Experimental Research on Effects of Process Parameters on Servo Scanning 3D Micro Electrical Discharge Machining

Servo scanning 3D micro electrical discharge machining (3D SSMEDM) is a novel and effective method in fabricating complex 3D micro structures with high aspect ratio on conducting materials. In 3D SSMEDM process, the axial wear of tool electrode can be compensated automatically by servo-keeping discharge gap, instead of the traditional methods that depend on experiential models or intermittent compensation. However, the effects of process parameters on 3D SSMEDM have not been reported up until now. In this study, the emphasis is laid on the effects of pulse duration, peak current, machining polarity, track style, track overlap, and scanning velocity on the 3D SSMEDM performances of machining efficiency, processing status, and surface accuracy. A series of experiments were carried out by machining a micro-rectangle cavity (900 μm×600 μm) on doped silicon. The experimental results were obtained as follows. Peak current plays a main role in machining efficiency and surface accuracy. Pulse duration affects obviously the stability of discharge state. The material removal rate of cathode processing is about 3/5 of that of anode processing. Compared with direction-parallel path, contour-parallel path is better in counteracting the lateral wear of tool electrode end. Scanning velocity should be selected moderately to avoid electric arc and short. Track overlap should be slightly less than the radius of tool electrode. In addition, a typical 3D micro structure of eye shape was machined based on the optimized process parameters. These results are beneficial to improve machining stability, accuracy, and efficiency in 3D SSMEDM.

Micro Electrical Discharge Machining Deposition in Air for Fabrication of Micro Spiral Structures

Micro electrical discharge machining（EDM） deposition process is a new micro machining method for fabrication of metal micro structures. In this process, the high level of tool electrode wear is used to achieve the metal material deposition. Up to now, the studies of micro EDM deposition process focused mainly on the researches of deposition process, namely the effects of discharge parameters in deposition process on the deposition rate or deposition quality. The research of the formation of micro structures with different discharge energy density still lacks. With proper conditions and only by the z-axis feeding in vertical direction, a novel shape of micro spiral structure can be deposited, with 0.11 mm in wire diameter, 0.20 mm in outside diameter, and 3.78 mm in height. Then some new deposition strategies including angular deposition and against the gravity deposition were also successful. In order to find the forming mechanism of the spiral structures, the numerical simulation of the transient temperature distribution on the discharge point was conducted by using the finite-element method（FEM）. The results show that there are two major factors lead to the forming of the spiral structures. One is the different material removal form of tool electrode according with the discharge energy density, the other is the influenced degree of the movement of the removed material particles in the discharge gap. The more the energy density in single discharge is, the smaller the mass of the removed material particles is, and the easier the movements of which will be changed to form an order tendency. The fine texture characteristics of the deposited micro spiral structures were analyzed by the energy spectrum analysis and the metallographic analysis. It shows that the components of the deposited material are almost the same as those of the tool electrode. Moreover the deposited material has the brass metallic luster in the longitudinal profile and has compact bonding with the base material. This research is useful to understand the micro-process of micro EDM deposition better and helpful to increase the controllability of the new EDM method for fabrication of micro structures.

Characteristic evaluation of Al_2O_3/CNTs hybrid materials for micro-electrical discharge machining

The characteristic evaluation of aluminum oxide (Al2O3)/carbon nanotubes (CNTs) hybrid composites for micro-electrical discharge machining (EDM) was described. Alumina matrix composites reinforced with CNTs were fabricated by a catalytic chemical vapor deposition method. Al2O3 composites with different CNT concentrations were synthesized. The electrical characteristic of Al2O3/CNTs composites was examined. These composites were machined by the EDM process according to the various EDM parameters, and the characteristics of machining were analyzed using field emission scanning electron microscope (FESEM). The electrical conductivity has a increasing tendency as the CNTs content is increased and has a critical point at 5% Al2O3 (volume fraction). In the machining accuracy, many tangles of CNT in Al2O3/CNTs composites cause violent spark. Thus, it causes the poor dimensional accuracy and circularity. The results show that conductivity of the materials and homogeneous distribution of CNTs in the matrix are important factors for micro-EDM of Al2O3/CNTs hybrid composites.

Micro electrical discharge machining of small hole in TC4 alloy

Aiming at machining deeply small holes in TC4 alloy,a series of experiments were carried out on a self-developed multi-axis micro electrical discharge machining(micro-EDM)machine tool.To improve machining efficiency and decrease relative wear of electrode in machining deeply small hole in TC4 alloy,many factors in micro-EDM,such as polarity,electrical parameters and supplying ways of working fluid were studied.Experimental results show that positive polarity machining is far superior to negative polarity machining;it is more optimal when open-circuit voltage,pulse width and pulse interval are 130 V,5μs and 15μs respectively on the self developed multi-axis micro-EDM machine tool;when flushing method is applied in micro-EDM,the machining efficiency is higher and relative wear of electrode is smaller.

Comparative study on discharge conditions in micro-hole electrical discharge machining of tungsten carbide (WC-Co) material

WC-Co is used widely in die and mold industries due to its unique combination of hardness, strength and wear-resistance. For machining difficult-to-cut materials, such as tungsten carbide, micro-electrical discharge machining(EDM) is one of the most effective methods for making holes because the hardness is not a dominant parameter in EDM. This paper describes the characteristics of the discharge conditions for micro-hole EDM of tungsten carbide with a WC grain size of 0.5 μm and Co content of 12%. The EDM process was conducted by varying the condenser and resistance values. A R-C discharge EDM device using arc erosion for micro-hole machining was suggested. Furthermore, the characteristics of the developed micro-EDM were analyzed in terms of the electro-optical observation using an oscilloscope and field emission scanning electron microscope.

Material properties and machining performance of hybrid Ti_2AlN bulk material for micro electrical discharge machining

Mn+1AXn(MAX) phases are a family of nanolaminated compounds that possess unique combination of typical ceramic properties and typical metallic properties.As a member of MAX phase,Ti2 AlN bulk materials are attractive for some high-temperature applications.The synthesis,characteristics and machining performance of hybrid Ti2 AlN bulk materials were focused on in this work.The bulk samples mainly consisting of Ti2 AlN MAX phase with density close to theoretic one were synthesized by a spark plasma sintering method.Scanning electron microscopy results indicate homogenous distribution of Ti2 AlN grains in the samples.Micro-hardness values are almost constant under different loads (6-6.5 GPa).A machining test was carried out to compare the effect of material properties on micro-electrical discharge machining (micro-EDM) performance for Ti2 AlN bulk samples and Ti6242 alloy.The machining performance of the Ti2 AlN sample is better than that of the Ti6242 alloy.The inherent mechanism was discussed by considering their electrical and thermal conductivity.

Scale Effects and a Method for Similarity Evaluation in Micro Electrical Discharge Machining

Electrical discharge machining（EDM） is a promising non-traditional micro machining technology that offers a vast array of applications in the manufacturing industry. However, scale effects occur when machining at the micro-scale, which can make it difficult to predict and optimize the machining performances of micro EDM. A new concept of ＂scale effects＂ in micro EDM is proposed, the scale effects can reveal the difference in machining performances between micro EDM and conventional macro EDM. Similarity theory is presented to evaluate the scale effects in micro EDM. Single factor experiments are conducted and the experimental results are analyzed by discussing the similarity difference and similarity precision. The results show that the output results of scale effects in micro EDM do not change linearly with discharge parameters. The values of similarity precision of machining time significantly increase when scaling-down the capacitance or open-circuit voltage. It is indicated that the lower the scale of the discharge parameter, the greater the deviation of non-geometrical similarity degree over geometrical similarity degree, which means that the micro EDM system with lower discharge energy experiences more scale effects. The largest similarity difference is 5.34 while the largest similarity precision can be as high as 114.03. It is suggested that the similarity precision is more effective in reflecting the scale effects and their fluctuation than similarity difference. Consequently, similarity theory is suitable for evaluating the scale effects in micro EDM. This proposed research offers engineering values for optimizing the machining parameters and improving the machining performances of micro EDM.

Development of micro wire electrical discharge machining platform and its application

A machining platform of micro wire electrical discharge machining (MWEDM) was developed. The key technology of MWEDM mainly includes granite basement, micro energy pulse generator, detection and servo control system, constant tension winding system and V-block guide wire mechanism. Utilizing micro wire electrode with 30μm in diameter, the MWEDM can machine the micro slot with the minimum size of 38μm wide, and the surface roughness is smaller than 0.1μm, the machining precision is less than 0.5μm, the white layer is no more than 2μm with main cut. All kinds of complex micro parts, such as micro gear, micro bearing bracket and micro shaped holes, can also be machined by using this platform.

Fabrication of Micro Structures by Ultrashort Voltage Pulse Electrical Discharge Machining

The machining of small holes and array holes has been a difficult problem in machining field. Tiny hole is widely used in mechanical field, for instance, fuel injection nozzles, spinneret holes for synthetic fibers and wire drawing dies. This paper investigated the application of EDM (electrical discharge machining) to the fabrication of micro structures. There are obvious limitations in the process of micro-electrical discharge machining, such as electrode wear, unstable discharge condition and low machining efficiency. The effects of EDM parameters were investigated, such as voltage, pulse frequency, and frequency of ultrasonic vibration applied to electrode. Micro holes were machined with Pt electrode made by focused-ion-beam chemical vapor deposition (FIB-CVD) and Cu electrode made by wire-electrode cutting. The comparison experiments between EDM and ECM (electrochemical machining) indicated that the processing of ECM has serious stray current corrosion and poor machining precision. Moreover, the workpiece vibration was firstly proposed to be utilized in the micro-electrical discharge machining. It can be concluded that maximum machine could be obtained under the amplitude ratio of 76%, which was an appropriate parameter.

RESEARCH OF MICRO ELECTRO DISCHARGE MACHINING EQUIPMENT AND PROCESS TECHNIQUES

Micro electro discharge machining (micro EDM) is a feasible way tomanufacture micro structures and has potential application in advanced industrial fields. For therealization of micro EDM, it is necessary to pay careful attention to its equipment design and thedevelopment of process techniques. The present status of research and development of micro EDMequipment and process techniques is overviewed. A micro electro discharge machine incorporated withan inchworm type of micro feed mechanism is introduced, and a micro electro discharge machine fordrilling micro holes suitable to industrial use is also introduced. Some of the machiningexperiments carried out on the micro EDM prototypes are shown and the feasibility of the micro EDMtechnology to practical use is discussed.

脉冲参数主动匹配式micro-EDM脉冲电源

为了提高微细电火花加工(micro-EDM)效率,设计了一种脉冲参数主动匹配式micro-EDM脉冲电源.采用等能量加工的方法,对不同的脉冲匹配参数进行加工效率对比实验,设计了脉冲参数主动匹配式脉冲电源的结构、功能和控制策略,并进行了加工实验验证.结果表明:选定合适的脉宽和脉间参数,使极间电容单次充电和单次放电,可获得最高的加工效率;该电源脉冲参数可根据极间电压和极间电容的大小自动调整;进行微小孔加工,加工连续性较好,加工效率和加工质量较高.利用该电源可进行微细加工,加工效率较传统电源有显著的提升,并能保证较高的加工质量.

主动匹配式micro-EDM脉冲电源设计与实验

为了提高微细电火花加工(micro-EDM)效率,设计了一种脉冲参数主动匹配式micro-EDM脉冲电源。采用主动匹配式脉冲发生电路实现脉冲参数根据极间电容充放电情况自动匹配,通过实验,对电源的加工效率、加工质量和低电压加工情况进行了分析。结果表明:采用该电源可以实现在单个脉冲周期内,极间电容单次充电、单次放电;与常规晶体管脉冲电源比较,该电源可以提高加工效率,加工表面变质层无裂纹、凹坑均匀、加工质量较高;可以实现24 V低电压加工,加工后的微孔圆度和精度较高。该电源具有提高微细电火花加工效率,保证较高加工质量的作用。

Surface Modification Process by Electrical Discharge Machining with Ti Powder Green Compact Electrode

This paper describes a new method of surface modification by Electrical Discharge Machining (EDM). By using ordinary EDM machine tool and kerosene fluid, a hard ceramic layer can be created on the workpiece surface with Ti or other compressed powder electrode in a certain condition. This new revolutionary method is called Electrical Discharge Coating (EDC). The process of EDC begins with electrode wear during EDM,then a kind of hard carbide is created through the thermal and chemical reaction between the worn electrode material and the carbon particle decomposed from kerosene fluid under high temperature. The carbide is piled up on a workpiece quickly and becomes a hard layer of ceramic about 20 μm in several minutes. This paper studies the principle and process of EDC systemically by using Ti powder green compact electrode. In order to obtain a layer of compact ceramic film, it is very important to select proper electric pulse parameters, such as pulse width, pulse interval, peak current. Meantime, the electrode materials and its forming mode will effect the machining surface quality greatly. This paper presents a series of experiment results to study the EDC process by adopt different technology parameters. Experiments and analyses show that a compact TiC ceramic layer can be created on the surface of metal workpiece. The hardness of ceramic layer is more 3 times higher than the base body, and the hardness changes gradiently from surface to base body. The method will have a great future because many materials can be easily added to the electrode and then be coated on the workpiece surface. Gearing the parameters ceramic can be created with different thickness. The switch between deposition and removal process is carried out easily by changing the polarity, thus the gear to the thickness and shape of the composite ceramic layer is carried out easily. This kind of composite ceramic layer will be used to deal with the surface of the cutting tools or molds possibly, in order to lengthen their life. It also can be found wide application in the fields of surface repairing and strengthening of the ship or aircraft.

Machining performance on hybrid process of abrasive jet machining and electrical discharge machining

To develop a hybrid process of abrasive jet machining (AJM) and electrical discharge machining (EDM),the effects of the hybrid process parameters on machining performance were comprehensively investigated to confirm the benefits of this hybrid process.The appropriate abrasives delivered by high speed gas media were incorporated with an EDM in gas system to construct the hybrid process of AJM and EDM,and then the high speed abrasives could impinge on the machined surface to remove the recast layer caused by EDM process to increase the efficiency of material removal and reduce the surface roughness.In this study,the benefits of the hybrid process were determined as the machining performance of hybrid process was compared with that of the EDM in gas system.The main process parameters were varied to explore their effects on material removal rate,surface roughness and surface integrities.The experimental results show that the hybrid process of AJM and EDM can enhance the machining efficiency and improve the surface quality.Consequently,the developed hybrid process can fit the requirements of modern manufacturing applications.

Parameter optimization model in electrical discharge machining process

Electrical discharge machining (EDM) process, at present is still an experience process, wherein selected parameters are often far from the optimum, and at the same time selecting optimization parameters is costly and time consuming. In this paper, artificial neural network (ANN) and genetic algorithm (GA) are used together to establish the parameter optimization model. An ANN model which adapts Levenberg-Marquardt algorithm has been set up to represent the relationship between material removal rate (MRR) and input parameters, and GA is used to optimize parameters, so that optimization results are obtained. The model is shown to be effective, and MRR is improved using optimized machining parameters.

Surface performance of workpieces processed by electrical discharge machining in gas

The surface performance of workpieces processed by electrical discharge machining in gas(dry EDM)was studied in this paper.Firstly,the composition,micro hardness and recast layer of electrical discharge machined(EDMed)surface of 45 carbon steels in air were investigated through different test analysis methods.The results show that the workpiece surface EDMed in air contains a certain quantity of oxide,and oxidation occurs on the workpiece surface.Compared with the surface of workpieces processed in kerosene,fewer cracks exist on the dry EDMed workpiece surface,and the surface recast layer is thinner than that obtained by conventional EDM.The micro hardness of workpieces machined by dry EDM method is lower than that machined in kerosene,and higher than that of the matrix.In addition,experiments were conducted on the surface wear resistance of workpieces processed in air and kerosene using copper electrode and titanium alloy electrode.The results indicate that the surface wear resistance of workpieces processed in air can be improved,and it is related with tool material and dielectric.

Modelling effect of magnetic field on material removal in dry electrical discharge machining

One of the reasons for increased material removal rate in magnetic field assisted dry electrical discharge machining （EDM） is confinement of plasma due to Lorentz forces. This paper presents a mathematical model to evaluate the effect of external magnetic field on crater depth and diameter in single- and multiple-discharge EDM process. The model incorporates three main effects of the magnetic field, which include plasma confinement, mean free path reduction and pulsating magnetic field effects. Upon the application of an external magnetic field, Lorentz forces that are developed across the plasma column confine the plasma column. Also, the magnetic field reduces the mean free path of electrons due to an increase in the plasma pressure and cycloidal path taken by the electrons between the electrodes. As the mean free path of electrons reduces, more ionization occurs in plasma column and eventually an increase in the current density at the inter-electrode gap occurs. The model results for crater depth and its diameter in single discharge dry EDM process show an error of 9%-10% over the respective experimental values.

Research of micro-EDM and its applications

A Micro Electrical Discharge Machining (MEDM) equipment was developed in this paper,on which the CNC interpolation for 3-axis linkage movement could be realized easily. By this micro-EDM equipment,the fabrication process of microelectrode,micro hole,silicon wafer and complex microstructure was discussed. The process rules of machining efficiency and the relative electrode wear rate as well as the machining mechanism and performance of silicon micro-EDM were also researched. Machining experiments showed that the microelectrode diameter as small as 6 μm and the micro hole with minimum size of 10 μm could be obtained steadily,and the maximum aspect ratios of microelectrode and micro hole were over 25 and 10 respectively. And silicon micro-EDM experiments showed that the micro beam with the aspect ratios over 15 could be obtained easily. And a micro beam with minimum size of 23 μm width on a silicon wafer with 420 μm thickness was achieved. At last,the microstructure machining technology for micro-EDM was also discussed. And a micro-facial sculpture with free space curved surface and size of 1 mm×0.3 mm×0.18 mm was also machined successfully.