Flexible pressure sensors have many potential applications in the monitoring of physiological signals because of their good biocompatibil-ity and wearability.However,their relatively low sensitivity,linearity,and stab...Flexible pressure sensors have many potential applications in the monitoring of physiological signals because of their good biocompatibil-ity and wearability.However,their relatively low sensitivity,linearity,and stability have hindered their large-scale commercial application.Herein,aflexible capacitive pressure sensor based on an interdigital electrode structure with two porous microneedle arrays(MNAs)is pro-posed.The porous substrate that constitutes the MNA is a mixed product of polydimethylsiloxane and NaHCO3.Due to its porous and interdigital structure,the maximum sensitivity(0.07 kPa-1)of a porous MNA-based pressure sensor was found to be seven times higher than that of an imporous MNA pressure sensor,and it was much greater than that of aflat pressure sensor without a porous MNA structure.Finite-element analysis showed that the interdigital MNA structure can greatly increase the strain and improve the sensitivity of the sen-sor.In addition,the porous MNA-based pressure sensor was found to have good stability over 1500 loading cycles as a result of its bilayer parylene-enhanced conductive electrode structure.Most importantly,it was found that the sensor could accurately monitor the motion of afinger,wrist joint,arm,face,abdomen,eye,and Adam’s apple.Furthermore,preliminary semantic recognition was achieved by monitoring the movement of the Adam’s apple.Finally,multiple pressure sensors were integrated into a 33 array to detect a spatial pressure distribu-×tion.Compared to the sensors reported in previous works,the interdigital electrode structure presented in this work improves sensitivity and stability by modifying the electrode layer rather than the dielectric layer.展开更多
The future intelligent era that will be brought about by 5G technology can be well predicted.For example,the connection between humans and smart wearable devices will become increasingly more intimate.Flexible wearabl...The future intelligent era that will be brought about by 5G technology can be well predicted.For example,the connection between humans and smart wearable devices will become increasingly more intimate.Flexible wearable pressure sensors have received much attention as a part of this process.Nevertheless,there is a lack of complete and detailed discussion on the recent research status of capacitive pressure sensors composed of polymer composites.Therefore,this article will mainly discuss the key concepts,preparation methods and main performance of flexible wearable capacitive sensors.The concept of a processing“toolbox”is used to review the developmental status of the dielectric layer as revealed in highly cited literature from the past five years.The preparation methods are categorized into types of processing:primary and secondary.Using these categories,the preparation methods and structure of the dielectric layer are discussed.Their influence on the final capacitive sensing behavior is also addressed.Recent developments in the electrode layer are also systematically reviewed.Finally,the results of the above discussion are summarized and future development trends are discussed.展开更多
A uniplanar capacitive sensor with 5-electrodes on one plane substrate and a large reflector electrode,was designed to get the corresponding capacitance information for weathering damage detection of non-metallic mate...A uniplanar capacitive sensor with 5-electrodes on one plane substrate and a large reflector electrode,was designed to get the corresponding capacitance information for weathering damage detection of non-metallic materials exposed to a service environment.A 2-D finite-element method was employed to simulate the electric potential distribution and capacitance measurements for the sensor.2 marble slabs,one was healthy and the other was notched,were experimentally detected.Both the simulation and the preliminary experimental results show that the measured capacitances decrease after weathering damage occurs in nonmetallic material.The reflector can enlarge the sensitive depth.The weathering assessment of nonmetallic materials can be done by processing the measured capacitances.The proposed approach can effectively detect the weathering damage of nonmetallic material and can be practically used for in-situ weathering damage evaluation.展开更多
Recently,electronic skins and fl exible wearable devices have been developed for widespread applications in medical monitoring,artifi cial intelligence,human–machine interaction,and artifi cial prosthetics.Flexible p...Recently,electronic skins and fl exible wearable devices have been developed for widespread applications in medical monitoring,artifi cial intelligence,human–machine interaction,and artifi cial prosthetics.Flexible proximity sensors can accurately perceive external objects without contact,introducing a new way to achieve an ultrasensitive perception of objects.This article reviews the progress of fl exible capacitive proximity sensors,fl exible triboelectric proximity sensors,and fl exible gate-enhanced proximity sensors,focusing on their applications in the electronic skin fi eld.Herein,their working mechanism,materials,preparation methods,and research progress are discussed in detail.Finally,we summarize the future challenges in developing fl exible proximity sensors.展开更多
Capacitive humidity sensors were made of nanometer barium titanate.The pellets were prepared under different pressures between 3920N to 7850N force.The capacitance changes in three orders of magnitude in the relative ...Capacitive humidity sensors were made of nanometer barium titanate.The pellets were prepared under different pressures between 3920N to 7850N force.The capacitance changes in three orders of magnitude in the relative humidity range of 10%~98%,indicating high humidity sensitivity of the sensors.At a certain measuring frequency,the capacitance of the sensors increases as increasing of the preparation pressure,while the sensitivity of the sensors basically remains the same.The frequencies corresponding to the peaks of the dielectric loss of the sensors move to the higher frequency direction as increasing of the relative humidity.At a certain humidity,the frequencies corresponding to the peaks of the dielectric loss move to the higher frequency direction as increasing of the preparation pressure.展开更多
This study presents an improvement of high dynamic range contact-type capacitive displacement sensor by applying planarization. The sensor is called the contact-type linear encoder-like capacitive displacement sensor ...This study presents an improvement of high dynamic range contact-type capacitive displacement sensor by applying planarization. The sensor is called the contact-type linear encoder-like capacitive displacement sensor (CLECDiS), is a nano-meter-resolution sensor with a wide dynamic range. However, height differences due to patterned electrodes may cause a variety of problems or performance degradation. In devices of two glass wafer surfaces with patterned structures assembled face-to-face and in sliding contact, the heights of the patterns crucially affect their performance and practicality, so it should be planarized for reducing the problem. A number of techniques for planarizing glass wafer surfaces with patterned chrome electrodes were evaluated and the following three were selected as adequate: lift-off, etch-back, and chemical mechanical polishing (CMP). The fabricated samples showed that CMP provided the best planarization. CMP was successfully employed to produce CLECDiS with improved signal reliability due to reduced collisions between electrodes.展开更多
For our research, a new hybrid experimental-computational method is presented. We applied a least squares fitting method (LSFM) to reconstruct the wood moisture content (WMC) from the data measured with a planar c...For our research, a new hybrid experimental-computational method is presented. We applied a least squares fitting method (LSFM) to reconstruct the wood moisture content (WMC) from the data measured with a planar capacitance sensor. A boundary element method (BEM) was used to compute the relationship between capacitance and the dielectric constant. A functional relationship between MC and the dielectric constant was identified by LSFM. The agreement of this final computation result with the experimental data indicates that this method can be used to estimate the WMC quickly and effectively with engineering analysis. Compared with popular statistical methods, a large number of experiments are avoided, some costs of testing are reduced and the efficiency of testing is enhanced.展开更多
In this paper, a micro capacitive sensor with nanometer resolution is presented for ultra-precision measurement of micro components, which is fabricated by the MEMS (micro electromechanical systems) non-silicon tech...In this paper, a micro capacitive sensor with nanometer resolution is presented for ultra-precision measurement of micro components, which is fabricated by the MEMS (micro electromechanical systems) non-silicon technique. Based on the sensor, a micro capacitive tactile probe is constructed by stylus assembly and packaging design for dimension metrology on micro/nano scale, in which a data acquiring system is developed with AD7747. Some measurements of the micro capacitive tactile probe are performed on a nano positioning and measuring machine (NMM). The measurement results show good linearity and hysteresis with a range of 11.6 μm and resolution of better than 5 nm. Hence, the micro capacitive tactile probe can be integrated on NMM to realize measurement of micro structures with nanometer accuracy.展开更多
Flexible pressure monitoring device can help correct the sitting posture and prevent health problems(e.g.,deformity of spinal column and musculoskeletal disease).Currently,most measurement systems hinder their wide ap...Flexible pressure monitoring device can help correct the sitting posture and prevent health problems(e.g.,deformity of spinal column and musculoskeletal disease).Currently,most measurement systems hinder their wide applications owing to the high cost or low accuracy.In this study,a flexible sitting pressure measurement system was proposed based on a textile-based capacitive pressure sensor array in order to measure sitting pressure distribution simply and conveniently.The capacitive pressure sensor array is sandwich structure composed of a high-density sponge layer and two electrode array fabrics,which possesses high resolution(2.26 sensors/cm2),high sensitivity(0.701 kPa-1)and fast response(≤35 ms).It is worth noting that the raw materials of the sensing fabric include commercialized copper sheets and polyester yarns.The as-prepared pressure measurement system can accurately measure the pressure distribution nephogram for sitting posture analysis.The sitting pressure of 10 volunteers was measured and six types of posture were distinguished clearly.展开更多
Simulation and optimization were applied to a capacitive sensor system based on electrical tomography technology. Sensors, consisting of Morgantown Energy Technology Center (METC) axial synchro driving guard electrode...Simulation and optimization were applied to a capacitive sensor system based on electrical tomography technology. Sensors, consisting of Morgantown Energy Technology Center (METC) axial synchro driving guard electrodes and two sets of detecting electrodes, make it possible to obtain simultaneously two groups of signals of the void fraction in oil-gas two-phase flow. The computational and experimental results showed that available sensors, charactered by high resolution and fast real-time response can be used for real-time liquid-gas two-phase flow pattern determination.展开更多
The recalibration of electrical capacitance tomography (ECT) system is one of the key problems in keeping the system running steadily.However, for engineering application in solids/gas transport,online calibration can...The recalibration of electrical capacitance tomography (ECT) system is one of the key problems in keeping the system running steadily.However, for engineering application in solids/gas transport,online calibration can not be implemented and the data from this sensor may be unreliable due to the sensor pipe interior wall abrasion during pneumatic transport,so the solids concentration calculated from the reconstructed image based on these data will be highly inaccurate.The simulations show that, the inter-electrode relative capacitance variation of electrode pair spacing 1 is the most sensitive to the abrasion of sensor pipe interior wall, so this relative capacitance variation when the sensor is filled with air can be used as an indicator demanding offline system recalibration when the wall abrasion goes significant.Furthermore, while the pipe interior wall abrasion is not very serious, online correcting measured inter-electrode capacitance with wall capacitance variation can improve the accuracy of concentration calculation.展开更多
To continuously monitor the soil retreat due to erosion in field,provide valuable information about the erosion processes and overcome the disadvantages of inefficiency,high time-consumption and labor-intensity of exi...To continuously monitor the soil retreat due to erosion in field,provide valuable information about the erosion processes and overcome the disadvantages of inefficiency,high time-consumption and labor-intensity of existing methods,this paper describes a novel capacitance sensor for measuring the soil retreat.A capacitance sensor based probe is proposed,which can measure the depth of the soil around it automatically and the data can be recorded by a data logger.Experimental results in the lab verify its usefulness.展开更多
使用正交排列的电容式传感单元的三维电场传感器(Three-dimensional electric field sensor,3D EFS)测量空间电场时,轴间耦合效应会严重影响EFS的测量精度。为此,提出了一种电场屏蔽电极,以降低3D EFS的轴间耦合效应,提高测量精度。首先...使用正交排列的电容式传感单元的三维电场传感器(Three-dimensional electric field sensor,3D EFS)测量空间电场时,轴间耦合效应会严重影响EFS的测量精度。为此,提出了一种电场屏蔽电极,以降低3D EFS的轴间耦合效应,提高测量精度。首先,利用多物理场仿真软件构建电场分布模型。其次,根据仿真结果建立带屏蔽电极的3D EFS电容式传感单元的屏蔽电极模型。最后,建立任意角度的测试平台,将带有屏蔽电极的3D EFS和无屏蔽电极的3D EFS进行实验对比。结果显示,有屏蔽电极的3D EFS的测量偏差在3.2%以内,比无屏蔽电极的3D EFS的测量偏差减少12%。因此,所设计的基于电场屏蔽结构的3D EFS可以使解耦矩阵更加可靠,有效降低空间电场测量偏差。展开更多
基金supported in part by the National Natural Science Foundation of China(Grant No.62104056)the Zhejiang Provincial Natural Science Foundation of China(Grant No.LQ21F010010)+4 种基金the National Natural Science Foundation of China(Grant Nos.62141409 and 62204204)the National Key R&D Program of China(Grant No.2022ZD0208602)the Zhejiang Provincial Key Research&Development Fund(Grant Nos.2019C04003 and 2021C01041)the Shanghai Sailing Program(Grant No.21YF1451000)the Key Research and Development Program of Shaanxi(Grant No.2022GY-001).
文摘Flexible pressure sensors have many potential applications in the monitoring of physiological signals because of their good biocompatibil-ity and wearability.However,their relatively low sensitivity,linearity,and stability have hindered their large-scale commercial application.Herein,aflexible capacitive pressure sensor based on an interdigital electrode structure with two porous microneedle arrays(MNAs)is pro-posed.The porous substrate that constitutes the MNA is a mixed product of polydimethylsiloxane and NaHCO3.Due to its porous and interdigital structure,the maximum sensitivity(0.07 kPa-1)of a porous MNA-based pressure sensor was found to be seven times higher than that of an imporous MNA pressure sensor,and it was much greater than that of aflat pressure sensor without a porous MNA structure.Finite-element analysis showed that the interdigital MNA structure can greatly increase the strain and improve the sensitivity of the sen-sor.In addition,the porous MNA-based pressure sensor was found to have good stability over 1500 loading cycles as a result of its bilayer parylene-enhanced conductive electrode structure.Most importantly,it was found that the sensor could accurately monitor the motion of afinger,wrist joint,arm,face,abdomen,eye,and Adam’s apple.Furthermore,preliminary semantic recognition was achieved by monitoring the movement of the Adam’s apple.Finally,multiple pressure sensors were integrated into a 33 array to detect a spatial pressure distribu-×tion.Compared to the sensors reported in previous works,the interdigital electrode structure presented in this work improves sensitivity and stability by modifying the electrode layer rather than the dielectric layer.
基金The authors gratefully acknowledge the financial support of this work by National Natural Science Foundation of China(51773139,51922071).
文摘The future intelligent era that will be brought about by 5G technology can be well predicted.For example,the connection between humans and smart wearable devices will become increasingly more intimate.Flexible wearable pressure sensors have received much attention as a part of this process.Nevertheless,there is a lack of complete and detailed discussion on the recent research status of capacitive pressure sensors composed of polymer composites.Therefore,this article will mainly discuss the key concepts,preparation methods and main performance of flexible wearable capacitive sensors.The concept of a processing“toolbox”is used to review the developmental status of the dielectric layer as revealed in highly cited literature from the past five years.The preparation methods are categorized into types of processing:primary and secondary.Using these categories,the preparation methods and structure of the dielectric layer are discussed.Their influence on the final capacitive sensing behavior is also addressed.Recent developments in the electrode layer are also systematically reviewed.Finally,the results of the above discussion are summarized and future development trends are discussed.
基金supported by the National Natural Science Foundation of China(60575015)
文摘A uniplanar capacitive sensor with 5-electrodes on one plane substrate and a large reflector electrode,was designed to get the corresponding capacitance information for weathering damage detection of non-metallic materials exposed to a service environment.A 2-D finite-element method was employed to simulate the electric potential distribution and capacitance measurements for the sensor.2 marble slabs,one was healthy and the other was notched,were experimentally detected.Both the simulation and the preliminary experimental results show that the measured capacitances decrease after weathering damage occurs in nonmetallic material.The reflector can enlarge the sensitive depth.The weathering assessment of nonmetallic materials can be done by processing the measured capacitances.The proposed approach can effectively detect the weathering damage of nonmetallic material and can be practically used for in-situ weathering damage evaluation.
基金supported by the National Key R&D Program of China(Nos.2022 YFF 1202700 and 2022YFB3203500)National Natural Science Foundation of China(Nos.62225403,62375046,51973024,an d U19A2091)+2 种基金“111”Project(No.B13013)Natur al Sci ence Foundation of Jilin Pro vin ce(No.20230101113JC)the Funding from Jilin Pr ovince(No.20220502002GH).
文摘Recently,electronic skins and fl exible wearable devices have been developed for widespread applications in medical monitoring,artifi cial intelligence,human–machine interaction,and artifi cial prosthetics.Flexible proximity sensors can accurately perceive external objects without contact,introducing a new way to achieve an ultrasensitive perception of objects.This article reviews the progress of fl exible capacitive proximity sensors,fl exible triboelectric proximity sensors,and fl exible gate-enhanced proximity sensors,focusing on their applications in the electronic skin fi eld.Herein,their working mechanism,materials,preparation methods,and research progress are discussed in detail.Finally,we summarize the future challenges in developing fl exible proximity sensors.
基金The project is supported by the National Natural Science Foundation of China (60074031, 60474052).
文摘Capacitive humidity sensors were made of nanometer barium titanate.The pellets were prepared under different pressures between 3920N to 7850N force.The capacitance changes in three orders of magnitude in the relative humidity range of 10%~98%,indicating high humidity sensitivity of the sensors.At a certain measuring frequency,the capacitance of the sensors increases as increasing of the preparation pressure,while the sensitivity of the sensors basically remains the same.The frequencies corresponding to the peaks of the dielectric loss of the sensors move to the higher frequency direction as increasing of the relative humidity.At a certain humidity,the frequencies corresponding to the peaks of the dielectric loss move to the higher frequency direction as increasing of the preparation pressure.
文摘This study presents an improvement of high dynamic range contact-type capacitive displacement sensor by applying planarization. The sensor is called the contact-type linear encoder-like capacitive displacement sensor (CLECDiS), is a nano-meter-resolution sensor with a wide dynamic range. However, height differences due to patterned electrodes may cause a variety of problems or performance degradation. In devices of two glass wafer surfaces with patterned structures assembled face-to-face and in sliding contact, the heights of the patterns crucially affect their performance and practicality, so it should be planarized for reducing the problem. A number of techniques for planarizing glass wafer surfaces with patterned chrome electrodes were evaluated and the following three were selected as adequate: lift-off, etch-back, and chemical mechanical polishing (CMP). The fabricated samples showed that CMP provided the best planarization. CMP was successfully employed to produce CLECDiS with improved signal reliability due to reduced collisions between electrodes.
基金supported by the Central University Basic Research Professional Expenses Special Foundation of Harbin Engineering University (Grant No. HEUCFL10101109)
文摘For our research, a new hybrid experimental-computational method is presented. We applied a least squares fitting method (LSFM) to reconstruct the wood moisture content (WMC) from the data measured with a planar capacitance sensor. A boundary element method (BEM) was used to compute the relationship between capacitance and the dielectric constant. A functional relationship between MC and the dielectric constant was identified by LSFM. The agreement of this final computation result with the experimental data indicates that this method can be used to estimate the WMC quickly and effectively with engineering analysis. Compared with popular statistical methods, a large number of experiments are avoided, some costs of testing are reduced and the efficiency of testing is enhanced.
基金supported by the Nano Special Projects of Shanghai Science and Technology Commission of China(Grant No.11nm0560800)the Young Scientists Fund of the National Natural Science Foundation of China(Grant No.11104284)
文摘In this paper, a micro capacitive sensor with nanometer resolution is presented for ultra-precision measurement of micro components, which is fabricated by the MEMS (micro electromechanical systems) non-silicon technique. Based on the sensor, a micro capacitive tactile probe is constructed by stylus assembly and packaging design for dimension metrology on micro/nano scale, in which a data acquiring system is developed with AD7747. Some measurements of the micro capacitive tactile probe are performed on a nano positioning and measuring machine (NMM). The measurement results show good linearity and hysteresis with a range of 11.6 μm and resolution of better than 5 nm. Hence, the micro capacitive tactile probe can be integrated on NMM to realize measurement of micro structures with nanometer accuracy.
基金Fundamental Research Fund for the Central Universities,China(Nos.2232020G-01 and 19D110106)Young Elite Scientists Sponsorship Program by China Association for Science and Technology,China(No.2017QNRC001)Graduate Student Innovation Fund of Donghua University,China(No.20D310111)。
文摘Flexible pressure monitoring device can help correct the sitting posture and prevent health problems(e.g.,deformity of spinal column and musculoskeletal disease).Currently,most measurement systems hinder their wide applications owing to the high cost or low accuracy.In this study,a flexible sitting pressure measurement system was proposed based on a textile-based capacitive pressure sensor array in order to measure sitting pressure distribution simply and conveniently.The capacitive pressure sensor array is sandwich structure composed of a high-density sponge layer and two electrode array fabrics,which possesses high resolution(2.26 sensors/cm2),high sensitivity(0.701 kPa-1)and fast response(≤35 ms).It is worth noting that the raw materials of the sensing fabric include commercialized copper sheets and polyester yarns.The as-prepared pressure measurement system can accurately measure the pressure distribution nephogram for sitting posture analysis.The sitting pressure of 10 volunteers was measured and six types of posture were distinguished clearly.
基金Project (No. 2002AA616050) supported by the Hi-Tech Researchand Development Program (863) of China
文摘Simulation and optimization were applied to a capacitive sensor system based on electrical tomography technology. Sensors, consisting of Morgantown Energy Technology Center (METC) axial synchro driving guard electrodes and two sets of detecting electrodes, make it possible to obtain simultaneously two groups of signals of the void fraction in oil-gas two-phase flow. The computational and experimental results showed that available sensors, charactered by high resolution and fast real-time response can be used for real-time liquid-gas two-phase flow pattern determination.
文摘The recalibration of electrical capacitance tomography (ECT) system is one of the key problems in keeping the system running steadily.However, for engineering application in solids/gas transport,online calibration can not be implemented and the data from this sensor may be unreliable due to the sensor pipe interior wall abrasion during pneumatic transport,so the solids concentration calculated from the reconstructed image based on these data will be highly inaccurate.The simulations show that, the inter-electrode relative capacitance variation of electrode pair spacing 1 is the most sensitive to the abrasion of sensor pipe interior wall, so this relative capacitance variation when the sensor is filled with air can be used as an indicator demanding offline system recalibration when the wall abrasion goes significant.Furthermore, while the pipe interior wall abrasion is not very serious, online correcting measured inter-electrode capacitance with wall capacitance variation can improve the accuracy of concentration calculation.
基金the National Natural Science Foundation of China (Grant No.60672076)
文摘To continuously monitor the soil retreat due to erosion in field,provide valuable information about the erosion processes and overcome the disadvantages of inefficiency,high time-consumption and labor-intensity of existing methods,this paper describes a novel capacitance sensor for measuring the soil retreat.A capacitance sensor based probe is proposed,which can measure the depth of the soil around it automatically and the data can be recorded by a data logger.Experimental results in the lab verify its usefulness.
基金Supported by the National Natural Science Foundation of China ( No. 60903195 ) and the Key Technological Problems Tackling Project of Wuhan (No. 200750499172).