This work presents a novel radio frequency(RF)narrowband Si micro-electro-mechanical systems(MEMS)filter based on capacitively transduced slotted width extensional mode(WEM)resonators.The flexibility of the plate lead...This work presents a novel radio frequency(RF)narrowband Si micro-electro-mechanical systems(MEMS)filter based on capacitively transduced slotted width extensional mode(WEM)resonators.The flexibility of the plate leads to multiple modes near the target frequency.The high Q-factor resonators of around 100000 enable narrow bandwidth filters with small size and simplified design.The 1-wavelength and 2-wavelength WEMs were first developed as a pair of coupled modes to form a passband.To reduce bandwidth,two plates are coupled with aλ-length coupling beam.The 79.69 MHz coupled plate filter(CPF)achieved a narrow bandwidth of 8.8 kHz,corresponding to a tiny 0.011%.The CPF exhibits an impressive 34.84 dB stopband rejection and 7.82 dB insertion loss with near-zero passband ripple.In summary,the RF MEMS filter presented in this work shows promising potential for application in RF transceiver front-ends.展开更多
随着工业技术的进步,高温高动态压力传感器的应用需求显著增加。提出一种集成专用补偿电路的高动态硅压阻式微电子机械系统(Micro-Electro-Mechanical Systems,MEMS)压力传感器,进行压力敏感芯片的结构设计和加工工艺设计,并对压力传感...随着工业技术的进步,高温高动态压力传感器的应用需求显著增加。提出一种集成专用补偿电路的高动态硅压阻式微电子机械系统(Micro-Electro-Mechanical Systems,MEMS)压力传感器,进行压力敏感芯片的结构设计和加工工艺设计,并对压力传感器进行封装和温度补偿电路设计。多层绝缘体上硅(Silicon On Insulator,SOI)材料能够使传感器在高温环境下正常工作。无引线的封装方式可有效提升传感器的频响性能。传感器后端集成了桥阻式专用集成电路(Application Specific Integrated Circuits,ASIC),能够显著减小传感器的体积,同时提升传感器整体性能。该MEMS传感器通过自动压力测试系统进行性能试验,结果表明MEMS压力传感器经过补偿后能够实现较高的线性度、稳定的零点输出特性以及理想的动态输出特性。展开更多
基金supported by the National Natural Science Foundation of China(61734007)National Key Research and Development Program of China(2022YFF0706100).
文摘This work presents a novel radio frequency(RF)narrowband Si micro-electro-mechanical systems(MEMS)filter based on capacitively transduced slotted width extensional mode(WEM)resonators.The flexibility of the plate leads to multiple modes near the target frequency.The high Q-factor resonators of around 100000 enable narrow bandwidth filters with small size and simplified design.The 1-wavelength and 2-wavelength WEMs were first developed as a pair of coupled modes to form a passband.To reduce bandwidth,two plates are coupled with aλ-length coupling beam.The 79.69 MHz coupled plate filter(CPF)achieved a narrow bandwidth of 8.8 kHz,corresponding to a tiny 0.011%.The CPF exhibits an impressive 34.84 dB stopband rejection and 7.82 dB insertion loss with near-zero passband ripple.In summary,the RF MEMS filter presented in this work shows promising potential for application in RF transceiver front-ends.
文摘随着工业技术的进步,高温高动态压力传感器的应用需求显著增加。提出一种集成专用补偿电路的高动态硅压阻式微电子机械系统(Micro-Electro-Mechanical Systems,MEMS)压力传感器,进行压力敏感芯片的结构设计和加工工艺设计,并对压力传感器进行封装和温度补偿电路设计。多层绝缘体上硅(Silicon On Insulator,SOI)材料能够使传感器在高温环境下正常工作。无引线的封装方式可有效提升传感器的频响性能。传感器后端集成了桥阻式专用集成电路(Application Specific Integrated Circuits,ASIC),能够显著减小传感器的体积,同时提升传感器整体性能。该MEMS传感器通过自动压力测试系统进行性能试验,结果表明MEMS压力传感器经过补偿后能够实现较高的线性度、稳定的零点输出特性以及理想的动态输出特性。
