Micro-optical electromechanical systems(MOEMS)combine the merits of micro-electromechanical systems(MEMS)and micro-optics to enable unique optical functions for a wide range of advanced applications.Using simple exter...Micro-optical electromechanical systems(MOEMS)combine the merits of micro-electromechanical systems(MEMS)and micro-optics to enable unique optical functions for a wide range of advanced applications.Using simple external electromechanical control methods,such as electrostatic,magnetic or thermal effects,Si-based MOEMS can achieve precise dynamic optical modulation.In this paper,we will briefly review the technologies and applications of Si-based MOEMS.Their basic working principles,advantages,general materials and micromachining fabrication technologies are introduced concisely,followed by research progress of advanced Si-based MOEMS devices,including micromirrors/micromirror arrays,micro-spectrometers,and optical/photonic switches.Owing to the unique advantages of Si-based MOEMS in spatial light modulation and high-speed signal processing,they have several promising applications in optical communications,digital light processing,and optical sensing.Finally,future research and development prospects of Si-based MOEMS are discussed.展开更多
This paper presents the design principles and fabrication techniques for simultaneously forming non-coplanar resonant beams and crab-leg supporting beams of dual-axis bulk micromachined resonant accelerometers by mask...This paper presents the design principles and fabrication techniques for simultaneously forming non-coplanar resonant beams and crab-leg supporting beams of dual-axis bulk micromachined resonant accelerometers by masked-maskless combined anisotropic etching.Four resonant beams are located at the surface of a silicon substrate,whereas the gravity centre of a proof mass lies within the neutral plane of four crab-leg supporting beams on the same substrate.Compared with early reported mechanical structures,the simple structure not only eliminates the bending moments caused by in-plane acceleration,and thereby avoiding the rotation of the proof mass,but also providing sufficiently small rigidity to X and Y axes accelerations,potentially leading to a large sensitivity for measuring the in-plane acceleration.展开更多
An amperometric multianalyte biosensor for the simultaneous determination of glucose and galactose was de-veloped based on chamber-type electrodes, which were fabricated by micromachining technology. The dual cham-ber...An amperometric multianalyte biosensor for the simultaneous determination of glucose and galactose was de-veloped based on chamber-type electrodes, which were fabricated by micromachining technology. The dual cham-ber-type enzyme electrode with glucose and galactose sensor elements was integrated onto one microchip. The ex-perimental parameters of this biosensor were optimized. The biosensor exhibited a linearity of up to 4.0 mol/L for glucose and 4.5 mol/L for galactose, and the response time was about 30 s for glucose and 40 s for galactose. No cross-talking behavior was investigated in the course of simultaneous measurement of the two analytes. Interference from electroactive species, such as ascorbic acid and uric acid, was minimized due to the permselectivity of Nafion film. In addition, the biosensor displayed a storage stability of longer than one month.展开更多
基金supported by the National Natural Science Foundation of China under Grant No.61975016the Science and Technology Project of Guangdong(2020B010190001)+2 种基金Natural Science Foundation of Beijing Municipality(1212013 and Z190006)Beijing Municipal Science&Technology Commission,Administrative Commission of Zhongguancun Science Park No.Z211100004821009Cultivation Project for Basic Research and Innovation of Yanshan University No.2021LGQN021.
文摘Micro-optical electromechanical systems(MOEMS)combine the merits of micro-electromechanical systems(MEMS)and micro-optics to enable unique optical functions for a wide range of advanced applications.Using simple external electromechanical control methods,such as electrostatic,magnetic or thermal effects,Si-based MOEMS can achieve precise dynamic optical modulation.In this paper,we will briefly review the technologies and applications of Si-based MOEMS.Their basic working principles,advantages,general materials and micromachining fabrication technologies are introduced concisely,followed by research progress of advanced Si-based MOEMS devices,including micromirrors/micromirror arrays,micro-spectrometers,and optical/photonic switches.Owing to the unique advantages of Si-based MOEMS in spatial light modulation and high-speed signal processing,they have several promising applications in optical communications,digital light processing,and optical sensing.Finally,future research and development prospects of Si-based MOEMS are discussed.
基金Project (No. 61076110) supported by the National Natural Science Foundation of China
文摘This paper presents the design principles and fabrication techniques for simultaneously forming non-coplanar resonant beams and crab-leg supporting beams of dual-axis bulk micromachined resonant accelerometers by masked-maskless combined anisotropic etching.Four resonant beams are located at the surface of a silicon substrate,whereas the gravity centre of a proof mass lies within the neutral plane of four crab-leg supporting beams on the same substrate.Compared with early reported mechanical structures,the simple structure not only eliminates the bending moments caused by in-plane acceleration,and thereby avoiding the rotation of the proof mass,but also providing sufficiently small rigidity to X and Y axes accelerations,potentially leading to a large sensitivity for measuring the in-plane acceleration.
基金Shanghai Rising Star Project of Shanghai Science and Technology Committee (No. 04QMX1443) the Science Foundation of Shanghai Education Commission and Applied Chemistry Key Laboratory Foundation of Shanghai Normal University.
文摘An amperometric multianalyte biosensor for the simultaneous determination of glucose and galactose was de-veloped based on chamber-type electrodes, which were fabricated by micromachining technology. The dual cham-ber-type enzyme electrode with glucose and galactose sensor elements was integrated onto one microchip. The ex-perimental parameters of this biosensor were optimized. The biosensor exhibited a linearity of up to 4.0 mol/L for glucose and 4.5 mol/L for galactose, and the response time was about 30 s for glucose and 40 s for galactose. No cross-talking behavior was investigated in the course of simultaneous measurement of the two analytes. Interference from electroactive species, such as ascorbic acid and uric acid, was minimized due to the permselectivity of Nafion film. In addition, the biosensor displayed a storage stability of longer than one month.
