In order to improve the navigation accuracy of an inertial navigation system （INS）, composed of quartz gyroscopes, the existing real-time compensation methods for periodic errors in quartz gyroscope drift and the pe...In order to improve the navigation accuracy of an inertial navigation system （INS）, composed of quartz gyroscopes, the existing real-time compensation methods for periodic errors in quartz gyroscope drift and the periodic error term relationship between sampled original data and smoothed data are reviewed. On the base of the results, a new compensation method called using former period characteristics to compensate latter smoothness data （UFCL for short） method is proposed considering the INS working characteristics. This new method uses the original data without smoothing to work out an error conversion formula at the INS initial alignment time and then compensate the smoothed data errors by way of the formula at the navigation time. Both theoretical analysis and experimental results demonstrate that this method is able to cut down on computational time and raise the accuracy which makes it a better real-time compensation approach for periodic error terms of quartz micro electronic mechanical system （MEMS） gyroscope＇s zero drift.展开更多
A novel on-line north-seeking method based on a three-axis micro-electro-mechanical system(MEMS)gyroscope is designed.This system processes data by using a Kalman filter to calibrate the installation error of the thre...A novel on-line north-seeking method based on a three-axis micro-electro-mechanical system(MEMS)gyroscope is designed.This system processes data by using a Kalman filter to calibrate the installation error of the three-axis MEMS gyroscope in complex environment.The attitude angle updating for quaternion,based on which the attitude instrument will be rotated in real-time and the true north will be found.Our experimental platform constitutes the dual-axis electric rotary table and the attitude instrument,which is developed independently by our scientific research team.The experimental results show that the accuracy of north-seeking is higher than 1°,while the maximum root mean square error and the maximum mean absolute error are 0.906 7 and 0.910 0,respectively.The accuracy of north-seeking is much higher than the traditional method.展开更多
The mode coupling is a major factor to affect the precision of the micro electromechanical systems（MEMS） gyroscope. Currently, many MEMS gyroscopes with separate oscillation modes for drive and detection have been d...The mode coupling is a major factor to affect the precision of the micro electromechanical systems（MEMS） gyroscope. Currently, many MEMS gyroscopes with separate oscillation modes for drive and detection have been developed to decrease the mode coupling, but the gyroscope accuracy can not satisfy the high-precision demand well. Therefore, high performance decoupled MEMS gyroscopes is still a hot topic at present. An innovative design scheme for a MEMS gyroscope is designed, and in this design, the inertial mass is divided into three parts including the inner mass, the outer mass and the main frame mass. The masses are supported and separated by a set of mutually orthogonal beams to decouple their movements. Moreover, the design is modelled by multi-port-element network（MuPEN） method and the simulation results show that the mode coupling of the gyroscope between driving and sensing mode was eliminated effectively. Furthermore, we proposed a new silicon-on-insulator（SOI） process to fabricate the gyroscope. The scale factor of the fabricated gyroscope is 8.9 mV/（（~）os） and the quality factor（Q-factor） is as high as 600 at atmosphere pressure, and then, the resonant frequency, scale factor and bias drift has been test. Process and test results show that the proposed MEMS gyroscope are effective for decrease mode coupling, furthermore, it can achieve a high performance at atmosphere pressure. Furthermore, the MEMS gyroscope can achieve a high performance at atmosphere pressure. The research can be taken as good advice for the design and fabrication of MEMS gyroscope, meanwhile, it also provides technical support for speeding up of MEMS gyroscope industrialization.展开更多
A novel phase-locked loop( PLL)-based closed-loop driving circuit with ultra-low-noise trans-impedance amplifier( TIA) is proposed. The TIA is optimized to achieve ultra-low input-referred current noise. To track driv...A novel phase-locked loop( PLL)-based closed-loop driving circuit with ultra-low-noise trans-impedance amplifier( TIA) is proposed. The TIA is optimized to achieve ultra-low input-referred current noise. To track drive-mode resonant frequency and reduce frequency jitter of actuation voltage,a PLL-based driving technique is adopted. Implemented on printed circuit board( PCB),the proposed driving loop has successfully excited MEMS element into resonance,with a settling time of 3 s. The stable frequency and amplitude of TIA output voltage are 10.14 KHz and 800 mVPP,respectively. With sense-channel electronics,the gyroscope exhibits a scale factor of 0.04 mV/°/s and a bias instability of 57.6°/h,which demonstrates the feasibility of the proposed driving circuit.展开更多
In recent years,a large number of small volume,low cost micro electro mechanical systems（MEMS）digital three-axis angular rate gyroscopes have been developed and widely used in civil and military fields.However,these...In recent years,a large number of small volume,low cost micro electro mechanical systems（MEMS）digital three-axis angular rate gyroscopes have been developed and widely used in civil and military fields.However,these kinds of gyroscopes have poor performances in initial zero-bias,temperature drift,In-Run bias stability,bias repeatability,etc.,their output errors need to be compensated before being used.Based on a lot of experiments,the temperature drift and the initial zero-bias are the major error sources in the MEMS gyroscopes output data.Due to the poor repeatability of temperature drift,the temperature compensation coefficients need to be recalculated every time before using.In order to recalculate parameters of the temperature compensation model quickly,a 1st-order polynomial model of temperature is established,then a forgetting factor recursive least squares estimator will be adopted to identify the model parameters in real time.Static and dynamic experimental data shows that this method removed/compensated the temperature drift and initial zero-bias from the output of the gyroscopes effectively.展开更多
基金New Century Program for Excellent Telents (NCET- 04-0162)National Defense Basic Research Program (K1204060116)
文摘In order to improve the navigation accuracy of an inertial navigation system （INS）, composed of quartz gyroscopes, the existing real-time compensation methods for periodic errors in quartz gyroscope drift and the periodic error term relationship between sampled original data and smoothed data are reviewed. On the base of the results, a new compensation method called using former period characteristics to compensate latter smoothness data （UFCL for short） method is proposed considering the INS working characteristics. This new method uses the original data without smoothing to work out an error conversion formula at the INS initial alignment time and then compensate the smoothed data errors by way of the formula at the navigation time. Both theoretical analysis and experimental results demonstrate that this method is able to cut down on computational time and raise the accuracy which makes it a better real-time compensation approach for periodic error terms of quartz micro electronic mechanical system （MEMS） gyroscope＇s zero drift.
基金Supported by the Chongqing International Science and Technology Cooperation Base Project(cstc2014gjhz40001)the University Achievement Transformation Project of Chongqing Science and Technology Commission(KJZH17115)+3 种基金the Basic Research Project of Chongqing Science and Technology Commission(cstc2015jcyjBX0068,cstc2014jcyjA1350,cstc2015jcyjB0360)the Dr.Start-up Fund of Chongqing University of Posts and Telecommunications(A2015-40,A2016-76)the National Natural Science Foundation of Chongqing University of Posts and Telecommunications(A2015-49)the Scientific and Technological Research Program of Chongqing Municipal Education Commission(KJ1704104,KJ1704091)
文摘A novel on-line north-seeking method based on a three-axis micro-electro-mechanical system(MEMS)gyroscope is designed.This system processes data by using a Kalman filter to calibrate the installation error of the three-axis MEMS gyroscope in complex environment.The attitude angle updating for quaternion,based on which the attitude instrument will be rotated in real-time and the true north will be found.Our experimental platform constitutes the dual-axis electric rotary table and the attitude instrument,which is developed independently by our scientific research team.The experimental results show that the accuracy of north-seeking is higher than 1°,while the maximum root mean square error and the maximum mean absolute error are 0.906 7 and 0.910 0,respectively.The accuracy of north-seeking is much higher than the traditional method.
基金supported by National Hi-tech Research and Development Program of China (863 Program, Grant No. 2009AA04Z320)Xi’an Municipal Applied Materials Innovation Fund of China (Grant No. XA-AM-200801)
文摘The mode coupling is a major factor to affect the precision of the micro electromechanical systems（MEMS） gyroscope. Currently, many MEMS gyroscopes with separate oscillation modes for drive and detection have been developed to decrease the mode coupling, but the gyroscope accuracy can not satisfy the high-precision demand well. Therefore, high performance decoupled MEMS gyroscopes is still a hot topic at present. An innovative design scheme for a MEMS gyroscope is designed, and in this design, the inertial mass is divided into three parts including the inner mass, the outer mass and the main frame mass. The masses are supported and separated by a set of mutually orthogonal beams to decouple their movements. Moreover, the design is modelled by multi-port-element network（MuPEN） method and the simulation results show that the mode coupling of the gyroscope between driving and sensing mode was eliminated effectively. Furthermore, we proposed a new silicon-on-insulator（SOI） process to fabricate the gyroscope. The scale factor of the fabricated gyroscope is 8.9 mV/（（~）os） and the quality factor（Q-factor） is as high as 600 at atmosphere pressure, and then, the resonant frequency, scale factor and bias drift has been test. Process and test results show that the proposed MEMS gyroscope are effective for decrease mode coupling, furthermore, it can achieve a high performance at atmosphere pressure. Furthermore, the MEMS gyroscope can achieve a high performance at atmosphere pressure. The research can be taken as good advice for the design and fabrication of MEMS gyroscope, meanwhile, it also provides technical support for speeding up of MEMS gyroscope industrialization.
基金supported by the National Natural Science Foundation of China (grant: 61234007)the subproject of the Very Large Scale Integrated Circuits Manufacturing Equipment and Complete Technology (No.2 National Major Projects of China) (No.: 2013ZX02502-001)
文摘A novel phase-locked loop( PLL)-based closed-loop driving circuit with ultra-low-noise trans-impedance amplifier( TIA) is proposed. The TIA is optimized to achieve ultra-low input-referred current noise. To track drive-mode resonant frequency and reduce frequency jitter of actuation voltage,a PLL-based driving technique is adopted. Implemented on printed circuit board( PCB),the proposed driving loop has successfully excited MEMS element into resonance,with a settling time of 3 s. The stable frequency and amplitude of TIA output voltage are 10.14 KHz and 800 mVPP,respectively. With sense-channel electronics,the gyroscope exhibits a scale factor of 0.04 mV/°/s and a bias instability of 57.6°/h,which demonstrates the feasibility of the proposed driving circuit.
文摘In recent years,a large number of small volume,low cost micro electro mechanical systems（MEMS）digital three-axis angular rate gyroscopes have been developed and widely used in civil and military fields.However,these kinds of gyroscopes have poor performances in initial zero-bias,temperature drift,In-Run bias stability,bias repeatability,etc.,their output errors need to be compensated before being used.Based on a lot of experiments,the temperature drift and the initial zero-bias are the major error sources in the MEMS gyroscopes output data.Due to the poor repeatability of temperature drift,the temperature compensation coefficients need to be recalculated every time before using.In order to recalculate parameters of the temperature compensation model quickly,a 1st-order polynomial model of temperature is established,then a forgetting factor recursive least squares estimator will be adopted to identify the model parameters in real time.Static and dynamic experimental data shows that this method removed/compensated the temperature drift and initial zero-bias from the output of the gyroscopes effectively.
