We present a micro-Pirani vacuum gauge using the low-resistivity monocrystal silicon as the heaters and heat sinks fabricated by the post complementary metal oxide semiconductor （CMOS） microelectromechanical system ...We present a micro-Pirani vacuum gauge using the low-resistivity monocrystal silicon as the heaters and heat sinks fabricated by the post complementary metal oxide semiconductor （CMOS） microelectromechanical system （MEMS） process. The metal interconnection of the device is fabricated by a 0.5 μm standard CMOS process on 8-inch silicon wafer. Then, a SiO2-Si low-temperature fusion bonding is developed to bond the CMOS wafer and the MEMS wafer, with the electrical connection realized by the tungsten through silicon via process. Wafer- level A1Ge euteetic bonding is adopted to package the Pirani gauge in a non-hermetic cavity to protect the gauge from being damaged or contaminated in the dicing and assembling process, and to make it suitable for actual applications. To increase the accuracy of the test and restrain negative influence of temperature drift, the Wheatstone bridge structure is introduced. The test results show that before capping, the gauge has an average sensitivity of 1.04 × 104 K.W-1Torr-1 in dynamic range of 0.01 20 Torr. After capping, the sensitivity of the gauge does not decrease but increases to 1.12 × 104 K.W-1 Torr-1.展开更多
The virtual machine of code mechanism （VMCM） as a new concept for code mechanical solidification and verification is proposed and can be applied in MEMS （micro-electromechanical systems） security device for high c...The virtual machine of code mechanism （VMCM） as a new concept for code mechanical solidification and verification is proposed and can be applied in MEMS （micro-electromechanical systems） security device for high consequence systems. Based on a study of the running condition of physical code mechanism, VMCM＇s configuration, ternary encoding method, running action and logic are derived. The cases of multi-level code mechanism are designed and verified with the VMCM method, showing that the presented method is effective.展开更多
Initially studied and developed by students in universities, the very small pico satellites （with a mass lower than 1 kg） are more and more considered for science applications. In particular, there are plans to use ...Initially studied and developed by students in universities, the very small pico satellites （with a mass lower than 1 kg） are more and more considered for science applications. In particular, there are plans to use them in constellations of small spacecraft for remote sensing of various regions of the magnetosphere. They require a payload with specific size, weight and power consumption. In order to respond to this demand, new instruments have to be developed. Those instruments should exhibit at least the same performances as those used in larger satellites while fulfilling the specific requirements imposed by the satellites size. For this reason, the authors currently develop a xylophone bar magnetometer （XBM） based on micro-electromechanical systems （MEMS） with integrated detector electronics. The principle of this magnetometer is based on a classical resonating xylophone bar. A sinnsoidal current oscillating at the fundamental bending resonant frequency of the bar is applied through the device, and when an external magnetic field is present, the resulting Lorentz force yields the bar to vibrate at its fundamental mode with a displacement directly proportional to the amplitude in one direction of the ambient magnetic field. When designing a MEMS XBM, the detection method is a crucial aspect. The measurement method largely influences the geometry of the magnetometer as well as the manufacturing technology. Due to the constraints in terms of size, weight and power consumption, the two most promising measurement methods are capacitive and piezoelectric ones. Several designs including these measurement techniques are presented and simulated under realistic conditions. First, designs including lateral electrodes for capacitive measurement are tackled based on Silicon-On-Insulator （SOI） process. For the piezoelectric detection, a new configuration based on Lead Zirconate Titanate （PZT）/Pt structure is introduced and leads to much better sensitivity than the traditional Pt/PZT/Pt sandwich structure. Finally, the principle of electronic circuits enabling high sensitivity and low power consumption are proposed.展开更多
基金Supported by the National High Technology Research and Development Program of China under Grant No 2015AA042602
文摘We present a micro-Pirani vacuum gauge using the low-resistivity monocrystal silicon as the heaters and heat sinks fabricated by the post complementary metal oxide semiconductor （CMOS） microelectromechanical system （MEMS） process. The metal interconnection of the device is fabricated by a 0.5 μm standard CMOS process on 8-inch silicon wafer. Then, a SiO2-Si low-temperature fusion bonding is developed to bond the CMOS wafer and the MEMS wafer, with the electrical connection realized by the tungsten through silicon via process. Wafer- level A1Ge euteetic bonding is adopted to package the Pirani gauge in a non-hermetic cavity to protect the gauge from being damaged or contaminated in the dicing and assembling process, and to make it suitable for actual applications. To increase the accuracy of the test and restrain negative influence of temperature drift, the Wheatstone bridge structure is introduced. The test results show that before capping, the gauge has an average sensitivity of 1.04 × 104 K.W-1Torr-1 in dynamic range of 0.01 20 Torr. After capping, the sensitivity of the gauge does not decrease but increases to 1.12 × 104 K.W-1 Torr-1.
基金Project supported by High-Technology Research and Develop-ment Program of China (Grant No .863 -2003AA404210)
文摘The virtual machine of code mechanism （VMCM） as a new concept for code mechanical solidification and verification is proposed and can be applied in MEMS （micro-electromechanical systems） security device for high consequence systems. Based on a study of the running condition of physical code mechanism, VMCM＇s configuration, ternary encoding method, running action and logic are derived. The cases of multi-level code mechanism are designed and verified with the VMCM method, showing that the presented method is effective.
文摘Initially studied and developed by students in universities, the very small pico satellites （with a mass lower than 1 kg） are more and more considered for science applications. In particular, there are plans to use them in constellations of small spacecraft for remote sensing of various regions of the magnetosphere. They require a payload with specific size, weight and power consumption. In order to respond to this demand, new instruments have to be developed. Those instruments should exhibit at least the same performances as those used in larger satellites while fulfilling the specific requirements imposed by the satellites size. For this reason, the authors currently develop a xylophone bar magnetometer （XBM） based on micro-electromechanical systems （MEMS） with integrated detector electronics. The principle of this magnetometer is based on a classical resonating xylophone bar. A sinnsoidal current oscillating at the fundamental bending resonant frequency of the bar is applied through the device, and when an external magnetic field is present, the resulting Lorentz force yields the bar to vibrate at its fundamental mode with a displacement directly proportional to the amplitude in one direction of the ambient magnetic field. When designing a MEMS XBM, the detection method is a crucial aspect. The measurement method largely influences the geometry of the magnetometer as well as the manufacturing technology. Due to the constraints in terms of size, weight and power consumption, the two most promising measurement methods are capacitive and piezoelectric ones. Several designs including these measurement techniques are presented and simulated under realistic conditions. First, designs including lateral electrodes for capacitive measurement are tackled based on Silicon-On-Insulator （SOI） process. For the piezoelectric detection, a new configuration based on Lead Zirconate Titanate （PZT）/Pt structure is introduced and leads to much better sensitivity than the traditional Pt/PZT/Pt sandwich structure. Finally, the principle of electronic circuits enabling high sensitivity and low power consumption are proposed.
