Dynamic characteristics of the resonant gyroscope are studied based on the Mathieu equation approximate solution in this paper.The Mathieu equation is used to analyze the parametric resonant characteristics and the ap...Dynamic characteristics of the resonant gyroscope are studied based on the Mathieu equation approximate solution in this paper.The Mathieu equation is used to analyze the parametric resonant characteristics and the approximate output of the resonant gyroscope.The method of small parameter perturbation is used to analyze the approximate solution of the Mathieu equation.The theoretical analysis and the numerical simulations show that the approximate solution of the Mathieu equation is close to the dynamic output characteristics of the resonant gyroscope.The experimental analysis shows that the theoretical curve and the experimental data processing results coincide perfectly,which means that the approximate solution of the Mathieu equation can present the dynamic output characteristic of the resonant gyroscope.The theoretical approach and the experimental results of the Mathieu equation approximate solution are obtained,which provides a reference for the robust design of the resonant gyroscope.展开更多
By combining a silicon-based lithium niobate modulator and a silicon-based Si3N4resonator with silicon-based photonics technology,a highly systematic design of a hybrid integrated optical gyroscope with enhanced recip...By combining a silicon-based lithium niobate modulator and a silicon-based Si3N4resonator with silicon-based photonics technology,a highly systematic design of a hybrid integrated optical gyroscope with enhanced reciprocity sensitivity and a dual micro-ring structure is proposed for the first time in this paper.The relationship between the device's structural parameters and optical performance is also analyzed by constructing a complete simulation link,which provides a theoretical design reference to improve the system's sensitivity.When the wavelength is 1550 nm,the conversion frequency of the dual-ring optical path is 50 MHz,the coupling coefficient is 0.2,and the radius R is 1000μm,the quality factor of the silicon-based Si_(3)N_(4)resonator is 2.58×10^(5),which is 1.58 times that of the silicon-on-insulator resonator.Moreover,the effective number of times the light travels around the ring before leaving the micro-ring is 5.93,which is 1.62 times that of the silicon-on-insulator resonator.The work fits the gyro dynamic output diagram,and solves the problem of low sensitivity at low speed by setting the phase offset.This results provide a basis for the further optimization of design and chip processing of the integrated optical gyroscope.展开更多
We theoretically investigate several parameters for the nuclear magnetic resonance gyroscope based on ^(133)C_(s–)^(129)Xe/^(131)Xe. For a cell containing a mixture of ^(133)Cs at saturated pressure, we inv...We theoretically investigate several parameters for the nuclear magnetic resonance gyroscope based on ^(133)C_(s–)^(129)Xe/^(131)Xe. For a cell containing a mixture of ^(133)Cs at saturated pressure, we investigate the optimal quenching gas(N_2) pressure and the corresponding pump laser intensity to achieve 30% ^(133)Cs polarization at the center of the cell when the static magnetic field B0 is 5 μT with different ^(129)Xe/^(131)Xe pressure. The effective field produced by spin-exchange polarized ^(129)Xe or ^(131)Xe sensed by ^(133)Cs can also be discussed in different^(129)Xe/^(131)Xe pressure conditions. Furthermore,the relationship between the detected signal and the probe laser frequency is researched. We obtain the optimum probe laser detuning from the D2(6~2S_(1/2)→ 6~2P_(3/2)) resonance with different ^(129)Xe/^(131)Xe pressure owing to the pressure broadening.展开更多
The dynamic range of the nuclear magnetic resonance gyroscope can be effectively improved through the closedloop control scheme,which is crucial to its application in inertial measurement.This paper presents the analy...The dynamic range of the nuclear magnetic resonance gyroscope can be effectively improved through the closedloop control scheme,which is crucial to its application in inertial measurement.This paper presents the analytical transfer function of Xe closed-loop system in the nuclear magnetic resonance gyroscope considering Rb–Xe coupling effect.It not only considers the dynamic characteristics of the system more comprehensively,but also adds the influence of the practical filters in the gyro signal processing system,which can obtain the accurate response characteristics of signal frequency and amplitude at the same time.The numerical results are compared with an experimentally verified simulation program,which indicate great agreement.The research results of this paper are of great significance to the practical application and development of the nuclear magnetic resonance gyroscope.展开更多
Integrated optical gyroscopes(IOGs)have been an efficient tool for numerous applications in various fields,including inertial navigation,flight control,and earthquake monitoring.Here,we review the progress of integrat...Integrated optical gyroscopes(IOGs)have been an efficient tool for numerous applications in various fields,including inertial navigation,flight control,and earthquake monitoring.Here,we review the progress of integrated optical gyroscopes based on two categories of integrated interferometric optical gyroscopes(IIOGs)and integrated resonant optical gyroscopes(IROGs).展开更多
Nuclear magnetic resonance gyroscope (NMRG) has the characteristics of high precision and miniaturization, and is one of the main applications of quantum technology in the field of navigation. The transverse relaxatio...Nuclear magnetic resonance gyroscope (NMRG) has the characteristics of high precision and miniaturization, and is one of the main applications of quantum technology in the field of navigation. The transverse relaxation time (T_(2)) of the xenon nuclear spin in the atomic cell of the NMRG directly affects the angular random walk of the gyro. Accurate and rapid measurement of T_(2) is conducive to further improvement of gyroscope. At present, for the measurement of T_(2), the schemes of two orthogonal lasers for pumping and detecting are usually used. By applying two fast-switching orthogonal static magnetic fields and a single beam of circularly polarized laser with corresponding wavelength to pump the atomic cell, the xenon nuclear macroscopic magnetic moment Larmor precession is generated. The cesium atoms parametric magnetometer in cell is formed to detect the free induction decay signal generated by nuclear spin precession of xenon atoms. The measurement of T_(2) by a single laser simplifies the measurement equipment compared with traditional method with two lasers. The experimental results show that the T_(2) of xenon atoms is more than 10 s, and the effects of temperature are studied, which lay the foundation for the subsequent improvement of gyro performance.展开更多
This paper presents the design,fabrication,and characterization of a novel high quality factor(Q)resonant pitch/roll gyroscope implemented in a 40μm(100)silicon-on-insulator(SOI)substrate without using the deep react...This paper presents the design,fabrication,and characterization of a novel high quality factor(Q)resonant pitch/roll gyroscope implemented in a 40μm(100)silicon-on-insulator(SOI)substrate without using the deep reactive-ion etching(DRIE)process.The featured silicon gyroscope has a mode-matched operating frequency of 200 kHz and is the first out-of-plane pitch/roll gyroscope with electrostatic quadrature tuning capability to fully compensate for fabrication non-idealities and variation in SOI thickness.The quadrature tuning is enabled by slanted electrodes with sub-micron capacitive gaps along the(111)plane created by an anisotropic wet etching.The quadrature cancellation enables a 20-fold improvement in the scale factor for a typical fabricated device.Noise measurement of quadrature-cancelled mode-matched devices shows an angle random walk(ARW)of 0.63°√h^(−1) and a bias instability of 37.7°h^(−1),partially limited by the noise of the interface electronics.The elimination of silicon DRIE in the anisotropically wet-etched gyroscope improves the gyroscope robustness against the process variation and reduces the fabrication costs.The use of a slanted electrode for quadrature tuning demonstrates an effective path to reach high-performance in future pitch and roll gyroscope designs for the implementation of single-chip high-precision inertial measurement units(IMUs).展开更多
Resonator integrated optic gyro (RIOG) is a high-accuracy gyroscope based on the Sagnac effect. The waveguide- type ring resonator is a key rotation sensing element in the RIOG. An asymmetric resonance line shape is...Resonator integrated optic gyro (RIOG) is a high-accuracy gyroscope based on the Sagnac effect. The waveguide- type ring resonator is a key rotation sensing element in the RIOG. An asymmetric resonance line shape is found in the optic resonator. These asymmetries will induce offset errors when the phase modulation spectroscopy technique (PMST) is applied to the RIOG. The polarization errors and the difference among normal mode losses are found to be the two main sources of resonance asymmetry in an experiment. These sources are fully investigated and their contributions to the offset errors are compared. The analysis shows that proper modulation frequencies in clockwise (CW) and counterclockwise (CCW) directions can reduce an RIOG bias error. A transmissive resonator is recommended to obtain a better resonance line shape.展开更多
Polarization fluctuation induced noise and backscattering-induced noise are the dominant noises in resonant fiber optic gyroscopes. This Letter proposes a new method to suppress the carrier and backscattering induced ...Polarization fluctuation induced noise and backscattering-induced noise are the dominant noises in resonant fiber optic gyroscopes. This Letter proposes a new method to suppress the carrier and backscattering induced noise by the sideband locking technique. Besides choosing an optimized modulation depth and different clockwise and counterclockwise modulation frequencies, the sideband is locked to the cavity resonance. With the proper modulation frequency, the carrier frequency component locates at a position far away from the resonant frequency, and then it is suppressed by the cavity itself, which can be taken as a bandpass filter. The amplitude of the carrier frequency can be suppressed by 20–25 d B additionally by the cavity and the total intensity suppression ratio can reach 115.74 d B. The backscattering induced noise can be eliminated for the adoption of different frequencies. The method can realize a stable and high suppression ratio without high requirements for parameter accuracy or device performance.展开更多
This paper investigates the effects of material and dimension parameters on the frequency splitting,frequency drift,and quality factor(Q)of aluminium nitride(AlN)-on-n-doped/pure silicon(Si)microelectromechanical syst...This paper investigates the effects of material and dimension parameters on the frequency splitting,frequency drift,and quality factor(Q)of aluminium nitride(AlN)-on-n-doped/pure silicon(Si)microelectromechanical systems(MEMS)disk resonators through analysis and simulation.These parameters include the crystallographic orientation,dopant,substrate thickness,and temperature.The resonators operate in the elliptical,higher order,and flexural modes.The simulation results show that i)the turnover points of the resonators exist at 55°C,-50°C,40°C,and-10°C for n-doped silicon with the doping concentration of 2×1019 cm-3 and the Si thickness of 3.5μm,and these points are shifted with the substrate thickness and mode variations;ii)compared with pure Si,the modal-frequency splitting for n-doped Si is higher and increases from 5%to 10%for all studied modes;iii)Q of the resonators depends on the temperature and dopant.Therefore,the turnover,modal-frequency splitting,and Q of the resonators depend on the thickness and material of the substrate and the temperature.This work offers an analysis and design platform for high-performance MEMS gyroscopes as well as oscillators in terms of the temperature compensation by n-doped Si.展开更多
基金Project supported by the National Natural Science Foundation of China (Grant No. 60927005)the Innovation Foundation of BUAA for Ph. D. Graduates,Chinathe Fundamental Research Funds for the Central Universities,China (Grant No. YWF-10-01-A17)
文摘Dynamic characteristics of the resonant gyroscope are studied based on the Mathieu equation approximate solution in this paper.The Mathieu equation is used to analyze the parametric resonant characteristics and the approximate output of the resonant gyroscope.The method of small parameter perturbation is used to analyze the approximate solution of the Mathieu equation.The theoretical analysis and the numerical simulations show that the approximate solution of the Mathieu equation is close to the dynamic output characteristics of the resonant gyroscope.The experimental analysis shows that the theoretical curve and the experimental data processing results coincide perfectly,which means that the approximate solution of the Mathieu equation can present the dynamic output characteristic of the resonant gyroscope.The theoretical approach and the experimental results of the Mathieu equation approximate solution are obtained,which provides a reference for the robust design of the resonant gyroscope.
基金Project supported by the science and technology general project of Beijing Municipal Education Commission(Grant No.KM202111232019)Beijing Municipal Natural Science Foundation(Grant No.2214058)+4 种基金the Discipline Innovation Program of Higher Education(Grant No.D17021)the Open Project of the State Key Laboratory of Integrated Optoelectronics(Grant No.IOSKL2020KF22)Beijing Great Wall Scholars Program(Grant No.CIT&TCD20190323)the National Natural Science Foundation of China(Grant No.61875237)Beijing Youth Talent Support Program(Grant No.Z2019042)。
文摘By combining a silicon-based lithium niobate modulator and a silicon-based Si3N4resonator with silicon-based photonics technology,a highly systematic design of a hybrid integrated optical gyroscope with enhanced reciprocity sensitivity and a dual micro-ring structure is proposed for the first time in this paper.The relationship between the device's structural parameters and optical performance is also analyzed by constructing a complete simulation link,which provides a theoretical design reference to improve the system's sensitivity.When the wavelength is 1550 nm,the conversion frequency of the dual-ring optical path is 50 MHz,the coupling coefficient is 0.2,and the radius R is 1000μm,the quality factor of the silicon-based Si_(3)N_(4)resonator is 2.58×10^(5),which is 1.58 times that of the silicon-on-insulator resonator.Moreover,the effective number of times the light travels around the ring before leaving the micro-ring is 5.93,which is 1.62 times that of the silicon-on-insulator resonator.The work fits the gyro dynamic output diagram,and solves the problem of low sensitivity at low speed by setting the phase offset.This results provide a basis for the further optimization of design and chip processing of the integrated optical gyroscope.
基金Project supported by the National High Technology Research and Development Program of China(Grant No.2014AA123401)the National Key BasResearch and Development Program of China(Grant Nos.2016YFA0302103 and 2012CB821302)+1 种基金the National Natural Science Foundation of China(Gra11134003)Shanghai Excellent Academic Leaders Program of China(Grant No.12XD1402400)
文摘We theoretically investigate several parameters for the nuclear magnetic resonance gyroscope based on ^(133)C_(s–)^(129)Xe/^(131)Xe. For a cell containing a mixture of ^(133)Cs at saturated pressure, we investigate the optimal quenching gas(N_2) pressure and the corresponding pump laser intensity to achieve 30% ^(133)Cs polarization at the center of the cell when the static magnetic field B0 is 5 μT with different ^(129)Xe/^(131)Xe pressure. The effective field produced by spin-exchange polarized ^(129)Xe or ^(131)Xe sensed by ^(133)Cs can also be discussed in different^(129)Xe/^(131)Xe pressure conditions. Furthermore,the relationship between the detected signal and the probe laser frequency is researched. We obtain the optimum probe laser detuning from the D2(6~2S_(1/2)→ 6~2P_(3/2)) resonance with different ^(129)Xe/^(131)Xe pressure owing to the pressure broadening.
基金the Natural Science Foundation of China(Grant Nos.61701515 and U23B2066)the Nat-ural Science Foundation of Hunan Province,China(Grant No.2021JJ40700)the Research Project of National Uni-versity of Defense Technology(Grant No.ZK22-18).
文摘The dynamic range of the nuclear magnetic resonance gyroscope can be effectively improved through the closedloop control scheme,which is crucial to its application in inertial measurement.This paper presents the analytical transfer function of Xe closed-loop system in the nuclear magnetic resonance gyroscope considering Rb–Xe coupling effect.It not only considers the dynamic characteristics of the system more comprehensively,but also adds the influence of the practical filters in the gyro signal processing system,which can obtain the accurate response characteristics of signal frequency and amplitude at the same time.The numerical results are compared with an experimentally verified simulation program,which indicate great agreement.The research results of this paper are of great significance to the practical application and development of the nuclear magnetic resonance gyroscope.
文摘Integrated optical gyroscopes(IOGs)have been an efficient tool for numerous applications in various fields,including inertial navigation,flight control,and earthquake monitoring.Here,we review the progress of integrated optical gyroscopes based on two categories of integrated interferometric optical gyroscopes(IIOGs)and integrated resonant optical gyroscopes(IROGs).
基金the Shanghai Aerospace Advanced Technology Joint Research Fund(No.USCAST2019-23)。
文摘Nuclear magnetic resonance gyroscope (NMRG) has the characteristics of high precision and miniaturization, and is one of the main applications of quantum technology in the field of navigation. The transverse relaxation time (T_(2)) of the xenon nuclear spin in the atomic cell of the NMRG directly affects the angular random walk of the gyro. Accurate and rapid measurement of T_(2) is conducive to further improvement of gyroscope. At present, for the measurement of T_(2), the schemes of two orthogonal lasers for pumping and detecting are usually used. By applying two fast-switching orthogonal static magnetic fields and a single beam of circularly polarized laser with corresponding wavelength to pump the atomic cell, the xenon nuclear macroscopic magnetic moment Larmor precession is generated. The cesium atoms parametric magnetometer in cell is formed to detect the free induction decay signal generated by nuclear spin precession of xenon atoms. The measurement of T_(2) by a single laser simplifies the measurement equipment compared with traditional method with two lasers. The experimental results show that the T_(2) of xenon atoms is more than 10 s, and the effects of temperature are studied, which lay the foundation for the subsequent improvement of gyro performance.
基金This work is supported by the DARPA MTO,Single-Chip Timing and Inertial Measurement Unit(TIMU)program under contract#N66001-11-C-4176.
文摘This paper presents the design,fabrication,and characterization of a novel high quality factor(Q)resonant pitch/roll gyroscope implemented in a 40μm(100)silicon-on-insulator(SOI)substrate without using the deep reactive-ion etching(DRIE)process.The featured silicon gyroscope has a mode-matched operating frequency of 200 kHz and is the first out-of-plane pitch/roll gyroscope with electrostatic quadrature tuning capability to fully compensate for fabrication non-idealities and variation in SOI thickness.The quadrature tuning is enabled by slanted electrodes with sub-micron capacitive gaps along the(111)plane created by an anisotropic wet etching.The quadrature cancellation enables a 20-fold improvement in the scale factor for a typical fabricated device.Noise measurement of quadrature-cancelled mode-matched devices shows an angle random walk(ARW)of 0.63°√h^(−1) and a bias instability of 37.7°h^(−1),partially limited by the noise of the interface electronics.The elimination of silicon DRIE in the anisotropically wet-etched gyroscope improves the gyroscope robustness against the process variation and reduces the fabrication costs.The use of a slanted electrode for quadrature tuning demonstrates an effective path to reach high-performance in future pitch and roll gyroscope designs for the implementation of single-chip high-precision inertial measurement units(IMUs).
基金Project supported by the National Key Research and Development Program of China(Grant No.2016YFA02005003)the National Natural Science Foundation of China(Grant Nos.61274066,61504138,and 61474115)
文摘Resonator integrated optic gyro (RIOG) is a high-accuracy gyroscope based on the Sagnac effect. The waveguide- type ring resonator is a key rotation sensing element in the RIOG. An asymmetric resonance line shape is found in the optic resonator. These asymmetries will induce offset errors when the phase modulation spectroscopy technique (PMST) is applied to the RIOG. The polarization errors and the difference among normal mode losses are found to be the two main sources of resonance asymmetry in an experiment. These sources are fully investigated and their contributions to the offset errors are compared. The analysis shows that proper modulation frequencies in clockwise (CW) and counterclockwise (CCW) directions can reduce an RIOG bias error. A transmissive resonator is recommended to obtain a better resonance line shape.
文摘Polarization fluctuation induced noise and backscattering-induced noise are the dominant noises in resonant fiber optic gyroscopes. This Letter proposes a new method to suppress the carrier and backscattering induced noise by the sideband locking technique. Besides choosing an optimized modulation depth and different clockwise and counterclockwise modulation frequencies, the sideband is locked to the cavity resonance. With the proper modulation frequency, the carrier frequency component locates at a position far away from the resonant frequency, and then it is suppressed by the cavity itself, which can be taken as a bandpass filter. The amplitude of the carrier frequency can be suppressed by 20–25 d B additionally by the cavity and the total intensity suppression ratio can reach 115.74 d B. The backscattering induced noise can be eliminated for the adoption of different frequencies. The method can realize a stable and high suppression ratio without high requirements for parameter accuracy or device performance.
文摘This paper investigates the effects of material and dimension parameters on the frequency splitting,frequency drift,and quality factor(Q)of aluminium nitride(AlN)-on-n-doped/pure silicon(Si)microelectromechanical systems(MEMS)disk resonators through analysis and simulation.These parameters include the crystallographic orientation,dopant,substrate thickness,and temperature.The resonators operate in the elliptical,higher order,and flexural modes.The simulation results show that i)the turnover points of the resonators exist at 55°C,-50°C,40°C,and-10°C for n-doped silicon with the doping concentration of 2×1019 cm-3 and the Si thickness of 3.5μm,and these points are shifted with the substrate thickness and mode variations;ii)compared with pure Si,the modal-frequency splitting for n-doped Si is higher and increases from 5%to 10%for all studied modes;iii)Q of the resonators depends on the temperature and dopant.Therefore,the turnover,modal-frequency splitting,and Q of the resonators depend on the thickness and material of the substrate and the temperature.This work offers an analysis and design platform for high-performance MEMS gyroscopes as well as oscillators in terms of the temperature compensation by n-doped Si.