The mode coupling is a major factor to affect the precision of the micro electromechanical systems（MEMS） gyroscope. Currently, many MEMS gyroscopes with separate oscillation modes for drive and detection have been d...The mode coupling is a major factor to affect the precision of the micro electromechanical systems（MEMS） gyroscope. Currently, many MEMS gyroscopes with separate oscillation modes for drive and detection have been developed to decrease the mode coupling, but the gyroscope accuracy can not satisfy the high-precision demand well. Therefore, high performance decoupled MEMS gyroscopes is still a hot topic at present. An innovative design scheme for a MEMS gyroscope is designed, and in this design, the inertial mass is divided into three parts including the inner mass, the outer mass and the main frame mass. The masses are supported and separated by a set of mutually orthogonal beams to decouple their movements. Moreover, the design is modelled by multi-port-element network（MuPEN） method and the simulation results show that the mode coupling of the gyroscope between driving and sensing mode was eliminated effectively. Furthermore, we proposed a new silicon-on-insulator（SOI） process to fabricate the gyroscope. The scale factor of the fabricated gyroscope is 8.9 mV/（（~）os） and the quality factor（Q-factor） is as high as 600 at atmosphere pressure, and then, the resonant frequency, scale factor and bias drift has been test. Process and test results show that the proposed MEMS gyroscope are effective for decrease mode coupling, furthermore, it can achieve a high performance at atmosphere pressure. Furthermore, the MEMS gyroscope can achieve a high performance at atmosphere pressure. The research can be taken as good advice for the design and fabrication of MEMS gyroscope, meanwhile, it also provides technical support for speeding up of MEMS gyroscope industrialization.展开更多
In this paper, we introduce a z-axis quartz gyroscope using a double-H tuning fork, which has a high sensitivity. However, it also causes a large mechanical quadrature error. The laser trimming method is used to suppr...In this paper, we introduce a z-axis quartz gyroscope using a double-H tuning fork, which has a high sensitivity. However, it also causes a large mechanical quadrature error. The laser trimming method is used to suppress this error at quartz level. The trimming law is obtained through the finite element method （FEM）. A femtosecond laser processing system is used to trim the gold balancing masses on the beams, and experimental results are basically consistent with the simulated ones. The mechanical quadrature error is suppressed by 96%, from 26.3° s-1 to 1.1° s-1. Nonlinearity changes from 1.48% to 0.30%, angular random walk （ARW） is reduced from 2.19° h-1/2 to 1.42° h-1/2, and bias instability is improved by a factor of 7.7, from 197.6° h-1 to 25.4° h-1.展开更多
Aiming at the problems of low measurement accuracy,uncertainty and nonlinearity of random noise of the micro electro mechanical system(MEMS)gyroscope,a gyroscope noise estimation and filtering method is proposed,which...Aiming at the problems of low measurement accuracy,uncertainty and nonlinearity of random noise of the micro electro mechanical system(MEMS)gyroscope,a gyroscope noise estimation and filtering method is proposed,which combines expectation maximum(EM)with maximum a posterior(MAP)to form an adpative unscented Kalman filter(UKF),called EMMAP-UKF.According to the MAP estimation principle,a suboptimal unbiased MAP noise statistical estimation model is constructed.Then,EM algorithm is introduced to transform the noise estimation problem into the mathematical expectation maximization problem,which can dynamically adjust the variance of the observed noise.Finally,the estimation and filtering of gyroscope random drift error can be realized.The performance of the gyro noise filtering method is evaluated by Allan variance,and the effectiveness of the method is verified by hardware-in-the-loop simulation.展开更多
A novel on-line north-seeking method based on a three-axis micro-electro-mechanical system(MEMS)gyroscope is designed.This system processes data by using a Kalman filter to calibrate the installation error of the thre...A novel on-line north-seeking method based on a three-axis micro-electro-mechanical system(MEMS)gyroscope is designed.This system processes data by using a Kalman filter to calibrate the installation error of the three-axis MEMS gyroscope in complex environment.The attitude angle updating for quaternion,based on which the attitude instrument will be rotated in real-time and the true north will be found.Our experimental platform constitutes the dual-axis electric rotary table and the attitude instrument,which is developed independently by our scientific research team.The experimental results show that the accuracy of north-seeking is higher than 1°,while the maximum root mean square error and the maximum mean absolute error are 0.906 7 and 0.910 0,respectively.The accuracy of north-seeking is much higher than the traditional method.展开更多
基金supported by National Hi-tech Research and Development Program of China (863 Program, Grant No. 2009AA04Z320)Xi’an Municipal Applied Materials Innovation Fund of China (Grant No. XA-AM-200801)
文摘The mode coupling is a major factor to affect the precision of the micro electromechanical systems（MEMS） gyroscope. Currently, many MEMS gyroscopes with separate oscillation modes for drive and detection have been developed to decrease the mode coupling, but the gyroscope accuracy can not satisfy the high-precision demand well. Therefore, high performance decoupled MEMS gyroscopes is still a hot topic at present. An innovative design scheme for a MEMS gyroscope is designed, and in this design, the inertial mass is divided into three parts including the inner mass, the outer mass and the main frame mass. The masses are supported and separated by a set of mutually orthogonal beams to decouple their movements. Moreover, the design is modelled by multi-port-element network（MuPEN） method and the simulation results show that the mode coupling of the gyroscope between driving and sensing mode was eliminated effectively. Furthermore, we proposed a new silicon-on-insulator（SOI） process to fabricate the gyroscope. The scale factor of the fabricated gyroscope is 8.9 mV/（（~）os） and the quality factor（Q-factor） is as high as 600 at atmosphere pressure, and then, the resonant frequency, scale factor and bias drift has been test. Process and test results show that the proposed MEMS gyroscope are effective for decrease mode coupling, furthermore, it can achieve a high performance at atmosphere pressure. Furthermore, the MEMS gyroscope can achieve a high performance at atmosphere pressure. The research can be taken as good advice for the design and fabrication of MEMS gyroscope, meanwhile, it also provides technical support for speeding up of MEMS gyroscope industrialization.
基金Project supported by the National Natural Science Foundation of China(Grant No.61027007)
文摘In this paper, we introduce a z-axis quartz gyroscope using a double-H tuning fork, which has a high sensitivity. However, it also causes a large mechanical quadrature error. The laser trimming method is used to suppress this error at quartz level. The trimming law is obtained through the finite element method （FEM）. A femtosecond laser processing system is used to trim the gold balancing masses on the beams, and experimental results are basically consistent with the simulated ones. The mechanical quadrature error is suppressed by 96%, from 26.3° s-1 to 1.1° s-1. Nonlinearity changes from 1.48% to 0.30%, angular random walk （ARW） is reduced from 2.19° h-1/2 to 1.42° h-1/2, and bias instability is improved by a factor of 7.7, from 197.6° h-1 to 25.4° h-1.
基金National Natural Science Foundation of China(No.61863024)Scientific Research Projects of Higher Institutions of Gansu Province(No.2018C-11)+1 种基金Natural Science Foundation of Gansu Province(No.18JR3RA107)Science and Technology Program of Gansu Province(No.18CX3ZA004)。
文摘Aiming at the problems of low measurement accuracy,uncertainty and nonlinearity of random noise of the micro electro mechanical system(MEMS)gyroscope,a gyroscope noise estimation and filtering method is proposed,which combines expectation maximum(EM)with maximum a posterior(MAP)to form an adpative unscented Kalman filter(UKF),called EMMAP-UKF.According to the MAP estimation principle,a suboptimal unbiased MAP noise statistical estimation model is constructed.Then,EM algorithm is introduced to transform the noise estimation problem into the mathematical expectation maximization problem,which can dynamically adjust the variance of the observed noise.Finally,the estimation and filtering of gyroscope random drift error can be realized.The performance of the gyro noise filtering method is evaluated by Allan variance,and the effectiveness of the method is verified by hardware-in-the-loop simulation.
基金Supported by the Chongqing International Science and Technology Cooperation Base Project(cstc2014gjhz40001)the University Achievement Transformation Project of Chongqing Science and Technology Commission(KJZH17115)+3 种基金the Basic Research Project of Chongqing Science and Technology Commission(cstc2015jcyjBX0068,cstc2014jcyjA1350,cstc2015jcyjB0360)the Dr.Start-up Fund of Chongqing University of Posts and Telecommunications(A2015-40,A2016-76)the National Natural Science Foundation of Chongqing University of Posts and Telecommunications(A2015-49)the Scientific and Technological Research Program of Chongqing Municipal Education Commission(KJ1704104,KJ1704091)
文摘A novel on-line north-seeking method based on a three-axis micro-electro-mechanical system(MEMS)gyroscope is designed.This system processes data by using a Kalman filter to calibrate the installation error of the three-axis MEMS gyroscope in complex environment.The attitude angle updating for quaternion,based on which the attitude instrument will be rotated in real-time and the true north will be found.Our experimental platform constitutes the dual-axis electric rotary table and the attitude instrument,which is developed independently by our scientific research team.The experimental results show that the accuracy of north-seeking is higher than 1°,while the maximum root mean square error and the maximum mean absolute error are 0.906 7 and 0.910 0,respectively.The accuracy of north-seeking is much higher than the traditional method.
