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DISCHARGE CHANNEL GROWTH IN MICRO EDM OF HIGH FREQUENCY PULSE 被引量:2
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作者 刘宇 王津 +1 位作者 王元刚 赵福令 《Transactions of Nanjing University of Aeronautics and Astronautics》 EI 2011年第4期353-361,共9页
The influences of intense magnetic pinch effect caused by electromagnetic field with high frequency on discharge channel expansion and plasma configuration change are discussed. The change of Lorentz force exerting on... The influences of intense magnetic pinch effect caused by electromagnetic field with high frequency on discharge channel expansion and plasma configuration change are discussed. The change of Lorentz force exerting on charged particles in discharge channel is calculated under the electromagnetic field with high frequency. Through the theoretical analysis and experimental study, the forming process of discharge channel is conjectured. And it is considered that the changes of discharge channel, such as the decrease of diameter and increase of energy density, coming from the intense magnetic pinch effect in high frequency electromagnetic field, are the main reasons for a series of special phenomena on the machined surface in micro EDM. 展开更多
关键词 micro edm discharge channel high frequency electromagnetic field magnetic pinch effect discharge crater
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纳米颗粒活性剂混粉EDM特性研究
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作者 刘庆玉 沙瑞 +1 位作者 王亚青 姜芙林 《中国工程机械学报》 北大核心 2024年第3期388-392,共5页
为了进一步提高EDM效率和表面质量,提出了纳米颗粒活性剂混粉EDM方法。基于Marangoni效应分析了活性剂对EDM材料去除的增强机制,并开展实验研究了纳米活性剂对钛合金EDM特性的影响。结果表明:当开路电压为100 V时,相对于混有Al_(2)O_(3)... 为了进一步提高EDM效率和表面质量,提出了纳米颗粒活性剂混粉EDM方法。基于Marangoni效应分析了活性剂对EDM材料去除的增强机制,并开展实验研究了纳米活性剂对钛合金EDM特性的影响。结果表明:当开路电压为100 V时,相对于混有Al_(2)O_(3)和ZrO_(2)纳米颗粒的工作液,在混有TiO_(2)纳米颗粒工作液中进行EDM可得到最高的材料去除率。采用混有纳米颗粒表面活性剂的工作液进行EDM可得到更低的工具损耗率、更高的微孔锥形度以及更低的表面粗糙度。通过在去离子水工作液中混入TiO_(2)纳米颗粒,可将EDM的表面粗糙度Ra降低50%。因此,在EDM工作液中加入活性剂纳米颗粒有助于提高加工性能。 展开更多
关键词 加工特性 纳米颗粒 edm 钛合金(edm) 表面活性剂
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脉冲参数主动匹配式micro-EDM脉冲电源 被引量:2
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作者 孙术发 刘美爽 狄士春 《哈尔滨工业大学学报》 EI CAS CSCD 北大核心 2014年第7期118-122,共5页
为了提高微细电火花加工(micro-EDM)效率,设计了一种脉冲参数主动匹配式micro-EDM脉冲电源.采用等能量加工的方法,对不同的脉冲匹配参数进行加工效率对比实验,设计了脉冲参数主动匹配式脉冲电源的结构、功能和控制策略,并进行了加工实... 为了提高微细电火花加工(micro-EDM)效率,设计了一种脉冲参数主动匹配式micro-EDM脉冲电源.采用等能量加工的方法,对不同的脉冲匹配参数进行加工效率对比实验,设计了脉冲参数主动匹配式脉冲电源的结构、功能和控制策略,并进行了加工实验验证.结果表明:选定合适的脉宽和脉间参数,使极间电容单次充电和单次放电,可获得最高的加工效率;该电源脉冲参数可根据极间电压和极间电容的大小自动调整;进行微小孔加工,加工连续性较好,加工效率和加工质量较高.利用该电源可进行微细加工,加工效率较传统电源有显著的提升,并能保证较高的加工质量. 展开更多
关键词 主动匹配式 微细电火花加工 脉冲电源 脉冲参数 加工效率
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主动匹配式micro-EDM脉冲电源设计与实验 被引量:1
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作者 孙术发 刘美爽 +3 位作者 狄士春 沈微 安立华 葛安华 《哈尔滨工程大学学报》 EI CAS CSCD 北大核心 2015年第8期1080-1085,共6页
为了提高微细电火花加工(micro-EDM)效率,设计了一种脉冲参数主动匹配式micro-EDM脉冲电源。采用主动匹配式脉冲发生电路实现脉冲参数根据极间电容充放电情况自动匹配,通过实验,对电源的加工效率、加工质量和低电压加工情况进行了分析... 为了提高微细电火花加工(micro-EDM)效率,设计了一种脉冲参数主动匹配式micro-EDM脉冲电源。采用主动匹配式脉冲发生电路实现脉冲参数根据极间电容充放电情况自动匹配,通过实验,对电源的加工效率、加工质量和低电压加工情况进行了分析。结果表明:采用该电源可以实现在单个脉冲周期内,极间电容单次充电、单次放电;与常规晶体管脉冲电源比较,该电源可以提高加工效率,加工表面变质层无裂纹、凹坑均匀、加工质量较高;可以实现24 V低电压加工,加工后的微孔圆度和精度较高。该电源具有提高微细电火花加工效率,保证较高加工质量的作用。 展开更多
关键词 主动匹配 微细电火花加工 脉冲电源 加工效率 加工质量
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Study on manufacturing freeform surface parts in micro EDM based on skin effect theory 被引量:1
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作者 刘宇 Sundaram Murali Meenakshi +1 位作者 Zhao Fuling Rajurkar Kamlakar P 《High Technology Letters》 EI CAS 2011年第4期439-445,共7页
Micro fabrication of freeform surface parts made of hard and brittle materials is always a tough job in micro machining field. This paper tries to fabricate freeform surface feature by using smooth surface of tool ele... Micro fabrication of freeform surface parts made of hard and brittle materials is always a tough job in micro machining field. This paper tries to fabricate freeform surface feature by using smooth surface of tool electrode after tool wear in micro EDM. According to the skin effect theory, the tool end shape in the stage of uniform wear can be changed by adjusting the frequency of discharge pulse. The electrical energy distributing rule of tool electrode section in RC circuit has been investigated under the influence of skin effect, and the law of spark location change has been summarized. The experimental studies demonstrate that different shapes of tool ends can be achieved by varying the pulse frequencies of discharge power supply. Additionally, a micro part of freeform surface feature with high precision and good surface quality has been successfully obtained by micro EDM through adopting the smooth surface after tool wear. 展开更多
关键词 micro edm freeform surface skin effect tool shape
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Influence of high frequency pulse on electrode wear in micro-EDM 被引量:3
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作者 Xiao-peng LI Yuan-gang WANG +2 位作者 Fu-ling ZHAO Meng-hua WU Yu LIU 《Defence Technology(防务技术)》 SCIE EI CAS 2014年第3期316-320,共5页
An electromagnetic coupling mathematical model is established by finite element method and is verified by the contrastive experiments of copper matrix Ni-TiN cylindrical coating electrode,copper electrode and Cu50 W e... An electromagnetic coupling mathematical model is established by finite element method and is verified by the contrastive experiments of copper matrix Ni-TiN cylindrical coating electrode,copper electrode and Cu50 W electrode.The wear mechanism of Ni-TiN/Cu composite electrode in the case of high-frequency pulse current is studied,and the influence of the fluctuation frequency of discharge current on electrode wear in micro-EDM is found out.Compared with the electrode made from homogeneous material,the high frequency electromagnetic properties of Ni-TiN composite layer can be used effectively to inhibit the effect of high frequency pulse on the electrode and improve the distribution trend of current density. 展开更多
关键词 HIGH-FREQUENCY PULSE ELECTROMAGNETIC coupling model NieTiN/Cu composite ELECTRODE ELECTRODE WEAR micro-edm
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High-efficiency Approach for Fabricating MTE Rotor by Micro-EDM and Micro-extrusion 被引量:2
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作者 GENG Xuesong CHI Guanxin +1 位作者 WANG Yukui WANG Zhenlong 《Chinese Journal of Mechanical Engineering》 SCIE EI CAS CSCD 2014年第4期830-835,共6页
Micro-gas turbine engine(MTE) rotor is an important indicator of its property, therefore, the manufacturing technology of the microminiature rotor has become a hot area of research at home and abroad. At present, th... Micro-gas turbine engine(MTE) rotor is an important indicator of its property, therefore, the manufacturing technology of the microminiature rotor has become a hot area of research at home and abroad. At present, the main manufacturing technologies of the MTE rotor are directed forming fabrication technologies. However, these technologies have a series of problems, such as complex processing technology high manufacturing cost, and low processing efficiency, and so on. This paper takes advantage of micro electric discharge machining(micro-EDM) in the field of microminiature molds manufacturing, organizes many processing technologies of micro-EDM reasonably to improve processing accuracy, presents an integrated micro-EDM technology and its process flow to fabricate MTE rotor die, and conducts a series of experiments to verify efficiency of this integrated micro-EDM. The experiments results show that the MTE rotor die has sharp outline and ensure the good consistency of MTE rotor blades. Meanwhile, the MTE rotor die is applied to micro extrusion equipment, and technologies of micro-EDM and micro forming machining are combined based on the idea of the molds manufacturing, so the MTE rotor with higher aspect ratio and better consistency of blades can be manufactured efficiently. This research presents an integrated micro-EDM technology and its process flow, which promotes the practical process of MTE effectively. 展开更多
关键词 integrated micro-edm micro extrusion MTE rotor EFFICIENCY CONSISTENCY
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Micro-EDM Milling of Complex 3D Structure with Fix-Length Compensation Method
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作者 董颖怀 《Journal of Wuhan University of Technology(Materials Science)》 SCIE EI CAS 2009年第S1期241-243,共3页
A human face with complex 3D structure is machined with a modified fix-length compensation method in this paper.The fast development of MEMS (Micro Electromechanical Systems) has strongly enhanced the application of n... A human face with complex 3D structure is machined with a modified fix-length compensation method in this paper.The fast development of MEMS (Micro Electromechanical Systems) has strongly enhanced the application of new harder work materials.As a low cost,flexible,good repeatable machining process with negligible process forces,micro-EDM milling is well suited for freeform metallic micro structures.A major problem in micro-EDM milling of complex 3D structure is the electrode wear.A new CAM system based on the UG software platform is developed in order to get good accuracy and higher efficiency.A correction coefficient is introduced and deduced for the modified fix-length compensation method.Using this method a human face with complex 3D stricter is machined successfully by micro-EDM milling. 展开更多
关键词 micro-edm milling COMPENSATION CAM
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灰色关联分析和熵权法的μ-EDM多目标参数优化
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作者 莫远东 连海山 +2 位作者 王雅芝 黄舒琦 钟佳俊 《机械强度》 CAS CSCD 北大核心 2023年第4期901-908,共8页
针对微孔的入口、出口和形状加工精度指标要求,提出灰色关联分析(Grey Relational Analysis,GRA)法和熵权法相结合的微细电火花加工多目标参数优化方法。运用熵权法,对三个加工精度指标进行分析,并得到对应的权重。通过设计正交试验并对... 针对微孔的入口、出口和形状加工精度指标要求,提出灰色关联分析(Grey Relational Analysis,GRA)法和熵权法相结合的微细电火花加工多目标参数优化方法。运用熵权法,对三个加工精度指标进行分析,并得到对应的权重。通过设计正交试验并对H62黄铜进行加工试验,计算出试验结果序列的各指标的灰色关联系数。采用熵权法和GRA法综合评价模型,得出各试验序列的灰色关联度,并对其进行均值分析,实现了多目标优化向单目标优化的转变。研究结果表明,优化后工艺参数的实验结果与灰色关联度最大的H-22组试验结果相比,其入口过切量EnOV、出口过切量ExOV及锥度TA分别降低了8.97%、4.11%、8.33%,微孔的加工精度得以提高。 展开更多
关键词 微细电火花加工 熵权法 灰色关联分析 正交试验 微孔
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磁场辅助场致射流微细放电加工研究
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作者 杨翔钧 张亚欧 +2 位作者 郑倩 高强 赵万生 《电加工与模具》 北大核心 2024年第1期65-70,共6页
场致射流放电加工方法利用高压电场诱导形成的微细射流与工件间放电来蚀除材料。虽无电极损耗,但微细射流的柔性较大且易受外界干扰,导致放电分散性和随机性较强,因此难以对其进行精准控制。为此,设计了一种四极性磁场施加装置,通过磁... 场致射流放电加工方法利用高压电场诱导形成的微细射流与工件间放电来蚀除材料。虽无电极损耗,但微细射流的柔性较大且易受外界干扰,导致放电分散性和随机性较强,因此难以对其进行精准控制。为此,设计了一种四极性磁场施加装置,通过磁场对离子束的约束作用控制射流,并分析了磁场的作用机理,研究了磁场约束对场致射流放电加工的蚀坑宽度、深度及表面粗糙度的影响规律。结果表明,随着磁感应强度的增大,放电蚀坑的最大深度和表面粗糙度值都减小;磁场散焦方向上蚀坑的宽度增加,而聚焦方向上蚀坑的宽度减小,同时放电时的极间距离也减小。经试验验证,所提出的磁场辅助场致射流放电加工方法适用于具有沟槽类型特征的部件加工。 展开更多
关键词 微细电火花加工 场致射流 磁场
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Experimental Research on Effects of Process Parameters on Servo Scanning 3D Micro Electrical Discharge Machining 被引量:3
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作者 TONG Hao LI Yong HU Manhong 《Chinese Journal of Mechanical Engineering》 SCIE EI CAS CSCD 2012年第1期114-121,共8页
Servo scanning 3D micro electrical discharge machining (3D SSMEDM) is a novel and effective method in fabricating complex 3D micro structures with high aspect ratio on conducting materials. In 3D SSMEDM process, the a... Servo scanning 3D micro electrical discharge machining (3D SSMEDM) is a novel and effective method in fabricating complex 3D micro structures with high aspect ratio on conducting materials. In 3D SSMEDM process, the axial wear of tool electrode can be compensated automatically by servo-keeping discharge gap, instead of the traditional methods that depend on experiential models or intermittent compensation. However, the effects of process parameters on 3D SSMEDM have not been reported up until now. In this study, the emphasis is laid on the effects of pulse duration, peak current, machining polarity, track style, track overlap, and scanning velocity on the 3D SSMEDM performances of machining efficiency, processing status, and surface accuracy. A series of experiments were carried out by machining a micro-rectangle cavity (900 μm×600 μm) on doped silicon. The experimental results were obtained as follows. Peak current plays a main role in machining efficiency and surface accuracy. Pulse duration affects obviously the stability of discharge state. The material removal rate of cathode processing is about 3/5 of that of anode processing. Compared with direction-parallel path, contour-parallel path is better in counteracting the lateral wear of tool electrode end. Scanning velocity should be selected moderately to avoid electric arc and short. Track overlap should be slightly less than the radius of tool electrode. In addition, a typical 3D micro structure of eye shape was machined based on the optimized process parameters. These results are beneficial to improve machining stability, accuracy, and efficiency in 3D SSMEDM. 展开更多
关键词 micro electrical discharge machining(micro edm) servo scanning machining 3D micro-structure process parameter
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基于集成正交实验与CNN方法的微细电火花微孔加工精度
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作者 莫远东 王雅芝 +1 位作者 黄舒琦 钟佳俊 《工程科学与技术》 EI CAS CSCD 北大核心 2024年第4期261-272,共12页
针对改善微细电火花微孔加工精度问题,提出一种集成正交试验与卷积神经网络的方法。首先,利用正交试验研究进给速度、主轴转速、脉冲占空比和脉冲频率4个因素对微细电火花加工H62黄铜微孔入口过切(En-OV)、出口过切(ExOV)和锥度(TA)的... 针对改善微细电火花微孔加工精度问题,提出一种集成正交试验与卷积神经网络的方法。首先,利用正交试验研究进给速度、主轴转速、脉冲占空比和脉冲频率4个因素对微细电火花加工H62黄铜微孔入口过切(En-OV)、出口过切(ExOV)和锥度(TA)的影响规律及其最优加工工艺参数。然后,采用基于PyTorch框架的卷积神经网络对试验结果进行预测。结果表明:对于微孔加工入口过切,各因素按影响程度由高到低依次为脉冲占空比、脉冲频率、进给速度和主轴转速;对于微孔加工出口过切,各因素按影响程度由高到低依次为进给速度、主轴转速、脉冲占空比和脉冲频率;对于微孔加工锥度,各因素按影响程度由高到低依次为进给速度、脉冲占空比、主轴转速和脉冲频率。综合考虑并分析各因素之间关系,通过验证实验得到微孔加工精度最优组合参数:进给速度为0.02mm/s、主轴转速为1000r/min、脉冲占空比为60%、脉冲频率为3000Hz。微孔加工入口过切、出口过切和锥度的预测值与试验真实值吻合程度较高,两者相对误差均小于12%。基于PyTorch框架的卷积神经网络(CNN)具有较高的预测准确性,满足实际生产加工需求,为微细电火花微孔加工精度预测研究提供了新方法,也为实际生产加工指导提供了依据。 展开更多
关键词 微细电火花加工 正交实验 卷积神经网络 H62黄铜 微孔
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微细EDM技术加工微齿轮的研究 被引量:6
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作者 陈文元 丁涛 +1 位作者 张卫平 姚锦元 《微细加工技术》 1998年第2期73-78,共6页
本文通过用微细电火花(EDM)方法加工模数为0.06的微齿轮研究,阐述了微细EDM方法加工微齿轮的原理、方法和关键技术。
关键词 微细加工 微齿轮 IC 制造工艺 微细edm加工
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斜率与变统计周期微细电火花脉冲识别系统
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作者 彭林发 李文斌 +1 位作者 王燕青 杨胜强 《机械设计与制造》 北大核心 2024年第2期119-124,共6页
针对电压阈值法不能很好统计开路时长和改变放电电压时需要调节电压阈值等问题。提出一种基于斜率比值和变统计周期的脉冲识别方法,该方法使检测装置直接用于微细电火花粗磨、精磨两种不同开路电压的加工情形中,不需要调节电压阈值且能... 针对电压阈值法不能很好统计开路时长和改变放电电压时需要调节电压阈值等问题。提出一种基于斜率比值和变统计周期的脉冲识别方法,该方法使检测装置直接用于微细电火花粗磨、精磨两种不同开路电压的加工情形中,不需要调节电压阈值且能有效的统计开路时长,从而提高检测效率和精度。首先使用NI采集卡和LabVIEW软件开发脉冲识别系统,该系统可对间隙电压进行显示、连续存储以及对文件进行拆分,接着对斜率比值法和变统计周期法进行理论分析并编写脉冲识别与统计程序,最后进行放电状态检测的实验验证。结果表明:该方法能够识别不同脉冲且适用于不同放电电压情形,程序结果与实际结果较吻合,证明了该方法的有效性和实用性。 展开更多
关键词 微细电火花 放电状态检测 脉冲识别 斜率比值法 变统计周期
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低速WEDM制备的微织构螺旋微铣刀的铣削实验研究 被引量:1
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作者 巩亚东 金丽雅 +1 位作者 孙瑶 苏志朋 《东北大学学报(自然科学版)》 EI CAS CSCD 北大核心 2020年第8期1111-1115,共5页
基于五轴低速走丝电火花线切割机床与回转机构相结合的加工方法,制备了后刀面具有微织构的螺旋微铣刀.建立了微织构螺旋微铣刀微刃单元的切削力理论模型,并开展微织构微铣刀与常规微铣刀的对比实验研究.结果表明:微织构螺旋微铣刀的切... 基于五轴低速走丝电火花线切割机床与回转机构相结合的加工方法,制备了后刀面具有微织构的螺旋微铣刀.建立了微织构螺旋微铣刀微刃单元的切削力理论模型,并开展微织构微铣刀与常规微铣刀的对比实验研究.结果表明:微织构螺旋微铣刀的切削力相对于常规刀具降低了30%~40%,相同加工条件下,微织构螺旋微铣刀所加工的表面粗糙度降低至0.745μm,而常规微铣刀所加工的表面粗糙度为1.130μm. 展开更多
关键词 电火花加工 线切割 微织构 微铣刀 微铣削
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微细电火花加工中的放电能量分布研究
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作者 姜东升 刘庆玉 +1 位作者 陈志恒 姜芙林 《青岛理工大学学报》 CAS 2024年第4期139-145,共7页
微细电火花加工技术已经广泛应用于精密制造领域,然而由于尺度效应的存在,其加工机理特别复杂,对于放电蚀除过程中的放电能量分布尚未明确。开展了微细电火花单脉冲放电实验,并考虑到熔化潜热和汽化潜热的影响,对传统的电热模型进行了修... 微细电火花加工技术已经广泛应用于精密制造领域,然而由于尺度效应的存在,其加工机理特别复杂,对于放电蚀除过程中的放电能量分布尚未明确。开展了微细电火花单脉冲放电实验,并考虑到熔化潜热和汽化潜热的影响,对传统的电热模型进行了修正,基于微细电火花的放电持续时间,计算了分布到工件中的能量分布比。结果发现,由于放电初期有相当一部分的放电能消耗于放电通道的形成,所以传入工件中的能量分数随着放电持续时间的增加而增大,在放电持续时间0.63~20.5μs时,分布到工件上的放电能量分数为7.1%~16.3%。伴随着放电持续时间的持续增加放电等离子体通道半径将会一定程度增大,放电等离子体通道半径随放电持续时间的变化范围是5.9~23.2μm。 展开更多
关键词 微细电火花加工 能量分布 放电等离子体通道半径 放电持续时间
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Scale Effects and a Method for Similarity Evaluation in Micro Electrical Discharge Machining
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作者 LIU Qingyu ZHANG Qinhe +3 位作者 WANG Kan ZHU Guang FU Xiuzhuo ZHANG Jianhua 《Chinese Journal of Mechanical Engineering》 SCIE EI CAS CSCD 2016年第6期1193-1199,共7页
Electrical discharge machining(EDM) is a promising non-traditional micro machining technology that offers a vast array of applications in the manufacturing industry. However, scale effects occur when machining at th... Electrical discharge machining(EDM) is a promising non-traditional micro machining technology that offers a vast array of applications in the manufacturing industry. However, scale effects occur when machining at the micro-scale, which can make it difficult to predict and optimize the machining performances of micro EDM. A new concept of "scale effects" in micro EDM is proposed, the scale effects can reveal the difference in machining performances between micro EDM and conventional macro EDM. Similarity theory is presented to evaluate the scale effects in micro EDM. Single factor experiments are conducted and the experimental results are analyzed by discussing the similarity difference and similarity precision. The results show that the output results of scale effects in micro EDM do not change linearly with discharge parameters. The values of similarity precision of machining time significantly increase when scaling-down the capacitance or open-circuit voltage. It is indicated that the lower the scale of the discharge parameter, the greater the deviation of non-geometrical similarity degree over geometrical similarity degree, which means that the micro EDM system with lower discharge energy experiences more scale effects. The largest similarity difference is 5.34 while the largest similarity precision can be as high as 114.03. It is suggested that the similarity precision is more effective in reflecting the scale effects and their fluctuation than similarity difference. Consequently, similarity theory is suitable for evaluating the scale effects in micro EDM. This proposed research offers engineering values for optimizing the machining parameters and improving the machining performances of micro EDM. 展开更多
关键词 Electrical Discharge Machining edm micro edm Scale effect Similarity theory Similarity evaluating method
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高品质大深径比微孔电火花加工研究现状
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作者 岳晓明 李国栋 +2 位作者 聂维梁 林晋宇 吴兆云 《电加工与模具》 北大核心 2024年第4期10-19,共10页
针对大深径比深微孔加工面临单一维度下大深径比高导致的排屑难等问题,综述了利用电火花技术加工深微孔的方法及演变。从工具电极的结构设计、运动规划和能场辅助方式等常用方法论述了目前电火花加工深微孔现状,同时介绍了提升深微孔加... 针对大深径比深微孔加工面临单一维度下大深径比高导致的排屑难等问题,综述了利用电火花技术加工深微孔的方法及演变。从工具电极的结构设计、运动规划和能场辅助方式等常用方法论述了目前电火花加工深微孔现状,同时介绍了提升深微孔加工表面质量的主要方法,最后探讨了当前电火花加工深微孔面临的瓶颈及未来发展趋势。 展开更多
关键词 电火花加工 大深径比微孔 排屑 加工表面质量
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基于SLA成形的EDM电极加工工艺
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作者 李建国 《现代制造工程》 CSCD 2005年第1期84-86,共3页
介绍基于立体光成形(SLA)EDM电极的加工工艺。该工艺将CAD、SAL壳形铸造与真空离心铸造相结合,特别 适宜具有微形复杂形状EDM电极的单件、小批量生产,并使传统分散、多工序的EDM电极加工工艺实现了集成化和自 动化。
关键词 SLA成形 edm 微形复杂电极
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Fabrication of Micro Structures by Ultrashort Voltage Pulse Electrical Discharge Machining
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作者 Chenxue Wang Weiyu He Yan Xiao 《Journal of Minerals and Materials Characterization and Engineering》 2018年第2期235-243,共9页
The machining of small holes and array holes has been a difficult problem in machining field. Tiny hole is widely used in mechanical field, for instance, fuel injection nozzles, spinneret holes for synthetic fibers an... The machining of small holes and array holes has been a difficult problem in machining field. Tiny hole is widely used in mechanical field, for instance, fuel injection nozzles, spinneret holes for synthetic fibers and wire drawing dies. This paper investigated the application of EDM (electrical discharge machining) to the fabrication of micro structures. There are obvious limitations in the process of micro-electrical discharge machining, such as electrode wear, unstable discharge condition and low machining efficiency. The effects of EDM parameters were investigated, such as voltage, pulse frequency, and frequency of ultrasonic vibration applied to electrode. Micro holes were machined with Pt electrode made by focused-ion-beam chemical vapor deposition (FIB-CVD) and Cu electrode made by wire-electrode cutting. The comparison experiments between EDM and ECM (electrochemical machining) indicated that the processing of ECM has serious stray current corrosion and poor machining precision. Moreover, the workpiece vibration was firstly proposed to be utilized in the micro-electrical discharge machining. It can be concluded that maximum machine could be obtained under the amplitude ratio of 76%, which was an appropriate parameter. 展开更多
关键词 micro-edm (Electrical DISCHARGE Machining) micro-Holes ULTRASHORT VOLTAGE PULSE
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