In order to achieve active grinding control, a novel numerical controlmicropositioning workpiece table with a resolution of 6 nm has been developed. The table is drivenby three piezoelectric actuators mounted on the b...In order to achieve active grinding control, a novel numerical controlmicropositioning workpiece table with a resolution of 6 nm has been developed. The table is drivenby three piezoelectric actuators mounted on the base. An elastic structure with three half-notchflexure hinges is designed to apply preload to the piezoelectric actuators. The position of flexurebinges is also elaborately designed with consideration to reduce the bending deformation of themoving part. Three capacitive sensors are used to form close loop control system. Considering thetable as a damped 3-DOF mass-spring system, the models of static and dynamic stiffness and errorowing to the action of external forces have been established. In order to make the table have highresolution and positioning accuracy, an error compensation algorithm is implemented by using theestablished models. The experimental testing has been carried out to verify the performance of theworkpiece table and the established models of the micropositioning workpiece table.展开更多
基金This project is supported by National Natural Science Foundation of China(No.50275104)
文摘In order to achieve active grinding control, a novel numerical controlmicropositioning workpiece table with a resolution of 6 nm has been developed. The table is drivenby three piezoelectric actuators mounted on the base. An elastic structure with three half-notchflexure hinges is designed to apply preload to the piezoelectric actuators. The position of flexurebinges is also elaborately designed with consideration to reduce the bending deformation of themoving part. Three capacitive sensors are used to form close loop control system. Considering thetable as a damped 3-DOF mass-spring system, the models of static and dynamic stiffness and errorowing to the action of external forces have been established. In order to make the table have highresolution and positioning accuracy, an error compensation algorithm is implemented by using theestablished models. The experimental testing has been carried out to verify the performance of theworkpiece table and the established models of the micropositioning workpiece table.
