On-Chip Micro Temperature Controllers Based on Freestanding Thermoelectric Nano Films for Low-Power Electronics

Multidimensional integration and multifunctional com-ponent assembly have been greatly explored in recent years to extend Moore’s Law of modern microelectronics.However,this inevitably exac-erbates the inhomogeneity of temperature distribution in microsystems,making precise temperature control for electronic components extremely challenging.Herein,we report an on-chip micro temperature controller including a pair of thermoelectric legs with a total area of 50×50μm^(2),which are fabricated from dense and flat freestanding Bi2Te3-based ther-moelectric nano films deposited on a newly developed nano graphene oxide membrane substrate.Its tunable equivalent thermal resistance is controlled by electrical currents to achieve energy-efficient temperature control for low-power electronics.A large cooling temperature difference of 44.5 K at 380 K is achieved with a power consumption of only 445μW,resulting in an ultrahigh temperature control capability over 100 K mW^(-1).Moreover,an ultra-fast cooling rate exceeding 2000 K s^(-1) and excellent reliability of up to 1 million cycles are observed.Our proposed on-chip temperature controller is expected to enable further miniaturization and multifunctional integration on a single chip for microelectronics.

Active Micro-Nano-Collaborative Bioelectronic Device for Advanced Electrophysiological Recording

The development of precise and sensitive electrophysiological recording platforms holds the utmost importance for research in the fields of cardiology and neuroscience.In recent years,active micro/nano-bioelectronic devices have undergone significant advancements,thereby facilitating the study of electrophysiology.The distinctive configuration and exceptional functionality of these active micro-nano-collaborative bioelectronic devices offer the potential for the recording of high-fidelity action potential signals on a large scale.In this paper,we review three-dimensional active nano-transistors and planar active micro-transistors in terms of their applications in electroexcitable cells,focusing on the evaluation of the effects of active micro/nano-bioelectronic devices on electrophysiological signals.Looking forward to the possibilities,challenges,and wide prospects of active micro-nano-devices,we expect to advance their progress to satisfy the demands of theoretical investigations and medical implementations within the domains of cardiology and neuroscience research.

Ignition processes and characteristics of charring conductive polymers with a cavity geometry in precombustion chamber for applications in micro/nano satellite hybrid rocket motors

The arc ignition system based on charring polymers has advantages of simple structure,low ignition power consumption and multiple ignitions,which bringing it broadly application prospect in hybrid propulsion system of micro/nano satellite.However,charring polymers alone need a relatively high input voltage to achieve pyrolysis and ignition,which increases the burden and cost of the power system of micro/nano satellite in practical application.Adding conductive substance into charring polymers can effectively decrease the conducting voltage which can realize low voltage and low power consumption repeated ignition of arc ignition system.In this paper,a charring conductive polymer ignition grain with a cavity geometry in precombustion chamber,which is composed of PLA and multiwall carbon nanotubes(MWCNT)was proposed.The detailed ignition processes were analyzed and two different ignition mechanisms in the cavity of charring conductive polymers were revealed.The ignition characteristics of charring conductive polymers were also investigated at different input voltages,ignition grain structures,ignition locations and injection schemes in a visual ignition combustor.The results demonstrated that the ignition delay and external energy required for ignition were inversely correlated with the voltages applied to ignition grain.Moreover,the incremental depth of cavity shortened the ignition delay and external energy required for ignition while accelerated the propagation of flame.As the depth of cavity increased from 2 to 6 mm(at 50 V),the time of flame propagating out of ignition grain changed from 235.6 to 108 ms,and values of mean ignition delay time and mean external energy required for ignition decreased from 462.8 to 320 ms and 16.2 to 10.75 J,respectively.The rear side of the cavity was the ideal ignition position which had a shorter ignition delay and a faster flame propagation speed in comparison to other ignition positions.Compared to direct injection scheme,swirling injection provided a more favorable flow field environment in the cavity,which was beneficial to ignition and initial flame propagation,but the ignition position needed to be away from the outlet of swirling injector.At last,the repeated ignition characteristic of charring conductive polymers was also investigated.The ignition delay time and external energy required for ignition decreased with repeated ignition times but the variation was decreasing gradually.

Research on Infrared Emissivity and Laser Reflectivity of Sn_(1−x)Er_(x)O_(2)Micro/Nanofibers Based on First-Principles

Sn_(1−x)Er_(x)O_(2)(x=0%,8%,16%,24%)micro/nanofibers were prepared by electrospinning combined with heat treatment using erbium nitrate,stannous chloride and polyvinylpyrrolidone(PVP)as raw materials.The target products were characterized by thermogravimetric analyzer,X-ray diffrotometer,fourier transform infrared spectrometer,scanning electron microscope,spectrophotometer and infrared emissivity tester,and the effects of Er^(3+)doping on its infrared and laser emissivity were studied.At the same time,the Sn_(1−x)Er_(x)O_(2)(x=0%,16%)doping models were constructed based on the first principles of density functional theory,and the related optoelectronic properties such as their energy band structure,density of states,reflectivity and dielectric constant were analyzed,and further explained the mechanism of Er^(3+)doping on SnO_(2)infrared emissivity and laser absorption from the point of electronic structure.The results showed that after calcination at 600℃,single rutile type SnO_(2)was formed,and the crystal structure was not changed by doping Er^(3+).The calcined products showed good fiber morphology,and the average fiber diameter was 402 nm.The infrared emissivity and resistivity of the samples both decreased first and then increased with the increase of Er^(3+)doping amount.When x=16%,the infrared emis-sivity of the sample was at least 0.71;and Er^(3+)doping can effectively reduce the reflectivity of SnO_(2)at 1.06μm and 1.55μm,when x=16%,its reflectivity at 1.06μm and 1.55μm are 50.5%and 40%,respectively,when x=24%,the reflectivity at 1.06μm and 1.55μm wavelengths are 47.3%and 42.1%,respectively.At the same time,the change of carrier concentration and electron transition before and after Er^(3+)doping were described by first-principle calculation,and the regulation mechanism of infrared emissivity and laser reflectivity was explained.This study provides a certain experimental and theoretical basis for the development of a single-type,light-weight and easily prepared infrared and laser compatible-stealth material.

Magnetic Field Effect and Heat Transfer of Nanofluids within Waveform Microchannel

In this research,a numerical study of mixed convection of non-Newtonian fluid and magnetic field effect along a vertical wavy surface was investigated.A simple coordinate transformation to transform wavy surface to a flat surface is employed.A cubic spline collocation numerical method is employed to analyze transformed equations.The effect of various parameters such as Reynolds number,volume fraction 0-,Hartmann number,and amplitude of wave length was evaluated in improving the performance of a wavy microchannel.According to the presented results,the sinusoidal shape of the microchannel has a direct impact on heat transfer.By increasing the microchannel wave amplitude,the Nusselt number has risen.On the other hand,increasing the heat transfer in the higher wavelength ratio corrugated channel is seen as an effective method of increasing the heat transfer,especially at higher Reynolds numbers.The results showed that with increasing Hartmann numbers,the flow line near thewall becomesmore regular and,according to the temperature gradient created,theNusselt number growth.

“Smart”micro/nano container-based self-healing coatings on magnesium alloys:A review

Coating technologies are a commonly used way to protect metals against corrosion.However,with more and more severe service environments of materials,many protective coating systems often are not environmentally friendly or toxic as in the case of chromates.Based on the world’s abundant ideal magnesium(Mg)and its alloy,the smart self-healing anticorrosive coating can autonomously restore the damaged part of the coating according to the environmental changes,strengthen the corrosion protection ability,and prolong its service life.This paper reviews the research progress of smart self-healing coatings on Mg alloys.These coatings mostly contain suitable corrosion inhibitors encapsulated into micro/nano containers.Moreover,the different self-healing mechanisms and functionalities of micro/nano containers are discussed.The micro/nano containers range from inorganic nanocontainers such as mesoporous nanoparticles(silica(SiO_(2)),titanium dioxide(TiO_(2)),etc.),over inorganic clays(halloysite,hydrotalcite-like,zeolite),to organic nanocontainers such as polymer microcapsules,nanofibers,chitosan(CS)and cyclodextrin(CD),as well as,carbon materials such as graphene and carbon nanotubes and hybrids such as metal organic frameworks.The functioning of micro/nano containers can be divided in two principal groups:autonomous(based on defect filling and corrosion inhibition)and non-autonomous(based on dynamic bonds and shape memory polymers).Moreover,multi functionalities and composite applications of various micro/nano containers are summarized.At present,significant progress has been made in the preparation methods and technologies of micro/nano containers.Achieving long-term self-healing properties of coatings sensing of coating failure and early warning after self-healing function failure can be expected as the main development direction of self-healing corrosion protection coatings in the future.

Micro–Nano Water Film Enabled High‑Performance Interfacial Solar Evaporation

Interfacial solar evaporation holds great promise to address the freshwater shortage.However,most interfacial solar evaporators are always filled with water throughout the evaporation process,thus bringing unavoidable heat loss.Herein,we propose a novel interfacial evaporation structure based on the micro–nano water film,which demonstrates significantly improved evaporation performance,as experimentally verified by polypyrrole-and polydopamine-coated polydimethylsiloxane sponge.The 2D evaporator based on the as-prepared sponge realizes an enhanced evaporation rate of 2.18 kg m^(−2)h^(−1)under 1 sun by fine-tuning the interfacial micro–nano water film.Then,a homemade device with an enhanced condensation function is engineered for outdoor clean water production.Throughout a continuous test for 40 days,this device demonstrates a high water production rate(WPR)of 15.9–19.4 kg kW^(−1)h^(−1)m^(−2).Based on the outdoor outcomes,we further establish a multi-objective model to assess the global WPR.It is predicted that a 1 m^(2)device can produce at most 7.8 kg of clean water per day,which could meet the daily drinking water needs of 3 people.Finally,this technology could greatly alleviate the current water and energy crisis through further large-scale applications.

Precision Metrology of Micro Work-pieces on Their Tribological Performance with Error Compensation Method

The frictional properties of micro bearings have strong influence on the performance of the whole system because of tiny scale of micro-electromechanical system (MEMS). To develop micro bearings with low friction,it is important to evaluate the friction behaviors on the micro bearing. The testing system and the principle to evaluate the tribological performance of micromachining work-pieces under the load of mill Newton scale is introduced in paper "A new approach to measure the friction coefficient of micro journal bearings" of Yao et al,. But as the tribological force is faint in micro scale, the measured force is influenced a lot by the testing error. As the equation of that of Yao’s paper is very sensitive to the measured force, the tested result is influenced remarkably by testing error. So it is hard to get precision result. To solve this problem, the test system with new compensation method is introduced to precisely evaluate tribological performance under mill scale. The new metrology method is developed by means of the error compensation from two sets of testing data. The data are the force collected respectively when the friction counterparts rotate in CW(clockwise) and CCW(counter-clockwise) direction. So we deduce the equation of friction coefficient respctively on the condition of journal running in CCW and CW direction. As condition of measuring those two friciton coefficients are alike except the running direction of journal, and then the friction coefficient should be the same because this difference of direction has no influence on the fricition coefficients. Considering this, we unite the both equation, make the data measured in different subtract each other in the equation, and then a new equation can be gotten. This new equation enhances the metrology precision of friction coefficient theoretically thanks to the counteracting of error values in the equation. Using this method we testing the friction of high speed steel journal with hard alloy bearing. The result shows the new compensation method has better precision and repetition than CW and CCW method thanks to the error resistance.

Modification of Nano-α-Al2O3 and Its Influence on the Surface Properties of Waterborne Polyurethane Resin Composite Passivation Films

Silane coupling agent KH560 was used to modify the surface of nano-α-Al2O3 in ethanol-aqueous solution with different proportions. The particle size of nano-α-Al2O3 was determined by nano-particle size analyzer, and the effects of nano-α-Al2O3 content, ethanol-aqueous solution ratio and KH560 dosage on the dispersion and particle size of nano-α-Al2O3 were investigated. The material structure before and after modification was determined by Fourier transform infrared spectroscopy (FTIR). Aqueous polyurethane resin and inorganic components are combined with modified nano-α-Al2O3 dispersion to form chromium-free passivation solution. The solution is coated on the galvanized sheet, the adhesion and surface hardness are tested, the bonding strength of the coating and the surface hardness of the substrate are discussed. The corrosion resistance and surface morphology of the matrix were investigated by electrochemical test, neutral salt spray test and scanning electron microscope test. The chromium-free passivation film formed after the modification of nano-α-Al2O3 increases the surface hardness of galvanized sheet by about 85%. The corrosion resistance of the film is better than that of a single polyurethane film. The results show that the surface hardness and corrosion resistance of polyurethane resin composite passivation film are significantly improved by the introduction of nano-α-Al2O3.

Micro/nano Indentation and Single Grit Diamond Grinding Mechanism on Ultra Pure Fused Silica

The existing research about ductile grinding of fused silica glass was mainly focused on how to carry out ductile regime material removal for generating very ＂smoothed＂ surface and investigate the machining-induced damage in the grinding in order to reduce or eliminate the subsurface damage.The brittle/ductile transition behavior of optical glass materials and the wear of diamond wheel are the most important factors for ductile grinding of optical glass.In this paper,the critical brittle/ductile depth,the influence factors on brittle/ductile transition behavior,the wear of diamond grits in diamond grinding of ultra pure fused silica（UPFS） are investigated by means of micro/nano indentation technique,as well as single grit diamond grinding on an ultra-stiff machine tool,Tetraform ＂C＂.The single grit grinding processes are in-process monitored using acoustic emission（AE） and force dynamometer simultaneously.The wear of diamond grits,morphology and subsurface integrity of the machined groves are examined with atomic force microscope（AFM） and scanning electron microscope（SEM）.The critical brittle/ductile depth of more than 0.5 μm is achieved.When compared to the using roof-like grits,by using pyramidal diamonds leads to higher critical depths of scratch with identical grinding parameters.However,the influence of grit shapes on the critical depth is not significant as supposed.The grinding force increased linearly with depth of cut in the ductile removal regime,but in brittle removal regime,there are large fluctuations instead of forces increase.The SEM photographs of the cross-section profile show that the median cracks dominate the crack patterns beneath the single grooves.Furthermore,The SEM photographs show multi worn patterns of diamond grits,indicating an inhomogeneous wear mechanism of diamond grits in grinding of fused silica with diamond grinding wheels.The proposed research provides the basal technical theory for improving the ultra-precision grinding of UPFS.

Synthesis of hierarchical dendritic micro–nano structure ZnFe_2O_4 and photocatalytic activities for water splitting

Hierarchical dendritic micro–nano structure Zn Fe_2O_4 have been prepared by electrochemical reduction and thermal oxidation method in this work. X-ray diffractometry, Raman spectra and field-emission scanning electron microscopy were used to characterize the crystal structure, size and morphology. The results show that the sample(S-2) is composed of pure ZnFe_2O_4 when the molar ratio of Zn^(2+)/Fe^(2+)in the electrolyte is 0.35. Decreasing the molar ratio of Zn^(2+)/Fe^(2+), the sample(S-1) is composed of ZnFe_2O_4 and α-Fe_2O_3, whereas increasing the molar ratio of Zn^(2+)/Fe^(2+), the sample(S-3) is composed of ZnFe_2O_4 and Zn O. The lattice parameters of ZnFe_2O_4 are influenced by the molar ratio of Zn^(2+)/Fe: Zn at excess decreases the cell volume whereas Fe at excess increases the cell volume of Zn Fe_2O_4. All the samples have the dendritic structure, of which S-2 has micron-sized lush branches with nano-sized leaves. UV–Vis diffuse reflectance spectra were acquired by a spectrophotometer. The absorption edges gradually blue shift with the increase of the molar ratio of Zn^(2+)/Fe^(2+). Photocatalytic activities for water splitting were investigated under Xe light irradiation in an aqueous olution containing 0.1 mol·L^(-1)Na_2S/0.02 mol·L^(-1)Na_2SO_3 in a glass reactor. The relatively highest photocatalytic activity with 1.41 μmol·h-1· 0.02 g^(-1)was achieved by pure ZnFe_2O_4sample(S-2). The photocatalytic activity of the mixture phase of Zn Fe_2O_4 and α-Fe_2O_3(S-1) is better than ZnF e_2O_4 and ZnO(S-3).

STRENGTH ANALYSIS OF CLAMPING IN MICRO/NANO SCALE EXPERIMENTS

Two kinds of clamping in micro/nano scale experiments are investigated in this paper, one based on electron-beam-induced deposition, and the other on the van der Waals interaction. The clamping strength and mechanism are analyzed both theoretically and experimentally. The influence of relative humidity on the micro/nano clamping and the method of electrostatic clamping are discussed. The clamping strength and performance of different clamping methods are compared considering the size and material of the clamped objects, and the application environments.

Deformation Analysis of Micro/Nano Indentation and Diamond Grinding on Optical Glasses

The previous research of precision grinding optical glasses with electrolytic in process dressing （ELID） technology mainly concentrated on the action of ELID and machining parameters when grinding, which aim at generating very ＂smoothed＂ surfaces and reducing the subsurface damage. However, when grinding spectrosil 2000 and BK7 glass assisted with ELID technology, a deeply comparative study on material removal mechanism and the wheel wear behaviors have not been given yet. In this paper, the micro/nano indentation technique is initially applied for investigating the mechanical properties of optical glasses, whose results are then refereed to evaluate the machinability. In single grit diamond scratching on glasses, the scratching traces display four kinds of scratch characteristics according to different material removal modes. In normal grinding experiments, the result shows BK7 glass has a better machinability than that of spectrosil 2000, corresponding to what the micro/nano indentation vent revealed. Under the same grinding depth parameters, the smaller amplitude of acoustic emission （AE） raw signals, grinding force and grinding force ratio correspond to a better surface quality. While for these two kinds of glasses, with the increasing of grinding depth, the variation trends of the surface roughness, the force ratio, and the AE raw signals are contrary, which should be attributed to different material removal modes. Moreover, the SEM micrographs of used wheels surface indicate that diamond grains on the wheel surface after grinding BK7 glass are worn more severely than that of spectrosil 2000. The proposed research analyzes what happened in the grinding process with different material removal patterns, which can provide a basis for producing high-quality optical glasses and comprehensively evaluate the surface and subsurface integrity of optical glasses.

Construction and Properties of Structure-and Size-controlled Micro/Nano-energetic Materials

The recent research progress of structure- and size-controlled micro/nano-energetic materials is reviewed, which properties are fundamentally different from those of their corresponding bulk materials. The development of the construction strategies for achieving zero-dimensional (0D), one-dimensional (1D), two-dimensional (2D), and three-dimensional (3D) micro/nanostructures from energetic molecules is introduced. Also, an overview of the unique properties induced by micro/nanostructures and size effects is provided. Special emphasis is focused on the size-dependent properties that are different from those of the conventional micro-sized energetic materials, such as thermal decomposition, sensitivity, combustion and detonation, and compaction behaviors. A conclusion and our view of the future development of micro/nano-energetic materials and devices are given.

Research on a Diamond Tip Wear Mechanism in Atomic Force Microscope-based Micro/nano-machining

The object is to investigate the wear of an atomic force microscope (AFM) diamond tip when conducting micro/nano machining on single crystal silicon surface. The experimental research and theoretical analysis were carried out on the worn tip in terms of wear rate, wear mechanism and the effect of the tip wear on micro machining process. The wear rate was calculated as 1.7(10～10mm 3/(N·m) by using a theoretical model combined with the experimental results. Through an integration of an AFM observation on the worn tip features with the FEM simulation of the stress distribution, in addition to the unit cutting force calculation on the AFM diamond tip, the wear mechanism of the AFM diamond tip was concluded as mainly chemical wear, and the wear process was also elaborated as well.

Osteoblast Behavior on Hierarchical Micro-/Nano-Structured Titanium Surface

In the present work, osteoblast behavior on a hierarchical micro-/nano-structured titanium surface was investigated. A hi- erarchical hybrid micro-/nano-structured titanium surface topography was produced via Electrolytic Etching （EE）. MG-63 cells were cultured on disks for 2 h to 7 days. The osteoblast response to the hierarchical hybrid micro-/nano-structured titanium surface was evaluated through the osteoblast cell morphology, attachment and proliferation. For comparison, MG-63 cells were also cultured on Sandblasted and Acid-etched （SEA） as well as Machined （M） surfaces respectively. The results show signifi- cant differences in the adhesion rates and proliferation levels of MG-63 cells on EE, SLA, and M surfaces. Both adhesion rate and proliferation level on EE surface are higher than those on SLA and M surfaces. Therefore, we may expect that, comparing with SLA and M surfaces, bone growth on EE surface could be accelerated and bone formation could be promoted at an early stage, which could be applied in the clinical practices for immediate and early-stage loadings.

Tribological characteristics of micro or nano particles between the gear pairs

将4种分别含有微米或纳米固体粒子的磨合油应用在45号钢齿轮副磨合试验中，研究这2类粒子对齿轮磨合的影响及行为．研究中使用的2种微米粒子分别是平均粒径为10μm的碳酸钙和100μm的石英砂，2种纳米粒子分别是平均粒径为5nm的金刚石和30nm的导电炭黑，大齿轮和小齿轮未磨合前的齿面三维粗糙度分别是24．00μm和32．97μm．试验结果表明：微米粒子对磨合磨损的主要影响表现为磨粒磨损，且微粒的粒径越大，磨粒磨损越剧烈；纳米粒子对磨合磨损影响不大，但纳米粒子能够吸附、填充和渗入齿面，从而改观齿面形貌和改善齿面摩擦学性能．另外，在含有这2类粒子的磨合磨损中，摩擦副间都有不同程度的“负电阻”现象发生，且两齿轮的磨损率蒡越大，该电现象越明显．

Bibliometric analysis of micro-nano manufacturing technologies

Manufacturing is the primary industry promoting economic and social development.For the past 30 years,the global trends of preciseness and device miniaturisation have promoted manufacturing to the micro(μ)and nano(η)scale.Identification of themost promising micro-nano manufacturing technologies(MNMT)is of interest to industry,academia and private and national science investing foundations.Considering the exponential broadening of the research area and an enormous volume of literature,providing an overview of the state of the art is far beyond the scope of a technical review paper.This study performs bibliometric analysis of a stream of academic literature devoted toμ-andη-machining.Themain goals of the analysis are to assess the current core and trends in the field ofMNMT.Literature and citation statistics from 1988 were collected from theWeb of Science,Google Scholar,Scopus,Engineering Village,ScienceDirect and SpringerLink databases and were then analysed and illustrated with Microsoft Excel and VOSviewer software.The top keywords,articles,journals,authors,universities and countrieswere identified according to different parameters.The index of normalised influence was offered to evaluate the top element in each category.We observed that the most powerful keywords were present in well-known articles published in prominent journals by authoritative scientists at leading universities in the countries that are most actively engaged in MNMT.The implications of the research outcomes for investors and academicians are summarised in the conclusion.