The swelling of SU-8 mold is one of the most important factors influencing the dimensional accuracy of a metal mieropart produced by ultra-violet lithography galvanik abformung（UV-LIGA）. The isolation belt struc- tu...The swelling of SU-8 mold is one of the most important factors influencing the dimensional accuracy of a metal mieropart produced by ultra-violet lithography galvanik abformung（UV-LIGA）. The isolation belt struc- ture is usually employed to enhance the dimensional accuracy of electroformed metal mieropart. However, noble metal is wasted because the isolation belt is filled with metal when noble metal mieroparts are fabricated. There- fore, a semi-isolation belt structure is presented to save noble metal. Furthermore, a high current density is also introduced to shorten the eleetroforming time, and thus the dimensional accuracy of electroformed gold micropart is improved by using the electrolyte jet. The experimental results indicate that both the semi-isolation belt and the high current density can help to enhance the dimensional accuracy of electroformed gold micropart. Its dimen- sional error is only 5 μm at the current density of 0. 6 A/dm2 while the semi-isolation belt structure is used.展开更多
Relatively to non-traditional and high-energy-beam micro-manufacturing technique, the micro-cutting technology has many merits. For instance, the machining range is bigger, the cost of equipments is much lower, and th...Relatively to non-traditional and high-energy-beam micro-manufacturing technique, the micro-cutting technology has many merits. For instance, the machining range is bigger, the cost of equipments is much lower, and the productivity and machining accuracy are higher. Therefore, the micro-cutting technology will take an important effect on the machining technique of complex shape microparts. In this paper, based on selfly-developed machine tool, the precision cutting technology of complex shape microparts made of metal material was studied by analyzing the modeling method on complex shape, the means of toolpaths layout and the optimal selection for cutting parameters. On the basis of above work, a typical duralumin specimen of high precision, low surface roughness and complex shape micropart was manufactured. This result will provide favorable technical support for farther research on the micro-cutting technology.展开更多
We have been developing new fabrication tools based on optical radiation pressur e and related phenomena to develop a flexible and accurate microfabrication tec hnology. In this paper, the laser trapping probe for the...We have been developing new fabrication tools based on optical radiation pressur e and related phenomena to develop a flexible and accurate microfabrication tec hnology. In this paper, the laser trapping probe for the nano-CMM for assessment , in addition to micromachining technique using a small particle controlled by o p tical radiation pressure and laser aggregation technique are discussed. As the p o sitional detection probe for the nano-CMM, an optically trapped silica particle with 8 mm diameter in forced oscillation state is used. A probe sphere retains a stable position when applied with trapping force by Nd:YAG laser light formed an nu lar and is forced to oscillate by the driving force changed by modulating the in tensity of LD emission. Experintal results show that this vibrational microprobe h as the possibility to achieve positional sensing accuracy of less than 25 nm. As a new micromachining technique, nano-removal process using an optically trapped m icro-grain is proposed. The laser trapping force enables not only to stably trap the diamond grain with asymmetrical shape but also to freely control the positi on with spinning. Using this micro machining tool, the machining experiments of h ydrocarbon film are performed. AFM observation confirmed that the fine groove wi th depths of about 3～4 nm can be fabricated. As an additive process based on ra diation pressure, a laser microstructure fabrication using laser agglomeration p h enomena of colloidal particles aided by radiation pressure is investigated. By c ontrolling laser beam scanning in slurry containing KOH solution and SiO 2 par ticles with a diameter of 140 nm, colloidal particles are aggregated and adhered firmly to a silicon wafer substrate. Using this laser agglomerating process, two-dimensional grid microstructures at the pitch of 5 mm can be fabricated.展开更多
基金Supported by the National Natural Science Foundation of China(91023018)~~
文摘The swelling of SU-8 mold is one of the most important factors influencing the dimensional accuracy of a metal mieropart produced by ultra-violet lithography galvanik abformung（UV-LIGA）. The isolation belt struc- ture is usually employed to enhance the dimensional accuracy of electroformed metal mieropart. However, noble metal is wasted because the isolation belt is filled with metal when noble metal mieroparts are fabricated. There- fore, a semi-isolation belt structure is presented to save noble metal. Furthermore, a high current density is also introduced to shorten the eleetroforming time, and thus the dimensional accuracy of electroformed gold micropart is improved by using the electrolyte jet. The experimental results indicate that both the semi-isolation belt and the high current density can help to enhance the dimensional accuracy of electroformed gold micropart. Its dimen- sional error is only 5 μm at the current density of 0. 6 A/dm2 while the semi-isolation belt structure is used.
基金Sponsored by China Postdoctoral Science Foundation (Grant No2004035530)
文摘Relatively to non-traditional and high-energy-beam micro-manufacturing technique, the micro-cutting technology has many merits. For instance, the machining range is bigger, the cost of equipments is much lower, and the productivity and machining accuracy are higher. Therefore, the micro-cutting technology will take an important effect on the machining technique of complex shape microparts. In this paper, based on selfly-developed machine tool, the precision cutting technology of complex shape microparts made of metal material was studied by analyzing the modeling method on complex shape, the means of toolpaths layout and the optimal selection for cutting parameters. On the basis of above work, a typical duralumin specimen of high precision, low surface roughness and complex shape micropart was manufactured. This result will provide favorable technical support for farther research on the micro-cutting technology.
文摘We have been developing new fabrication tools based on optical radiation pressur e and related phenomena to develop a flexible and accurate microfabrication tec hnology. In this paper, the laser trapping probe for the nano-CMM for assessment , in addition to micromachining technique using a small particle controlled by o p tical radiation pressure and laser aggregation technique are discussed. As the p o sitional detection probe for the nano-CMM, an optically trapped silica particle with 8 mm diameter in forced oscillation state is used. A probe sphere retains a stable position when applied with trapping force by Nd:YAG laser light formed an nu lar and is forced to oscillate by the driving force changed by modulating the in tensity of LD emission. Experintal results show that this vibrational microprobe h as the possibility to achieve positional sensing accuracy of less than 25 nm. As a new micromachining technique, nano-removal process using an optically trapped m icro-grain is proposed. The laser trapping force enables not only to stably trap the diamond grain with asymmetrical shape but also to freely control the positi on with spinning. Using this micro machining tool, the machining experiments of h ydrocarbon film are performed. AFM observation confirmed that the fine groove wi th depths of about 3～4 nm can be fabricated. As an additive process based on ra diation pressure, a laser microstructure fabrication using laser agglomeration p h enomena of colloidal particles aided by radiation pressure is investigated. By c ontrolling laser beam scanning in slurry containing KOH solution and SiO 2 par ticles with a diameter of 140 nm, colloidal particles are aggregated and adhered firmly to a silicon wafer substrate. Using this laser agglomerating process, two-dimensional grid microstructures at the pitch of 5 mm can be fabricated.
