Analytical modeling of static behavior of electrostatically actuatednano/micromirrors considering van der Waals forces

In this paper, the effect of van der Waals （vdW） force on the pull-in behavior of electrostatically actuated nano/micromirrors is investigated. First, the minimum po- tential energy principle is utilized to find the equation gov- erning the static behavior of nano/micromirror under electro- static and vdW forces. Then, the stability of static equilib- rium points is analyzed using the energy method. It is found that when there exist two equilibrium points, the smaller one is stable and the larger one is unstable. The effects of dif- ferent design parameters on the mirror＇s pull-in angle and pull-in voltage are studied and it is found that vdW force can considerably reduce the stability limit of the mirror. At the end, the nonlinear equilibrium equation is solved numer- ically and analytically using homotopy perturbation method （HPM）. It is observed that a sixth order perturbation approx- imation can precisely model the mirror＇s behavior. The re- suits of this paper can be used for stable operation design and safe fabrication of torsional nano/micro actuators.

Research on a Diamond Tip Wear Mechanism in Atomic Force Microscope-based Micro/nano-machining

The object is to investigate the wear of an atomic force microscope (AFM) diamond tip when conducting micro/nano machining on single crystal silicon surface. The experimental research and theoretical analysis were carried out on the worn tip in terms of wear rate, wear mechanism and the effect of the tip wear on micro machining process. The wear rate was calculated as 1.7(10～10mm 3/(N·m) by using a theoretical model combined with the experimental results. Through an integration of an AFM observation on the worn tip features with the FEM simulation of the stress distribution, in addition to the unit cutting force calculation on the AFM diamond tip, the wear mechanism of the AFM diamond tip was concluded as mainly chemical wear, and the wear process was also elaborated as well.

MICRO/NANO-MACHINING ON SILICON SURFACE WITH A MODIFIED ATOMIC FORCE MICROSCOPE

To understand the deformation and removal mechanism of material on nano-scale at ultralow loads,a systemic study on AFM micro/nano-machining on single crystal ailicon is conducted. The results indicate that AFM nano- machining has a precisely dimensional controllability and a good surface quality on nanometer scale.A SEM is adopted to observe nano-machined region and chips,the results indicate that the material removal mechanisms change with the applied normal load. An XPS is used to analyze the changes of chemical composition inside and outside the nano-machined region respectively.The nano-indentation which is conducted with the same AFM diamond tip on the machined region shows a big discrepancy compared with that on the macro-scale. The calculated results show higher nano-hardness and elastic modulus than normal values .This phenomenon on be regarded as the indentation size effect(ISE).

Shape gradient and classical gradient of curvatures:driving forces on micro/nano curved surfaces

Recent experiments and molecule dynamics simulations have shown that adhesion droplets on conical surfaces may move spontaneously and directionally. Besides, this spontaneous and directional motion is independent of the hydrophilicity and hydrophobicity of the conical surfaces. Aimed at this important phenomenon, a gen- eral theoretical explanation is provided from the viewpoint of the geometrization of micro/nano mechanics on curved surfaces. In the extrinsic mechanics on micro/nano soft curved surfaces, we disclose that the curvatures and their extrinsic gradients form the driving forces on the curved spaces. This paper focuses on the intrinsic mechanics on micro/nano hard curved surfaces and the experiment on the spontaneous and directional motion. Based on the pair potentials of particles, the interactions between an isolated particle and a micro/nano hard curved surface are studied, and the geometric foundation for the interactions between the particle and the hard curved surface is analyzed. The following results are derived： （a） Whatever the exponents in the pair potentials may be, the potential of the particle/hard curved surface is always of the unified curvature form, i.e., the potential is always a unified function of the mean curvature and the Gaussian curvature of the curved surface. （b） On the basis of the curvature-based potential, the geometrization of the micro/nano mechanics on hard curved surfaces may be realized. （c） Similar to the extrinsic mechanics on micro/nano soft curved surfaces, in the intrinsic mechanics on micro/nano hard curved surfaces, the curvatures and their intrinsic gradi- ents form the driving forces on the curved spaces. In other words, either on soft curved surfaces or hard curved surfaces and either in the extrinsic mechanics or the intrinsic mechanics, the curvatures and their gradients are all essential factors for the driving forces on the curved spaces. （d） The direction of the driving force induced by the hard curved surface is independent of the hydrophilieity and hydrophobicity of the curved surface, explaining the experimental phenomenon of the spontaneous and directional motion.

Development of the Atomic Force Microscopy Research Technique for the Nanostructures on the Vertical Edge of Thin Insulating Film

In this work, a development of a method of a thin insulating film vertical edge visualization of metal-insulator-metal （MIM） memory cells with atomic force microscopy （AFM） using a modified Omicron UHV AFM/STM microscope was performed. This included a development of a technique of the AFM visualization of segments of a vertical edge of thin insulator SiO2 film structures on a conductive substrate, a comparison of AFM topography and current profilograms for the edge profiles, and an Omicron microscope custom upgrade. The latter allowed us to perform the AFM probe positioning to any specific area of the sample in the scanning plane by two coordinates with an order of precision of 1 micrometer. The method is illustrated with the experimental results of AFM investigations of the special MIM structures with comb-type topology, and of the cells of functioning memory matrices with 20 nm thin silicon dioxide film open edge perimeter and TiN lower electrode, including topography/current profilograms. As a conclusion, our ongoing work on the AFM visualization of a complete perimeter of a SiO2 open edge of memory cells with a special new topology with a goal to visualize conductive phase nanoparticles during switching processes is briefly overviewed.

Forced vibration analysis of nano-composite rotating pressurized microbeam reinforced by CNTs based on MCST with temperature-variable material properties

In this study, free and forced vibration analysis of nano-composite rotating pressurized microbeam reinforced by carbon nanotubes （CNTs） under magnetic field based on modify couple stress theory （MCST） with temperature-variable material propertiesis presented. Also, the boundary conditions at two ends of nano-composite rotating pressurized microbeam reinforced by CNTs are considered as simply supported. The governing equations are obtained based on the Hamilton＇s principle and then computed these equations by using Navier＇s solution. The magnetic field is inserted in the thickness direction of the nano-composite microbeam. The effects of various parameters such as angular velocity, temperature changes, and pressure between of the inside and outside, the magnetic field, material length scale parameter, and volume fraction of nanocomposite microbeam on the natural frequency and response systemare studied. The results show that with increasing volume fraction of nano-composite microbeam, thickness, material length scale parameter, and magnetic fields, the natural frequency increases. The results of this research can be used for optimization of micro-structures and manufacturing sensors, displacement fluid, and drug delivery.

Improved social force model based on exit selection for microscopic pedestrian simulation in subway station

An improved social force model based on exit selection is proposed to simulate pedestrians' microscopic behaviors in subway station. The modification lies in considering three factors of spatial distance, occupant density and exit width. In addition, the problem of pedestrians selecting exit frequently is solved as follows: not changing to other exits in the affected area of one exit, using the probability of remaining preceding exit and invoking function of exit selection after several simulation steps. Pedestrians in subway station have some special characteristics, such as explicit destinations, different familiarities with subway station. Finally, Beijing Zoo Subway Station is taken as an example and the feasibility of the model results is verified through the comparison of the actual data and simulation data. The simulation results show that the improved model can depict the microscopic behaviors of pedestrians in subway station.

On-Chip Micro Temperature Controllers Based on Freestanding Thermoelectric Nano Films for Low-Power Electronics

Multidimensional integration and multifunctional com-ponent assembly have been greatly explored in recent years to extend Moore’s Law of modern microelectronics.However,this inevitably exac-erbates the inhomogeneity of temperature distribution in microsystems,making precise temperature control for electronic components extremely challenging.Herein,we report an on-chip micro temperature controller including a pair of thermoelectric legs with a total area of 50×50μm^(2),which are fabricated from dense and flat freestanding Bi2Te3-based ther-moelectric nano films deposited on a newly developed nano graphene oxide membrane substrate.Its tunable equivalent thermal resistance is controlled by electrical currents to achieve energy-efficient temperature control for low-power electronics.A large cooling temperature difference of 44.5 K at 380 K is achieved with a power consumption of only 445μW,resulting in an ultrahigh temperature control capability over 100 K mW^(-1).Moreover,an ultra-fast cooling rate exceeding 2000 K s^(-1) and excellent reliability of up to 1 million cycles are observed.Our proposed on-chip temperature controller is expected to enable further miniaturization and multifunctional integration on a single chip for microelectronics.

Active Micro-Nano-Collaborative Bioelectronic Device for Advanced Electrophysiological Recording

The development of precise and sensitive electrophysiological recording platforms holds the utmost importance for research in the fields of cardiology and neuroscience.In recent years,active micro/nano-bioelectronic devices have undergone significant advancements,thereby facilitating the study of electrophysiology.The distinctive configuration and exceptional functionality of these active micro-nano-collaborative bioelectronic devices offer the potential for the recording of high-fidelity action potential signals on a large scale.In this paper,we review three-dimensional active nano-transistors and planar active micro-transistors in terms of their applications in electroexcitable cells,focusing on the evaluation of the effects of active micro/nano-bioelectronic devices on electrophysiological signals.Looking forward to the possibilities,challenges,and wide prospects of active micro-nano-devices,we expect to advance their progress to satisfy the demands of theoretical investigations and medical implementations within the domains of cardiology and neuroscience research.

Ignition processes and characteristics of charring conductive polymers with a cavity geometry in precombustion chamber for applications in micro/nano satellite hybrid rocket motors

The arc ignition system based on charring polymers has advantages of simple structure,low ignition power consumption and multiple ignitions,which bringing it broadly application prospect in hybrid propulsion system of micro/nano satellite.However,charring polymers alone need a relatively high input voltage to achieve pyrolysis and ignition,which increases the burden and cost of the power system of micro/nano satellite in practical application.Adding conductive substance into charring polymers can effectively decrease the conducting voltage which can realize low voltage and low power consumption repeated ignition of arc ignition system.In this paper,a charring conductive polymer ignition grain with a cavity geometry in precombustion chamber,which is composed of PLA and multiwall carbon nanotubes(MWCNT)was proposed.The detailed ignition processes were analyzed and two different ignition mechanisms in the cavity of charring conductive polymers were revealed.The ignition characteristics of charring conductive polymers were also investigated at different input voltages,ignition grain structures,ignition locations and injection schemes in a visual ignition combustor.The results demonstrated that the ignition delay and external energy required for ignition were inversely correlated with the voltages applied to ignition grain.Moreover,the incremental depth of cavity shortened the ignition delay and external energy required for ignition while accelerated the propagation of flame.As the depth of cavity increased from 2 to 6 mm(at 50 V),the time of flame propagating out of ignition grain changed from 235.6 to 108 ms,and values of mean ignition delay time and mean external energy required for ignition decreased from 462.8 to 320 ms and 16.2 to 10.75 J,respectively.The rear side of the cavity was the ideal ignition position which had a shorter ignition delay and a faster flame propagation speed in comparison to other ignition positions.Compared to direct injection scheme,swirling injection provided a more favorable flow field environment in the cavity,which was beneficial to ignition and initial flame propagation,but the ignition position needed to be away from the outlet of swirling injector.At last,the repeated ignition characteristic of charring conductive polymers was also investigated.The ignition delay time and external energy required for ignition decreased with repeated ignition times but the variation was decreasing gradually.

Capillary force of a novel skew-grooved wick structure for micro heat pipes

In order to improve the capillary force of grooved wick, a novel skew-grooved wick structure was proposed for micro heat pipes. Risen meniscus experiments were carried out to research the capillary force of the skew-grooved and rectangle-grooved wick and a comparison of capillarity between the two wick structures was explored. A theoretical capillary force model of skew-grooved wick structure was also developed to calculate its effective capillary radius by comparing with the rectangle-grooved wick. From the experimental results, the maximum capillary force of the skewed-grooved wick is 8.62% larger than that of the rectangle-grooved wick. From the theoretical analysis, because the skewed-grooved wick has a smaller effective capillary radius, its maximum capillary force is 8.64% larger than that of the rectangle-grooved wick. The results indicate that the skew-grooved wick provides larger capillary force than the rectangle-grooved wick.

Development of micro milling force model and cutting parameter optimization

Taking the minimum chip thickness effect,cutter deflection,and spindle run-out into account,a micro milling force model and a method to determine the optimal micro milling parameters were developed.The micro milling force model was derived as a function of the cutting coefficients and the instantaneous projected cutting area that was determined based on the machining parameters and the rotation trajectory of the cutter edges.When an allowable micro cutter deflection is defined,the maximum allowable cutting force can be determined.The optimal machining parameters can then be computed based on the cutting force model for better machining efficiency and accuracy.To verify the proposed cutting force model and the method to determine the optimal cutting parameters,micro-milling experiments were conducted,and the results show the feasibility and effectiveness of the model and method.

Mechanical Properties of Micro-regions in Cement-based Material based on the PeakForce QNM Mode of AFM

In this paper, the cement paste and the mortar were tested using the PF-QNM technique. It is shown that the PF-QNM technique is very powerful to characterize the mechanical properties of micro-and nanostructures in the cement-based materials. It does not have strict requirements for test environment and it does not damage the surface of the material. High-resolution images can be obtained very easily, and they can be analyzed statistically. The test results show that PF-QNM analysis can test not only the mechanical properties of the cement paste, but also investigate the interfacial regions in the cement-based material, including the variation in the mechanical properties of interface regions and the extension of the interfacial regions. During the test, care must be taken to choose the size of test area;indeed, a test area too small is not representative but too large leads to lack of stability. The recommended side is a square with a length of in the range 10-30 μm.

Numerical Analysis of the Adhesive Forces in Nano-Scale Structure

Nanohairs, which can be found on the epidermis of Tokay gecko＇s toes, contribute to the adhesion by means of van der Waals force, capillary force, etc. This structure has inspired many researchers to fabricate the attachable nano-scale structures. However, the efficiency of artificial nano-scale structures is not reliable sufficiently. Moreover, the mechanical parameters related to the nano-hair attachment are not yet revealed qualitatively. The mechanical parameters which have influence on the ability of adhesive nano-hairs were investigated through numerical simulation in which only van der Waals force was considered. For the numerical analysis, finite element method was utilized and van der Waals force, assumed as 12-6 Lennard-Jones potential, was implemented as the body force term in the finite element formulation.

Study of ss-DNA Adsorption and Nano-mechanical Properties on Mica Substrate with Surface Forces Apparatus

Many DNA?based devices need to build stable and controllable DNA films on surfaces. However, the most com?monly used method of film characterization, namely, the probe?like microscopes which may destroy the sample and substrate. Surface Forces Apparatus(SFA) technique, specializing in surface interaction studies, is introduced to investigate the e ects of DNA concentration on the formation of single?stranded DNA(ss?DNA) film. The result demonstrates that 50 ng/μL is the lowest concentration that ss?DNA construct a dense layer on mica. Besides, it is also indicated that at di erent DNA concentrations, ss?DNA exhibit diverse morphology: lying flat on surface at 50 ng/μL while forming bilayer or cross?link at 100 ng/μL, and these ss?DNA structures are stable enough due to the repeatabil?ity even under the load of 15 mN/m. At the same time, an obvious adhesion force is measured:/m at 100 ng/μL, respectively, which is attributed to the ion?correlation e ect. M-6.5 mN/m at 50 ng/μL and-5.3 mNoreover, the atomic force microscopy(AFM) images reveal the entire surface is covered with wormlike ss?DNA and the measured surface roughness(1.8±0.2 nm) also matches well with the film thickness by SFA. The desorption behaviors of ss?DNA layer from mica surface occur by adding sodium salt into gap bu er, which is mainly ascribed to the decreased ion?ion cor?relation force. This paper employing SFA and AFM techniques to characterize the DNA film with flexibility and stable mechanical ability achieved by ion bridging method, is helpful to fabricate the DNA?based devices in nanoscale.

Impacts of Micro- and Nano-Plastics on Soil Properties and Plant Production in Agroecosystems: A Mini-Review

Micro- and nano-plastics (MNPs) are tiny plastic particles resulting from plastic product degradation. Soil MNPs have been identified as potential influential factors affecting various soil properties and crop biomass productivity. This mini-review provides a synthesis of recent findings concerning their effects on soil physicochemical properties, microorganisms, organic carbon content, soil nutrients, greenhouse gas emissions, soil fauna, and their impacts on plant ecophysiology, growth, and production. The results indicate that MNPs may markedly impede soil aggregation ability, increase porosity, decrease soil bulk density, enhance water retention capacity, influence soil pH and electrical conductivity, and escalate soil water evaporation. Exposure to MNPs may predominantly induce changes in soil microbial composition, reducing the diversity and complexity of microbial communities and microbial activity while enhancing soil organic carbon stability, influencing soil nutrient dynamics, and stimulating organic carbon decomposition and denitrification processes, leading to elevated soil respiration and methane emissions, and potentially decreasing soil nitrous oxide emission. Additionally, MNPs may adversely affect soil fauna, diminish seed germination rates, promote plant root growth, yet impair plant photosynthetic efficacy and biomass productivity. These findings contribute to a better understanding of the impacts and mechanistic foundations of MNPs. Future research avenues are suggested to further explore the impacts and economic implications.

An automated AFM for nanoindentation and force related measurements

A fully automated atomic force microscope(AFM)is presented.The mechanical motion of the AFM stage was controlled by three steppers.The fine motion of the AFM was controlled by an MCL one-axis piezo plate.A32.768kHz crystal tuning fork(TF)was used as the transducer with a probe attached.An acoustic sensor was used to measure the interactions between the probe and the sample.An SR850lock-in amplifier was used to monitor the TF signals.An additional lock-in amplifier was used to monitor the acoustic signal.A field programmable gate array(FPGA)board was used to collect the data in automatic mode.The main controller was coded with LabVIEW,which was in charge of Z-axis scan,signal processing and data visualization.A manual mode and an automatic mode were implemented in the controller.Users can switch the two modes at any time during the operation.This AFM system showed several advantages during the test operations.It is simple,flexible and easy to use.

Towards Quantitative Characterisation of the Small Force Transducer Used in Nanoindentation Instruments

Quantitative characterization of the mechanical properties of materials in micro-/nano-scale using depth-sensing indentation technique demands high performance of nanoindentation instruments in use. In this paper, the efforts to calibrate the capacitive force transducer of a commercial nanoindentation instrument are presented, where the quasi-static characteristic of the force transducer has been calibrated by a precise compensation balance with a resolution of ~1 nN. To investigate the dynamic response of the transducer, an electrostatic MEMS (Micro-Electro-Mechanical System) based on nano-force transfer standard with nano-Newton (10-9 Newton) resolution and a bandwidth up to 6 kHz have been employed. Preliminary experimental results indicate that 1) the force transducer under calibration has a probing force uncertainty less than 300 nN (1σ) in the calibration range of 1 mN;2) the transient duration at contact points amounts to 10 seconds;3) the overshoot of engagement is pre-load dependent.

Producing micro-droplet of dilute sulphuric acid on pure iron surface and observing its corrosion behaviour by atomic force microscopy

A simple method was presented to produce a micro-droplet of sulphuric acid on a pre-selected micro-zone on a pure iron surface with the tip of an AFM cantilever. The three-dimensional shape of the droplet was imaged with the AC non-contact mode of the AFM, and the liquid/solid interface was observed in situ during corrosion using the contact mode. The substrate surface beneath the droplet was lowered by approximately 19 nm after 3.6 ks of adhesion. This method has important implications for experimental studies of micro-zone corrosion or lubrication.

Edge Effects and Coupling Effects in Atomic Force Microscope Images

The AFM images were obtained by an atomic force microscope (AFM) and transformed from the deformation of AFM micro cantilever probe. However, due to the surface topography and surface forces applied on the AFM tip of sample, the deformation of AFM probe results in obvious edge effects and coupling effects in the AFM images.The deformation of AFM probe was analyzed,the mechanism of the edge effects and the coupling effects was investigated, and their results in the AFM images were studied. It is demonstrated by the theoretical analysis and AFM experiments that the edge effects make lateral force images more clear than the topography images,also make extraction of frictional force from lateral force images more complex and difficult. While the coupling effects make the comparison between topography images and lateral force images more advantage to acquire precise topography information by AFM.