The high concentration of heavy metal (Cu, Cr, Zn, Pb) in tannery sludge causes severe heavy metal emissions in the process of incineration. In the present investigation, the tannery sludge was treated with 85% phosph...The high concentration of heavy metal (Cu, Cr, Zn, Pb) in tannery sludge causes severe heavy metal emissions in the process of incineration. In the present investigation, the tannery sludge was treated with 85% phosphoric acid before the incineration process in the tube furnace to control the heavy metal emissions. The thermal behavior and heavy metal vaporization of pre-treated tannery sludge were investigated, and X-ray diffraction (XRD) and scanning electron microscopy (SEM) analysis were also implemented to elucidate the chemical mechanisms responsible for the thermal behavior and weakening of heavy metal vaporization of pre-treated tannery sludge. The results obtained show that the differences in thermal behaviors between untreated and pre-treated tannery sludge are caused by the reaction of phosphoric acid and calcium carbonate. The vaporization percentage of heavy metal decreased efficiently with the increasing volumes of H3PO4, which indicated the important thermal stability of the water-insoluble metallic phosphates (Ca18Cu3(PO4)14, Ca9Cr(PO4)7, Ca19Zn2(PO4)14, PbMgP2O7) formed during tannery sludge phosphatation.展开更多
The metal vapor synthesis (MVS) methed was used to prepare activatedcarbon supported nickel electrode. The electrocatalytic activity of the electrode forhydrogen evolution reaction(HGR) in alkaline solution was studie...The metal vapor synthesis (MVS) methed was used to prepare activatedcarbon supported nickel electrode. The electrocatalytic activity of the electrode forhydrogen evolution reaction(HGR) in alkaline solution was studied. Cathodicpolarization curves showed the electrocatalytic activity of Ni/C electrode prepared byMVS method was higher than that of the one prepared by conventional method.展开更多
The effect of arc plasma on electrode erosion in a liquid metal current limiter(LMCL)is studied.Based on a simplified two-dimensional magnetohydrodynamic model,the elongated GaInSn metal vapor arc and its contraction ...The effect of arc plasma on electrode erosion in a liquid metal current limiter(LMCL)is studied.Based on a simplified two-dimensional magnetohydrodynamic model,the elongated GaInSn metal vapor arc and its contraction process in a liquid metal current limiter are simulated.The distributions of temperature,pressure and velocity of the arc plasma are calculated.The simulation results indicate that the electrode erosion is mainly caused by two high temperature gas jet flows arising from the pressure gradient,which is a result of the non-uniform arc temperature distribution.The gas flows,which act as jets onto the electrode surface,lead to the evaporation of the electrode material form the surface.A redesign structure of the electrode is proposed and implemented according to the analysis,which greatly increased the service life of the electrode.展开更多
The metal vapor synthesis technique was employed to prepare Co nanoparticles. The characteristics and properties ofthe particles were studied by transmission electron microscopy, X-ray diffraction, temperature-program...The metal vapor synthesis technique was employed to prepare Co nanoparticles. The characteristics and properties ofthe particles were studied by transmission electron microscopy, X-ray diffraction, temperature-programmed desorption,chemisorption and magnetic measurements. The experimental results showed that the particle size of Co powdersdepended on the initial Co concentration in the toluene matrix, reaching average crystallite diameter of 1.5 nm for thehighest concentration (6.4 at. pct) investigated. The particles with size of 10 nm exist, due to the agglomerates ofmicrocrystallites. The Co particles were surrounded by a thin carbonaceous layer formed due to toluene decompositionon cocondate melt-down and subsequent warming to room temperature. The carbonaceous layer was composedprimarily of C1 fragments. The Co powders demonstrated ferromagnetic behavior.展开更多
AISI 304 stainless steel was ion implanted with Co, and the tribological property on the surface of the stainless steel was investigated. The Co ion implantation was carried out using a metal vapor vacuum arc (Mevva) ...AISI 304 stainless steel was ion implanted with Co, and the tribological property on the surface of the stainless steel was investigated. The Co ion implantation was carried out using a metal vapor vacuum arc (Mevva) broad-beam ion source with an extraction voltage of 40 kV, implantation doses of 3×1017/cm2 and 5×1017/cm2, and ion current densities of 13, 22 and 32 μA/cm2. The results showed that the near-surface hardness of Co-implanted stainless steel sample was increased by 50% or more, and it increased with increasing ion current density at first and then declined. The friction coefficient decreased from 0.74 to 0.20 after Co implantation. The wear rate after Co implantation reduced by 25% or more as compared to the unimplanted sample. The wear rate initially decreased with increasing ion current density and then an increase was observed. Within the range of experimental parameters, there exists a critical ion current density for the Co-implanted stainless steel, at which the wear rate decreased with increasing retained dose, going through a minimum and then increased. The critical ion current density in this paper is about 22 μA/cm2.展开更多
Fine ground powders of Nd-Fe-B sintered magnet bulks (particle size=46~125 μm in diameter) were coated and alloyed with Yb metal by sorbing them. A significant recovery of the decreased magnetic properties of the gr...Fine ground powders of Nd-Fe-B sintered magnet bulks (particle size=46~125 μm in diameter) were coated and alloyed with Yb metal by sorbing them. A significant recovery of the decreased magnetic properties of the ground powders (remanence B r=~0.95 T, coercivity H cj =~227 kA·m -1 and maximum energy product (BH) max=~48 8 kJ·m -3) was observed in accordance with increasing temperature up to 800 ℃. The sorbing temperature and time for Yb metal vapor were optimized and after heating at 800 ℃ for 90 min and annealing subsequently at 610 ℃ for 60 min, the B r, H cj and (BH) max values were increased to be 0.98 T, 712 kA·m -1 and 173 kJ·m -3, respectively. From the microstructural characterizations of resulting samples by using X-ray diffraction (XRD), scanning electron microscopy (SEM), and electron probe X-ray microanalyzer (EPMA), it is found that the sorbed Yb metal uniformly covers the surface and diffuses to the Nd-rich grain boundary of fine ground powders of Nd-Fe-B sintered magnet bulks forming a (Nd,Yb)Fe 2 phase.展开更多
In this work, the wafer bowing during growth can be in-situ measured by a reflectivity mapping method in the 3×2 Thomas Swan close coupled showerhead metal organic chemical vapor deposition(MOCVD) system. The ref...In this work, the wafer bowing during growth can be in-situ measured by a reflectivity mapping method in the 3×2 Thomas Swan close coupled showerhead metal organic chemical vapor deposition(MOCVD) system. The reflectivity mapping method is usually used to measure the film thickness and growth rate. The wafer bowing caused by stresses(tensile and compressive) during the epitaxial growth leads to a temperature variation at different positions on the wafer, and the lower growth temperature leads to a faster growth rate and vice versa. Therefore, the wafer bowing can be measured by analyzing the discrepancy of growth rates at different positions on the wafer. Furthermore, the wafer bowings were confirmed by the ex-situ wafer bowing measurement. High-resistivity and low-resistivity Si substrates were used for epitaxial growth. In comparison with low-resistivity Si substrate, Ga N grown on high-resistivity substrate shows a larger wafer bowing caused by the highly compressive stress introduced by compositionally graded Al Ga N buffer layer. This transition of wafer bowing can be clearly in-situ measured by using the reflectivity mapping method.展开更多
High-performance low-leakage-current AlGaN/GaN high electron mobility transistors(HEMTs) on silicon(111) substrates grown by metal organic chemical vapor deposition(MOCVD) with a novel partially Magnesium(Mg)-doped Ga...High-performance low-leakage-current AlGaN/GaN high electron mobility transistors(HEMTs) on silicon(111) substrates grown by metal organic chemical vapor deposition(MOCVD) with a novel partially Magnesium(Mg)-doped GaN buffer scheme have been fabricated successfully. The growth and DC results were compared between Mg-doped GaN buffer layer and a unintentionally one. A 1-μm gate-length transistor with Mg-doped buffer layer exhibited an OFF-state drain leakage current of 8.3 × 10-8A/mm, to our best knowledge, which is the lowest value reported for MOCVD-grown AlGaN/GaN HEMTs on Si featuring the same dimension and structure. The RF characteristics of 0.25-μm gate length T-shaped gate HEMTs were also investigated.展开更多
Three kinds of metal catalysts Ni/D<sub>4</sub>, Ni-Mn/D<sub>4</sub>, Ni-Mn-La/D<sub>4</sub>, wrapped in organosilicon compound were prepared by metal vapor synthesis. Their feature...Three kinds of metal catalysts Ni/D<sub>4</sub>, Ni-Mn/D<sub>4</sub>, Ni-Mn-La/D<sub>4</sub>, wrapped in organosilicon compound were prepared by metal vapor synthesis. Their feature was characterized with XRD, TEM, XPS, FMR and static magnetic measurement. The metal particle size in catalysts was less than 3.5 am. The results of XPS showed that the metals in the catalysts existed in zero and other valent state. Inner metal, as an organosilicon compound folded around the metal particle, was protected from oxidation. FMR and static magnetic measuremeat revealed that metal particles were spheroidal and of superparamagnetism. Of all the caralysts the catalytic activity of Ni-Mn-La/D<sub>4</sub> was the highest in hydrogenating furfuraldehyde into furfuralcohol.展开更多
Metal–organic chemical vapor deposition(MOCVD) grown ferromagnetic GaMnN films are investigated by photoluminescence(PL) measurement with a mid-gap excitation wavelength of 405 nm. A sharp PL peak at 1.8 eV is found ...Metal–organic chemical vapor deposition(MOCVD) grown ferromagnetic GaMnN films are investigated by photoluminescence(PL) measurement with a mid-gap excitation wavelength of 405 nm. A sharp PL peak at 1.8 eV is found and the PL intensity successively decreases with the addition of Mn, in which the Mn concentration of sample A is below 1%([Mn]A= 0.75%) but its PL intensity is stronger than other samples'. The 1.8-eV PL peak is attributed to the recombination of electrons in the t2 state of the neutral Mn3+acceptor with holes in the valence band. With Mn concentration increasing,the intensity of the PL peak decreases and the magnetic increment reduces in our samples. The correlation between the PL peak intensity and ferromagnetism of the samples is discussed in combination with the experimental results.展开更多
Pulsed metal organic chemical vapor deposition is introduced into the growth of In Ga N channel heterostructure for improving material qualities and transport properties. High-resolution transmission electron microsco...Pulsed metal organic chemical vapor deposition is introduced into the growth of In Ga N channel heterostructure for improving material qualities and transport properties. High-resolution transmission electron microscopy imaging shows the phase separation free In Ga N channel with smooth and abrupt interface. A very high two-dimensional electron gas density of approximately 1.85 × 1013cm-2is obtained due to the superior carrier confinement. In addition, the Hall mobility reaches 967 cm2/V·s, owing to the suppression of interface roughness scattering. Furthermore, temperature-dependent Hall measurement results show that In Ga N channel heterostructure possesses a steady two-dimensional electron gas density over the tested temperature range, and has superior transport properties at elevated temperatures compared with the traditional Ga N channel heterostructure. The gratifying results imply that In Ga N channel heterostructure grown by pulsed metal organic chemical vapor deposition is a promising candidate for microwave power devices.展开更多
Orthogonal experiments of Ga Sb films growth on Ga As(001)substrates have been designed and performed by using a low-pressure metal–organic chemical vapor deposition(LP-MOCVD)system.The crystallinities and microstruc...Orthogonal experiments of Ga Sb films growth on Ga As(001)substrates have been designed and performed by using a low-pressure metal–organic chemical vapor deposition(LP-MOCVD)system.The crystallinities and microstructures of the produced films were comparatively analyzed to achieve the optimum growth parameters.It was demonstrated that the optimized Ga Sb thin film has a narrow full width at half maximum(358 arc sec)of the(004)ω-rocking curve,and a smooth surface with a low root-mean-square roughness of about 6 nm,which is typical in the case of the heteroepitaxial single-crystal films.In addition,we studied the effects of layer thickness of Ga Sb thin film on the density of dislocations by Raman spectra.It is believed that our research can provide valuable information for the fabrication of high-crystalline Ga Sb films and can promote the integration probability of mid-infrared devices fabricated on mainstream performance electronic devices.展开更多
We report the growth of Al N epilayers on c-plane sapphire substrates by pulsed metal organic chemical vapor deposition(MOCVD). The sources of trimethylaluminium(TMAl) and ammonia were pulse introduced into the reacto...We report the growth of Al N epilayers on c-plane sapphire substrates by pulsed metal organic chemical vapor deposition(MOCVD). The sources of trimethylaluminium(TMAl) and ammonia were pulse introduced into the reactor to avoid the occurrence of the parasitic reaction. Through adjusting the duty cycle ratio of TMAl to ammonia from 0.8 to 3.0, the growth rate of Al N epilayers could be controlled in the range of 0.24 m/h to 0.93 m/h. The high-resolution x-ray diffraction(HRXRD) measurement showed that the full width at half maximum(FWHM) of the(0002) and(10-12) reflections for a sample would be 194 arcsec and 421 arcsec, respectively. The step-flow growth mode was observed in the sample with the atomic level flat surface steps, in which a root-mean-square(RMS) roughness was lower to 0.2 nm as tested by atomic force microscope(AFM). The growth process of Al N epilayers was discussed in terms of crystalline quality, surface morphology,and residual stress.展开更多
Metalization is widely used in integrated circuit devices to connect millions of devices together. The success of metallization depends strongly on diffusion barrier technology, due to the interactions of metals with ...Metalization is widely used in integrated circuit devices to connect millions of devices together. The success of metallization depends strongly on diffusion barrier technology, due to the interactions of metals with surrounding materials. As device dimension further shrinks, diffusion barrier technology is facing more challenges and opening up new opportunities, particularly for chemical vapor deposition (CVD) process technology. CVD is attracting increased attention in advanced metallization mainly due to its capability in producing conformal thin films. In this review, we will focus our discussion on CVD processes for three most important classes of diffusion barriers: Ti, W and Ta-based diffusion banters. Examples from current literature will be examined.展开更多
综述了涉及工程应用的冷丝熔化极气体保护焊(Cold wire gas metal arc welding,CW-GMAW)熔滴过渡形态特征。结果表明,在大电流、强规范、富氩混合气体保护下,CW-GMAW工艺的熔滴过渡形态呈喷射过渡;当电流较小、电弧电压较低时,可能为滴...综述了涉及工程应用的冷丝熔化极气体保护焊(Cold wire gas metal arc welding,CW-GMAW)熔滴过渡形态特征。结果表明,在大电流、强规范、富氩混合气体保护下,CW-GMAW工艺的熔滴过渡形态呈喷射过渡;当电流较小、电弧电压较低时,可能为滴状过渡,甚至在弧压很低时,呈现短路过渡形态。该工艺电弧发生偏向冷丝的位移,弧长变短甚至发生短路,与冷丝送进速率比增高及冷丝在电弧中产生大量金属蒸气时弧柱电阻下降有关。在具有富氩混合保护气体的相同工艺参数下,CWGMAW转变电流比GMAW降低了4%~7%。焊接工艺参数对CW-GMAW和GMAW工艺熔滴过渡形态的影响规律大致相近,但前者因涉及冷丝送进速率比和电极焊丝送进速度,以及它们的匹配等,使焊接电流的影响更为复杂。展开更多
基金the Education Ministryof China (No. 305005)the Department of Sci-ence and Technology of Zhejiang Province, China (No.2007C210054)
文摘The high concentration of heavy metal (Cu, Cr, Zn, Pb) in tannery sludge causes severe heavy metal emissions in the process of incineration. In the present investigation, the tannery sludge was treated with 85% phosphoric acid before the incineration process in the tube furnace to control the heavy metal emissions. The thermal behavior and heavy metal vaporization of pre-treated tannery sludge were investigated, and X-ray diffraction (XRD) and scanning electron microscopy (SEM) analysis were also implemented to elucidate the chemical mechanisms responsible for the thermal behavior and weakening of heavy metal vaporization of pre-treated tannery sludge. The results obtained show that the differences in thermal behaviors between untreated and pre-treated tannery sludge are caused by the reaction of phosphoric acid and calcium carbonate. The vaporization percentage of heavy metal decreased efficiently with the increasing volumes of H3PO4, which indicated the important thermal stability of the water-insoluble metallic phosphates (Ca18Cu3(PO4)14, Ca9Cr(PO4)7, Ca19Zn2(PO4)14, PbMgP2O7) formed during tannery sludge phosphatation.
文摘The metal vapor synthesis (MVS) methed was used to prepare activatedcarbon supported nickel electrode. The electrocatalytic activity of the electrode forhydrogen evolution reaction(HGR) in alkaline solution was studied. Cathodicpolarization curves showed the electrocatalytic activity of Ni/C electrode prepared byMVS method was higher than that of the one prepared by conventional method.
基金supported by National Natural Science Foundation of China(No.51207125)State Key Laboratory of Electrical Insulation and Power Equipment of China(No.EIPE13312)
文摘The effect of arc plasma on electrode erosion in a liquid metal current limiter(LMCL)is studied.Based on a simplified two-dimensional magnetohydrodynamic model,the elongated GaInSn metal vapor arc and its contraction process in a liquid metal current limiter are simulated.The distributions of temperature,pressure and velocity of the arc plasma are calculated.The simulation results indicate that the electrode erosion is mainly caused by two high temperature gas jet flows arising from the pressure gradient,which is a result of the non-uniform arc temperature distribution.The gas flows,which act as jets onto the electrode surface,lead to the evaporation of the electrode material form the surface.A redesign structure of the electrode is proposed and implemented according to the analysis,which greatly increased the service life of the electrode.
文摘The metal vapor synthesis technique was employed to prepare Co nanoparticles. The characteristics and properties ofthe particles were studied by transmission electron microscopy, X-ray diffraction, temperature-programmed desorption,chemisorption and magnetic measurements. The experimental results showed that the particle size of Co powdersdepended on the initial Co concentration in the toluene matrix, reaching average crystallite diameter of 1.5 nm for thehighest concentration (6.4 at. pct) investigated. The particles with size of 10 nm exist, due to the agglomerates ofmicrocrystallites. The Co particles were surrounded by a thin carbonaceous layer formed due to toluene decompositionon cocondate melt-down and subsequent warming to room temperature. The carbonaceous layer was composedprimarily of C1 fragments. The Co powders demonstrated ferromagnetic behavior.
文摘AISI 304 stainless steel was ion implanted with Co, and the tribological property on the surface of the stainless steel was investigated. The Co ion implantation was carried out using a metal vapor vacuum arc (Mevva) broad-beam ion source with an extraction voltage of 40 kV, implantation doses of 3×1017/cm2 and 5×1017/cm2, and ion current densities of 13, 22 and 32 μA/cm2. The results showed that the near-surface hardness of Co-implanted stainless steel sample was increased by 50% or more, and it increased with increasing ion current density at first and then declined. The friction coefficient decreased from 0.74 to 0.20 after Co implantation. The wear rate after Co implantation reduced by 25% or more as compared to the unimplanted sample. The wear rate initially decreased with increasing ion current density and then an increase was observed. Within the range of experimental parameters, there exists a critical ion current density for the Co-implanted stainless steel, at which the wear rate decreased with increasing retained dose, going through a minimum and then increased. The critical ion current density in this paper is about 22 μA/cm2.
文摘Fine ground powders of Nd-Fe-B sintered magnet bulks (particle size=46~125 μm in diameter) were coated and alloyed with Yb metal by sorbing them. A significant recovery of the decreased magnetic properties of the ground powders (remanence B r=~0.95 T, coercivity H cj =~227 kA·m -1 and maximum energy product (BH) max=~48 8 kJ·m -3) was observed in accordance with increasing temperature up to 800 ℃. The sorbing temperature and time for Yb metal vapor were optimized and after heating at 800 ℃ for 90 min and annealing subsequently at 610 ℃ for 60 min, the B r, H cj and (BH) max values were increased to be 0.98 T, 712 kA·m -1 and 173 kJ·m -3, respectively. From the microstructural characterizations of resulting samples by using X-ray diffraction (XRD), scanning electron microscopy (SEM), and electron probe X-ray microanalyzer (EPMA), it is found that the sorbed Yb metal uniformly covers the surface and diffuses to the Nd-rich grain boundary of fine ground powders of Nd-Fe-B sintered magnet bulks forming a (Nd,Yb)Fe 2 phase.
基金Project supported by the National Natural Science Foundation of China(Grant Nos.61274039 and 51177175)the National Basic Research Program of China(Grant No.2011CB301903)+5 种基金the Ph.D.Programs Foundation of Ministry of Education of China(Grant No.20110171110021)the International Science and Technology Collaboration Program of China(Grant No.2012DFG52260)the International Science and Technology Collaboration Program of Guangdong Province,China(Grant No.2013B051000041)the Science and Technology Plan of Guangdong Province,China(Grant No.2013B010401013)the National High Technology Research and Development Program of China(Grant No.2014AA032606)the Opened Fund of the State Key Laboratory on Integrated Optoelectronics,China(Grant No.IOSKL2014KF17)
文摘In this work, the wafer bowing during growth can be in-situ measured by a reflectivity mapping method in the 3×2 Thomas Swan close coupled showerhead metal organic chemical vapor deposition(MOCVD) system. The reflectivity mapping method is usually used to measure the film thickness and growth rate. The wafer bowing caused by stresses(tensile and compressive) during the epitaxial growth leads to a temperature variation at different positions on the wafer, and the lower growth temperature leads to a faster growth rate and vice versa. Therefore, the wafer bowing can be measured by analyzing the discrepancy of growth rates at different positions on the wafer. Furthermore, the wafer bowings were confirmed by the ex-situ wafer bowing measurement. High-resistivity and low-resistivity Si substrates were used for epitaxial growth. In comparison with low-resistivity Si substrate, Ga N grown on high-resistivity substrate shows a larger wafer bowing caused by the highly compressive stress introduced by compositionally graded Al Ga N buffer layer. This transition of wafer bowing can be clearly in-situ measured by using the reflectivity mapping method.
文摘High-performance low-leakage-current AlGaN/GaN high electron mobility transistors(HEMTs) on silicon(111) substrates grown by metal organic chemical vapor deposition(MOCVD) with a novel partially Magnesium(Mg)-doped GaN buffer scheme have been fabricated successfully. The growth and DC results were compared between Mg-doped GaN buffer layer and a unintentionally one. A 1-μm gate-length transistor with Mg-doped buffer layer exhibited an OFF-state drain leakage current of 8.3 × 10-8A/mm, to our best knowledge, which is the lowest value reported for MOCVD-grown AlGaN/GaN HEMTs on Si featuring the same dimension and structure. The RF characteristics of 0.25-μm gate length T-shaped gate HEMTs were also investigated.
文摘Three kinds of metal catalysts Ni/D<sub>4</sub>, Ni-Mn/D<sub>4</sub>, Ni-Mn-La/D<sub>4</sub>, wrapped in organosilicon compound were prepared by metal vapor synthesis. Their feature was characterized with XRD, TEM, XPS, FMR and static magnetic measurement. The metal particle size in catalysts was less than 3.5 am. The results of XPS showed that the metals in the catalysts existed in zero and other valent state. Inner metal, as an organosilicon compound folded around the metal particle, was protected from oxidation. FMR and static magnetic measuremeat revealed that metal particles were spheroidal and of superparamagnetism. Of all the caralysts the catalytic activity of Ni-Mn-La/D<sub>4</sub> was the highest in hydrogenating furfuraldehyde into furfuralcohol.
基金Project supported by the National Natural Science Foundation of China(Grant Nos.61204008,11075176,and 60976090)the National Key Basic Research Special Foundation of China(Grant No.2013CB328705)
文摘Metal–organic chemical vapor deposition(MOCVD) grown ferromagnetic GaMnN films are investigated by photoluminescence(PL) measurement with a mid-gap excitation wavelength of 405 nm. A sharp PL peak at 1.8 eV is found and the PL intensity successively decreases with the addition of Mn, in which the Mn concentration of sample A is below 1%([Mn]A= 0.75%) but its PL intensity is stronger than other samples'. The 1.8-eV PL peak is attributed to the recombination of electrons in the t2 state of the neutral Mn3+acceptor with holes in the valence band. With Mn concentration increasing,the intensity of the PL peak decreases and the magnetic increment reduces in our samples. The correlation between the PL peak intensity and ferromagnetism of the samples is discussed in combination with the experimental results.
基金supported by the National Natural Science Foundation of China(Grant Nos.61306017,61334002,61474086,and 11435010)the Young Scientists Fund of the National Natural Science Foundation of China(Grant No.61306017)
文摘Pulsed metal organic chemical vapor deposition is introduced into the growth of In Ga N channel heterostructure for improving material qualities and transport properties. High-resolution transmission electron microscopy imaging shows the phase separation free In Ga N channel with smooth and abrupt interface. A very high two-dimensional electron gas density of approximately 1.85 × 1013cm-2is obtained due to the superior carrier confinement. In addition, the Hall mobility reaches 967 cm2/V·s, owing to the suppression of interface roughness scattering. Furthermore, temperature-dependent Hall measurement results show that In Ga N channel heterostructure possesses a steady two-dimensional electron gas density over the tested temperature range, and has superior transport properties at elevated temperatures compared with the traditional Ga N channel heterostructure. The gratifying results imply that In Ga N channel heterostructure grown by pulsed metal organic chemical vapor deposition is a promising candidate for microwave power devices.
基金Project supported by the National Natural Science Foundation of China(Grant No.61076010)the International Science and Technology Cooperation Program of Science and Technology Bureau of Changchun,China(Grant No.12ZX68)
文摘Orthogonal experiments of Ga Sb films growth on Ga As(001)substrates have been designed and performed by using a low-pressure metal–organic chemical vapor deposition(LP-MOCVD)system.The crystallinities and microstructures of the produced films were comparatively analyzed to achieve the optimum growth parameters.It was demonstrated that the optimized Ga Sb thin film has a narrow full width at half maximum(358 arc sec)of the(004)ω-rocking curve,and a smooth surface with a low root-mean-square roughness of about 6 nm,which is typical in the case of the heteroepitaxial single-crystal films.In addition,we studied the effects of layer thickness of Ga Sb thin film on the density of dislocations by Raman spectra.It is believed that our research can provide valuable information for the fabrication of high-crystalline Ga Sb films and can promote the integration probability of mid-infrared devices fabricated on mainstream performance electronic devices.
基金Project supported by the National High Technology Research and Development Program of China(Grant No.2015AA016801)Guangdong Provincial Scientific and Technologic Planning Program,China(Grant No.2014B010119002)
文摘We report the growth of Al N epilayers on c-plane sapphire substrates by pulsed metal organic chemical vapor deposition(MOCVD). The sources of trimethylaluminium(TMAl) and ammonia were pulse introduced into the reactor to avoid the occurrence of the parasitic reaction. Through adjusting the duty cycle ratio of TMAl to ammonia from 0.8 to 3.0, the growth rate of Al N epilayers could be controlled in the range of 0.24 m/h to 0.93 m/h. The high-resolution x-ray diffraction(HRXRD) measurement showed that the full width at half maximum(FWHM) of the(0002) and(10-12) reflections for a sample would be 194 arcsec and 421 arcsec, respectively. The step-flow growth mode was observed in the sample with the atomic level flat surface steps, in which a root-mean-square(RMS) roughness was lower to 0.2 nm as tested by atomic force microscope(AFM). The growth process of Al N epilayers was discussed in terms of crystalline quality, surface morphology,and residual stress.
文摘Metalization is widely used in integrated circuit devices to connect millions of devices together. The success of metallization depends strongly on diffusion barrier technology, due to the interactions of metals with surrounding materials. As device dimension further shrinks, diffusion barrier technology is facing more challenges and opening up new opportunities, particularly for chemical vapor deposition (CVD) process technology. CVD is attracting increased attention in advanced metallization mainly due to its capability in producing conformal thin films. In this review, we will focus our discussion on CVD processes for three most important classes of diffusion barriers: Ti, W and Ta-based diffusion banters. Examples from current literature will be examined.
文摘综述了涉及工程应用的冷丝熔化极气体保护焊(Cold wire gas metal arc welding,CW-GMAW)熔滴过渡形态特征。结果表明,在大电流、强规范、富氩混合气体保护下,CW-GMAW工艺的熔滴过渡形态呈喷射过渡;当电流较小、电弧电压较低时,可能为滴状过渡,甚至在弧压很低时,呈现短路过渡形态。该工艺电弧发生偏向冷丝的位移,弧长变短甚至发生短路,与冷丝送进速率比增高及冷丝在电弧中产生大量金属蒸气时弧柱电阻下降有关。在具有富氩混合保护气体的相同工艺参数下,CWGMAW转变电流比GMAW降低了4%~7%。焊接工艺参数对CW-GMAW和GMAW工艺熔滴过渡形态的影响规律大致相近,但前者因涉及冷丝送进速率比和电极焊丝送进速度,以及它们的匹配等,使焊接电流的影响更为复杂。