With the recent development of digital Micro Electro Mechanical System （MEMS） sensors, the cost of monitoring and detecting seismic events in real time can be greatly reduced. Ability of MEMS accelerograph to record...With the recent development of digital Micro Electro Mechanical System （MEMS） sensors, the cost of monitoring and detecting seismic events in real time can be greatly reduced. Ability of MEMS accelerograph to record a seismic event depends upon the efficiency of triggering algorithm, apart from the sensor＇s sensitivity. There are several classic triggering algorithms developed to detect seismic events, ranging from basic amplitude threshold to more sophisticated pattern recognition. Algorithms based on STA/LTA are reported to be computationally efficient for real time monitoring. In this paper, we analyzed several STA/LTA algorithms to check their efficiency and suitability using data obtained from the Quake Catcher Network （network of MEMS accelerometer stations）. We found that most of the STA/LTA algorithms are suitable for use with MEMS accelerometer data to accurately detect seismic events. However, the efficiency of any particular algorithm is found to be dependent on the parameter set used （i.e., window width of STA, LTA and threshold level）.展开更多
The rapid development of MEMS technology has made MEMS accelerometers mature and the application range has been expanded. Many kinds of MEMS accelerometers are researched. According to the working principle of MEMS ac...The rapid development of MEMS technology has made MEMS accelerometers mature and the application range has been expanded. Many kinds of MEMS accelerometers are researched. According to the working principle of MEMS accelerometer, it can be divided into: piezoresistive, piezoelectric, capacitive, tunnel, resonant, electromagnetic, thermocouple, optical, inductive, etc. Due to its outstanding features in terms of size, quality, power consumption and reliability, MEMS sensors are used in military applications and where high environmental resistance is required. MEMS accelerometers are developing rapidly and have good application prospects. In order to make MEMS accelerometers more widely understood, the advantages of MEMS accelerometers are expounded. The research status of MEMS accelerometers is introduced, and MEMS are analyzed. The application of accelerometers in real-world environments, and the development trend of MEMS accelerometers in the future. More scholars will invest in MEMS accelerometer research, pursuing high performance, low power consumption, high precision, multi-function, and interaction. Strong MEMS accelerometers will be ubiquitous in the future.展开更多
A new analytical model of a 3-degree-of-freedom （3-DOF） gyro-accelerometer system consisting of a 1-DOF drive and 2-DOF sense modes is presented. The model constructs lumped differential equations associated with ea...A new analytical model of a 3-degree-of-freedom （3-DOF） gyro-accelerometer system consisting of a 1-DOF drive and 2-DOF sense modes is presented. The model constructs lumped differential equations associated with each DOFof the system by vector analysis. The coupled differential equations thus established are solved analytically for their responses in both the time and frequency domains. Considering these frequency response equations, novel device design concepts are derived by forcing the sense phase to zero, which leads to a certain relationship between the structural frequencies, thereby causing minimization of the damping effect on the performance of the system. Furthermore, the feasibility of the present gyro-accelerometer structure is studied using a unique discriminatory scheme for the detection of both gyro action and linear acceleration at their events. This scheme combines the formulated settled transient solution of the gyro-accelerometer with the processes of synchronous demodulation and filtration, which leads to the in-phase and quadrature components of the system＇s output signal. These two components can be utilized in the detection of angular motion and linear acceleration. The obtained analytical results are validated by simulation in a MATLAB/Simulink environment, and it is found that the results are in excellent agreement with each other.展开更多
MEMS accelerometers are widely used in various fields due to their small size and low cost,and have good application prospects.However,the low accuracy limits its range of applications.To ensure data accuracy and safe...MEMS accelerometers are widely used in various fields due to their small size and low cost,and have good application prospects.However,the low accuracy limits its range of applications.To ensure data accuracy and safety we need to calibrate MEMS accelerometers.Many authors have improved accelerometer accuracy by calculating calibration parameters,and a large number of published calibration methods have been confusing.In this context,this paper introduces these techniques and methods,analyzes and summarizes the main error models and calibration procedures,and provides useful suggestions.Finally,the content of the accelerometer calibration method needs to be overcome.展开更多
Packaging of MEMS ( micro-electro-mechanical system ) devices poses more challenges than conventional IC packaging, since the performance of the MEMS devices is highly dependent on packaging processes. A Land Grid Arr...Packaging of MEMS ( micro-electro-mechanical system ) devices poses more challenges than conventional IC packaging, since the performance of the MEMS devices is highly dependent on packaging processes. A Land Grid Array ( LGA ) package is introduced for MEMS technology based linear multi-axis accelerometers. Finite element modeling is conducted to simulate the warpage behavior of the LGA packages. A method to correlate the package warpage to matrix block warpage has been developed. Warpage for both package and sensor substrate are obtained. Warpage predicted by simulation correlates very well with experimental measurements. Based on this validated method, detailed design analysis with different package geometrical variations are carried out to optimize the package design. With the optimized package structure, the packaging effect on accelerometer signal performance is well controlled.展开更多
基金IIT Roorkee under the Faculty Initiation Grant No.100556
文摘With the recent development of digital Micro Electro Mechanical System （MEMS） sensors, the cost of monitoring and detecting seismic events in real time can be greatly reduced. Ability of MEMS accelerograph to record a seismic event depends upon the efficiency of triggering algorithm, apart from the sensor＇s sensitivity. There are several classic triggering algorithms developed to detect seismic events, ranging from basic amplitude threshold to more sophisticated pattern recognition. Algorithms based on STA/LTA are reported to be computationally efficient for real time monitoring. In this paper, we analyzed several STA/LTA algorithms to check their efficiency and suitability using data obtained from the Quake Catcher Network （network of MEMS accelerometer stations）. We found that most of the STA/LTA algorithms are suitable for use with MEMS accelerometer data to accurately detect seismic events. However, the efficiency of any particular algorithm is found to be dependent on the parameter set used （i.e., window width of STA, LTA and threshold level）.
文摘The rapid development of MEMS technology has made MEMS accelerometers mature and the application range has been expanded. Many kinds of MEMS accelerometers are researched. According to the working principle of MEMS accelerometer, it can be divided into: piezoresistive, piezoelectric, capacitive, tunnel, resonant, electromagnetic, thermocouple, optical, inductive, etc. Due to its outstanding features in terms of size, quality, power consumption and reliability, MEMS sensors are used in military applications and where high environmental resistance is required. MEMS accelerometers are developing rapidly and have good application prospects. In order to make MEMS accelerometers more widely understood, the advantages of MEMS accelerometers are expounded. The research status of MEMS accelerometers is introduced, and MEMS are analyzed. The application of accelerometers in real-world environments, and the development trend of MEMS accelerometers in the future. More scholars will invest in MEMS accelerometer research, pursuing high performance, low power consumption, high precision, multi-function, and interaction. Strong MEMS accelerometers will be ubiquitous in the future.
文摘A new analytical model of a 3-degree-of-freedom （3-DOF） gyro-accelerometer system consisting of a 1-DOF drive and 2-DOF sense modes is presented. The model constructs lumped differential equations associated with each DOFof the system by vector analysis. The coupled differential equations thus established are solved analytically for their responses in both the time and frequency domains. Considering these frequency response equations, novel device design concepts are derived by forcing the sense phase to zero, which leads to a certain relationship between the structural frequencies, thereby causing minimization of the damping effect on the performance of the system. Furthermore, the feasibility of the present gyro-accelerometer structure is studied using a unique discriminatory scheme for the detection of both gyro action and linear acceleration at their events. This scheme combines the formulated settled transient solution of the gyro-accelerometer with the processes of synchronous demodulation and filtration, which leads to the in-phase and quadrature components of the system＇s output signal. These two components can be utilized in the detection of angular motion and linear acceleration. The obtained analytical results are validated by simulation in a MATLAB/Simulink environment, and it is found that the results are in excellent agreement with each other.
基金This work has received funding from 5150 Spring Specialists(05492018012)the European Union Horizon 2020 research and innovation programme under the Marie Sklodowska-Curie grant agreement No.701697,Major Program of the National Social Science Fund of China(Grant No.17ZDA092)+1 种基金Basic Research Programs(Natural Science Foundation)of Jiangsu Province(BK20180794)333 High-Level Talent Cultivation Project of Jiangsu Province(BRA2018332)and the PAPD fund.
文摘MEMS accelerometers are widely used in various fields due to their small size and low cost,and have good application prospects.However,the low accuracy limits its range of applications.To ensure data accuracy and safety we need to calibrate MEMS accelerometers.Many authors have improved accelerometer accuracy by calculating calibration parameters,and a large number of published calibration methods have been confusing.In this context,this paper introduces these techniques and methods,analyzes and summarizes the main error models and calibration procedures,and provides useful suggestions.Finally,the content of the accelerometer calibration method needs to be overcome.
文摘Packaging of MEMS ( micro-electro-mechanical system ) devices poses more challenges than conventional IC packaging, since the performance of the MEMS devices is highly dependent on packaging processes. A Land Grid Array ( LGA ) package is introduced for MEMS technology based linear multi-axis accelerometers. Finite element modeling is conducted to simulate the warpage behavior of the LGA packages. A method to correlate the package warpage to matrix block warpage has been developed. Warpage for both package and sensor substrate are obtained. Warpage predicted by simulation correlates very well with experimental measurements. Based on this validated method, detailed design analysis with different package geometrical variations are carried out to optimize the package design. With the optimized package structure, the packaging effect on accelerometer signal performance is well controlled.
