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Growth and characterization of InAsSb alloys by metalorganic chemical vapour deposition
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作者 闫军锋 汪韬 +2 位作者 王警卫 张志勇 赵武 《Chinese Physics B》 SCIE EI CAS CSCD 2009年第1期320-323,共4页
Low pressure metalorganic chemical vapour deposition (LP-MOCVD) growth and characteristics of InAsSb on (100) GaSb substrates are investigated. Mirror-like surfaces with a minimum lattice mismatch are obtained. Th... Low pressure metalorganic chemical vapour deposition (LP-MOCVD) growth and characteristics of InAsSb on (100) GaSb substrates are investigated. Mirror-like surfaces with a minimum lattice mismatch are obtained. The samples are studied by photoluminescence spectra, and the output is 3.17μm in wavelength. The surface of InAsSb epilayer shows that its morphological feature is dependent on buffer layer. With an InAs buffer layer used, the best surface is obtained. The InAsSb film shows to be of n-type conduction with an electron concentration of 8.52 × 10^16 cm^-3. 展开更多
关键词 metalorganic chemical vapour deposition mocvd ANTIMONIDES semiconducting indium compounds
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Some Properties of Manganese Oxide (Mn-O) and Lithium Manganese Oxide (Li-Mn-O) Thin Films Prepared via Metal Organic Chemical Vapor Deposition (MOCVD) Technique
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作者 Kabir O. Oyedotun Marcus Adebola Eleruja +7 位作者 Bolutife Olofinjana Olumide Oluwole Akinwunmi Olusoji O.Ilori Ezekiel Omotoso Emmanuel. Ajenifuja Adetokunbo T. Famojuro Eusebius I. Obianjuwa Ezekiel Oladele Bolarlnwa Ajay 《材料科学与工程(中英文B版)》 2015年第5期231-242,共12页
关键词 金属有机化学气相沉积 锂锰氧化物 薄膜沉积 mocvd 制备 技术 性质 紫外可见光谱
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Metal Organic Chemical Vapour Deposited Thin Films of Cobalt Oxide Prepared via Cobalt Acetylacetonate
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作者 C.U. Mordi M.A. Eleruja +6 位作者 B.A. Taleatu G.O. Egharevba A.V. Adedeji O.O. Akinwunmi B. Olofinjana C. Jeynes E.O.B. Ajayi 《Journal of Materials Science & Technology》 SCIE EI CAS CSCD 2009年第1期85-89,共5页
The single solid source precursor, cobalt (Ⅱ) acetylacetonate was prepared and characterized by infrared spectroscopy. Thin films of cobalt oxide were deposited on soda lime glass substrates through the pyrolysis ... The single solid source precursor, cobalt (Ⅱ) acetylacetonate was prepared and characterized by infrared spectroscopy. Thin films of cobalt oxide were deposited on soda lime glass substrates through the pyrolysis (metal organic chemical vapour deposition (MOCVD)) of single solid source precursor, cobalt acetylacetonate, Co[C5H7O2]2 at a temperature of 420℃. The compositional characterization carried out by rutherford backscattering spectroscopy and X-ray diffraction (XRD), showed that the films have a stoichiometry of Co2O3 and an average thickness of 227±0.2 nm. A direct energy gap of 2,15±0.01 eV was calculated by the data obtained by optical absorption spectroscopy. The morphology of the films obtained by scanning electron microscopy, showed that the grains were continuous and uniformly distributed at various magnifications, while the average grain size was less than i micron for the deposited thin films of cobalt oxide. 展开更多
关键词 PRECURSOR Thin film Oxide Metal organic chemical vapour deposition mocvd Rutherford backscattering spectroscopy (RBS)
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Synthesis and Characterization of Metal Organic Chemical Vapour Deposited Copper Titanium Oxide (Cu-Ti-O) Thin Films from Single Solid Source Precursor
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作者 Oladepo Fasakin Marcus Adebola Eleruja +3 位作者 Olumide Oluwole Akinwunmi Bolutife Olofinjana Emmanuel Ajenifuja Ezekiel Oladele Bolarinwa Ajayi 《Journal of Modern Physics》 2013年第12期1-6,共6页
Thin films of copper titanium oxide were deposited by metal organic chemical vapour deposition technique from the synthesized single solid source precursor, copper titanium acetylacatonate Cu [Ti(C5H7O2)3] at the depo... Thin films of copper titanium oxide were deposited by metal organic chemical vapour deposition technique from the synthesized single solid source precursor, copper titanium acetylacatonate Cu [Ti(C5H7O2)3] at the deposition temperature of 420°C. The deposited films were characterized using Rutherford Backscattering Spectroscopy, Scanning Electron Microscopy with Energy Dispersive X-Ray facility attached to it, X-Ray Diffractometry, UV-Visible Spectrometry and van-der Pauw Conductivity measurement. Results show that the thickness of the prepared film is determined as 101.236 nm and the film is amorphous in structure, having average grain size of approximately 1 μm. The optical behaviour showed that the absorption edge of the film was at 918 nm near infrared with corresponding direct energy band gap of 1.35 eV. The electrical characterization of the film gave the values of resistivity, sheet resistance and conductivity of the film as 3.43 × 10-1 Ω-cm, 3.39 × 106 Ω/square and 2.91 (Ω-cm)-1 respectively. 展开更多
关键词 Thin Film COPPER Titanium OXIDE Metalorganic chemical vapour deposition (mocvd)
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汞灯辅助MOCVD SnO_2薄层晶体的结构与透明导电性研究 被引量:9
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作者 罗文秀 任鹏程 谭忠恪 《功能材料》 EI CAS CSCD 1993年第2期129-133,共5页
采用x—射线衍射(XRD)、高能电子衍射(RHEED)、扫描电子显微镜(SEM)和紫外可见吸收谱(UV)等技术研究了在汞灯(ML)辅助下进行有机金属化学气相沉积(MOCVD)所得本征及掺杂SnO_2薄层晶体的结构和透明导电性。实验指出,采用汞灯辅助有机金... 采用x—射线衍射(XRD)、高能电子衍射(RHEED)、扫描电子显微镜(SEM)和紫外可见吸收谱(UV)等技术研究了在汞灯(ML)辅助下进行有机金属化学气相沉积(MOCVD)所得本征及掺杂SnO_2薄层晶体的结构和透明导电性。实验指出,采用汞灯辅助有机金属化学气相沉积(ML-MOCVD)SnO_2薄层晶体比无汞灯辅助的有机金属化学气相沉积(MOCVD)膜层生长速度快,结晶粒度大且其透明导电性能更好。本文对ML-MOCVD SnO_2薄层晶体的结晶粒度与生长温度的关系、掺杂对结晶取向的影响以及可见光透过率、导电性能等进行了较详细的研究。结果指出,ML-MOCVD是获得透明导电优质薄层SnO_2晶体材料的最佳途径。 展开更多
关键词 汞灯 薄层晶体 二氧化锡 气相沉积
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MOCVD法制备金属陶瓷功能梯度材料的研究 被引量:5
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作者 章娴君 郑慧雯 +1 位作者 张庆熙 王显祥 《西南师范大学学报(自然科学版)》 CAS CSCD 北大核心 2005年第4期682-686,共5页
利用金属有机化学气相沉积(MOCVD)方法,以Mo(CO)6,Si(OC2H5)4为物源,在Al2O3陶瓷基片上制备了金属陶瓷功能梯度材料,并用XPS,XRD,SEM等技术对其成分分布,物相组成和表面形貌进行测试和表征.结果表明:材料的组成沿厚度方向呈连续梯度变化... 利用金属有机化学气相沉积(MOCVD)方法,以Mo(CO)6,Si(OC2H5)4为物源,在Al2O3陶瓷基片上制备了金属陶瓷功能梯度材料,并用XPS,XRD,SEM等技术对其成分分布,物相组成和表面形貌进行测试和表征.结果表明:材料的组成沿厚度方向呈连续梯度变化,符合功能梯度材料的变化规律. 展开更多
关键词 功能梯度材料(FGM) 金属有机化学气相沉积(mocvd) X射线光电子能谱(XPS) 表面形貌
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MOCVD掺A_s的S_nO_2透明导电膜
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作者 罗文秀 谭忠恪 李志萍 《青岛科技大学学报(自然科学版)》 CAS 1990年第1期7-10,共4页
本文采用有机金属化合物气相沉积(MOCVD)技术制备了可见光透过率】90%(厚度为10<sup>2</sup>-10<sup>4</sup>)、薄层方块电阻值为38-56Ω/□的SO<sub>2</sub>·A,多晶透明导电薄膜,并简... 本文采用有机金属化合物气相沉积(MOCVD)技术制备了可见光透过率】90%(厚度为10<sup>2</sup>-10<sup>4</sup>)、薄层方块电阻值为38-56Ω/□的SO<sub>2</sub>·A,多晶透明导电薄膜,并简要报道了利用X射线衍射、电子衍射、扫描电子显微镜以及紫外可见吸收光谱等方法对膜层结构及性能的研究结果。 展开更多
关键词 有机金属化学气相沉积 砷掺杂 二氧化锡
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气相色谱分析MOCVD中的Ⅲ-Ⅴ族挥发性无机氢化物及其反应尾气 被引量:2
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作者 王庆 王志模 《应用化工》 CAS CSCD 2000年第4期32-34,共3页
为配合Ⅲ Ⅴ族半导体研制和评定金属有机物化学气相沉积 (简称MOCVD)装置的尾气处理效果 ,及其对安全的影响 ,研究了用气相色谱对所用的高纯氢化物的杂质、检测灵敏度及相对保留值 ;混合氢化物的组分 ;反应尾气中有害物在处理前后的含... 为配合Ⅲ Ⅴ族半导体研制和评定金属有机物化学气相沉积 (简称MOCVD)装置的尾气处理效果 ,及其对安全的影响 ,研究了用气相色谱对所用的高纯氢化物的杂质、检测灵敏度及相对保留值 ;混合氢化物的组分 ;反应尾气中有害物在处理前后的含量变化等进行了测定。组分分离较好 ,相对标准误差小于 2 3 %。 展开更多
关键词 挥发性 无机氢化物 反应尾气 气相色谱分析
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InGaAs/GaAsP应变补偿多量子阱MOCVD生长 被引量:4
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作者 王旭 王海珠 +4 位作者 张彬 王曲惠 范杰 邹永刚 马晓辉 《发光学报》 EI CAS CSCD 北大核心 2021年第4期448-454,共7页
利用金属有机化学气相沉积技术在GaAs衬底上开展了大失配InGaAs多量子阱的外延生长研究。针对InGaAs与GaAs之间较大晶格失配的问题,设计了GaAsP应变补偿层结构;通过理论模拟与实验相结合的方式,调控了GaAsP材料体系中的P组分,设计了P组... 利用金属有机化学气相沉积技术在GaAs衬底上开展了大失配InGaAs多量子阱的外延生长研究。针对InGaAs与GaAs之间较大晶格失配的问题,设计了GaAsP应变补偿层结构;通过理论模拟与实验相结合的方式,调控了GaAsP材料体系中的P组分,设计了P组分分别为0,0.128,0.184,0.257的三周期In_(x)Ga_(1-x)As/GaAs_(1-y)P_(y)多量子阱结构;通过PL、XRD、AFM测试对比发现,高势垒GaAsP材料的张应变补偿可以改善晶体质量。综合比较,在P组分为0.184时,PL波长1043.6 nm,半峰宽29.9 nm,XRD有多级卫星峰且半峰宽较小,AFM粗糙度为0.130 nm,表面形貌显示为台阶流生长模式。 展开更多
关键词 金属有机化学气相沉积 InGaAs/GaAsP 应变补偿 多量子阱 晶格失配
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MOCVD of Molybdenum Sulphide Thin Film Via Single Solid Source Precursor Bis-(Morpholinodithioato-s,s’)-Mo 被引量:2
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作者 Bolutife Olofinjana Gabriel Egharevba +2 位作者 Bidini Taleatu Olumide Akinwunmi Ezekiel Oladele Ajayi 《Journal of Modern Physics》 2011年第5期341-349,共9页
A single solid source precursor bis-(morpholinodithioato-s,s’)-Mo was prepared and molybdenum sulphide thin film was deposited on sodalime glass using Metal Organic Chemical Vapour Deposition (MOCVD) technique at dep... A single solid source precursor bis-(morpholinodithioato-s,s’)-Mo was prepared and molybdenum sulphide thin film was deposited on sodalime glass using Metal Organic Chemical Vapour Deposition (MOCVD) technique at deposition temperature of 420?C. The film was characterized using Rutherford Backscattering Spectroscopy (RBS), Ultraviolet-Visible Spectroscopy, Four point probe technique, Scanning Electron Mi-croscopy (SEM), X-ray Diffractometry (XRD) and Atomic Force Microscopy (AFM). A direct optical band gap of 1.77 eV was obtained from the analysis of the absorption spectrum. The sheet resistance was found to be of the order of 10P–5P ΩP–1P?cmP–1P. SEM micrographs of the films showed the layered structure of the film with an estimated grain size that is less than 2 μm while XRD indicates parallel orientation of the basal plane to the substrate surface. 展开更多
关键词 MOLYBDENUM SULPHIDE PRECURSOR Metal ORGANIC chemical vapour deposition (mocvd) Thin Film Characterization
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用于日盲波段的MgZnO薄膜材料和紫外探测器 被引量:8
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作者 张吉英 蒋大勇 +3 位作者 鞠振刚 申德振 姚斌 范希武 《中国光学与应用光学》 2008年第1期80-84,共5页
考虑ZnO优秀的物理和化学性能以及由于生长温度低而具有更低的缺陷密度从而易于实现高的光电器件效率等特点,本文采用射频磁控溅射和金属有机化学汽相沉积(MOCVD)方法在石英及蓝宝石衬底上生长了立方结构MgZnO薄膜,制备了MgZnO的MSM型... 考虑ZnO优秀的物理和化学性能以及由于生长温度低而具有更低的缺陷密度从而易于实现高的光电器件效率等特点,本文采用射频磁控溅射和金属有机化学汽相沉积(MOCVD)方法在石英及蓝宝石衬底上生长了立方结构MgZnO薄膜,制备了MgZnO的MSM型紫外探测器。该器件实现了在日盲(太阳盲)波段的光响应,典型的光响应峰值分别在225和250 nm,截止边为230和273 nm。 展开更多
关键词 MgZnO薄膜 射频磁控溅射 金属有机化学汽相沉积 日盲紫外探测器
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Synthesis and Some Properties of Metal Organic Chemical Vapour Deposited Molybdenum Oxysulphide Thin Films 被引量:1
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作者 B.Olofinjana G.O.Egharevba +6 位作者 M.A.Eleruja C.Jeynes A.V.Adedeji O.O.Akinwunmi B.A.Taleatu C.U.Mordi E.O.B.Ajayi 《Journal of Materials Science & Technology》 SCIE EI CAS CSCD 2010年第6期552-557,共6页
Molybdenum oxodithiocarbamate was prepared as thin films which were deposited on sodalime glass a single solid source precursor for molybdenum oxysulphide substrates using metal organic chemical vapour deposition (MO... Molybdenum oxodithiocarbamate was prepared as thin films which were deposited on sodalime glass a single solid source precursor for molybdenum oxysulphide substrates using metal organic chemical vapour deposition (MOCVD) technique at a temperature of 420~C. Rutherford backscattering spectroscopy (RBS) was used to determine the elemental composition of the film which showed that the films contained large amounts of oxygen. The large amount of oxygen was attributed to the large abundance of oxygen in the starting material. A direct optical energy gap of 3.31 eV was obtained from the analysis of the absorption spectrum. The scanning electron microscopy (SEM) micrographs of the films showed that the films were continuous and porous. An estimated average size of the grains was below 5 #m. X-ray diffraction (XRD) showed that the deposited films were crystalline in nature. 展开更多
关键词 Molybdenum oxodithiocarbamate Molybdenum oxysulphide Metal organic chemical vapour deposition mocvd Thin film
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Preparation of the In_2O_23·Sn Films by MO-CVD Technique
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作者 LUO Wen-xiu, REN Peng-cheng and TAN Zhong-ke(Center for Fimctional Materials Rcscarch, Qingdao Institute ofChemical Technology, Qingdao, 266042)LI Zhi-ping (Department of Applied Chemistry, Qingdao University, Qingdao, 266071) 《Chemical Research in Chinese Universities》 SCIE CAS CSCD 1992年第4期477-479,共3页
Introduction In;O;·Sn films have high transparency(>95%) within the visible spectral region, low resistivity(10;—10;ohm·cm) at room temperature and superior thermal stability. These films have been ap... Introduction In;O;·Sn films have high transparency(>95%) within the visible spectral region, low resistivity(10;—10;ohm·cm) at room temperature and superior thermal stability. These films have been applied to solar cells, electronics and photoelectronics fields. In recent years, organometallic-CVD method has emerged as a successful alternate to the physical methods and general CVD for the growth of these films. The MO-CVD tech- 展开更多
关键词 metallorganic chemical vapour deposition (mocvd) Tin doped Indium oxide
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In_(0.49)Ga_(0.51)P材料有序度对发光特性的影响
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作者 刘伟超 王海珠 +4 位作者 王嘉宾 王曲惠 范杰 邹永刚 马晓辉 《发光学报》 EI CAS CSCD 北大核心 2022年第6期862-868,共7页
In_(0.49)Ga_(0.51)P材料因与GaAs晶格匹配且具有较宽的能量带隙,在GaAs基短波长激光器和无铝激光器等研究方向上受到了广泛关注。不同领域的应用对In_(0.49)Ga_(0.51)P材料的性能提出了不同的需求,导致In_(0.49)Ga_(0.51)P材料的有序... In_(0.49)Ga_(0.51)P材料因与GaAs晶格匹配且具有较宽的能量带隙,在GaAs基短波长激光器和无铝激光器等研究方向上受到了广泛关注。不同领域的应用对In_(0.49)Ga_(0.51)P材料的性能提出了不同的需求,导致In_(0.49)Ga_(0.51)P材料的有序度发生变化,进而导致其发光特性发生改变。本文利用金属有机化学气相沉积(MOCVD)技术,在半绝缘的GaAs衬底上开展In_(0.49)Ga_(0.51)P材料有序度对其发光特性影响的研究。通过改变硅烷(SiH_(4))和二乙基锌(DEZn)掺杂剂的掺杂流量和Ⅴ/Ⅲ比的方法来改变In_(0.49)Ga_(0.51)P材料的有序度。室温光致发光测试(PL)和低温PL测试结果表明,两种掺杂剂掺杂流量增加都会导致In_(0.49)Ga_(0.51)P有序度降低,从而使InGaP的发光波长蓝移。此外,Ⅴ/Ⅲ比增加会导致In_(0.49)Ga_(0.51)P有序度增加,使样品的发光波长红移。 展开更多
关键词 金属有机化学气相沉积 铟镓磷/镓砷 光致发光 故意掺杂
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Characterisation of Zinc Oxynitride Thin Films Prepared Using Zinc(II) Complex of Hexamethylenetetramine as the Precursor
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作者 Olumide Oluwole Akinwunmi Oluwaseun Philip Adelabu +4 位作者 Adetokunbo Temitope Famojuro Olakunle A. Akinwumi Priscilla Oluwatumilara Olaopa Kehinde Folorunso Olafisan Ezekiel Oladele Bolarinwa Ajayi 《Materials Sciences and Applications》 CAS 2022年第8期479-489,共11页
A Zinc(II) complex of hexamethylenetetramine was prepared as a single source precursor and used to deposit zinc oxynitride thin films. The thin films were deposited on soda-lime glass substrates using the Metal Organi... A Zinc(II) complex of hexamethylenetetramine was prepared as a single source precursor and used to deposit zinc oxynitride thin films. The thin films were deposited on soda-lime glass substrates using the Metal Organic Chemical Vapour Deposition (MOCVD) technique at the deposition temperature of 370°C and 390°C, respectively. The Fourier Transform Infrared Spectroscopy (FTIR) was used to determine the functional groups in the precursor, with stretching frequency for O-H, N-H, and C-H observed. The deposited films were characterized using UV-Visible Spectroscopy, Scanning Electron Microscopy (SEM), Elemental diffraction X-ray (EDX), and X-ray Diffractometer (XRD). A direct bandgap of 3.15 eV and 3.18 eV was obtained from the film deposited at 370°C and 390°C, respectively, using the Envelope Method. In comparison, a bandgap of 3.19 eV and 3.21 eV was obtained using the absorption spectrum fitting (ASF) method. The SEM revealed that the film is homogeneous, dense, and compact, composed of cluster grains. The EDX confirmed the presence of Zinc, Nitrogen and Oxygen. The X-ray Diffraction indicated the polycrystalline nature of the film. 展开更多
关键词 Zinc Oxynitride Metal Organic chemical vapour deposition (mocvd) PRECURSOR Characterisation Thin Film
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InGaN/GaN多量子阱蓝光LED的p-GaN盖层的MOCVD生长研究 被引量:5
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作者 牛南辉 王怀兵 +6 位作者 刘建平 刘乃鑫 邢燕辉 韩军 邓军 郭霞 沈光地 《光电子.激光》 EI CAS CSCD 北大核心 2006年第5期517-521,共5页
利用金属有机物化学气相淀积(MOCVD)生长了InGaN/GaN多量子阱(MQW)蓝光发光二极管(LED),研究了不同Cp2Mg流量下生长的p-GaN盖层对器件电学特性的影响。结果表明,随着Cp2Mg流量的提高,漏电流升高,并且到达一临界点会迅速恶化;正向压降则... 利用金属有机物化学气相淀积(MOCVD)生长了InGaN/GaN多量子阱(MQW)蓝光发光二极管(LED),研究了不同Cp2Mg流量下生长的p-GaN盖层对器件电学特性的影响。结果表明,随着Cp2Mg流量的提高,漏电流升高,并且到达一临界点会迅速恶化;正向压降则先降低,后升高。进而研究相同生长条件下生长的p-GaN薄膜的电学特性、表面形貌及晶体质量,结果表明,生长p-GaN盖层时,Cp2Mg流量过低,盖层的空穴浓度低,电学特性不好;Cp2Mg流量过高,则会产生大量的缺陷,盖层晶体质量与表面形貌变差,使得空穴浓度降低,电学特性变差。因此,生长p-GaN盖层时,为使器件的正向压降与反向漏电流均达到要求,Cp2Mg流量应精确控制。 展开更多
关键词 GaN 伏安特性 发光二极管(LED) 金属有机物化学气相淀积(mocvd)
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LP-MOCVD法制作n-ZnO/p-Si异质结及其电致发光研究 被引量:3
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作者 李香萍 张宝林 +3 位作者 申人升 张源涛 董鑫 夏晓川 《光电子.激光》 EI CAS CSCD 北大核心 2009年第5期601-604,共4页
采用低压-金属有机化学气相沉积法(LP-MOCVD)在(100)p-Si衬底上制备未掺杂n型ZnO薄膜,并制作了相应的n-ZnO/p-Si异质结器件。通过X射线衍射(XRD)、光致发光(PL)光谱和霍尔测试分别研究了所制备薄膜的结构、光学和电学特性,得到具有较高... 采用低压-金属有机化学气相沉积法(LP-MOCVD)在(100)p-Si衬底上制备未掺杂n型ZnO薄膜,并制作了相应的n-ZnO/p-Si异质结器件。通过X射线衍射(XRD)、光致发光(PL)光谱和霍尔测试分别研究了所制备薄膜的结构、光学和电学特性,得到具有较高质量的n型ZnO薄膜。在室温条件下,测得了该类异质结器件正向注入电流下可见光和近红外区域的电致发光(EL)。 展开更多
关键词 ZNO薄膜 n-ZnO/p-Si 异质结 金属有机化学气相沉积(mocvd) 电致发光(EL)
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Cl2/H2 ICP刻蚀优化及其在1.55μm DFB激光器制作中的应用 被引量:2
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作者 江山 董雷 +2 位作者 张瑞康 罗勇 谢世钟 《光电子.激光》 EI CAS CSCD 北大核心 2009年第5期583-586,共4页
采用特别设计的InGaAsP/InP多量子阱结构(MQW),研究了Cl2/H2电感耦合等离子体(ICP)刻蚀损伤,优化了低损伤ICP刻蚀的关键工艺参数,得到了一种低损伤、形貌良好的Bragg光栅的制作方法。结合优化的InP材料金属有机物化学气相沉积(MOCVD)外... 采用特别设计的InGaAsP/InP多量子阱结构(MQW),研究了Cl2/H2电感耦合等离子体(ICP)刻蚀损伤,优化了低损伤ICP刻蚀的关键工艺参数,得到了一种低损伤、形貌良好的Bragg光栅的制作方法。结合优化的InP材料金属有机物化学气相沉积(MOCVD)外延生长工艺,制作出1.55μm分布反馈(DFB)激光器,端面镀膜前其阈值电流和斜率效率分别为15mA和0.3mW/mA,边模抑制比大于45dB。寿命加速老化实验结果显示,该器件40℃的中值寿命超过2×106h,表明了本文ICP光栅刻蚀工艺的可靠性。 展开更多
关键词 电感耦合等离子体(ICP)刻蚀 金属氧化物化学气相沉积(mocvd) 分布反馈(DFB)激光器 可靠性
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