Design and Fabrication of MEMS Gyroscopes on the Silicon-on-insulator Substrate with Decoupled Oscillation Modes

The mode coupling is a major factor to affect the precision of the micro electromechanical systems（MEMS） gyroscope. Currently, many MEMS gyroscopes with separate oscillation modes for drive and detection have been developed to decrease the mode coupling, but the gyroscope accuracy can not satisfy the high-precision demand well. Therefore, high performance decoupled MEMS gyroscopes is still a hot topic at present. An innovative design scheme for a MEMS gyroscope is designed, and in this design, the inertial mass is divided into three parts including the inner mass, the outer mass and the main frame mass. The masses are supported and separated by a set of mutually orthogonal beams to decouple their movements. Moreover, the design is modelled by multi-port-element network（MuPEN） method and the simulation results show that the mode coupling of the gyroscope between driving and sensing mode was eliminated effectively. Furthermore, we proposed a new silicon-on-insulator（SOI） process to fabricate the gyroscope. The scale factor of the fabricated gyroscope is 8.9 mV/（（~）os） and the quality factor（Q-factor） is as high as 600 at atmosphere pressure, and then, the resonant frequency, scale factor and bias drift has been test. Process and test results show that the proposed MEMS gyroscope are effective for decrease mode coupling, furthermore, it can achieve a high performance at atmosphere pressure. Furthermore, the MEMS gyroscope can achieve a high performance at atmosphere pressure. The research can be taken as good advice for the design and fabrication of MEMS gyroscope, meanwhile, it also provides technical support for speeding up of MEMS gyroscope industrialization.

Temperature compensation method for low cost three-axis MEMS digital angular rate gyroscopes

In recent years,a large number of small volume,low cost micro electro mechanical systems（MEMS）digital three-axis angular rate gyroscopes have been developed and widely used in civil and military fields.However,these kinds of gyroscopes have poor performances in initial zero-bias,temperature drift,In-Run bias stability,bias repeatability,etc.,their output errors need to be compensated before being used.Based on a lot of experiments,the temperature drift and the initial zero-bias are the major error sources in the MEMS gyroscopes output data.Due to the poor repeatability of temperature drift,the temperature compensation coefficients need to be recalculated every time before using.In order to recalculate parameters of the temperature compensation model quickly,a 1st-order polynomial model of temperature is established,then a forgetting factor recursive least squares estimator will be adopted to identify the model parameters in real time.Static and dynamic experimental data shows that this method removed/compensated the temperature drift and initial zero-bias from the output of the gyroscopes effectively.

基于MEMS陀螺的高温随钻定向测斜仪研究

针对油气井测量时所面临的小孔径、超深井、温度范围广、温度变化率高、工作时间长等挑战,研究了基于MEMS陀螺仪的定向测斜仪,设计了MEMS陀螺定向测斜仪软硬件系统.为确保该环境下的测量精度提出了一种动态温度补偿方案,并采用基于小波滤波多尺度分析的方法对动态温变环境下陀螺输出信号进行去噪滤波处理,以实现定向测斜仪系统的测量精度.论文给出了定向测斜仪硬件系统方案、定向测斜算法、小波多尺度滤波算法.测试结果表明:该系统在常温和动态温变环境下井斜方位角精度优于±2°,井斜角精度优于±0.1°,工作温度最高150℃,可适应我国深层油气井勘探开发的应用场景需求.

基于改进自适应滤波的MEMS陀螺振动误差抑制研究

本文提出一种基于改进自适应滤波的MEMS陀螺随机振动误差的补偿算法。该算法采用简化Sage-Husa自适应滤波算法估计量测噪声,并通过协方差匹配技术引入收敛性判据抑制了滤波的发散,它提高了实时性且减少了计算量。实验结果表明:经过改进算法滤波后,MEMS陀螺随机振动误差的方差减少97.76%,与常规卡尔曼滤波相比,改进算法的方差减少了72.66%,验证了改进的自适应卡尔曼滤波算法可以有效地抑制MEMS陀螺因随机振动引起的输出误差。

Structure design and simulation of MEMS vibrating ring gyroscope

MEMS gyroscope is a new inertial navigation sensor,which can measure the input angular rate of sensitive axis using Coriolis effect.Compared to the conventional gyroscope,it owns many unique advantages.A novel structure of vibrating ring gyroscope is proposed and the finite element model of the oscillator is established based on MEMS technology.Through the modal analysis,the natural frequency and mode shapes of the oscillator are obtained.By analyzing the effects of the structural parameters on the mode shapes and frequency of the harmonic oscillator,the optimal design parameters are got.The frequency difference between the operating mode and the other modes is greater than 1kHz after optimization,which can avoid the frequency coupling of the operating mode and other vibrating modes of the oscillator.The simulation results show that the performance parameters of the ring structure meet the design requirements and have obvious advantages.

New digital drive phase control for improving bias stability of silicon MEMS gyroscope

In order to improve the bias stability of the micro-electro mechanical system（MEMS） gyroscope and reduce the impact on the bias from environmental temperature,a digital signal processing method is described for improving the accuracy of the drive phase in the gyroscope drive mode.Through the principle of bias signal generation,it can be concluded that the deviation of the drive phase is the main factor affecting the bias stability.To fulfill the purpose of precise drive phase control,a digital signal processing circuit based on the field-programmable gate array（FPGA） with the phase-lock closed-loop control method is described and a demodulation method for phase error suppression is given.Compared with the analog circuit,the bias drift is largely reduced in the new digital circuit and the bias stability is improved from 60 to 19 °/h.The new digital control method can greatly increase the drive phase accuracy,and thus improve the bias stability.

MEMS陀螺工作原理及其性能提升方法

MEMS陀螺是一种应用广泛的新型微惯性传感器,可实现高精度、小体积、抗干扰性强的角速度测量,被广泛应用于航空航天、平台钻井、自动驾驶、可穿戴设备以及手机中。近年来,随着对MEMS陀螺研究的不断深入,许多新型MEMS陀螺的工作原理被提出,由于测量原理的不同,其性能差异往往很大。本文旨在解决对MEMS陀螺的工作模式缺少系统性综述的问题,根据陀螺最终的读出技术,将MEMS陀螺的工作模式分为调幅、全角以及调频模式。在系统介绍其工作原理的基础上,详细讨论了各种工作模式下MEMS陀螺的性能提升方法。最后还介绍了各类MEMS陀螺的发展趋势,并结合各模式特性对MEMS陀螺的发展做出了展望。

Gross errors identification and correction of in-vehicle MEMS gyroscope based on time series analysis

This paper presents a novel approach to identify and correct the gross errors in the microelectromechanical system （MEMS） gyroscope used in ground vehicles by means of time series analysis. According to the characteristics of autocorrelation function （ACF） and partial autocorrelation function （PACF）, an autoregressive integrated moving average （ARIMA） model is roughly constructed. The rough model is optimized by combining with Akaike＇s information criterion （A/C）, and the parameters are estimated based on the least squares algorithm. After validation testing, the model is utilized to forecast the next output on the basis of the previous measurement. When the difference between the measurement and its prediction exceeds the defined threshold, the measurement is identified as a gross error and remedied by its prediction. A case study on the yaw rate is performed to illustrate the developed algorithm. Experimental results demonstrate that the proposed approach can effectively distinguish gross errors and make some reasonable remedies.

三轴MEMS陀螺仪轨迹跟踪的自耦PID控制方法

为了有效提高三轴微机械(Micro-Electro-Mechanic System,MEMS)陀螺仪的抗干扰能力和检测精度,基于自耦PID控制理论提出了一种简单的陀螺仪控制方法。该方法将三轴MEMS陀螺仪控制问题分解为三个严格反馈子系统的控制问题,然后将三个子系统已知或未知动态、其不确定性和外部有界扰动分别定义为三个总扰动,进而将三个子系统等价映射为三个二阶线性扰动系统,据此分别构建了在总扰动反相激励下的三个受控误差系统,并根据自耦PID控制理论分别设计了三个自耦PD控制器,最后分析了每个子系统的鲁棒稳定性和抗扰动鲁棒性。仿真实验证明了所提控制方法的有效性,其在MEMS陀螺仪控制系统领域具有良好的实际应用前景。

低成本MEMS惯性器件行人运动模式识别算法

针对行人正常行走、上楼、下楼等常见运动模式识别的问题,提出了一种低成本的足部MEMS惯性器件运动模式识别算法。首先,根据MEMS惯性器件的安装关系和实际采集的数据,分析了不同运动模式下的加速度计和陀螺仪的输出特征,然后,选取x轴方向的加速度计和y轴方向的陀螺仪输出的数据,利用输出波峰波谷的先后逻辑顺序,识别正常行走、上楼、下楼3种常见的行人运动模式,最后,对4名实验人员采集的10组数据进行分析。结果表明:采用该方法,正常行走状态识别的平均成功率可达到100%,上楼状态识别的平均成功率达到97.25%以上,下楼状态识别的平均成功率达到98.99%以上。从而验证了该方法的有效性。

基于维纳过程的MEMS陀螺仪贮存寿命评估

目的 针对MEMS陀螺仪在步进应力加速试验条件下获取的性能退化数据,提出基于维纳过程的贮存寿命评估方法及其模型准确度检验方法。方法 首先,确定温度为影响MEMS陀螺仪性能退化的主要环境因素,采用步进温度应力加速试验的方式获取其性能退化数据。其次,分析各项性能参数的演变规律,确定标度因数为表征产品性能退化的特征性能参数。最后,采用漂移维纳过程对标度因数退化轨迹进行建模,并外推得到常温条件下的贮存寿命。结果 采用留一法对模型精度进行验证,模型准确度最低为86.44%。可靠度水平为0.95时,常温贮存(25℃)条件下的寿命评估结果为50.02 a。结论 基于维纳过程建立的性能退化模型的准确度在85%以上,该模型可应用于指定贮存条件下MEMS陀螺仪的性能退化预测及贮存寿命评估。

Periodic Error Compensation for Quartz MEMS Gyroscope Drift of INS

In order to improve the navigation accuracy of an inertial navigation system （INS）, composed of quartz gyroscopes, the existing real-time compensation methods for periodic errors in quartz gyroscope drift and the periodic error term relationship between sampled original data and smoothed data are reviewed. On the base of the results, a new compensation method called using former period characteristics to compensate latter smoothness data （UFCL for short） method is proposed considering the INS working characteristics. This new method uses the original data without smoothing to work out an error conversion formula at the INS initial alignment time and then compensate the smoothed data errors by way of the formula at the navigation time. Both theoretical analysis and experimental results demonstrate that this method is able to cut down on computational time and raise the accuracy which makes it a better real-time compensation approach for periodic error terms of quartz micro electronic mechanical system （MEMS） gyroscope＇s zero drift.

基于CERLMDAN-PE-NLMS的MEMS陀螺信号去噪方法

随着武器技术的不断发展,常规弹药的制导化改造已成为一种必然趋势。通过应用精确制导技术,可以显著提高弹药的打击精度和效率。而在实现弹药制导化改造的过程中,精准测量角速度是一项关键核心技术。微机电系统(Micro-Electro Mechanical System,MEMS)陀螺仪存在输出信号噪声大、精度低的问题,针对上述问题,提出了一种自适应噪声完备集合鲁棒局部均值分解(CERLMDAN)和归一化LMS算法(Normalized Least Mean Square,NLMS)结合的滤波模型。该模型通过在鲁棒局部均值分解(Robust Local Mean Decomposition,RLMD)过程中添加白噪声将原始数据分解为多个乘积函数(Product Functions,PF),并根据排列熵(Permutation Entropy,PE)将PF分为混合PF和有用PF;其次对混合PF使用NLMS去噪;最后,把处理后的PF和有用PF进行重构,得到去噪后的信号。试验表明,本文提出的去噪模型对信号均值与方差有显著提升,信号均值由0.5891提升至0.5396,信号方差由44.473提升至5.2692。

石英MEMS陀螺检测电极分布参数优化

针对石英微机电系统(MEMS)陀螺检测电极输出感应电压较低问题,通过优化检测电极分布参数,提升其机械灵敏度。首先,分析检测电极分布参数对陀螺输出感应电荷的影响,确定优化方案的控制参数和目标函数。其次,基于有限元方法(FEM)构建三种石英MEMS陀螺的机电耦合模型。最后,使用内尔德-米德(NM)算法优化检测电极分布参数。实验结果表明,优化后的检测电极分布参数更加合理,石英MEMS陀螺的机械灵敏度在传统的双端式和梳齿式音叉结构上分别提升了3.06和1.53倍,在基于剪应力检测的结构上提升了39.37倍,验证了优化检测电极分布参数可以提升石英MEMS陀螺机械灵敏度。

基于转台实验的MEMS陀螺仪自动化标定软件设计

MEMS陀螺应用广泛但是误差很大,使用前需要进行标定,在MEMS陀螺的转台标定实验中,数据处理繁琐,基于此,文中设计了MEMS陀螺的自动化标定软件,软件实现了对阶梯状曲线的自动分段识别,并通过可视化界面对数据进行了显示。经过测试证明了软件可以完成自动化标定与数据可视化的工作,在一定程度上提高了实验的效率。

Novel On-Line North-Seeking Method Based on a Three-Axis MEMS Gyroscope

A novel on-line north-seeking method based on a three-axis micro-electro-mechanical system(MEMS)gyroscope is designed.This system processes data by using a Kalman filter to calibrate the installation error of the three-axis MEMS gyroscope in complex environment.The attitude angle updating for quaternion,based on which the attitude instrument will be rotated in real-time and the true north will be found.Our experimental platform constitutes the dual-axis electric rotary table and the attitude instrument,which is developed independently by our scientific research team.The experimental results show that the accuracy of north-seeking is higher than 1°,while the maximum root mean square error and the maximum mean absolute error are 0.906 7 and 0.910 0,respectively.The accuracy of north-seeking is much higher than the traditional method.

基于单轴光学陀螺与MEMS IMU的室内移动机器人寻北

三轴高精度光学陀螺成本高体积大,限制了陀螺寻北技术在移动机器人领域的应用。针对该问题,提出一种基于单轴光学陀螺和微机电系统(MEMS)惯性测量单元的室内移动机器人寻北方法,达到或者接近三轴光学陀螺的寻北精度,成本和体积降低约2/3。移动机器人于第1位置静止时,根据单轴光学陀螺的输出与MEMS三轴加速度计的输出,获得两个可能方位角,以相同的方式获得移动机器人在第2位置的两个可能方位角,两个位置的方位角相减得到4个可能的方位角变化值,通过和MEMS捷联惯导系统所得方位角变化值比较,确定第2位置的唯一方位角。误差分析显示在方位角接近90°和270°时,所提出的方法接近三轴光学陀螺的寻北精度,仿真实验和跑车实验证实了所提出方法的有效性。

基于MEEMD的MEMS陀螺仪降噪方法

为了有效抑制微机械陀螺仪的随机误差,基于改进的经验模态分解(MEEMD),结合粒子群优化算法(QPSO)优化的卡尔曼滤波(KF),提出了一种微机械陀螺仪降噪方法。通过引入排列熵的概念对微机械陀螺信号进行分解得到本征模态分量;计算各分量排列熵,分析排列熵变化趋势筛选出信号噪声混叠的分量,对其中混叠的分量分析建模,采用QPSO-KF算法滤波去噪;再对滤波结果和信号主导的分量进行重构,实现微机械陀螺信号降噪。实验验证了所提方法的有效性,相比传统经验模态分解(EMD)、KF精度提高了1个数量级,验证了所提方法的有效性和精度。

采用菱形辐条的高对称MEMS蜘蛛网状盘式谐振陀螺仪

微电子机械系统(MEMS)陀螺仪因抵抗制造误差能力差和品质因数低等问题限制了其在高端领域的应用。通过对MEMS陀螺仪的理论分析和有限元仿真,基于绝缘体上硅(SOI)工艺设计并制备出了一种由多个同心嵌套的蜘蛛网环和菱形辐条组成的新型MEMS盘式谐振陀螺仪。实验结果表明,该陀螺仪的驱动谐振频率为42.749 kHz,感应谐振频率为42.798 kHz,频率失配为1.145×10^(-3),实测谐振频率与仿真结果差异为8.5%,优于采用相同工艺制作的环形盘式谐振陀螺仪。该MEMS陀螺仪不仅性能优异、工艺流程简单,而且由于采用全线性结构,所以对制造误差也相对不敏感,适合批量生产,具有较高的产业价值。

A Practical Pll-Based Drive Circuit with Ultra-Low-Noise Tia for Mems Gyroscope

A novel phase-locked loop( PLL)-based closed-loop driving circuit with ultra-low-noise trans-impedance amplifier( TIA) is proposed. The TIA is optimized to achieve ultra-low input-referred current noise. To track drive-mode resonant frequency and reduce frequency jitter of actuation voltage,a PLL-based driving technique is adopted. Implemented on printed circuit board( PCB),the proposed driving loop has successfully excited MEMS element into resonance,with a settling time of 3 s. The stable frequency and amplitude of TIA output voltage are 10.14 KHz and 800 mVPP,respectively. With sense-channel electronics,the gyroscope exhibits a scale factor of 0.04 mV/°/s and a bias instability of 57.6°/h,which demonstrates the feasibility of the proposed driving circuit.