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高分辨率MEMS纤毛式湍流传感器 被引量:1
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作者 申玮 张文君 +4 位作者 廉宇琦 张国军 杨华 薛晨阳 王任鑫 《微纳电子技术》 北大核心 2019年第11期911-917,924,共8页
国外的剪切流传感器已经趋于成熟,但仍存在测试信息量单薄、空间分辨率不高和价格昂贵的缺点。提出了一种新型高分辨率微电子机械系统(MEMS)湍流传感器,通过MEMS工艺的微结构实现湍流传感器的高分辨率探测,同时凭借Parylene真空气相沉... 国外的剪切流传感器已经趋于成熟,但仍存在测试信息量单薄、空间分辨率不高和价格昂贵的缺点。提出了一种新型高分辨率微电子机械系统(MEMS)湍流传感器,通过MEMS工艺的微结构实现湍流传感器的高分辨率探测,同时凭借Parylene真空气相沉积技术来实现传感器在海中的绝缘性和抗腐蚀性。经过5~45℃的高低温循环实验,验证了MEMS湍流传感器在复杂环境中的可靠性,并通过实验测量得到电压形式的湍流数据。 展开更多
关键词 纤毛 高分辨率 微电子机械系统(MEMS) 湍流传感器 压电
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Biomimetic Cilia Based on MEMS Technology 被引量:3
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作者 Zhi-guo Zhou Zhi-wen Liu 《Journal of Bionic Engineering》 SCIE EI CSCD 2008年第4期358-365,共8页
A review on the research of Micro Electromechanical Systems (MEMS) technology based biomimetic cilia is presented. Biomimetic cilia, enabled by the advancement of MEMS technology, have been under dynamic development... A review on the research of Micro Electromechanical Systems (MEMS) technology based biomimetic cilia is presented. Biomimetic cilia, enabled by the advancement of MEMS technology, have been under dynamic development for the past decade. After a brief description of the background of cilia and MEMS technology, different biomimetic cilia applications are reviewed. Biomimetic cilia micro-actuators, including micromachined polyimide bimorph biomimetic cilia micro-actuator, electro-statically actuated polymer biomimetic cilia micro-actuator, and magnetically actuated nanorod array biomimetic cilia micro-actuator, are presented. Subsequently micromachined underwater flow biomimetic cilia micro-sensor is studied, followed by acoustic flow micro-sensor. The fabrication of these MEMS-based biomimetic cilia devices, characterization of their physical properties, and the results of their application experiments are discussed. 展开更多
关键词 biomimetic cilia MEMS MICRO-ACTUATOR micro-sensor
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仿生纤毛微流量传感器及其制备方法
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作者 李俊忠 廖晓波 +2 位作者 许世林 庄健 蔡勇 《光学精密工程》 EI CAS CSCD 北大核心 2022年第16期1968-1977,共10页
针对微流体流量测量难度大且精度不高的问题,本文基于压阻原理设计了一种悬臂梁结构的仿生纤毛微流量传感器。本文首先对比分析了现有热线式、压电式和压阻式微流量传感器的优缺点,基于压阻式传感器的应变与阻值之间呈现线性关系的优点... 针对微流体流量测量难度大且精度不高的问题,本文基于压阻原理设计了一种悬臂梁结构的仿生纤毛微流量传感器。本文首先对比分析了现有热线式、压电式和压阻式微流量传感器的优缺点,基于压阻式传感器的应变与阻值之间呈现线性关系的优点,选择压阻应变原理设计微流量传感器;其次,通过有限元数值分析方法确定了微流量传感器最佳仿生纤毛的阵列规模、直径、高度和悬臂梁长度等参数;然后,采用微液滴限制电沉积(Meniscus Confined Electrodeposition,MCED)方法制备了仿生纤毛阵列,并制作了微流量传感器;最后,通过自主设计的实验装置进行验证,结果表明,该传感器可以对大于0.4 m/s的微流速进行灵敏感应并准确测量,且传感器对流体流速测量的非线性误差为2.84%。该仿生纤毛应变式流量传感器在微流量测量领域具有广泛的应用前景。 展开更多
关键词 液滴限制电沉积 仿生纤毛微流量传感器 有限元分析与仿真
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高灵敏度Si基纤毛式MEMS湍流传感器
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作者 申玮 张文君 王任鑫 《微纳电子技术》 北大核心 2020年第5期379-385,共7页
为了满足湍流探测高灵敏度、高分辨率的要求,提出了一种新型纤毛微电子机械系统(MEMS)湍流传感器。基于MEMS技术制作了硅十字梁敏感受力结构,通过橡胶探头的受力振动传递水中的湍流信号,凭借传感器头部的导流罩来保证传感器的高分辨率... 为了满足湍流探测高灵敏度、高分辨率的要求,提出了一种新型纤毛微电子机械系统(MEMS)湍流传感器。基于MEMS技术制作了硅十字梁敏感受力结构,通过橡胶探头的受力振动传递水中的湍流信号,凭借传感器头部的导流罩来保证传感器的高分辨率探测。对MEMS湍流传感器进行理论和仿真分析,其一阶共振频率达到481.04 Hz。经过海洋环境模拟机测试实验,结果显示其在50 MPa压力下保持了完好的结构和良好的性能,验证了其水下的可靠性。在湍流实验平台进行测试,通过比较标定法得出其灵敏度为1.92×10^-4 V·m·s^2/kg,满足海洋湍流测试要求。 展开更多
关键词 湍流传感器 微电子机械系统(MEMS) 橡胶探头 纤毛 压电
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Effect of Cilia Orientation in Metachronal Transport of Microparticles 被引量:1
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作者 Christoph Brücker Uwe Schnakenberg +1 位作者 Alexander Rockenbach Vladimir Mikulich 《World Journal of Mechanics》 2017年第1期1-10,共10页
A biomimetic approach is used to generate a directed transversal transportation of micron-sized particles in liquids based on the principle of cilia-type arrays in coordinated motion. Rows of flaps mimicking planar ci... A biomimetic approach is used to generate a directed transversal transportation of micron-sized particles in liquids based on the principle of cilia-type arrays in coordinated motion. Rows of flaps mimicking planar cilia are positioned off-centre along an array of cavities covered with membranes that support the flaps. These membranes are deflected from a concave to a convex shape and vice versa by pneumatic actuation applying positive and negative pressures (relative to the ambient) inside the cavities. As a result, the flap on top of the membrane tilts to the left or right within such a pressure cycle, performing a beat stroke. Since each cavity can be addressed in the device individually and in rapid succession, waves of coordinated flap motion can be run along the wall. Such metachronal waves are generated and transport of particles along the cilia surface is achieved in both symplectic and antiplectic direction. It is shown that the initial tilt of the flaps relative to the wall-normal determines the direction of transport. 展开更多
关键词 CILIA TRANSPORT Metachronal WAVE Fluidic TRANSPORT Micro-Particles
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Directional transport of centimeter-scale object on anisotropic microcilia surface under water 被引量:1
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作者 Yuefeng Wang Xiaodong Chen +6 位作者 Kang Sun Ke Li Feilong Zhang Bing Dai Jun Shen Guoqing Hu Shutao Wang 《Science China Materials》 SCIE EI CSCD 2019年第2期236-244,共9页
Natural organisms such as cactus spines or trachea cilia have unique directional transport ability, owing to their anisotropic surface structures or asymmetric motion.However, most artificial interfacial materials are... Natural organisms such as cactus spines or trachea cilia have unique directional transport ability, owing to their anisotropic surface structures or asymmetric motion.However, most artificial interfacial materials are incapable of transporting macroscale object underwater. Herein, we report that anisotropic microcilia arrays, composed of cobalt fine powder and PDMS, can successfully transport the centimeterscale hydrogel underwater by periodically asymmetric stroke under alternative magnetic field. Reciprocal collective stroke of anisotropic microcilia can generate directional flow, propelling the centimeter-scale hydrogel slice forward. Accompanying computational simulation results are consistent with the directional transport behaviors observed in our experiments. This study provides a clue to design artificial anisotropic interfacial materials with capability of transporting macroscale object at low Reynolds number. 展开更多
关键词 macro-object transport anisotropic surface artificial micro-cilia arrays
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A bioinspired magnetic responsive cilia array surface for microspheres underwater directional transport 被引量:1
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作者 Shuang Ben Jinjia Yao +5 位作者 Yuzhen Ning Zhihong Zhao Jinlong Zha Dongliang Tian Kesong Liu Lei Jiang 《Science China Chemistry》 SCIE EI CAS CSCD 2020年第3期347-353,共7页
Bio-inspired surfaces are usually designed by imitating the surface properties of a particular biological species,or combing with the surface characteristics of multiple biological species to construct a cross-species... Bio-inspired surfaces are usually designed by imitating the surface properties of a particular biological species,or combing with the surface characteristics of multiple biological species to construct a cross-species surface.Herein,inspired by the structure and rhythmic swing of human pulmonary cilia,and the directional migration of pigeons by geomagnetic field,an integrated system of biomimetic hydrophobic magnetic cilia array surface with reversible deformation properties and excellent magnetic response performance for solid microspheres underwater transport is designed and constructed.Driven by an external magnetic field,the magnetic responsive cilia array surface can directionally and continuously transport microspheres underwater in periodic motion.This work will shed new light on the designing of micromanipulation systems for micro-objects transport,and promote the practical application of micro-operating systems in underwater transportation and drug delivery. 展开更多
关键词 cilia-inspired SURFACE UNDERWATER MICROSPHERES TRANSPORT MAGNETIC response micro-operating system
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