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Numerical simulation of the plasma acceleration process in a magnetically enhanced micro-cathode vacuum arc thruster 被引量:6
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作者 Jinyue GENG Yongcai CHEN +2 位作者 Surong SUN Wendong HUANG Haixing WANG 《Plasma Science and Technology》 SCIE EI CAS CSCD 2020年第9期95-105,共11页
A particle-in-cell simulation is conducted to investigate the plasma acceleration process in a micro-cathode vacuum arc thruster.A coaxial electrode structure thruster with an applied magnetic field configuration is u... A particle-in-cell simulation is conducted to investigate the plasma acceleration process in a micro-cathode vacuum arc thruster.A coaxial electrode structure thruster with an applied magnetic field configuration is used to investigate the effects of the distribution of the magnetic field on the acceleration process and the mechanism of electrons and ions.The modeling results show that due to the small Larmor radius of electrons,they are magnetized and bound by the magnetic field lines to form a narrow electron channel.Heavy ions with a large Larmor radius take a long time to keep up with the electron movement.The presence of a magnetic field strengthens the charge separation phenomenon.The electric field caused by the charge separation is mainly responsible for the ion acceleration downstream of the computation.The impact of variations in the distribution of the magnetic field on the acceleration of the plasma is also investigated in this study,and it is found that the position of the magnetic coil relative to the thruster exit has an important impact on the acceleration of ions.In order to increase the axial velocity of heavy ions,the design should be considered to reduce the confinement of the magnetic field on the electrons in the downstream divergent part of the applied magnetic field. 展开更多
关键词 micro-cathode vacuum arc thruster magnetic field ion acceleration
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Microstructure and mechanical properties of TiN/TiAlN multilayer coatings deposited by arc ion plating with separate targets 被引量:13
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作者 魏永强 李春伟 +2 位作者 巩春志 田修波 杨士勤 《Transactions of Nonferrous Metals Society of China》 SCIE EI CAS CSCD 2011年第5期1068-1073,共6页
TiN/TiAlN multilayer coatings were prepared by arc ion plating with separate targets. In order to decrease the unfavorable macroparticles, a straight magnetized filter was used for the low melting aluminium target. Th... TiN/TiAlN multilayer coatings were prepared by arc ion plating with separate targets. In order to decrease the unfavorable macroparticles, a straight magnetized filter was used for the low melting aluminium target. The results show that the output plasmas of titanium target without filter and aluminium target with filter reach the substrate with the same order of magnitude. Meanwhile, the number of macropartieles in TiN/TiAlN multilayer coatings deposited with separate targets is only 1/10-1/3 of that deposited with alloy target reported in literature. Al atom addition may lead to the decrease of peak at (200) lattice plane and strengthening of peak at (111) and (220) lattice planes. The measured hardness of TiN/TiAlN multilayer coatings accords with the mixture principle and the maximum hardness is HV2495. The adhesion strength reaches 75 N. 展开更多
关键词 arc ion plating TiN/TiAlN coatings M2 high speed steel MACROPARTICLES HARDNESS bilayer modulation
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Ti/(Ti,Cr)N/CrN multilayer coated 316L stainless steel by arc ion plating as bipolar plates for proton exchange membrane fuel cells 被引量:21
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作者 Shengli Wang Ming Hou +5 位作者 Qing Zhao Yongyi Jiang Zhen Wang Huizhe Li Yu Fu Zhigang Shao 《Journal of Energy Chemistry》 SCIE EI CAS CSCD 2017年第1期168-174,共7页
Arc ion plating (AIP) is applied to form Ti/(Ti,Cr)N/CrN multilayer coating on the surface of 316L stainless steel (SS316L) as bipolar plates for proton exchange membrane fuel cells (PEMFCs). The characterizations of ... Arc ion plating (AIP) is applied to form Ti/(Ti,Cr)N/CrN multilayer coating on the surface of 316L stainless steel (SS316L) as bipolar plates for proton exchange membrane fuel cells (PEMFCs). The characterizations of the coating are analyzed by scanning electron microscopy (SEM) and X-ray diffraction (XRD). Interfacial contact resistance (ICR) between the coated sample and carbon paper is 4.9 m Omega cm(2) under 150 N/cm(2), which is much lower than that of the SS316L substrate. Potentiodynamic and potentiostatic tests are performed in the simulated PEMFC working conditions to investigate the corrosion behaviors of the coated sample. Superior anticorrosion performance is observed for the coated sample, whose corrosion current density is 0.12 mu A/cm(2). Surface morphology results after corrosion tests indicate that the substrate is well protected by the multilayer coating. Performances of the single cell with the multilayer coated SS316L bipolar plate are improved significantly compared with that of the cell with the uncoated SS316L bipolar plate, presenting a great potential for PEMFC application. (C) 2016 Science Press and Dalian Institute of Chemical Physics, Chinese Academy of Sciences. Published by Elsevier B.V. and Science Press. All rights reserved. 展开更多
关键词 Stainless steel bipolar plate Proton exchange membrane fuel cell arc ion plating Multilayer coating
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Effect of Rare Earth Element Cerium on Mechanical Properties and Morphology of TiN Coating Prepared by Arc Ion Plating 被引量:9
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作者 黄拿灿 胡社军 +2 位作者 谢光荣 曾鹏 汝强 《Journal of Rare Earths》 SCIE EI CAS CSCD 2003年第3期380-383,共4页
TiN coatings were deposited on polished substrates of W18Cr4V high speed steel by means of vacuum arc ion plating. The effect of cerium on adhesion between TiN coating and substrate was studied. The microstructures an... TiN coatings were deposited on polished substrates of W18Cr4V high speed steel by means of vacuum arc ion plating. The effect of cerium on adhesion between TiN coating and substrate was studied. The microstructures and composition of TiN coatings were also investigated by means of scanning electron microscope (SEM), Auger electron spectroscopy (AES), and X ray diffraction (XRD) technique. It was found that cerium is an effective modifying agent and the addition of suitable amount of cerium to TiN coatings can produce relatively excellent properties such as micro hardness, wear resistance, oxidation resistance and porosity. The experimental results show that the added cerium in TiN coatings makes a contribution to form the preferred direction along with a (111) or (222) close packed face, which may be one of the reasons that improves some properties mentioned above. 展开更多
关键词 metal materials arc ion plating TiN coatings ADHESion rare earths
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Experimental Verification of the Physical Model for Droplet-Particles Cleaning in Pulsed Bias Arc Ion Plating 被引量:5
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作者 YanhuiZHAO GuoqiangLIN +1 位作者 ChuangDONG LishiWEN 《Journal of Materials Science & Technology》 SCIE EI CAS CSCD 2005年第3期423-426,共4页
It has been reported that application of pulsed biases in arc ion plating could effectively eliminate droplet particles. The present paper aims at experimental verification of a physical model proposed previously by u... It has been reported that application of pulsed biases in arc ion plating could effectively eliminate droplet particles. The present paper aims at experimental verification of a physical model proposed previously by us which is based on particle charging and repulsion in the pulsed plasma sheath. An orthogonal experiment was designed for this purpose, using the electrical parameters of the pulsed bias for the deposition of TiN films on stainless steel substrates. The effect of these parameters on the amount and the size distribution of the particles were analyzed, and the results provided sufficient evidence for the physical model. 展开更多
关键词 arc ion plating Pulsed bias TiN fllm Droplet-particles
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THE EFFECTS OF PULSE BIAS VOLTAGE AND N_2 PARTIAL PRESSURE ON TiAlN FILMS OF ARC ION PLATING (AIP) 被引量:4
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作者 M.S. Li, S.L. Zhu, Fuhui Wang, C. Sun and L.S. Wen (Institute of Metal Research, The Chinese Academy of Sciences, Shenyang l10016, China) 《Acta Metallurgica Sinica(English Letters)》 SCIE EI CAS CSCD 2001年第6期520-524,共5页
Owing to the characteristics of arc ion plating(AIP) technique, the structure and composition of TiAlN films can be tailored by controlling of various parameters such as compositions of target materials, N2 partial pr... Owing to the characteristics of arc ion plating(AIP) technique, the structure and composition of TiAlN films can be tailored by controlling of various parameters such as compositions of target materials, N2 partial pressure, substrate bias and so on. In this study, several titanium aluminum nitride films were deposited on 1Cr11Ni2W2MoV steel for compressor blade of areo-engine under different d.c pulse bias voltage and nitrogen partial pressure. The effects of substrate pulse bias and nitrogen partial pressure on the deposition rate, droplet formation, microstruture and elemental component of the films were investigated. 展开更多
关键词 TiAlN film pulse bias voltage nitrogen partial pressure arc ion plating
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Formation of nanocrystalline microstructure in arc ion plated CrN films 被引量:4
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作者 Qi-min WANG Se-Hun KWON Kwang-Ho KIM 《Transactions of Nonferrous Metals Society of China》 SCIE EI CAS CSCD 2011年第A01期73-77,共5页
Applying negative bias voltages caused significant microstructure changes in arc ion plated CrN films. Nanocrystalline microstructures were obtained by adjusting the negative bias voltage. Structural characterizations... Applying negative bias voltages caused significant microstructure changes in arc ion plated CrN films. Nanocrystalline microstructures were obtained by adjusting the negative bias voltage. Structural characterizations of the films were carried out using X-ray diffractometry (XRD) and high-resolution transmission electron microscopy (HR-TEM). The results indicated that increasing ion bombardment by applying negative bias voltages resulted in the formation of defects in the CrN films, inducing microstructure evolution from micro-columnar to nanocrystalline. The microhardness and residual stresses of the films were also affected. Based on the experimental results, the evolution mechanisms of the film microstructure and properties were discussed by considering ion bombardment effects. 展开更多
关键词 CRN thin films DEPOSITion microstructure arc ion plating ion bombardment
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Composition demixing effect on cathodic arc ion plating 被引量:3
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作者 Jun Zhang Li Li +2 位作者 Lipeng Zhang Shilu Zhao Qiang Guo 《Journal of University of Science and Technology Beijing》 CSCD 2006年第2期125-130,共6页
The composition demixing effect has been found often in alloy coatings deposited by cathodic arc ion plating using various alloy cathode targets. The characteristics of composition demixing phenomena were summarized. ... The composition demixing effect has been found often in alloy coatings deposited by cathodic arc ion plating using various alloy cathode targets. The characteristics of composition demixing phenomena were summarized. Beginning with the ionization zone near the surface of the cathode target, a physical model in terms of the ions generated in the ionization zone and their movement in the plating room modified by bias electric field was proposed. Based on the concept of electric charge state, the simulation calculation of the composition demixing effect was carried out. The percentage of atoms of an element in coating and from the alloy target was demonstrated by direct comparison. The influences of the composition change of the alloy target and the bias electric field on the composition demixing effect were discussed in detail. It is also proposed that the average charge states of the elements may be used to calculate the composition demixing effect and to design the composition of the alloy target. 展开更多
关键词 cathodic arc ion plating alloy coating COMPOSITion DEMIXING
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Microstructure and residual stress of TiN films deposited at low temperature by arc ion plating 被引量:6
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作者 Hai-juan MEI Sheng-sheng ZHAO +2 位作者 Wei CHEN Qi-min WANG Hai-feng LIANG 《Transactions of Nonferrous Metals Society of China》 SCIE EI CAS CSCD 2018年第7期1368-1377,共10页
The TiN films were deposited on 316 L stainless steel substrates at low temperature by arc ion plating. The influences of substrate bias voltage and temperature on microstructure, residual stress and mechanical proper... The TiN films were deposited on 316 L stainless steel substrates at low temperature by arc ion plating. The influences of substrate bias voltage and temperature on microstructure, residual stress and mechanical properties of the films were investigated by EDS, SEM, XRD and nanoindenter tester, respectively. The results showed that the TiN films were highly oriented in(111) orientation with a face-centered cubic structure. With the increase of substrate bias voltage and temperature, the diffraction peak intensity increased sharply with simultaneous peak narrowing, and the small grain sizes increased from 6.2 to 13.8 nm. As the substrate temperature increased from 10 to 300℃, the residual compressive stress decreased sharply from 10.2 to 7.7 GPa, which caused the hardness to decrease from 33.1 to 30.6 GPa, while the adhesion strength increased sharply from 9.6 to 21 N. 展开更多
关键词 TiN film arc ion plating residual stress low temperature bias voltage
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STUDY ON HIGH TEMPERATURE PERFORMANCES OF MCrAlX COATINGS DEPOSITED BY MULTI-ARC ION PLATING 被引量:2
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作者 J. Zhang, J.B. Li, Q.Heng and X.H.Zhang Shenyang University,Shenyang 110044,China L.Q.Qi LiMing Aeroengine Manufacfruing Corperation, Shenyang 110043,China 《Acta Metallurgica Sinica(English Letters)》 SCIE EI CAS CSCD 1999年第5期1019-1024,共6页
NCoCrAlSiYHf and CoNiCrAlTaY coatings which belong to protective Al 2O 3 scale forming type were deposited by multi arc ion plating technique . The effect of deposition process parameters on qualities of the coat... NCoCrAlSiYHf and CoNiCrAlTaY coatings which belong to protective Al 2O 3 scale forming type were deposited by multi arc ion plating technique . The effect of deposition process parameters on qualities of the coatings was discussed. The high temperature oxidation performances isothermal oxidation with 950℃ / 500h and 1100℃ / 100h were studied. And also, the hot corrosion performances at 700℃ and 800℃, with molten mixed salt composed of 75%wt Na 2SO 4 and 25%wt NaCl were investigated. Then the high temperature protection decaying mechanisms were proposed. 展开更多
关键词 multi arc ion plating superalloy coating isothermal oxidation hotcorrosion
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The Arc Regulation Characteristics of the High-Current Ion Source for the EAST Neutral Beam Injector 被引量:1
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作者 谢亚红 胡纯栋 +5 位作者 刘胜 蒋才超 梁立振 李军 谢远来 刘智民 《Plasma Science and Technology》 SCIE EI CAS CSCD 2014年第4期429-432,共4页
The arc regulation method is applied to the high-current ion source for high-power hydrogen ion beam extraction for the first time. The characteristics of the arc and beam, including the probe ion saturation current, ... The arc regulation method is applied to the high-current ion source for high-power hydrogen ion beam extraction for the first time. The characteristics of the arc and beam, including the probe ion saturation current, the arc power and the beam current, are studied with feedback control. The results show that the arc regulation method can be successfully applied to ion beam extraction. This lays a sound foundation for the testing of a new ion source and the operation of a conditioned ion source for neutral beam injector devices. 展开更多
关键词 ion source arc regulation ion saturation current beam extraction
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Formation of Multicharged Metal Ions in Vacuum Arc Plasma Heated by Gyrotron Radiation 被引量:1
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作者 G. Yu. YUSHKOV K. P. SAVKIN +4 位作者 A. G. NIKOLAEV E. M. OKS A.V. VODOPYANOV I. V. IZOTOV D. A. MANSFELD 《Plasma Science and Technology》 SCIE EI CAS CSCD 2011年第5期596-599,共4页
A new method for the generation of high charged state metal ion beams is developed. This method is based on microwave heating of vacuum arc plasma in a magnetic trap under electron cyclotron resonance (ECR) conditio... A new method for the generation of high charged state metal ion beams is developed. This method is based on microwave heating of vacuum arc plasma in a magnetic trap under electron cyclotron resonance (ECR) conditions. Two gyrotrons for plasma heating were used, which were with the following parameters. The first is with a wave frequency of 37.5 GHz, a pulse duration of 1 ms and power of 100 kW, another is with 75 GHz, 0.15 ms and 400 kW. Two different magnetic traps were considered for vacuum arc plasma confinement. The first one is a simple mirror trap. Such system was already investigated and could provide high charge state ions. The second trap was with a cusp magnetic field configuration with native "minimum-B" field structure. Two different ways of metal plasma injection into the magnetic trap were used. The first one is an axial injection from an arc source located out of the trap, and the second is a radial injection from four arc sources mounted at the center of the trap. Both traps provide up to 200 eMA of ion beam current for platinum ions with highest charge state 10+. Ion beams were successfully extracted from the plasma and accelerated by a voltage of up to 20 kV. 展开更多
关键词 ion source ECR heating vacuum arc multicharged ions
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Influences of nitrogen flow rate on the structures and properties of Ti and N co-doped diamond-like carbon films deposited by arc ion plating 被引量:1
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作者 张林 马国佳 +2 位作者 林国强 马贺 韩克昌 《Chinese Physics B》 SCIE EI CAS CSCD 2014年第4期616-621,共6页
In this paper, Ti-C-N nanocomposite films are deposited under different nitrogen flow rates by pulsed bias arc ion plating using Ti and graphite targets in the Ar/N2 mixture gas. The surface morphologies, compositions... In this paper, Ti-C-N nanocomposite films are deposited under different nitrogen flow rates by pulsed bias arc ion plating using Ti and graphite targets in the Ar/N2 mixture gas. The surface morphologies, compositions, microstructures, and mechanical properties of the Ti-C-N films are investigated systematically by field emission scanning electron mi- croscopy (FE-SEM), x-ray photoelectron spectroscopy (XPS), grazing incident x-ray diffraction (GIXRD), Raman spectra, and nano-indentation. The results show that the nanocrystalline Ti(C,N) phase precipitates in the film from GIXRD and XPS analysis, and Raman spectra prove the presence of diamond-like carbon, indicating the formation of nanocomposite film with microstructures comprising nanocrystalline Ti(C,N) phase embedded into a diamond-like matrix. The nitrogen flow rate has a significant effect on the composition, structure, and properties of the film. The nano-hardness and elastic modulus first increase and then decrease as nitrogen flow rate increases, reaching a maximum of 34.3 GPa and 383.2 GPa, at a nitrogen flow rate of 90 sccm, respectively. 展开更多
关键词 arc ion plating Ti-C-N film nitrogen flow rate microstructure
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High temperature oxidation behavior of (Ti, Al)N coating deposited by arc ion plating 被引量:1
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作者 刘爱东 杨世伟 《中国有色金属学会会刊:英文版》 CSCD 2005年第S3期398-401,共4页
(Ti, Al)N gradient nano-coating was deposited on the surface of 1Cr11Ni2W2MoV stainless steel by the MTP-8-800 arc ion plating equipment. And the oxidation performance at high temperature for 500h was tested under t... (Ti, Al)N gradient nano-coating was deposited on the surface of 1Cr11Ni2W2MoV stainless steel by the MTP-8-800 arc ion plating equipment. And the oxidation performance at high temperature for 500h was tested under the condition of the surrounding air temperature 700℃. The test results show that, because of the structural features of the (Ti, Al)N coating, the coating becomes the compact and continuous Al2O3 film, which can protect the basis material effectively in the process of the high temperature oxidizing. The oxidation kinetics of the coating accord with parabolic law. 展开更多
关键词 arc ion PLATING (Ti Al)N gradient nano-coating oxidation resistant
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Friction and Wear Performances of Cathodic Arc Ion Plated TiAlSiN Coating under Oil Lubricated Condition 被引量:1
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作者 沈辉 KONG Weicheng +2 位作者 TANG Chengjian LI Baomin 孔德军 《Journal of Wuhan University of Technology(Materials Science)》 SCIE EI CAS 2017年第6期1301-1305,共5页
TiAlSiN coating was deposited on H13 hot work mould steel using cathodic arc ion plating(CAIP). The surface-interface morphologies and phases of the obtained coating were analyzed using field emission scanning elect... TiAlSiN coating was deposited on H13 hot work mould steel using cathodic arc ion plating(CAIP). The surface-interface morphologies and phases of the obtained coating were analyzed using field emission scanning electron microscopy(FESEM) and X-ray diffraction(XRD), respectively, and the morphologies, distributions of chemical elements and profiles of worn tracks were also researched using scanning electron microscopy(SEM), energy disperse spectroscopy(EDS), and optical microscope(OM), respectively. The friction-wear performances of TiAlSiN coating under oil lubricated and dry fiction conditions were investigated, and the wear mechanisms of TiAlSiN coating were discussed. The experimental results show that the coating is primarily composed of(Ti, Al)N, AlTiN, and TiN hard phases, Si_3N_4 exists between the(Ti, Al)N crystal grains, increasing the coating microhardness to 3200 HV. The TiAlSiN coating has excellent performances of reducing friction and wear resistance, the average coefficient of friction(COF) of TiAlSiN coating under oil lubricated condition is only 0.05, lowered than the average COF of 0.211 under dry friction condition, the wear rate decreases by about 81.2% compared with that under dry friction condition. The wear mechanism of TiAlSiN coating under oil lubricated and dry friction conditions is composed of abrasive wear, fatigue wear, and abrasive wear, respectively. The internal friction of oil lubrication is a main factor of decreasing fatigue wear. 展开更多
关键词 cathodic arc ion plating (CAIP) TiAISiN coating coefficient of friction (COF) oillubrication dry friction
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Characteristics of Resistance Triggering of a Pulsed Vacuum Arc Ion Source 被引量:1
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作者 蓝朝晖 龙继东 +4 位作者 郑乐 董攀 杨振 王韬 李杰 《Chinese Physics Letters》 SCIE CAS CSCD 2015年第9期84-87,共4页
Triggering scheme is a significant factor that may influence the process of vacuum arc initiation. In this work, the characteristics of resistance triggering of a pulsed vacuum arc ion source are investigated and comp... Triggering scheme is a significant factor that may influence the process of vacuum arc initiation. In this work, the characteristics of resistance triggering of a pulsed vacuum arc ion source are investigated and compared with the independent pulse generator triggering. The results show that although the resistance triggering method is capable of triggering a vacuum arc ion source by properly choosing the resistance and electric parameters, it inevitably increases the rise time of the arc current. A high speed multiframe camera is used to reveal the transition process o~ arc initiation during one shot. From the images it is conjectured that the lower voltage between the cathode and the anode may be the reason that leads to the lower transition speed of discharge at the moment of arc initiation. 展开更多
关键词 In Characteristics of Resistance Triggering of a Pulsed Vacuum arc ion Source arc
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Effect of deposition parameters on mechanical properties of TiN films coated on 2A12 aluminum alloys by arc ion plating (AIP) 被引量:1
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作者 AWAD Samir Hamid 《Journal of Chongqing University》 CAS 2005年第1期28-32,共5页
TiN films were deposited on 2A12 aluminum alloy by arc ion plating (AIP). The Vickers hardness of the films deposited at different bias voltages and different nitrogen gas pressures, and that of the substrate were mea... TiN films were deposited on 2A12 aluminum alloy by arc ion plating (AIP). The Vickers hardness of the films deposited at different bias voltages and different nitrogen gas pressures, and that of the substrate were measured. The surface roughness of the TiN films diposited at –30 V and –80 V respectively and at different nitrogen gas pressure was measured also. The mass loss of TiN films deposited at 0 V, –30 V and –80 V respectively were analyzed in dry sand rubber wheel abrasive wear tests and wet ones in comparison with uncoated Al alloy and austenitic stainless steel (AISI 316L). It is revealed that the highest hardness of the TiN film is obtained at a bias voltage of –30 V and a N2 gas pressure of 0.5 Pa. The surface roughness of the film is larger at –80 V than that at –30 V and reduces as the increase of the N2 gas pressure. The mass loss of TiN-film coated 2A12 aluminum alloy is remarkably less than that of uncoated Al alloy and also that of AISI 316L, which indicates that the abrasive wear rate is greatly reduced by the application of TiN coating. TiN coating deposited by arc ion plating (AIP) technique on aluminum alloy can be a potential coating for machine parts requiring preciseness and lightness. 展开更多
关键词 aluminum alloys arc ion plating HARDNESS wear resistance TiN film.
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EXPERIMENTAL STUDY ON SUPERFICIAL COAT OF GEARS OF NITRIDED 32Cr2MoV COATED WITH TiN FILM BY MULTI-ARC ION PLATING 被引量:2
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作者 LI Hui LI Runfang +1 位作者 XU Hongbin ZHANG Jin 《Chinese Journal of Mechanical Engineering》 SCIE EI CAS CSCD 2007年第4期52-56,共5页
After 32CrMoV is selected to manufacture nitrided gears coated with TiN by multi-arc ion plating, all of these uncoated gears and coated gears run in the gearbox under the same initial conditions so as to compare thei... After 32CrMoV is selected to manufacture nitrided gears coated with TiN by multi-arc ion plating, all of these uncoated gears and coated gears run in the gearbox under the same initial conditions so as to compare their difference concerning properties and microstructure. Experiment results indicate that tooth surface of the coated-TiN gears does not suffer surface abnormalities in meshed zone. Instead, the gears with nitrided case exhibit an abrasion mark on the meshed zone of tooth surface, which results in more weight loss of nitrided gears. The morphology of the surface suggests TiN film with more than 2 000 HV is so dense and smooth that coated-TiN gears have higher wear resistance compared with the uncoated gears. The microstructure of coated-TiN gears is finer, hardness is higher and its distribution of coated-TiN gears is more reliable than uncoated ones, which makes nitride layer combined with TiN film tightly. Consequently, the wear-resistance of gears has been dramatically promoted. 展开更多
关键词 GEAR Multi-arc ion plating TiN Wear-resistance
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STRUCTURE, MECHANICAL PROPERTIES AND THERMAL STABILITY OF DIAMOND-LIKE CARBON FILMS PREPARED BY ARC ION PLATING
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作者 Y.S.Zou J.D.Zheng +3 位作者 J.Gong C.Sun R.F.Huang L.S.Wen 《Acta Metallurgica Sinica(English Letters)》 SCIE EI CAS CSCD 2005年第3期331-338,共8页
Diamond-like Carbon (DLC) films have been prepared on Si(100) substrates by arc ion plating in conjunction with pulse bias voltage under H2 atmosphere. The depo sited films have been characterized by scanning electron... Diamond-like Carbon (DLC) films have been prepared on Si(100) substrates by arc ion plating in conjunction with pulse bias voltage under H2 atmosphere. The depo sited films have been characterized by scanning electron microscopy and atomic f orce microscopy. The results show that the surface of the film is smooth and den se without any cracks, and the surface roughness is low. The bonding characteris tic of the films has been studied by X-ray photoelectron spectroscopy (XPS) and Raman spectroscopy. It shows the sp3 bond content of the film deposited at -200V is 26.7%. The hardness and elastic modulus of the film determined by nanoindent ation technique are 30.8 and 250.1GPa, respectively. The tribological characteri stic of the films reveals that they have low friction coefficient and good wear- resistance. After deposition, the films have been annealed in the range of 350-7 00℃ for 1h in vacuum to investigate the thermal stability. Raman spectra indica te that the ID/IG ratio and G peak position have few detectable changes below 50 0℃. Further increasing the annealing temperature, the hydrogen can be released, the structure rearranges, and the phase transition of sp3 configured carbon to sp2 configured carbon appears. 展开更多
关键词 diamond-like carbon arc ion plating MICROSTRUCTURE MECHANICAL
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Deposition of photocatalytic TiO_2 and N-doped TiO_2 films by arc ion plating 被引量:1
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作者 李明升 张淑娟 +5 位作者 娄瑾 刘庭芝 周泽华 杨干兰 胡长员 李文魁 《中国有色金属学会会刊:英文版》 CSCD 2007年第A02期827-830,共4页
TiO2 and N-doped TiO2 films were deposited on the glass substrates by arc ion plating method. The results show that the deposition rate does not change with the increasing deposition time. The increase of mass flow ra... TiO2 and N-doped TiO2 films were deposited on the glass substrates by arc ion plating method. The results show that the deposition rate does not change with the increasing deposition time. The increase of mass flow rate of N2 gives rise to the increase of deposition rate. All as-deposited TiO2 and N-doped TiO2 films are amorphous. The anatase TiO2 phase with preferred orientation(101) is acquired by post-annealing at 400 ℃ for 2 h. The incorporation of N into the TiO2 films and the heat treatment extensively shift the band edge to the visible light region. 展开更多
关键词 电弧离子电镀法 光催化性能 二氧化钛薄膜 氮掺杂
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