell equation with the linear response expectation value. Finally, taking the external field to be zero, we obtain the dispersion relation of the surface plasmons from the eigenvalue equation. In addition, the charge-density and current-density in the z direction on the surface of ultrathin metal films are also calculated. The results may be helpful to the fundamental understanding of the complex phenomenon of surface plasmon-polaritons.
基金Project supported by the Natural Science Foundation of Fujian Province,China(Grant No.2010J01210)
文摘In light of the nanostructured surface model, where half-spherical nanoparticles grow out symmetrically from a plane metallic film, the mathematical model for the partial electrical potential around nanospheres is developed when a uniform external electric field is applied. On the basis of these models, the three-dimensional spatial distribution of the partial electrical potential is obtained and given in the form of a curved surface using a numerical computation method. Our results show that the electrical potential distribution around the nanospheres exhibits an obvious geometrical symmetry. These results could serve as a reference for investigating many abnormal phenomena such as abnormal infrared effects, which are found when CO molecules are adsorbed on the surface of nanostructured transition metals.
基金The project surported by State"863"PlanNational Natural science fund.
文摘A novel method for preparing metalllzed film has been studied.The reduction process and properties of the poly(vinyl alcohol)(PVA)were probed by several analytic means.According to the etudies,a mechanism for the polymer surface reduction metallization was proposed and proved.
基金Supported by the National Natural Science Foundation of China under Grant No 61204006the Fundamental Research Funds for the Central Universities under Grant No 7214570101the National Key Science and Technology Special Project under Grant No 2008ZX01002-002
文摘Hydride vapor phase epitaxy (HVPE) is utilized to grow nonpolar a-plane GaN layers on r-plane sapphire templates prepared by metal organic vapor phase epitaxy (MOVPE). The surface morphology and microstructures of the samples are characterized by atomic force microscopy. The full width at half maximum (FWHM) of the HVPE sample shows a W-shape and that of the MOVPE sample shows an M-shape plane with the degree of 0 in the high-resolution x-ray diffraction (HRXRD) results. The surface morphology attributes to this significant anisotropic. HRXRD reveals that there is a significant reduction in the FWHM, both on-axis and off-axis for HVPE GaN are compared with the MOVPE template. The decrease of the FWHM of E2 (high) Raman scat tering spectra further indicates the improvement of crystal quality after HVPE. By comparing the results of secondary- ion-mass spectroscope and photoluminescence spectrum of the samples grown by HVPE and MOVPE, we propose that C-involved defects are originally responsible for the yellow luminescence.
基金This work was co-supported by Natural Science Foundation of Shandong Province in China (Grant No.Y2002F06), and Education Ministry Foundation of China (Grant No.20020422035).
文摘The study for the interface of as-grown diamond and metallic film surrounding diamond is an attractive way for understanding diamond growth mechanism at high temperature and high pressure (HTHP), because it is that through the interface carbon atom groups from the molten film are transported to growing diamond surface. It is of great interest to perform atomic force microscopy (AFM) experiment; which provides a unique technique different from that of normal optical and electron microscopy studies, to observe the interface morphology. In the present paper, we report first that the morphologies obtained by AFM on the film are similar to those of corresponding diamond surface, and they are the remaining traces after the carbon groups moving from the film to growing diamond. The fine particles and a terrace structure with homogeneous average step height are respectively found on the diamond (100) and (111) surface. Diamond growth conditions show that its growth rates and the temperature gradients in the boundary layer of the molten film at HTHP result in the differences of surface morphologies on diamond planes, being rough on (100) plane and even on the (111) plane. The diamond growth on the (100) surface at HPHT could be considered as a process of unification of these diamond fine particles or of carbon atom groups recombination on the growing diamond crystal surface. Successive growth layer steps directly suggest the layer growth mechanism of the diamond (111) plane. The sources of the layer steps might be two-dimensional nuclei and dislocations.
基金supported by the National Natural Science Foundation of China (Nos.50571034 and 50971056) and the State Key Laboratory of Powder Metallurgy,Central South University
基金Project supported by the National High Technology Research and Development Program of China (Grant No. 2009AA044001)the Open Funds of the State Key Laboratory of Robotics and Systems (HIT),China (Grant No. SKLRS-2010-MS-01)the Fundamental Research Funds for the Central Universities,China
文摘A dispersion compensation method is introduced to correct the distorted image passing through an ultrathin metal film.An LCD-CCD system is modeled by the back propagation network and used to evaluate the transmittance of the ultrathin metal film.Training samples for the network come from 729 images captured by shooting test patches,in which the RGB values are uniformity distributed between 0 and 255.The RGB value of the original image that will be distorted by the dispersion is first transformed by mapping from the LCD to the CCD,multiplied by the inverse matrix of the transmittance matrix,and finally transformed by mapping from the CCD to the LCD,then the corrected image is obtained.In order to verify the effectiveness of the proposed method,ultrathin aluminum films with different thicknesses are evaporated on glass substrates and laid between the CCD and LCD.Experimental results show that the proposed method compensates for the dispersion successfully.
基金supported by National Basic Research Development Program of China (973 Program,Grant No. 2009 CB724200)Tribology Science Fund of State Key Laboratory of Tribology of Tsinghua University of China (Grant No. SKLTKF09B08)Shanxi Provincial Science Foundation for Youths of China (Grant No. 2010021023-4)
文摘How to describe surface morphology characteristic and microstructure evolution are the hottest researches of current thin film researches. But in traditional characterization of surface morphology, the roughness parameters are scale related. And the microstructure evolution of thin film during post-treatment is usually not considered in detail, To give a better understanding of the roughness of thin films topography, fractal method is carried out. In addition, microstrueture evolution of thin films is analyzed based on the crystallography and energy theory. Cu thin films are deposited on Si (100) substrates by magnetron sputtering, and then annealed at different temperatures. Surface topography is characterized by atomic force microscope (AFM). Triangular prism surface area (TPSA) algorithm is used to calculate the fractal dimension of the AFM images. Apparent scale effect exists between the surface morphology roughness and film thickness. Relationship between the fractal dimension and roughness is analyzed by linear regression method and linear relationship exists between fractal dimension and surface roughness root mean square (RMS). Fractal dimension can be characterized as a scale independence parameter to represent the complex degree and roughness level of surface. With the increase of annealing temperature, surface roughness and fractal dimension decrease. But when the annealing temperature exceeds the recrystallization temperature, due to the agglomeration and coalescence of Cu grain, surface roughness and fractal dimension increase. Scale effect and changing regularity of grain growth and shape evolution for different film thickness under different annealing temperatures are analyzed. Based on minimum total free energy, regularity of grain growth and changing is proposed. The proposed research has some theory significance and applicative value of Cu interconnect process and development of MEMS.
基金Supported by the Natural Science Foundation of Hebei Province under Grant Nos A2013402069 and A2013402081
文摘A surface plasmon interference lithography assisted by a Fabry-Perot (F-P) cavity composed of subwavelength metal gratings and a thin metal fihn is proposed to fabricate high-quality nanopatterns. The calculated results indicate that uniform straight interference fringes with high contrast and high electric-field intensity are formed in the resist under the F-P cavity. The analyses of spatial frequency spectra illuminate the physical mechanism of the formation for the interference fringes. The influence of the F-P cavity spacing is discussed in detail. Moreover, the error analyses reveal that all parameters except the metal grating period in this scheme can bear large tolerances for the device fabrication.
基金supported by the National Magnetic Confinement Fusion Science Program of China(Nos.2014GB125003 and 2013GB114002)National Natural Science Foundation of China(No.11105044)
文摘Numerical and experimental investigation results on the magnetohydrodynamics(MHD) film flows along flat and curved bottom surfaces are summarized in this study. A simplified modeling has been developed to study the liquid metal MHD film state, which has been validated by the existing experimental results. Numerical results on how the inlet velocity(V), the chute width(W) and the inlet film thickness(d0) affect the MHD film flow state are obtained. MHD stability analysis results are also provided in this study. The results show that strong magnetic fields make the stable V decrease several times compared to the case with no magnetic field,especially small radial magnetic fields(Bn) will have a significant impact on the MHD film flow state. Based on the above numerical and MHD stability analysis results flow control methods are proposed for flat and curved MHD film flows. For curved film flow we firstly proposed a new multi-layers MHD film flow system with a solid metal mesh to get the stable MHD film flows along the curved bottom surface. Experiments on flat and curved MHD film flows are also carried out and some firstly observed results are achieved.
基金the National Key Research and Development Program(Grant No.2019YFC1906100)the National Natural Science Foundation of China(Grant Nos.11974067 and 12074054)+1 种基金the Natural Science Foundation Project of CQ CSTC(cstc2019jcyj-msxmX0145,cstc2019jcyj-bshX0042,and cstc2019jcyj-msxmX0828)the Sharing Fund of Chongqing University’s Large-scale Equipment.
文摘Benefiting from the induced image charge on film surface,the nanoparticle aggregating on metal exhibits interesting optical properties.In this work,a linear metal nanoparticle trimer on metal film system has been investigated to explore the novel optical phenomenon.Both the electric field and surface charge distributions demonstrate the light is focused on film greatly by the nanoparticles at two sides,which could be strongly modulated by the wavelength of incident light.And the influence of nanoparticle in middle on this light focusing ability has also been studied here,which is explained by the plasmon hybridization theory.Our finding about light focusing in nanoparticle aggregating on metal film not only enlarges the novel phenomenon of surface plasmon but also has great application prospect in the field of surface-enhanced spectra,surface catalysis,solar cells,water splitting,etc.
基金Funded by the National Natural Science Foundation of China (Nos. 20275011 and 20675033)
文摘Platinum, palladium and their alloy films on polyimide were formed by catalyst-enhanced chemical vapor deposition (CVD) in the carrier gas (N2, O2) at 220-300℃ under reduced pressure and normal pressure. The deposition of palladium complexes [ Pd((η3-allyl)(hfac) and Pd(hfac)2 ] gives pure palladium film, while the deposition of platinum needs the enhancement of palladium complex by mixing precursor platinum complex Pt(COD)Me2 and palladium complex in the same chamber. The co-deposition of Pd and Pt metals was used for the deposition of alloy films. During the CVD of palladium-platinum alloy, the Pd/Pt atomic ratios vary under different co-deposition conditions. These metal films were characterized by XPS and SEM, and show a good adhesive property.
基金Project supported by the National Natural Science Foundation of China(Grant No.11174372)the Youth Foundation of the Education Department of Hunan Province,China(Grant Nos.11B134 and 10B118)
文摘In this paper, we reveal that the enhanced transmission through a perforated metal film can be further boosted up by a V-shaped nanoslit, which consists of two connected oblique slits. The maximum transmission at resonance can be enhanced significantly by 71.5% in comparison with the corresponding vertical slit with the same exit width. The value and position of transmission resonance peak strongly depend on the apex angle of the V-shaped slit. The optimum apex angle, at which the transmission is maximal, is sensitive to the slit width. Such phenomena can be well explained by a concrete picture in which the incident wave drives free electrons on the slit walls. Moreover, we also simply analyze the splitting of the transmission peak in the symmetry broken V-shaped slit, originating from the resonances of different parts of the V-shaped slit. We expect that our findings will be used to design the nanoscale light sources based on the metal nanoslit structures.
基金Supported by the National Natural Science Foundation of China under Grant No 11574185the Science and Technology Development Program of Shandong Province under Grant No 2009GG10001005
文摘We report a heptad vortex array structure in the wave fields in an extremely deep Fresnel diffraction region by asymmetrical subwavelength holes in a metal film illuminated with linearly polarized light. A Mach Zehnder interferometer with a microscopic objective is used to record the wave fields at different distance& and the phase maps are extracted by Fourier transform of the interference intensities. We study the evolutions of the heptad vortex array with distance from the sample to the object plane. To explain the formations and the evolutions of the vortex array, we calculate the diffracted wave fields with Kirchhoff's diffraction theory. The calculations are basically consistent with the experimental results, and the properties of the heptad vortex array structure are reasonably explained.
文摘The LB film of the title complex was prepared by dropping a benzene solution of the title complex on the surfaceof water subphase at 25±1℃.The film was deposited in Z type on various hydrophilic pretreated substrates ofquartz,CaF;and electronic conductive glass for different purposes.The π-A curve of the film shows that thecross section per molecule is 125;,which indicates that the alkyl chain of the molecule is basically perpendiculalto the surface of the substrate.UV,IR spectra and transmission electronic microscopy of the film were also obtained.
基金supported by the National Key Research and Development Program of China(Grant Nos.2020YFA0711502 and 2019YFA0704900)the National Natural Sciences Foundation of China(Grant Nos.52088101,51971240,and 11921004)the Key Program of the Chinese Academy of Sciences and the Strategic Priority Research Program(B)of the Chinese Academy of Sciences(Grant No.XDB33030200)。
文摘The origin of ferromagnetism in epitaxial strained LaCoO_(3-x)films has long been controversial.Here,we investigated the magnetic behavior of a series of oxygen vacancy-ordered LaCoO_(3-x)films on different substrates.Obvious ferromagnetism was observed in perovskite LaCoO_(3)/LSAT(LSAT=(LaAlO_(3))0.3(SrAlTaO_(6))_(0.7))and LaCoO_(3)/SrTiO_(3) films,while LaCoO_(3)/LaAlO_(3)films showed weak ferromagnetic behavior.Meanwhile,LaCoO_(2.67) films exhibited antiferromagnetic behavior.An unexpected low-temperature ferromagnetic phenomenon with a Curie temperature of~83 K and a saturation magnetization of~1.2μB/Co was discovered in 15 nm thick LaCoO_(2.5)/LSAT thin films,which is probably related to the change in the interface CoO_(6) octahedron rotation pattern.Meanwhile,the observed ferromagnetism gradually disappeared as the thickness of the film increased,indicating a relaxation of tensile strain.Analysis suggests that the rotation and rhombohedral distortion of the CoO_(6) octahedron weakened the crystal field splitting and promoted the generation of the ordered high-spin state of Co^(2+).Thus the super-exchange effect between Co^(2+)(high spin state),Co^(2+)(low spin state)and Co^(2+)(high spin state)produced a low-temperature ferromagnetic behavior.However,compressive-strained LaCoO_(2.5)film on a LaAlO_(3)substrate showed normal anti-ferromagnetic behavior.These results demonstrate that both oxygen vacancies and tensile strain are correlated with the emergent magnetic properties in epitaxial LaCoO_(3-x)films and provide a new perspective to regulate the magnetic properties of transition oxide thin films.
基金supported by the Technology Innovation Program Industrial Strategic Technology Development Program(10035430)Development of reliable fine-pitch metallization technologies funded by the Ministry of Knowledge Economy MKE,Korea.The synchrotron radiation XRD analysis was performed at Pohang Light Source beam line 3C2
文摘Cobalt (Co) thermal or plasma enhanced atomic layer deposition (PE-ALD) was investigated using a novel metal organic precursor, Co(MeCp)2, and NH3 or H2 or their plasma as a reactant. The growth characteristics, electrical and microstructural properties were investigated. Especially, PE-ALD produced Co thin films at low growth temperature down to 100℃. Interestingly, the low temperature growth of Co films showed the formation of columnar structure at substrate temperature below 300℃. The growth characteristics and films properties of PE-ALD Co using bis(η-methylcyclopentadienyl) Co(II) (Co(MeCp)2) was compared with those of PE-ALD Co using other Cp based metal organic precursors, bis-cyclopentadienyl cobalt (II) (CoCp2) and cyclopentadienyl isopropyl acetamidinato-cobalt (Co(CpAMD)).