Detecting magnetic field direction by a micro beam operating in different vibration modes

A new method to detect the magnetic field direction by using a silicon structure is presented in this paper. The structure includes a micro beam and an in-plane coil electrode. When the electrode under a magnetic field is applied with an alternating current, the micro beam is actuated under the effect of the Lorentz forces. Magnetic fields of different directions cause different vibration profiles. The direction of the magnetic field is obtained by measuring the vibration amplitudes of the micro beam, which is driven to work at first- and second-order resonant modes. A micro structure has been fabricated using the bulk microma^hined silicon process. A laser Doppler vibrometer system is implemented to measure the vibration amplitudes. The experimental results show that the amplitude of the structure, which depends on the different modes, is a sine or cosine function of the angle of the magnetic field. It agrees well with the simulation result. Currently a resolution of 10~ for the magnetic field direction measurement can be obtained using the detecting principle.

Coupled vibrations and frequency shift of compound system consisting of quartz crystal resonator in thickness-shear motions and micro-beam array immersed in liquid

The dynamic characteristics of a quartz crystal resonator（QCR） in thicknessshear modes（TSM） with the upper surface covered by an array of micro-beams immersed in liquid are studied. The liquid is assumed to be inviscid and incompressible for simplicity. Dynamic equations of the coupled system are established. The added mass effect of liquid on micro-beams is discussed in detail. Characteristics of frequency shift are clarified for different liquid depths. Modal analysis shows that a drag effect of liquid has resulted in the change of phase of interaction（surface shear force）, thus changing the system resonant frequency. The obtained results are useful in resonator design and applications.

Vibration and wave propagation analysis of twisted micro-beam using strain gradient theory

In this research, vibration and wave propagation analysis of a twisted micro- beam on Pasternak foundation is investigated. The strain-displacement relations （kine-matic equations） are calculated by the displacement fields of the twisted micro-beam. The strain gradient theory （SGT） is used to implement the size dependent effect at micro-scale. Finally, using an energy method and Hamilton＇s principle, the governing equations of motion for the twisted micro-beam are derived. Natural frequencies and the wave prop- agation speed of the twisted micro-beam are calculated with an analytical method. Also, the natural frequency, the phase speed, the cut-off frequency, and the wave number of the twisted micro-beam are obtained by considering three material length scale parameters, the rate of twist angle, the thickness, the length of twisted micro-beam, and the elastic medium. The results of this work indicate that the phase speed in a twisted micro-beam increases with an increase in the rate of twist angle. Moreover, the wave number is in- versely related with the thickness of micro-beam. Meanwhile, it is directly related to the wave propagation frequency. Increasing the rate of twist angle causes the increase in the natural frequency especially with higher thickness. The effect of the twist angle rate on the group velocity is observed at a lower wave propagation frequency.

Effect of strain-gradients of surface micro-beams on frequency-shift of a quartz crystal resonator under thickness-shear vibrations

With introduction of the first-order strain-gradient of surface micro-beams into the energy density function,we developed a two-dimensional dynamic model for a compound quartz crystal resonator（QCR） system,consisting of a QCR and surface micro-beam arrays.The frequency shift that was induced by micro-beams with consideration of strain-gradients is discussed in detail and some useful results are obtained,which have important significance in resonator design and applications.

Instability of functionally graded micro-beams via micro-structure-dependent beam theory

This paper focuses on the buckling behaviors of a micro-scaled bi-directional functionally graded （FG） beam with a rectangular cross-section, which is now widely used in fabricating components of micro-nano-electro-mechanical systems （MEMS/NEMS） with a wide range of aspect ratios. Based on the modified couple stress theory and the principle of minimum potential energy, the governing equations and boundary conditions for a micro-structure-dependent beam theory are derived. The present beam theory incorporates different kinds of higher-order shear assumptions as well as the two familiar beam theories, namely, the Euler-Bernoulli and Timoshenko beam theories. A numerical solu- tion procedure, based on a generalized differential quadrature method （GDQM）, is used to calculate the results of the bi-directional FG beams. The effects of the two exponential FG indexes, the higher-order shear deformations, the length scale parameter, the geomet- ric dimensions, and the different boundary conditions on the critical buckling loads are studied in detail, by assuming that Young＇s modulus obeys an exponential distribution function in both length and thickness directions. To reach the desired critical buckling load, the appropriate exponential FG indexes and geometric shape of micro-beams can be designed according to the proposed theory.

Influence of surface micro-beams with large deflection on the resonance frequency of a quartz crystal resonator in thickness-shear mode vibrations

We study the dynamic behavior of a quartz crystal resonator （QCR） in thickness-shear vibrations with the upper surface covered by an array of micro-beams （MBs） under large deflection. Through taking into account the continuous conditions of shear force and bending moment at the interface of MBs/resonator, dependences of frequency shift of the compound QCR system versus material parameter and geometrical parameter are illustrated in detail for nonlinear and linear vibrations. It is found that the frequency shift produces a little right （left） translation for increasing elastic modulus （length/radius ratio） of MBs. Moreover, the frequency right （left） translation distance caused by nonlinear deformation becomes more serious in the second-order mode than in the first-order one,

Compounded Surface Modification of ZK60 Mg Alloy by High Current Pulsed Electron Beam+Micro-plasma Oxidation

In this study, compounded surface modification technology-high current pulsed electron beam （HCPEB） ＋ micro-plasma oxidation （MPO） was applied to treat ZK60 Mg alloys. The characteristics of the microstructure of ZK60 Mg alloy after single MPO and HCPEB＋MPO compounded treatment were investigated by SEM. The results showed that the density of the ceramic layer of HCPEB＋MPO-treated ZK60 Mg alloy was improved and defects were reduced compared to that under MPO treatment alone. Surface modified layer of ZK60 Mg alloys treated by HCPEB＋MPO was divided into three zones, namely the top loose ceramic zone, middle compact zone and inside HCPEB-induced melted zone. Corrosion resistance of ZK60 Mg alloy before and after the compounded surface modification was measured in a solution of 3.5% NaCl by potentiodynamic polarization curves. It was found that the corrosion current density of ZK60 Mg alloys could be reduced by about three orders of magnitude, from 311μA/cm^2 of the original sample to 0.2μA/cm^2 of the HCPEB＋MPO-treated sample. This indicates the great application potential of the HCPEB＋MPO compounded surface modification technology in improving the corrosion resistance of ZK60 Mg alloys in the future.

Micro-beam XRF localization by a laser beam

A new method for micro-beam XRF localiztion is presented.A laser beam along with an incident X-ray hits on the surface of a sample.The micro region on the sample that reached by X-ray beam can be localized by means of the visible spot of the laser beam.This method is suitable for X-ray microprobes using an X-ray tube or synchrotron radiation as excitation sources.

Corrosion and fatigue in micro-sized Ni cantilever beams

The Ni microcantilevers were fabricated by femtosecond laser. The corrosion behavior of the micro-sized Ni cantilever beams was studied by electrochemical noise and a newly developed fatigue testing method. The results show that the micro-sized specimens exhibit general corrosion behavior under the studied corrosion condition,whereas the ordinary-sized plates exhibit the localized corrosion behavior. The critical load amplitude of the micro-sized Ni specimens under corrosion fatigue status was determined to be 15 mN. The maximum bending loads,which were measured by fatigue tests,decrease gradually prior to final fracture. Corrosion fracture first occurs in the range of notch with a higher tensile bending stress,and exhibits clear evidence of trans-columnar fracture. The variation of maximum bending loads with time agrees with that creep deformation of the micro-sized Ni specimens can easily occur at room temperature,which implies that the micro-sized Ni specimens appear to have an improved resistance towards total crack as compared with the ordinary-sized Ni specimens.

光子晶体Micro LED微显示阵列加工及光学特性分析

Micro LED器件具有高亮度、低功耗和高可靠性等优点,但Micro LED显示像素巨量转移和光提取效率低的问题为其应用带来挑战。开发了具有高转移效率和出光效率的单片64×64 Micro LED微显示阵列,提出了倒装型GaN基单片Micro LED微显示阵列芯片和Si基驱动电路的设计方法及集成工艺。通过时域有限差分(FDTD)方法对Micro LED微显示阵列光学特性进行了建模分析,设计了一种提高Micro LED微显示阵列出光效率的光提取结构。结合仿真结果,开发了一种在Micro LED蓝宝石衬底表面制备光子晶体结构的聚焦离子束(FIB)微纳加工工艺,并进行了器件加工。测试结果表明,蓝宝石衬底上加工的光子晶体结构可以提高Micro LED器件的表面出光效率,光功率平均值提升了16.36%,对Micro LED微显示阵列加工及微显示像素光提取问题具有借鉴意义。

利用Cone-Beam CT探讨支抗微螺钉周围骨密度与其稳定性的关系

目的:利用Cone-Beam CT测量支抗微螺钉周围骨密度值,探讨其与微螺钉稳定性的关系。方法:选取颌骨左右对称植入微螺钉后一侧松动而另一侧稳固的7名(共18枚微螺钉)正畸患者。拍摄CBCT,所得三维影像重建后用OnDemand 3DApplication软件对微螺钉骨内部分周围2mm范围内骨密度(以Hounsfield Unit表示)进行测量,自身对照比较分析双侧对称部位所植入微螺钉周围骨密度测量值间的差异。结果:松动微螺钉与稳定微螺钉骨内部分周围2mm范围内骨密度无统计学差异,两侧微螺钉钉尖部1/3、钉中部1/3及钉颈部1/3周围骨密度均无统计学差异。结论:微螺钉种植支抗的稳定性与其周围骨密度间未发现明显相关性。

Micro-Plasma闪耀离子束治疗40例萎缩性痤疮瘢痕疗效观察

[背景]观察Micro-Plasma闪耀离子束治疗面部皮肤痤疮萎缩性瘢痕的临床疗效.[病例报告]给40例萎缩性痤疮瘢痕患者行Micro-Plasma闪耀离子束治疗,分别记录术前、第1,2,3次治疗后患者术后评价、术后皮肤反应、医师综合评测、不良反应等情况,并进行对比分析.均按照5级评分标准对疗效及患者满意度加以评估.结果见,利用Micro-Plasma闪耀离子束治疗痤疮萎缩性瘢痕疗效满意率为82.6%.[讨论]Micro-Plasma闪耀离子束治疗痤疮萎缩性瘢痕安全、有效.

成年中国人第5腰椎峡部Micro CT扫描的显微影像特点

背景:目前国内外学者对成年中国人第5腰椎峡部作了大量的应用解剖学研究,但研究结果各不相同,并且观测参数不系统、不完整,而对成年中国人第5腰椎峡部进行较系统的临床应用解剖与Micro CT扫描显微影像解剖对照研究国内外文献未见报道。目的:观测成年中国人第5腰椎峡部Micro CT扫描显微影像解剖学及应用解剖学特点,以期为成年中国人第5腰椎峡部易患病性提供形态学依据。方法:实验从成都医学院局解实验室随机选取60例成年中国人干燥、无破损第5腰椎标本,应用游标卡尺测量第5腰椎峡部的相关数据,并应用Micro CT的三维重建系统分析第5腰椎标本三维骨结构,并逐一测量与第5腰椎左、右侧峡部临床应用解剖观测的指标相对应的Micro CT扫描显微影像解剖参数。结果与结论:在成年中国人第5腰椎标本观测:①左、右侧峡部上缘厚度分别为(4.27±0.99)mm,(4.25±0.98)mm。②左、右侧峡部下缘厚度分别为(7.31±1.23)mm,(7.29±1.25)mm。③左、右侧峡部内缘厚度分别为(6.61±0.33)mm,(6.59±0.36)mm。④左、右侧峡部外缘厚度分别为(8.65±0.27)mm,(8.59±0.33)mm。⑤左、右侧峡部上下缘距离分别为(11.10±3.14)mm,(11.07±3.11)mm。⑥左、右侧峡部上缘长度分别为(8.37±0.99)mm,(8.40±0.96)mm。⑦左、右侧峡部下缘长度分别为(4.71±0.71)mm,(4.73±0.62)mm。⑧左、右侧峡部内缘长度分别为(13.01±1.38)mm,(13.04±1.36)mm。⑨左、右侧峡部外缘长度分别为(10.75±1.11)mm,(10.78±1.06)mm。游标卡尺与Micro CT所测的第5腰椎峡部左右侧的三维数值之间均差异无显著性意义。结果证实,对成年中国人第5腰椎峡部临床应用解剖测量值与Micro CT测量值之间具有统一性,左右侧腰椎峡部解剖值没有差异,Micro CT能为临床上第5腰椎的易患病性提供更为详尽准确的参考数据。

STATIC STUDY OF CANTILEVER BEAM STICTION UNDER ELECTROSTATIC FORCE INFLUENCE

The model and analysis of the cantilever beam adhesion problem under the action of electrostatic force are given. Owing to the nonlinearity of electrostatic force, the analytical solution for this kind of problem is not available. In this paper, a systematic method of generating polynomials which are the exact beam solutions of the loads with di?erent distributions is provided. The polynomials are used to approximate the beam displacement due to electrostatic force. The equilibrium equation o?ers an answer to how the beam deforms but no information about the unstuck length. The derivative of the functional with respect to the unstuck length o?ers such information. But to compute the functional it is necessary to know the beam deformation. So the problem is iteratively solved until the results are converged. Galerkin and Newton-Raphson methods are used to solve this nonlinear problem. The e?ects of dielectric layer thickness and electrostatic voltage on the cantilever beam stiction are studied. The method provided in this paper exhibits good convergence. For the adhesion problem of cantilever beam without electrostatic voltage, the analytical solution is available and is also exactly matched by the computational results given by the method presented in this paper.

Laser-assisted deposition of Cu bumps for microelectronic packaging

Cu bump was transferred using a focused laser pulse for microelectronic packaging.An Nd:YAG laser pulse (maximum energy of 500 mJ;wavelength of 1064 nm;fluences of 0.4-2.1 kJ/cm2) was irradiated on a sacrificial absorption layer with copper coating.The focused laser beam induced plasma between the semi-transparent donor slide and the sacrificial layer,causing a shock wave.The shock wave pressure pushed the Cu layer and transferred material to deposit a bump on substrate.A beam-shaper was used to produce uniform pressure at the interface to reduce fragmentation of the transferred material on the substrate.The calculated shock wave pressure with respect to laser fluence was 1-3 GPa.A Cu bump of diameter of 200 μm was successfully deposited at laser fluence of 0.6 kJ/cm 2.The pressure control at the sacrificial layer using a laser pulse was critical to produce a bump with less fragmentation.The technique can be applied to forming Cu bump for an interconnecting process in electronics.

Investigation on the priming effect of a CVD diamond microdosimeter

CVD diamond microdosimeter is an ideal substitute of common Si.GaAs detector for extremely strong radiation experimental environment due to its high band gap energy, fast charge collection, low dielectric constant and hardness. In order to improve its character, a CVD diamond microdosimeter was irradiated by a proton dose of 46 Gy, and a lateral micro-ion beam induced charge (IBIC) technique was utilized to characterize it in low beam current (～fA). It was clearly shown that charge collection efficiency and energy resolution were greatly improved after proton irradiation of that dose. Moreover, the homogeneities of both its counting performance and collection efficiency were enhanced. Proton irradiation of 46 Gy has been proved to be an effective way to prime a CVD diamond.

锥形束Micro-CT几何校正方法的实现

目的 :通过实现校正方法和设计校正体模,对锥形束Micro-CT系统进行几何校正,以实现高质量锥形束Micro-CT图像重建。方法 :使用特定体模,根据体模在探测器上的投影数据,利用线性拟合、几何关系等推导算法计算出锥形束Micro-CT系统几何位置参数,以实现系统几何校正。计算软件及仿真实验均使用VC++实现。结果:仿真实验表明,该算法具有较高精度,相对误差较小,证明了该校正体模和校正方法的有效性、可行性。结论:应用该校正方法能够准确计算锥形束Micro-CT系统几何位置参数误差,精度较高。通过对几何位置参数误差进行调整,能有效减少重建图像伪影,进一步提高成像分辨力。

基于电子束扫描阵列微焦点射线源的倒置结构Micro-CT成像研究

倒置几何结构CT成像系统理论上具有扫描视场大、图像信噪比好、锥束伪影小等优点,但其多焦点、稀疏角的扫描模式亦会带来投影数据截断、稀疏和局部数据冗余等问题。本文利用电子束扫描阵列微焦点射线源和高分辨率小面积探测器等构建了一种新型高分辨率、大视场的倒置几何结构Micro-CT实验系统(IG-Micro-CT)。针对该系统多焦点、稀疏角扫描模式下的投影数据截断和稀疏等特点,提出一种图像先验约束的全变分正则化SART迭代CT图像重建算法。首先通过仿真实验对图像重建算法进行了验证,并对阵列微焦点数量、旋转扫描分度数量等扫描参数进行优化,最后在IG-Micro-CT实验系统上获得了高分辨的Micro-CT测试图像。实验结果表明,本文提出的算法适用于IG-Micro-CT系统,解决了投影数据截断、稀疏采样和局部数据冗余带来的条状等伪影问题,并验证了IG-Micro-CT这种新型成像方式的可行性。

Magneto-rheological elastomer (MRE) based composite structures for micro-vibration control

Magneto-rheological elastomers （MILEs） are used to construct composite structures for micro-vibration control of equipment under stochastic support-motion excitations. The dynamic behavior of MREs as a smart viscoelastic material is characterized by a complex modulus dependent on vibration frequency and controllable by external magnetic fields. Frequency-domain solution methods for stochastic micro-vibration response analysis of the MRE-based structural systems are developed to derive the system frequency-response function matrices and the expressions of the velocity response spectrum. With these equations, the root-mean-square （RMS） velocity responses in terms of the one-third octave frequency band spectrum can be calculated. Further, the optimization problem of the complex moduli of the MRE cores is defined by minimizing the velocity response spectra and the RMS velocity responses through altering the applied magnetic fields. Simulation results illustrate the influences of MRE parameters on the RMS velocity responses and the high response reduction capacities of the MRE-based structures. In addition, the developed frequency-domain analysis methods are applicable to sandwich beam structures with arbitrary cores characterized by complex shear moduli under stochastic excitations described by power spectral density functions, and are valid for a wide frequency range.

Micro Mechanical Model of 3D Woven Composites

A combined beam model representing the periodicity of the microstructure and micro deformation of 3D woven composites is developed for predicting mechanical properties. The model considers the effects of off axial tension/compression and bending/shearing couplings as well as the mutual reactions of fiber yarns. The method determining microstructure by using woven parameters is described for a typical 3D woven composite material. An analytical cell, constructed by a minimum periodic section of yarn and interlayer matrix, is adopted. Micro stresses in the cell under in-plane tensile loading are obtained by using the proposed beam model and macro modulus is then obtained by the averaging method. Material tests and a 2D micro FEM analysis are made to evaluate this model. Analyses reveal that micro stress caused by tensile/bending coupling effect is not negligible in the stress analysis.