A differential capacitance detection circuit aiming at detection of rotating angle in a novel levitation structure is presented. To ensure the low non-linearity and high resolution, noise analysis and non-linearity si...A differential capacitance detection circuit aiming at detection of rotating angle in a novel levitation structure is presented. To ensure the low non-linearity and high resolution, noise analysis and non-linearity simulation are conducted. In the capacitance interface, an integral charge amplifier is adopted as a front end amplifier to reduce the parasitic capacitance caused by connecting wire. For the novel differential capacitance bridge with a coupling capacitor, the noise floor and non-linearity of the detection circuit are analyzed, and the results show that the detecting circuit is capable of realizing angle detection with high angular resolution and relative low non-linearity. With a specially designed printed circuit board, the circuit is simulated by PSpice. The practical experiment shows that the detection board can achieve angular resolution as high as 0.04° with a non-linearity error 2.3%.展开更多
Based on three kinds of dynamic test of MEMS, a dynamic system for the vibration test of micro machined gyroscope based on high speed photography is introduced. Firstly, the architecture of the system hardware is intr...Based on three kinds of dynamic test of MEMS, a dynamic system for the vibration test of micro machined gyroscope based on high speed photography is introduced. Firstly, the architecture of the system hardware is introduced. Secondly, the image tracking performance is compared by the test using the template matching algorithm, the mean shift algorithm and the SURF algorithm. The vibration curve shows that high speed photograph combined with SURF algorithm is faster, more ac- curate, and more suitable for the vibration test of micro machined gyroscope. After the frequency a- nalysis and related interpolation, more characteristics of micro gyroscope can be obtained.展开更多
This paper reports the experimental results of silica on a silicon ring resonator in a resonator micro optic gyroscope based on the frequency modulation spectroscopy technique by our research group. The ring resonator...This paper reports the experimental results of silica on a silicon ring resonator in a resonator micro optic gyroscope based on the frequency modulation spectroscopy technique by our research group. The ring resonator is composed of a 4 cm diameter silica waveguide. By testing at D1550 nm, the FSR, FWHM and the depth of resonance are 3122 MHz, 103.07 MHz and 0.8 respectively. By using a polarization controller, the resonance curve under the TM mode can be inhibited. The depth of resonance increased from 0.8 to 0.8913, namely the finesse increase from 30.33 to 33.05. In the experiments, there is an acoustic-optical frequency shifter（AOFS） in each light loop. We lock the lasing frequency at the resonance frequency of the silica waveguide ring resonator for the counterclockwise lightwave; the frequency difference between the driving frequencies of the two AOFS is equivalent to the Sagnac frequency difference caused by gyro rotation. Thus, the gyro output is observed. The slope of the linear fit is about 0.330 m V/（°/s） based on the 900 to 900 k Hz equivalent frequency and the gyro dynamic range is ±2.0×10^3rad/s.展开更多
基金Foundation item： National Natural Science Foundation of China （60402003） The Key National Basic Research and Development Program of China （2002AA745120）
文摘A differential capacitance detection circuit aiming at detection of rotating angle in a novel levitation structure is presented. To ensure the low non-linearity and high resolution, noise analysis and non-linearity simulation are conducted. In the capacitance interface, an integral charge amplifier is adopted as a front end amplifier to reduce the parasitic capacitance caused by connecting wire. For the novel differential capacitance bridge with a coupling capacitor, the noise floor and non-linearity of the detection circuit are analyzed, and the results show that the detecting circuit is capable of realizing angle detection with high angular resolution and relative low non-linearity. With a specially designed printed circuit board, the circuit is simulated by PSpice. The practical experiment shows that the detection board can achieve angular resolution as high as 0.04° with a non-linearity error 2.3%.
文摘Based on three kinds of dynamic test of MEMS, a dynamic system for the vibration test of micro machined gyroscope based on high speed photography is introduced. Firstly, the architecture of the system hardware is introduced. Secondly, the image tracking performance is compared by the test using the template matching algorithm, the mean shift algorithm and the SURF algorithm. The vibration curve shows that high speed photograph combined with SURF algorithm is faster, more ac- curate, and more suitable for the vibration test of micro machined gyroscope. After the frequency a- nalysis and related interpolation, more characteristics of micro gyroscope can be obtained.
文摘This paper reports the experimental results of silica on a silicon ring resonator in a resonator micro optic gyroscope based on the frequency modulation spectroscopy technique by our research group. The ring resonator is composed of a 4 cm diameter silica waveguide. By testing at D1550 nm, the FSR, FWHM and the depth of resonance are 3122 MHz, 103.07 MHz and 0.8 respectively. By using a polarization controller, the resonance curve under the TM mode can be inhibited. The depth of resonance increased from 0.8 to 0.8913, namely the finesse increase from 30.33 to 33.05. In the experiments, there is an acoustic-optical frequency shifter（AOFS） in each light loop. We lock the lasing frequency at the resonance frequency of the silica waveguide ring resonator for the counterclockwise lightwave; the frequency difference between the driving frequencies of the two AOFS is equivalent to the Sagnac frequency difference caused by gyro rotation. Thus, the gyro output is observed. The slope of the linear fit is about 0.330 m V/（°/s） based on the 900 to 900 k Hz equivalent frequency and the gyro dynamic range is ±2.0×10^3rad/s.
