Exposure of absolute pressure sensors, resonant microtube density, binary concentration sensors and chip-scale vacuum packaged pirani gauges to room temperature helium resulted in a gradual drift in sensor output. No ...Exposure of absolute pressure sensors, resonant microtube density, binary concentration sensors and chip-scale vacuum packaged pirani gauges to room temperature helium resulted in a gradual drift in sensor output. No effect was found for differential pressure sensors and pirani gauges vacuum packaged with ceramic or metal packages. The observed results apply to other vacuum packaged MEMS devices such as gyroscopes, voltage controlled oscillators, infrared and Coriolis mass flow sensors. Potential causes for this loss of hermeticity are discussed as well as application limitations for MEMS sensors.展开更多
This paper provides a brief introduction to the application of the sensor monitoring network of micro-electro-mechanical systems(MEMS)to Zhejiang province.In the Wenzhou Shanxi reservoir and other areas,MEMS and tradi...This paper provides a brief introduction to the application of the sensor monitoring network of micro-electro-mechanical systems(MEMS)to Zhejiang province.In the Wenzhou Shanxi reservoir and other areas,MEMS and traditional intensity-monitoring instruments have been deployed with complementary functions to implement hybrid networking.The low-cost MEMS network can continuously monitor areas at high risk of earthquakes at a high resolution.Moreover,it can quickly collect the parameters of earthquakes and records of the near-field acceleration of strong earthquakes.It can be also used to rapidly generate earthquake intensity reports and provide early warning of earthquakes.We used the MEMS sensors for the first time in 2016,and it has helped promote the development and application of seismic intensity instruments since then.展开更多
This paper reviews a novel cell-based biosensor and Bio-MEMS which incorporate living cells as sensing elements that convert a change in immediate environment to signals conducive for processing.It is characterized wi...This paper reviews a novel cell-based biosensor and Bio-MEMS which incorporate living cells as sensing elements that convert a change in immediate environment to signals conducive for processing.It is characterized with high sensitivity,excellent selectivity and fast response and have been implemented for a number of applications ranging from pharmaceutical screening to environmental pollutant detection.This paper also introduces our recent work about Light-Addressable Potentiometric Sensors (LAPS),Field Effect Transistor (FET),Micro-Electrode Array Sensors (MEAS) and Bio-MEMS for detecting the changes of concentration of extracellular ions and the action potential of living cell under effect of drugs and environmental parameters.Finely, the paper gives some prospects of cell-based biosensors in the future.展开更多
The design and optimization of two types of novel miniature vibrating Electric Field Sensors (EFSs) based on Micro Electro Mechanical Systems (MEMS) technology are presented.They have different structures and vibratin...The design and optimization of two types of novel miniature vibrating Electric Field Sensors (EFSs) based on Micro Electro Mechanical Systems (MEMS) technology are presented.They have different structures and vibrating modes. The volume is much smaller than other types of charge-induced EFSs such as field-mills. As miniaturizing, the induced signal is reduced enormously and a high sensitive circuit is needed to detect it. Elaborately designed electrodes can increase the amplitude of the output current, making the detecting circuit simplified and improving the signal-to-noise ratio. Computer simulations for different structural parameters of the EFSs and vibrating methods have been carried out by Finite Element Method (FEM). It is proved that the new structures are realizable and the output signals are detectable.展开更多
文摘Exposure of absolute pressure sensors, resonant microtube density, binary concentration sensors and chip-scale vacuum packaged pirani gauges to room temperature helium resulted in a gradual drift in sensor output. No effect was found for differential pressure sensors and pirani gauges vacuum packaged with ceramic or metal packages. The observed results apply to other vacuum packaged MEMS devices such as gyroscopes, voltage controlled oscillators, infrared and Coriolis mass flow sensors. Potential causes for this loss of hermeticity are discussed as well as application limitations for MEMS sensors.
文摘This paper provides a brief introduction to the application of the sensor monitoring network of micro-electro-mechanical systems(MEMS)to Zhejiang province.In the Wenzhou Shanxi reservoir and other areas,MEMS and traditional intensity-monitoring instruments have been deployed with complementary functions to implement hybrid networking.The low-cost MEMS network can continuously monitor areas at high risk of earthquakes at a high resolution.Moreover,it can quickly collect the parameters of earthquakes and records of the near-field acceleration of strong earthquakes.It can be also used to rapidly generate earthquake intensity reports and provide early warning of earthquakes.We used the MEMS sensors for the first time in 2016,and it has helped promote the development and application of seismic intensity instruments since then.
基金Acknowledgement： This work was supported by the National Natural Science Foundation of China （Grant Nos. 30270387, No. 30570492）；the Project of State Key Laboratory of Transducer Technology of China （Grant No. SKT0403）；the Foundation for the Bureau of Zhejiang Province of China （Grant No. 20040197）.
文摘This paper reviews a novel cell-based biosensor and Bio-MEMS which incorporate living cells as sensing elements that convert a change in immediate environment to signals conducive for processing.It is characterized with high sensitivity,excellent selectivity and fast response and have been implemented for a number of applications ranging from pharmaceutical screening to environmental pollutant detection.This paper also introduces our recent work about Light-Addressable Potentiometric Sensors (LAPS),Field Effect Transistor (FET),Micro-Electrode Array Sensors (MEAS) and Bio-MEMS for detecting the changes of concentration of extracellular ions and the action potential of living cell under effect of drugs and environmental parameters.Finely, the paper gives some prospects of cell-based biosensors in the future.
基金Supported by the National Natural Science Foundation of China (No.60172001).
文摘The design and optimization of two types of novel miniature vibrating Electric Field Sensors (EFSs) based on Micro Electro Mechanical Systems (MEMS) technology are presented.They have different structures and vibrating modes. The volume is much smaller than other types of charge-induced EFSs such as field-mills. As miniaturizing, the induced signal is reduced enormously and a high sensitive circuit is needed to detect it. Elaborately designed electrodes can increase the amplitude of the output current, making the detecting circuit simplified and improving the signal-to-noise ratio. Computer simulations for different structural parameters of the EFSs and vibrating methods have been carried out by Finite Element Method (FEM). It is proved that the new structures are realizable and the output signals are detectable.
