Etching of quartz crystals in liquid phase environment:A review

Quartz crystals are the most widely used material in resonant sensors,owing to their excellent piezoelectric and mechanical properties.With the development of portable and wearable devices,higher processing efficiency and geometrical precision are required.Wet etching has been proven to be the most efficient etching method for large-scale production of quartz devices,and many wet etching approaches have been developed over the years.However,until now,there has been no systematic review of quartz crystal etching in liquid phase environments.Therefore,this article provides a comprehensive review of the development of wet etching processes and the achievements of the latest research in thisfield,covering conventional wet etching,additive etching,laser-induced backside wet etching,electrochemical etching,and electrochemical discharge machining.For each technique,a brief overview of its characteristics is provided,associated problems are described,and possible solutions are discussed.This review should provide an essential reference and guidance for the future development of processing strategies for the manufacture of quartz crystal devices.

微细直写掩膜电解加工非晶合金平面微线圈工艺研究

针对掩膜电解加工工艺固化、流程复杂等问题,提出一种基于微细直写聚合物材料的图案化掩膜电解加工方法。对直写掩膜工艺应用于微细电解加工平面线圈工艺进行研究。采用单因素法获得了直写加工参数对掩膜的影响规律。采用正交实验获得了加工电压、阴极振动频率和占空比等工艺参数对成形精度的规律。建立了加工微结构尺寸的预测模型,利用优化的工艺参数在厚度30μm合金薄片上加工出宽度为300μm平面微线圈结构,通过网络分析仪对电流传感效应进行检测,获得了阻抗变化率为3.46%的响应。证明了直写掩膜应用于微细掩膜电解加工的可行性。

基于创新性内侧壁成型工艺的多光学通道微型碱金属原子气室

Existing microfabricated atomic vapor cells have only one optical channel,which is insufficient for supporting the multiple orthogonal beams required by atomic devices.In this study,we present a novel wafer-level manufacturing process for fabricating multi-optical-channel atomic vapor cells and an innovative method for batch processing the inner sidewalls of millimeter glass holes to meet optical channel requirements.Surface characterization and transmittance tests demonstrate that the processed inner sidewalls satisfy the criteria for an optical channel.In addition,the construction of an integrated processing platform enables multilayer non-isothermal anode bonding,the filling of inert gases,and the recovery and recycling of noble gases.Measurements of the absorption spectra and free-induction decay signals of xenon-129(^(129)Xe)and xenon-131(^(131)Xe)under different pump-probe schemes demonstrate the suitability of our vapor cell for use in atomic devices including atomic gyroscopes,dual-beam atomic magnetometers,and other optical/atomic devices.The proposed micromolding technology has broad application prospects in the field of optical-device processing.

Leveraging electrochemical sensors to improve efficiency of cancer detection

Electrochemical biosensors have emerged as a promising technology for cancer detection due to their high sensitivity,rapid response,low cost,and capability for non-invasive detection.Recent advances in nanomaterials like nanoparticles,graphene,and nanowires have enhanced sensor performance to allow for cancer biomarker detection,like circulating tumor cells,nucleic acids,proteins and metabolites,at ultra-low concentrations.However,several challenges need to be addressed before electrochemical biosensors can be clinically implemented.These include improving sensor selectivity in complex biological media,device miniaturization for implantable applications,integration with data analytics,handling biomarker variability,and navigating regulatory approval.This editorial critically examines the prospects of electrochemical biosensors for efficient,low-cost and minimally invasive cancer screening.We discuss recent developments in nanotechnology,microfabrication,electronics integration,multiplexing,and machine learning that can help realize the potential of these sensors.However,significant interdisciplinary efforts among researchers,clinicians,regulators and the healthcare industry are still needed to tackle limitations in selectivity,size constraints,data interpretation,biomarker validation,toxicity and commercial translation.With committed resources and pragmatic strategies,electrochemical biosensors could enable routine early cancer detection and dramatically reduce the global cancer burden.

Laser Synthesis and Microfabrication of Micro/ Nanostructured Materials Toward Energy Conversion and Storage

Nanomaterials are known to exhibit a number of interesting physical and chemical properties for various applications,including energy conversion and storage,nanoscale electronics,sensors and actuators,photonics devices and even for biomedical purposes.In the past decade,laser as a synthetic technique and laser as a microfabrication technique facilitated nanomaterial preparation and nanostructure construction,including the laser processing-induced carbon and non-carbon nanomaterials,hierarchical structure construction,patterning,heteroatom doping,sputtering etching,and so on.The laser-induced nanomaterials and nanostructures have extended broad applications in electronic devices,such as light–thermal conversion,batteries,supercapacitors,sensor devices,actuators and electrocatalytic electrodes.Here,the recent developments in the laser synthesis of carbon-based and non-carbon-based nanomaterials are comprehensively summarized.An extensive overview on laser-enabled electronic devices for various applications is depicted.With the rapid progress made in the research on nanomaterial preparation through laser synthesis and laser microfabrication technologies,laser synthesis and microfabrication toward energy conversion and storage will undergo fast development.

Laser-induced microjet-assisted ablation for high-quality microfabrication

Liquid-assisted laser ablation has the advantage of relieving thermal effects of common laser ablation processes, whereas the light scattering and shielding effects by laser-induced cavitation bubbles, suspended debris, and turbulent liquid flow generally deteriorate laser beam transmission stability, leading to low energy efficiency and poor surface quality. Here, we report that a continuous and directional high-speed microjet will form in the laser ablation zone if laser-induced primary cavitation bubbles asymmetrically collapse sequentially near the air-liquid interface under a critical thin liquid layer. The laser-induced microjet can instantaneously and directionally remove secondary bubbles and ablation debris around the laser ablation region, and thus a very stable material removal process can be obtained. The shadowgraphs of high-speed camera reveal that the average speed of laser-induced continuous microjet can be as high as 1.1 m sin its initial 500 μm displacement. The coupling effect of laser ablation, mechanical impact along with the collapse of cavitation bubbles and flushing of high-speed microjet helps achieve a high material removal rate and significantly improved surface quality. We name this uncovered liquid-assisted laser ablation process as laser-induced microjet-assisted ablation(LIMJAA) based on its unique characteristics. High-quality microgrooves with a large depth-to-width ratio of 5.2 are obtained by LIMJAA with a single-pass laser scanning process in our experiments. LIMJAA is capable of machining various types of difficult-to-process materials with high-quality arrays of micro-channels, square and circle microscale through-holes. The results and disclosed mechanisms in our work provide a deep understanding of the role of laser-induced microjet in improving the processing quality of liquid-assisted laser micromachining.

Etching-assisted femtosecond laser microfabrication

Although femtosecond laser microfabrication is one of the most promising three-dimensional（3D） fabrication techniques, it could suffer from low fabrication efficiency for structures with high 3D complexities. By using etching as a main assistant technique, the processing can be speeded up and an improved structure surface quality can be provided. However,the assistance of a single technique cannot satisfy the increasing demands of fabrication and integration of highly functional 3D microstructures. Therefore, a multi-technique-based 3D microfabrication method is required. In this paper, we briefly review the recent development on etching-assisted femtosecond laser microfabrication（EAFLM）. Various processing approaches have been proposed to further strengthen the flexibilities of the EAFLM. With the use of the multi-technique-based microfabrication method, 3D microstructure arrays can be rapidly defined on planar or curved surfaces with high structure qualities.

Microfabrication of Bubbular Cavities in PDMS for Cell Sorting and Microcell Culture Applications

We describe a novel technique, low surface energy Gas Expansion Molding （GEM）, to fabricate microbubble arrays in polydimethylsiloxane （PDMS） which are incorporated into parallel plate flow chambers and tested in cell sorting and microcell cuTture applications. This architecture confers several operational advantages that distinguish this technology approach from currently used methods. Herein we describe the GEM process and the parameters that are used to control microbubble formation and a Vacuum-Assisted Coating （VAC） process developed to selectively and spatially alter the PDMS surface chemistry in the wells and on the microchannel surface. We describe results from microflow image visualization studies conducted to investigate fluid streams above and within microbubble wells and conclude with a discussion of cell culture studies in PDMS.

臼齿碳酸盐岩:解密前寒武纪海洋化学性质的钥匙

臼齿构造(Molar tooth structure, MTS)是指主要由微米级微亮晶方解石充填的、具有肠状褶皱等特殊形态和结构的前寒武纪沉积构造。具有臼齿构造的这类前寒武纪碳酸盐岩称为臼齿碳酸盐岩(Molar tooth carbonate, MTC)。MTS具有全球分布、时代限定、形态多样、由微米级微亮晶方解石组成及早期成岩等基本特征,该认识早已得到学界广泛认同。在系统归纳MTC的地理分布、发育时限、宏观形态和微观组构的基础上,再次总结性地剖析了物理作用、生物作用和生物-地球化学作用3类主要成因假说的基本论点及其局限性。长期以来,作为一种大量出现于中—新元古代、具全球性分布的特殊碳酸盐岩类或沉积构造,研究关注的焦点和热点是MTS形成与消失的机制。尽管MTS成因还有争议,但其所具有的早期成岩特征,使越来越多的研究者将其作为前寒武纪海洋地球化学环境重建的重要研究对象。MTC的兴衰与前寒武纪海洋化学性质演化和前寒武纪一系列全球性事件密不可分。在此基础上提出MTC进一步研究的方向:一是探索MTC事件与相关全球性事件(如叠层石、冰川事件等)相互响应、促进或消长的关系,MTS的兴衰如何协同Columbia和Rodinia超大陆的聚散过程;二是从MTS微亮晶方解石微观组构出发,采用行之有效的地球化学方法,将MTC的形成、演化、更替与前寒武纪海洋性质以及大气圈、生物圈的演化相结合,进一步完善MTC成因理论,为前寒武纪诸多重大科学问题的研究提供参考。

Microfabrication and Performance of Annealed NiTi Shape Memory Thin Films by Sputtering for Microdevice Applications

The microfabrication and performance NiTi shape memory thin films for microdevice applications were studied by microfabrication processes, which were compatible with those of microelectronics fabrication processes. The sputter-deposition conditions, patterning process, and annealing conditions were investigated. The B2 crystal structures of the thin films can be obtained by annealing at 525°C for 30min. The results from x-ray photoemission spectroscopy indicated that the atomic concentration in the surface of the annealed thin films with preferred structures is comparable with those of the as-deposited films.

一种热对流式MEMS二维质点振速传感器

由空气质点振速传感器和声压传感器组成的矢量传声器是测量声场空间信息的重要方式。本文设计了一种新型热对流式二维质点振速传感器,不同于传统平行线式传感机制,该器件由多线进行交叉连结形成一个中央十字加热器和四个直角测温线,构成新的局域加热和温度传感方式,基于此设计能够获得更高的灵敏度并具有理想的正交性。通过数值分析对其传感机制进行了详细分析,并使用MEMS工艺进行器件制备和性能验证。实验结果表明,该器件具有良好的响应灵敏度和接近完美的正交指向性。所提出器件在体积受限的声场测量中具有潜在应用价值。

可悬停扑翼飞行器研究现状与关键技术

可悬停扑翼飞行器模仿自然界定点滞空昆虫和鸟类的飞行特点,隐蔽性高、灵活机动、应用环境多样,具有突出的理论和实用价值,引起了世界范围的广泛关注。对可悬停扑翼飞行器的研究现状和发展方向进行了综合评述。首先总结了近年来最突出的研究成果,按照微扑翼尺寸分类分别介绍MAV、NAV、PAV尺度下可悬停扑翼微飞行器的样机构型、动力系统、质量分配与飞行性能,统计了升力、翼展、质量、扑翼幅值等重要参数,介绍了电机、压电和电磁驱动扑翼微飞行器最具代表性的研究工作;然后针对目前飞行器研究运用的升力产生原理、飞行稳定性分析、功耗效率优化、续航能力等关键技术进行了分析和总结;最后讨论了扑翼飞行器亟待突破的技术难题和未来发展方向。

静电力驱动的悬臂梁微型电场传感器件

随着智能电网和能源互联网的发展,大规模实时电压/电场监测成为电力系统的迫切需求,这依赖于先进传感器件的大规模布置。电场测量在电力系统中具有重要意义。一方面,基于电场测量的电压反演可以实现高电压的非接触式测量,替代传统高压互感器,从而减少测量设备绝缘成本和安装难度;另一方面,电场测量还可以被应用于设备故障诊断、雷电预警、电磁环境测量等应用场景。传统的电场测量设备,如场磨等,往往体积大、成本高,无法大规模灵活布置。本文提出了一种静电力驱动的压阻式微型电场传感器。传感器被设计为四悬臂结构,悬臂在静电力的驱动下产生位移和应变,通过压阻材料转化为可测信号。所提出的传感器具有尺寸小、成本低、功耗低、易于批量生产的优点。同时,该传感器该具有高信噪比、高分辨率及宽电场测量范围。实验结果表明,所提出的传感器具有1.1~1100.0kV·m^(-1)的线性测量范围、112 V·m^(-1)·Hz^(-1/2)的交流电场分辨率以及496 Hz的截止频率。这一微型电场传感器将在智能电网及能源互联网中具有广泛的应用价值。

Development of a simple two-step lithography fabrication process for resonant tunneling diode using air-bridge technology

This article reports on the development of a simple two-step lithography process for double barrier quantum well(DBQW)InGaAs/AlAs resonant tunneling diode(RTD)on a semi-insulating indium phosphide(InP)substrate using an air-bridge technology.This approach minimizes processing steps,and therefore the processing time as well as the required resources.It is particularly suited for material qualification of new epitaxial layer designs.A DC performance comparison between the proposed process and the conventional process shows approximately the same results.We expect that this novel technique will aid in the recent and continuing rapid advances in RTD technology.

GaAs-based resonant tunneling diode:Device aspects from design,manufacturing,characterization and applications

This review article discusses the development of gallium arsenide(GaAs)-based resonant tunneling diodes(RTD)since the 1970s.To the best of my knowledge,this article is the first review of GaAs RTD technology which covers different epitaxialstructure design,fabrication techniques,and characterizations for various application areas.It is expected that the details presented here will help the readers to gain a perspective on the previous accomplishments,as well as have an outlook on the current trends and future developments in GaAs RTD research.

天然乳白水晶的微组构特征及其对呈色的影响

为了给乳白水晶的评价与改性以及其他工业类型石英乳白色的产生原因研究提供科学依据,采用ICP-OES、SEM、偏光显微镜和体视镜等现代分析测试技术,对比研究了乳白水晶和无色透明水晶的化学成分、气液包裹体、显微结构以及热处理等特征,分析探讨了它们对乳白水晶呈色的影响。结果表明,乳白水晶呈色的影响因素主要有:1)乳白水晶中存在大量的气液包裹体,其各种成分与石英晶体之间的折射率存在较大差值,在自然光下产生乳浊效应,使石英晶体变白;2)乳白水晶中分布有较多长0.1~1 mm、宽<50μm的微裂纹和长1 mm~4 cm、宽1~4 mm的微裂隙,微裂纹和微裂隙的气-固界面反射等作用可使乳白水晶呈色。w(SiO_(2))≥99.91325%,或Al、B、Li、Na、K、Ca、Mg、Ti、Fe、Mn、Cu、Cr、Ni等13种痕量杂质元素总量≤867.5×10^(-6)时,它们对乳白水晶的呈色基本上没有影响。加热温度<500℃,气液包裹体、微裂纹和微裂隙等致色因素并不会消除,因此在此温度条件下对乳白水晶的颜色变化几乎没有影响。

薄膜热电堆(Cu/Cu55Ni45)热流传感器的制备工艺及性能研究

本文首先通过磁控溅射技术在单晶Si和Al_(2)O_(3)陶瓷衬底上分别依次沉积厚度为600 nm的Cu和Cu55Ni45薄膜,然后使用微加工技术在10 mm×10 mm的衬底区域内制备了200对串联的热电偶组成薄膜热电堆结构,最后采用反应溅射联合硬掩膜沉积了不同厚度的氧化铝热阻层,使串联的热电偶分别产生冷端和热端。根据Seebeck效应,在热流的作用下薄膜热电堆冷热两端的温差使传感器输出热电信号,实现对热流密度的测量。通过对薄膜热电堆的表征与标定,结果表明:沉积在Si衬底与Al_(2)O_(3)陶瓷衬底上的Cu/Cu55Ni45热电堆中,Cu膜粗糙度分别为20和60 nm,Cu55Ni45膜粗糙度分别为15和20 nm,电阻分别为38.2Ω和2.83 kΩ,灵敏度分别为0.06945和0.02697 mV/(kW·m^(-2))。具有不同表面粗糙度的单晶Si衬底与Al_(2)O_(3)陶瓷衬底会影响在其表面沉积的Cu/Cu55Ni45热电堆表面粗糙度,进而导致薄膜热电堆产生电阻大小差异,此外,Cu/Cu55Ni45热流传感器的输出热电势与热流密度呈现良好的线性关系。

液滴喷射技术的应用进展

液滴喷射技术具有结构简单、成本低、定位精度高等优势,除喷墨打印外,在无模具成形、微机械和微器件制造、生物芯片、材料合成等领域有广泛的应用前景,本文综述这些进展,并简要介绍本课题组设计研制的8喷头组合溶液喷射合成仪及其性能、应用。

微流控芯片的材料与加工方法研究进展

综述了微流控芯片的制作材料及其加工方法的研究进展。在介绍了传统硅质材料,如硅、玻璃、石英等的基础上,着重描述了高分子聚合物材料在微流控芯片的应用趋势。针对不同材料,详叙了其材料特性、应用范围及加工方法。特别介绍了一些新的加工方法,如激光刻蚀法、软光刻、LIGA方法在该领域的应用。针对微流控芯片的材料与加工做了一个简要而系统的回顾,对微流控芯片和其他微型全分析系统的研究者有重要参考价值。

制造玻璃微流控芯片的简易加工技术

报道了在普通化学实验室中设计和加工玻璃微流控芯片的方法。用AdobeIllustrator 8.0软件设计微流控芯片图形 ,通过高分辨率激光照排机在照相底片上制得光刻掩模。用商品匀胶铬板表面的 14 5nmCr 5 70nmAz 180 5光胶层作为保护层 ,在 5 0℃刻蚀液 (1mol LHF +1mol LNaF)中 ,刻蚀速度为 2 μm min。通过彻底洗净加工好的玻璃基片 ,提高了芯片热键合的质量和成品率。制得的芯片已成功地用于氨基酸分离和PCR扩增。