Structure design and simulation of MEMS vibrating ring gyroscope

MEMS gyroscope is a new inertial navigation sensor,which can measure the input angular rate of sensitive axis using Coriolis effect.Compared to the conventional gyroscope,it owns many unique advantages.A novel structure of vibrating ring gyroscope is proposed and the finite element model of the oscillator is established based on MEMS technology.Through the modal analysis,the natural frequency and mode shapes of the oscillator are obtained.By analyzing the effects of the structural parameters on the mode shapes and frequency of the harmonic oscillator,the optimal design parameters are got.The frequency difference between the operating mode and the other modes is greater than 1kHz after optimization,which can avoid the frequency coupling of the operating mode and other vibrating modes of the oscillator.The simulation results show that the performance parameters of the ring structure meet the design requirements and have obvious advantages.

New digital drive phase control for improving bias stability of silicon MEMS gyroscope

In order to improve the bias stability of the micro-electro mechanical system（MEMS） gyroscope and reduce the impact on the bias from environmental temperature,a digital signal processing method is described for improving the accuracy of the drive phase in the gyroscope drive mode.Through the principle of bias signal generation,it can be concluded that the deviation of the drive phase is the main factor affecting the bias stability.To fulfill the purpose of precise drive phase control,a digital signal processing circuit based on the field-programmable gate array（FPGA） with the phase-lock closed-loop control method is described and a demodulation method for phase error suppression is given.Compared with the analog circuit,the bias drift is largely reduced in the new digital circuit and the bias stability is improved from 60 to 19 °/h.The new digital control method can greatly increase the drive phase accuracy,and thus improve the bias stability.

基于MEMS陀螺的高温随钻定向测斜仪研究

针对油气井测量时所面临的小孔径、超深井、温度范围广、温度变化率高、工作时间长等挑战,研究了基于MEMS陀螺仪的定向测斜仪,设计了MEMS陀螺定向测斜仪软硬件系统.为确保该环境下的测量精度提出了一种动态温度补偿方案,并采用基于小波滤波多尺度分析的方法对动态温变环境下陀螺输出信号进行去噪滤波处理,以实现定向测斜仪系统的测量精度.论文给出了定向测斜仪硬件系统方案、定向测斜算法、小波多尺度滤波算法.测试结果表明:该系统在常温和动态温变环境下井斜方位角精度优于±2°,井斜角精度优于±0.1°,工作温度最高150℃,可适应我国深层油气井勘探开发的应用场景需求.

基于改进自适应滤波的MEMS陀螺振动误差抑制研究

本文提出一种基于改进自适应滤波的MEMS陀螺随机振动误差的补偿算法。该算法采用简化Sage-Husa自适应滤波算法估计量测噪声,并通过协方差匹配技术引入收敛性判据抑制了滤波的发散,它提高了实时性且减少了计算量。实验结果表明:经过改进算法滤波后,MEMS陀螺随机振动误差的方差减少97.76%,与常规卡尔曼滤波相比,改进算法的方差减少了72.66%,验证了改进的自适应卡尔曼滤波算法可以有效地抑制MEMS陀螺因随机振动引起的输出误差。

MEMS陀螺工作原理及其性能提升方法

MEMS陀螺是一种应用广泛的新型微惯性传感器,可实现高精度、小体积、抗干扰性强的角速度测量,被广泛应用于航空航天、平台钻井、自动驾驶、可穿戴设备以及手机中。近年来,随着对MEMS陀螺研究的不断深入,许多新型MEMS陀螺的工作原理被提出,由于测量原理的不同,其性能差异往往很大。本文旨在解决对MEMS陀螺的工作模式缺少系统性综述的问题,根据陀螺最终的读出技术,将MEMS陀螺的工作模式分为调幅、全角以及调频模式。在系统介绍其工作原理的基础上,详细讨论了各种工作模式下MEMS陀螺的性能提升方法。最后还介绍了各类MEMS陀螺的发展趋势,并结合各模式特性对MEMS陀螺的发展做出了展望。

Gross errors identification and correction of in-vehicle MEMS gyroscope based on time series analysis

This paper presents a novel approach to identify and correct the gross errors in the microelectromechanical system （MEMS） gyroscope used in ground vehicles by means of time series analysis. According to the characteristics of autocorrelation function （ACF） and partial autocorrelation function （PACF）, an autoregressive integrated moving average （ARIMA） model is roughly constructed. The rough model is optimized by combining with Akaike＇s information criterion （A/C）, and the parameters are estimated based on the least squares algorithm. After validation testing, the model is utilized to forecast the next output on the basis of the previous measurement. When the difference between the measurement and its prediction exceeds the defined threshold, the measurement is identified as a gross error and remedied by its prediction. A case study on the yaw rate is performed to illustrate the developed algorithm. Experimental results demonstrate that the proposed approach can effectively distinguish gross errors and make some reasonable remedies.

热振子式Z轴MEMS角速度陀螺敏感机理的研究

揭示了一种热振子式Z轴MEMS角速度陀螺的敏感机理。在给出工作原理、热振子的振动模态和陀螺效应的基础上,对敏感结构内的温度场进行了计算。结果表明:(1)开机1.8 s后在敏感结构内形成一个稳定的温度场。(2)热振子在Y方向建立驱动模态,当沿着Z轴输入角速度时,在哥氏力的作用下热振子沿着X方向移动,造成温度场偏移,X方向上对称平行设置的两热线温差ΔT_(X)随着输入加速度az的加大呈现线性增长,温度灵敏度为125 mK/(°/s)。(3)根据输入-输出ω_(z)-V_(Xout)特性曲线,得到数学模型,揭示了该陀螺的敏感机理,陀螺灵敏度为0.095 mV/(°/s),非线性度为2.97%。本研究为优化结构奠定了实用理论基础。

Periodic Error Compensation for Quartz MEMS Gyroscope Drift of INS

In order to improve the navigation accuracy of an inertial navigation system （INS）, composed of quartz gyroscopes, the existing real-time compensation methods for periodic errors in quartz gyroscope drift and the periodic error term relationship between sampled original data and smoothed data are reviewed. On the base of the results, a new compensation method called using former period characteristics to compensate latter smoothness data （UFCL for short） method is proposed considering the INS working characteristics. This new method uses the original data without smoothing to work out an error conversion formula at the INS initial alignment time and then compensate the smoothed data errors by way of the formula at the navigation time. Both theoretical analysis and experimental results demonstrate that this method is able to cut down on computational time and raise the accuracy which makes it a better real-time compensation approach for periodic error terms of quartz micro electronic mechanical system （MEMS） gyroscope＇s zero drift.

Design and Fabrication of MEMS Gyroscopes on the Silicon-on-insulator Substrate with Decoupled Oscillation Modes

The mode coupling is a major factor to affect the precision of the micro electromechanical systems（MEMS） gyroscope. Currently, many MEMS gyroscopes with separate oscillation modes for drive and detection have been developed to decrease the mode coupling, but the gyroscope accuracy can not satisfy the high-precision demand well. Therefore, high performance decoupled MEMS gyroscopes is still a hot topic at present. An innovative design scheme for a MEMS gyroscope is designed, and in this design, the inertial mass is divided into three parts including the inner mass, the outer mass and the main frame mass. The masses are supported and separated by a set of mutually orthogonal beams to decouple their movements. Moreover, the design is modelled by multi-port-element network（MuPEN） method and the simulation results show that the mode coupling of the gyroscope between driving and sensing mode was eliminated effectively. Furthermore, we proposed a new silicon-on-insulator（SOI） process to fabricate the gyroscope. The scale factor of the fabricated gyroscope is 8.9 mV/（（~）os） and the quality factor（Q-factor） is as high as 600 at atmosphere pressure, and then, the resonant frequency, scale factor and bias drift has been test. Process and test results show that the proposed MEMS gyroscope are effective for decrease mode coupling, furthermore, it can achieve a high performance at atmosphere pressure. Furthermore, the MEMS gyroscope can achieve a high performance at atmosphere pressure. The research can be taken as good advice for the design and fabrication of MEMS gyroscope, meanwhile, it also provides technical support for speeding up of MEMS gyroscope industrialization.

Analysis of mathematical model for micromechanical vibratory wheel gyroscope

By the sketch of structure of MVWG,the working laws of this kind of gyroscope we re explained.To the aid of Euler′s Dynamics Equation,a mathematical model of the gyroscope was constructed,and then by the basic working laws of MVWG the model was simplified.Under the conditions of the three axial direction rotations and general rotation,the mathematical model was resolved.And finally by the solutions, the working laws of the gyroscope, the working disparity among all sorts of gyrations and the influences from the gyrations in the axial directions were analysed.

Novel On-Line North-Seeking Method Based on a Three-Axis MEMS Gyroscope

A novel on-line north-seeking method based on a three-axis micro-electro-mechanical system(MEMS)gyroscope is designed.This system processes data by using a Kalman filter to calibrate the installation error of the three-axis MEMS gyroscope in complex environment.The attitude angle updating for quaternion,based on which the attitude instrument will be rotated in real-time and the true north will be found.Our experimental platform constitutes the dual-axis electric rotary table and the attitude instrument,which is developed independently by our scientific research team.The experimental results show that the accuracy of north-seeking is higher than 1°,while the maximum root mean square error and the maximum mean absolute error are 0.906 7 and 0.910 0,respectively.The accuracy of north-seeking is much higher than the traditional method.

Multi-scale prediction of MEMS gyroscope random drift based on EMD-SVR

To improve the prediction accuracy of micro-electromechanical systems(MEMS)gyroscope random drift series,a multi-scale prediction model based on empirical mode decomposition(EMD)and support vector regression(SVR)is proposed.Firstly,EMD is employed to decompose the raw drift series into a finite number of intrinsic mode functions(IMFs)with the frequency descending successively.Secondly,according to the time-frequency characteristic of each IMF,the corresponding SVR prediction model is established based on phase space reconstruction.Finally,the prediction results are obtained by adding up the prediction results of all IMFs with equal weight.The experimental results demonstrate the validity of the proposed model in random drift prediction of MEMS gyroscope.Compared with a single SVR model,the proposed model has higher prediction precision,which can provide the basis for drift error compensation of MEMS gyroscope.

A Practical Pll-Based Drive Circuit with Ultra-Low-Noise Tia for Mems Gyroscope

A novel phase-locked loop( PLL)-based closed-loop driving circuit with ultra-low-noise trans-impedance amplifier( TIA) is proposed. The TIA is optimized to achieve ultra-low input-referred current noise. To track drive-mode resonant frequency and reduce frequency jitter of actuation voltage,a PLL-based driving technique is adopted. Implemented on printed circuit board( PCB),the proposed driving loop has successfully excited MEMS element into resonance,with a settling time of 3 s. The stable frequency and amplitude of TIA output voltage are 10.14 KHz and 800 mVPP,respectively. With sense-channel electronics,the gyroscope exhibits a scale factor of 0.04 mV/°/s and a bias instability of 57.6°/h,which demonstrates the feasibility of the proposed driving circuit.

Noise estimation and filtering method of MEMS gyroscope based on EMMAP

Aiming at the problems of low measurement accuracy,uncertainty and nonlinearity of random noise of the micro electro mechanical system(MEMS)gyroscope,a gyroscope noise estimation and filtering method is proposed,which combines expectation maximum(EM)with maximum a posterior(MAP)to form an adpative unscented Kalman filter(UKF),called EMMAP-UKF.According to the MAP estimation principle,a suboptimal unbiased MAP noise statistical estimation model is constructed.Then,EM algorithm is introduced to transform the noise estimation problem into the mathematical expectation maximization problem,which can dynamically adjust the variance of the observed noise.Finally,the estimation and filtering of gyroscope random drift error can be realized.The performance of the gyro noise filtering method is evaluated by Allan variance,and the effectiveness of the method is verified by hardware-in-the-loop simulation.

INVESTIGATION OF SENSITIVITY FOR SILICON MICROMECHANICAL TUNING-FORK GYROSCOPE

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MEMS陀螺仪高精度低噪声检测电路设计

为满足电容式MEMS陀螺仪低噪声,高精度的检测需求,设计了一款基于开关电容结构的全差分检测电路,主要包括电容检测和数字量化处理两部分。电容检测电路采用离散时间电容电压(C/V)转换方案,提出将高频载波调制和相关双采样技术相结合的方式,有效降低了低频噪声的干扰。量化电路采用一款4阶4 bit单环前馈结构的带通ΔΣ调制器,输入信号前馈通路的引入提高了系统的稳定性,内部多位量化器有效提高了信噪比。系统在保持低功耗的同时实现了高精度输出。基于0.18μm BCD工艺,在5 V电源电压下,对整体电路进行仿真验证。仿真结果表明,检测电路灵敏度可以实现10 m V/f F,在谐振频率5 k Hz处,等效输入电容噪声为■。最终在100 Hz带宽范围内,读出信号量化精度可以达到15 bits。与传统的MEMS陀螺仪检测电路相比,该电路具有更低的噪声和更高的量化精度,能够满足高精度检测应用需求。

Temperature compensation method for low cost three-axis MEMS digital angular rate gyroscopes

In recent years,a large number of small volume,low cost micro electro mechanical systems（MEMS）digital three-axis angular rate gyroscopes have been developed and widely used in civil and military fields.However,these kinds of gyroscopes have poor performances in initial zero-bias,temperature drift,In-Run bias stability,bias repeatability,etc.,their output errors need to be compensated before being used.Based on a lot of experiments,the temperature drift and the initial zero-bias are the major error sources in the MEMS gyroscopes output data.Due to the poor repeatability of temperature drift,the temperature compensation coefficients need to be recalculated every time before using.In order to recalculate parameters of the temperature compensation model quickly,a 1st-order polynomial model of temperature is established,then a forgetting factor recursive least squares estimator will be adopted to identify the model parameters in real time.Static and dynamic experimental data shows that this method removed/compensated the temperature drift and initial zero-bias from the output of the gyroscopes effectively.

三轴MEMS陀螺仪轨迹跟踪的自耦PID控制方法

为了有效提高三轴微机械(Micro-Electro-Mechanic System,MEMS)陀螺仪的抗干扰能力和检测精度,基于自耦PID控制理论提出了一种简单的陀螺仪控制方法。该方法将三轴MEMS陀螺仪控制问题分解为三个严格反馈子系统的控制问题,然后将三个子系统已知或未知动态、其不确定性和外部有界扰动分别定义为三个总扰动,进而将三个子系统等价映射为三个二阶线性扰动系统,据此分别构建了在总扰动反相激励下的三个受控误差系统,并根据自耦PID控制理论分别设计了三个自耦PD控制器,最后分析了每个子系统的鲁棒稳定性和抗扰动鲁棒性。仿真实验证明了所提控制方法的有效性,其在MEMS陀螺仪控制系统领域具有良好的实际应用前景。

低成本MEMS惯性器件行人运动模式识别算法

针对行人正常行走、上楼、下楼等常见运动模式识别的问题,提出了一种低成本的足部MEMS惯性器件运动模式识别算法。首先,根据MEMS惯性器件的安装关系和实际采集的数据,分析了不同运动模式下的加速度计和陀螺仪的输出特征,然后,选取x轴方向的加速度计和y轴方向的陀螺仪输出的数据,利用输出波峰波谷的先后逻辑顺序,识别正常行走、上楼、下楼3种常见的行人运动模式,最后,对4名实验人员采集的10组数据进行分析。结果表明:采用该方法,正常行走状态识别的平均成功率可达到100%,上楼状态识别的平均成功率达到97.25%以上,下楼状态识别的平均成功率达到98.99%以上。从而验证了该方法的有效性。

基于维纳过程的MEMS陀螺仪贮存寿命评估

目的 针对MEMS陀螺仪在步进应力加速试验条件下获取的性能退化数据,提出基于维纳过程的贮存寿命评估方法及其模型准确度检验方法。方法 首先,确定温度为影响MEMS陀螺仪性能退化的主要环境因素,采用步进温度应力加速试验的方式获取其性能退化数据。其次,分析各项性能参数的演变规律,确定标度因数为表征产品性能退化的特征性能参数。最后,采用漂移维纳过程对标度因数退化轨迹进行建模,并外推得到常温条件下的贮存寿命。结果 采用留一法对模型精度进行验证,模型准确度最低为86.44%。可靠度水平为0.95时,常温贮存(25℃)条件下的寿命评估结果为50.02 a。结论 基于维纳过程建立的性能退化模型的准确度在85%以上,该模型可应用于指定贮存条件下MEMS陀螺仪的性能退化预测及贮存寿命评估。