Servo scanning 3D micro electrical discharge machining (3D SSMEDM) is a novel and effective method in fabricating complex 3D micro structures with high aspect ratio on conducting materials. In 3D SSMEDM process, the a...Servo scanning 3D micro electrical discharge machining (3D SSMEDM) is a novel and effective method in fabricating complex 3D micro structures with high aspect ratio on conducting materials. In 3D SSMEDM process, the axial wear of tool electrode can be compensated automatically by servo-keeping discharge gap, instead of the traditional methods that depend on experiential models or intermittent compensation. However, the effects of process parameters on 3D SSMEDM have not been reported up until now. In this study, the emphasis is laid on the effects of pulse duration, peak current, machining polarity, track style, track overlap, and scanning velocity on the 3D SSMEDM performances of machining efficiency, processing status, and surface accuracy. A series of experiments were carried out by machining a micro-rectangle cavity (900 μm×600 μm) on doped silicon. The experimental results were obtained as follows. Peak current plays a main role in machining efficiency and surface accuracy. Pulse duration affects obviously the stability of discharge state. The material removal rate of cathode processing is about 3/5 of that of anode processing. Compared with direction-parallel path, contour-parallel path is better in counteracting the lateral wear of tool electrode end. Scanning velocity should be selected moderately to avoid electric arc and short. Track overlap should be slightly less than the radius of tool electrode. In addition, a typical 3D micro structure of eye shape was machined based on the optimized process parameters. These results are beneficial to improve machining stability, accuracy, and efficiency in 3D SSMEDM.展开更多
Electrical discharge machining（EDM） is a promising non-traditional micro machining technology that offers a vast array of applications in the manufacturing industry. However, scale effects occur when machining at th...Electrical discharge machining（EDM） is a promising non-traditional micro machining technology that offers a vast array of applications in the manufacturing industry. However, scale effects occur when machining at the micro-scale, which can make it difficult to predict and optimize the machining performances of micro EDM. A new concept of ＂scale effects＂ in micro EDM is proposed, the scale effects can reveal the difference in machining performances between micro EDM and conventional macro EDM. Similarity theory is presented to evaluate the scale effects in micro EDM. Single factor experiments are conducted and the experimental results are analyzed by discussing the similarity difference and similarity precision. The results show that the output results of scale effects in micro EDM do not change linearly with discharge parameters. The values of similarity precision of machining time significantly increase when scaling-down the capacitance or open-circuit voltage. It is indicated that the lower the scale of the discharge parameter, the greater the deviation of non-geometrical similarity degree over geometrical similarity degree, which means that the micro EDM system with lower discharge energy experiences more scale effects. The largest similarity difference is 5.34 while the largest similarity precision can be as high as 114.03. It is suggested that the similarity precision is more effective in reflecting the scale effects and their fluctuation than similarity difference. Consequently, similarity theory is suitable for evaluating the scale effects in micro EDM. This proposed research offers engineering values for optimizing the machining parameters and improving the machining performances of micro EDM.展开更多
The machining of small holes and array holes has been a difficult problem in machining field. Tiny hole is widely used in mechanical field, for instance, fuel injection nozzles, spinneret holes for synthetic fibers an...The machining of small holes and array holes has been a difficult problem in machining field. Tiny hole is widely used in mechanical field, for instance, fuel injection nozzles, spinneret holes for synthetic fibers and wire drawing dies. This paper investigated the application of EDM (electrical discharge machining) to the fabrication of micro structures. There are obvious limitations in the process of micro-electrical discharge machining, such as electrode wear, unstable discharge condition and low machining efficiency. The effects of EDM parameters were investigated, such as voltage, pulse frequency, and frequency of ultrasonic vibration applied to electrode. Micro holes were machined with Pt electrode made by focused-ion-beam chemical vapor deposition (FIB-CVD) and Cu electrode made by wire-electrode cutting. The comparison experiments between EDM and ECM (electrochemical machining) indicated that the processing of ECM has serious stray current corrosion and poor machining precision. Moreover, the workpiece vibration was firstly proposed to be utilized in the micro-electrical discharge machining. It can be concluded that maximum machine could be obtained under the amplitude ratio of 76%, which was an appropriate parameter.展开更多
基金supported by National Natural Science Foundation of China (Grant No. 50905094)National Hi-tech Research and Development Program of China (863 Program, Grant No. 2009AA044204, Grant No. 2009AA044205)China Postdoctoral Science Foundation (Grant No. 20080440378, Grant No. 200902097)
文摘Servo scanning 3D micro electrical discharge machining (3D SSMEDM) is a novel and effective method in fabricating complex 3D micro structures with high aspect ratio on conducting materials. In 3D SSMEDM process, the axial wear of tool electrode can be compensated automatically by servo-keeping discharge gap, instead of the traditional methods that depend on experiential models or intermittent compensation. However, the effects of process parameters on 3D SSMEDM have not been reported up until now. In this study, the emphasis is laid on the effects of pulse duration, peak current, machining polarity, track style, track overlap, and scanning velocity on the 3D SSMEDM performances of machining efficiency, processing status, and surface accuracy. A series of experiments were carried out by machining a micro-rectangle cavity (900 μm×600 μm) on doped silicon. The experimental results were obtained as follows. Peak current plays a main role in machining efficiency and surface accuracy. Pulse duration affects obviously the stability of discharge state. The material removal rate of cathode processing is about 3/5 of that of anode processing. Compared with direction-parallel path, contour-parallel path is better in counteracting the lateral wear of tool electrode end. Scanning velocity should be selected moderately to avoid electric arc and short. Track overlap should be slightly less than the radius of tool electrode. In addition, a typical 3D micro structure of eye shape was machined based on the optimized process parameters. These results are beneficial to improve machining stability, accuracy, and efficiency in 3D SSMEDM.
基金Supported by National Natural Science Foundation of China(Grant No.51375274)China Postdoctoral Science Foundation(Grant No.2014M561920)
文摘Electrical discharge machining（EDM） is a promising non-traditional micro machining technology that offers a vast array of applications in the manufacturing industry. However, scale effects occur when machining at the micro-scale, which can make it difficult to predict and optimize the machining performances of micro EDM. A new concept of ＂scale effects＂ in micro EDM is proposed, the scale effects can reveal the difference in machining performances between micro EDM and conventional macro EDM. Similarity theory is presented to evaluate the scale effects in micro EDM. Single factor experiments are conducted and the experimental results are analyzed by discussing the similarity difference and similarity precision. The results show that the output results of scale effects in micro EDM do not change linearly with discharge parameters. The values of similarity precision of machining time significantly increase when scaling-down the capacitance or open-circuit voltage. It is indicated that the lower the scale of the discharge parameter, the greater the deviation of non-geometrical similarity degree over geometrical similarity degree, which means that the micro EDM system with lower discharge energy experiences more scale effects. The largest similarity difference is 5.34 while the largest similarity precision can be as high as 114.03. It is suggested that the similarity precision is more effective in reflecting the scale effects and their fluctuation than similarity difference. Consequently, similarity theory is suitable for evaluating the scale effects in micro EDM. This proposed research offers engineering values for optimizing the machining parameters and improving the machining performances of micro EDM.
文摘The machining of small holes and array holes has been a difficult problem in machining field. Tiny hole is widely used in mechanical field, for instance, fuel injection nozzles, spinneret holes for synthetic fibers and wire drawing dies. This paper investigated the application of EDM (electrical discharge machining) to the fabrication of micro structures. There are obvious limitations in the process of micro-electrical discharge machining, such as electrode wear, unstable discharge condition and low machining efficiency. The effects of EDM parameters were investigated, such as voltage, pulse frequency, and frequency of ultrasonic vibration applied to electrode. Micro holes were machined with Pt electrode made by focused-ion-beam chemical vapor deposition (FIB-CVD) and Cu electrode made by wire-electrode cutting. The comparison experiments between EDM and ECM (electrochemical machining) indicated that the processing of ECM has serious stray current corrosion and poor machining precision. Moreover, the workpiece vibration was firstly proposed to be utilized in the micro-electrical discharge machining. It can be concluded that maximum machine could be obtained under the amplitude ratio of 76%, which was an appropriate parameter.
