The fabrication and performance of 160-nm gate-length metamorphic AlInAs/GaInAs high electron mobility transistors (mHEMTs) grown on GaAs substrate by metal organic chemical vapour deposition (MOCVD) are reported....The fabrication and performance of 160-nm gate-length metamorphic AlInAs/GaInAs high electron mobility transistors (mHEMTs) grown on GaAs substrate by metal organic chemical vapour deposition (MOCVD) are reported. By using a novel combined optical and e-beam photolithography technology, submicron mHEMTs devices have been achieved. The devices exhibit good DC and RF performance. The maximum current density was 817 mA/mm and the maximum transconductance was 828 mS/mm. The non-alloyed Ohmic contact resistance Rc was as low as 0.02 Ω- ram. The unity current gain cut-off frequency (fT) and the maximum oscillation frequency (fmax) were 146 GHz and 189 GHz, respectively. This device has the highest fT yet reported for a 160-nm gate-length HEMTs grown by MOCVD. The output conductance is 28.9 mS/mm, which results in a large voltage gain of 28.6, Also, an input capacitance to gate-drain feedback capacitance ratio, Cgs/Cgd, of 4.3 is obtained in the device.展开更多
In this paper we report that the GaN thin film is grown by metal-organic chemical vapour deposition on a sapphire (0001) substrate with double A1N buffer layers. The buffer layer consists of a low-temperature (LT)...In this paper we report that the GaN thin film is grown by metal-organic chemical vapour deposition on a sapphire (0001) substrate with double A1N buffer layers. The buffer layer consists of a low-temperature (LT) A1N layer and a high-temperature (HT) A1N layer that are grown at 600 ℃ and 1000 ℃, respectively. It is observed that the thickness of the LT-A1N layer drastically influences the quality of GaN thin film, and that the optimized 4.25-min-LT-A1N layer minimizes the dislocation density of GaN thin film. The reason for the improved properties is discussed in this paper.展开更多
The single solid source precursor, cobalt (Ⅱ) acetylacetonate was prepared and characterized by infrared spectroscopy. Thin films of cobalt oxide were deposited on soda lime glass substrates through the pyrolysis ...The single solid source precursor, cobalt (Ⅱ) acetylacetonate was prepared and characterized by infrared spectroscopy. Thin films of cobalt oxide were deposited on soda lime glass substrates through the pyrolysis (metal organic chemical vapour deposition (MOCVD)) of single solid source precursor, cobalt acetylacetonate, Co[C5H7O2]2 at a temperature of 420℃. The compositional characterization carried out by rutherford backscattering spectroscopy and X-ray diffraction (XRD), showed that the films have a stoichiometry of Co2O3 and an average thickness of 227±0.2 nm. A direct energy gap of 2,15±0.01 eV was calculated by the data obtained by optical absorption spectroscopy. The morphology of the films obtained by scanning electron microscopy, showed that the grains were continuous and uniformly distributed at various magnifications, while the average grain size was less than i micron for the deposited thin films of cobalt oxide.展开更多
Photoluminescence (PL) and lasing properties of InAs/GaAs quantum dots (QDs) with different growth procedures prepared by metalorganic chemical vapour deposition are studied. PL measurements show that the low grow...Photoluminescence (PL) and lasing properties of InAs/GaAs quantum dots (QDs) with different growth procedures prepared by metalorganic chemical vapour deposition are studied. PL measurements show that the low growth rate QD sample has a larger PL intensity and a narrower PL line width than the high growth rate sample. During rapid thermal annealing, however, the low growth rate sample shows a greater blueshift of PL peak wavelength. This is caused by the larger InAs layer thickness which results from the larger 2-3 dimensional transition critical layer thickness for the QDs in the low-growth-rate sample. A growth technique including growth interruption and in-situ annealing, named indium flush method, is used during the growth of GaAs cap layer, which can flatten the GaAs surface effectively. Though the method results in a blueshift of PL peak wavelength and a broadening of PL line width, it is essential for the fabrication of room temperature working QD lasers.展开更多
Chromium (Cr) doped Zinc oxide ZnO thin films were deposited onto glass substrates by Metal Organic Chemical Vapour Deposition (MOCVD) technique with varying dopant concentration at a temperature of 420°C. The ef...Chromium (Cr) doped Zinc oxide ZnO thin films were deposited onto glass substrates by Metal Organic Chemical Vapour Deposition (MOCVD) technique with varying dopant concentration at a temperature of 420°C. The effect of the chromium concentration on morphological, structural, optical, electrical and gas sensing properties of the films were investigated. The scanning electron microscopy results revealed that the Cr concentration has great influence on the crystallinity, surface smoothness and grain size. X-ray diffraction (XRD) studies shows that films were polycrystalline in nature and grown as a hexagonal wurtzite structure. A direct optical band energy gap of 3.32 to 3.10 eV was obtained from the optical measurements. The transmission was found to decrease with increasing Cr doping concentration. Rutherford Backscattering Spectroscopy (RBS) analysis also demonstrates that Cr ions are substitutionally incorporated into ZnO. I-V characteristic of the film shows a resistivity ranges from 1.134 × 10-2 · cm to 1.24 × 10-2 · cm at room temperature. The gas sensing response of the films were enhanced with incorporation of Cr as a dopant with optimum operating temperature around 200°C.展开更多
In present paper, the metal vapour behavior in double electrodes TIG welding was investigated by a numerical model, including the arc plasma and weld pool. The thermodynamic parameters and transport coefficients of th...In present paper, the metal vapour behavior in double electrodes TIG welding was investigated by a numerical model, including the arc plasma and weld pool. The thermodynamic parameters and transport coefficients of the arc plasma were dependent on both the local temperature and the mass ratio of the metal vapour. A second viscosity approximation was used to formulate the diffusion coefficient of the metal vapour in the arc plasma. The temperature and flow fields together with the metal vapour concentration were simulated, and the influences of metal vapour on the arc plasma and the weld pool were analyzed. It was found that the metal vapour transport in the arc plasma was significantly influenced by the flow of the arc plasma, and the distribution of the metal vapour was more extended in the direction perpendicular to the line through the double electrodes tips. Both the arc plasma and the heat flux at the weld pool were constricted by the presence of the metal vapour, while the metal vapour had a minor effect on the total heat input to the work piece and the weld pool profile as a whole.展开更多
Theoretical investigation of nitrogen-silver arc transport properties and an arc plasma model in stationary state have studied at low temperature i.e. between 3500 K and 13,000 K at atmospheric pressure. Results showe...Theoretical investigation of nitrogen-silver arc transport properties and an arc plasma model in stationary state have studied at low temperature i.e. between 3500 K and 13,000 K at atmospheric pressure. Results showed that the presence of small amounts of metal vapours, which have low ionization potential such as silver, modify the plasma characteristics. The solution of Elenbaas-Heller gives us some information about the effect of metal vapours emitted from electrode on the characteristics of the arc column. We concluded that a small fraction of metal vapours in the arc column modify the electric field, current and the axial temperature.展开更多
基金Project supported by CERG Grant (615506) from the Research Grants Council of Hong Kong Special Administrative Region of China and Intel CorporationScience and Technology Plan of the Education Bureau of Guangxi Zhuang Autonomous Region of China (Grant No. 200911MS93)
文摘The fabrication and performance of 160-nm gate-length metamorphic AlInAs/GaInAs high electron mobility transistors (mHEMTs) grown on GaAs substrate by metal organic chemical vapour deposition (MOCVD) are reported. By using a novel combined optical and e-beam photolithography technology, submicron mHEMTs devices have been achieved. The devices exhibit good DC and RF performance. The maximum current density was 817 mA/mm and the maximum transconductance was 828 mS/mm. The non-alloyed Ohmic contact resistance Rc was as low as 0.02 Ω- ram. The unity current gain cut-off frequency (fT) and the maximum oscillation frequency (fmax) were 146 GHz and 189 GHz, respectively. This device has the highest fT yet reported for a 160-nm gate-length HEMTs grown by MOCVD. The output conductance is 28.9 mS/mm, which results in a large voltage gain of 28.6, Also, an input capacitance to gate-drain feedback capacitance ratio, Cgs/Cgd, of 4.3 is obtained in the device.
基金Project supported by the National Key Science & Technology Special Project,China(Grant No.2008ZX01002-002)the Fundamental Research Funds for the Central Universities,China(Grant No.JY10000904009)the Major Program and State Key Program of the National Natural Science Foundation of China(Grant Nos.60890191 and 60736033)
文摘In this paper we report that the GaN thin film is grown by metal-organic chemical vapour deposition on a sapphire (0001) substrate with double A1N buffer layers. The buffer layer consists of a low-temperature (LT) A1N layer and a high-temperature (HT) A1N layer that are grown at 600 ℃ and 1000 ℃, respectively. It is observed that the thickness of the LT-A1N layer drastically influences the quality of GaN thin film, and that the optimized 4.25-min-LT-A1N layer minimizes the dislocation density of GaN thin film. The reason for the improved properties is discussed in this paper.
基金the Third World Academy of Science (TWAS, Grant #93-058 R6/PHYS/AF/AC)Obafemi Awolowo University(University Research Committee URC) for supporting this project
文摘The single solid source precursor, cobalt (Ⅱ) acetylacetonate was prepared and characterized by infrared spectroscopy. Thin films of cobalt oxide were deposited on soda lime glass substrates through the pyrolysis (metal organic chemical vapour deposition (MOCVD)) of single solid source precursor, cobalt acetylacetonate, Co[C5H7O2]2 at a temperature of 420℃. The compositional characterization carried out by rutherford backscattering spectroscopy and X-ray diffraction (XRD), showed that the films have a stoichiometry of Co2O3 and an average thickness of 227±0.2 nm. A direct energy gap of 2,15±0.01 eV was calculated by the data obtained by optical absorption spectroscopy. The morphology of the films obtained by scanning electron microscopy, showed that the grains were continuous and uniformly distributed at various magnifications, while the average grain size was less than i micron for the deposited thin films of cobalt oxide.
基金Project supported by the National Natural Science Foundation of China (Grant Nos 60706009, 90401025, 60736036, 60777021 and60476009)the National Key Basic Research Program of China (Grant Nos 2006CB604901 and 2006CB604902)the National High Technology Research and Development Program of China (Grant Nos 2006AA01Z256, 2007AA03Z419 and 2007AA03Z417)
文摘Photoluminescence (PL) and lasing properties of InAs/GaAs quantum dots (QDs) with different growth procedures prepared by metalorganic chemical vapour deposition are studied. PL measurements show that the low growth rate QD sample has a larger PL intensity and a narrower PL line width than the high growth rate sample. During rapid thermal annealing, however, the low growth rate sample shows a greater blueshift of PL peak wavelength. This is caused by the larger InAs layer thickness which results from the larger 2-3 dimensional transition critical layer thickness for the QDs in the low-growth-rate sample. A growth technique including growth interruption and in-situ annealing, named indium flush method, is used during the growth of GaAs cap layer, which can flatten the GaAs surface effectively. Though the method results in a blueshift of PL peak wavelength and a broadening of PL line width, it is essential for the fabrication of room temperature working QD lasers.
文摘Chromium (Cr) doped Zinc oxide ZnO thin films were deposited onto glass substrates by Metal Organic Chemical Vapour Deposition (MOCVD) technique with varying dopant concentration at a temperature of 420°C. The effect of the chromium concentration on morphological, structural, optical, electrical and gas sensing properties of the films were investigated. The scanning electron microscopy results revealed that the Cr concentration has great influence on the crystallinity, surface smoothness and grain size. X-ray diffraction (XRD) studies shows that films were polycrystalline in nature and grown as a hexagonal wurtzite structure. A direct optical band energy gap of 3.32 to 3.10 eV was obtained from the optical measurements. The transmission was found to decrease with increasing Cr doping concentration. Rutherford Backscattering Spectroscopy (RBS) analysis also demonstrates that Cr ions are substitutionally incorporated into ZnO. I-V characteristic of the film shows a resistivity ranges from 1.134 × 10-2 · cm to 1.24 × 10-2 · cm at room temperature. The gas sensing response of the films were enhanced with incorporation of Cr as a dopant with optimum operating temperature around 200°C.
基金supported by the National Natural Science Foundation of China(Grant No.51705054)Scientific and Technological Research Program of Chongqing Municipal Education Commission(Grant No.KJ 1600903)
文摘In present paper, the metal vapour behavior in double electrodes TIG welding was investigated by a numerical model, including the arc plasma and weld pool. The thermodynamic parameters and transport coefficients of the arc plasma were dependent on both the local temperature and the mass ratio of the metal vapour. A second viscosity approximation was used to formulate the diffusion coefficient of the metal vapour in the arc plasma. The temperature and flow fields together with the metal vapour concentration were simulated, and the influences of metal vapour on the arc plasma and the weld pool were analyzed. It was found that the metal vapour transport in the arc plasma was significantly influenced by the flow of the arc plasma, and the distribution of the metal vapour was more extended in the direction perpendicular to the line through the double electrodes tips. Both the arc plasma and the heat flux at the weld pool were constricted by the presence of the metal vapour, while the metal vapour had a minor effect on the total heat input to the work piece and the weld pool profile as a whole.
文摘Theoretical investigation of nitrogen-silver arc transport properties and an arc plasma model in stationary state have studied at low temperature i.e. between 3500 K and 13,000 K at atmospheric pressure. Results showed that the presence of small amounts of metal vapours, which have low ionization potential such as silver, modify the plasma characteristics. The solution of Elenbaas-Heller gives us some information about the effect of metal vapours emitted from electrode on the characteristics of the arc column. We concluded that a small fraction of metal vapours in the arc column modify the electric field, current and the axial temperature.
基金Project (51001037) supported by the National Natural Science Foundation of ChinaProject (HIT.NSRIF.2013003) supported by the Fundamental Research Funds for the Central Universities, China