Mixed sensitivity H_∞ control for LTI systems with varying time delays

Designing a robust controller for a system with timevarying delays poses a major challenge. In this paper, we propose a method based on mixed sensitivity H∞ for the control of linear time invariant（LTI） systems with varying time delays. The time delay is assumed bounded and the upper bound is known. In the technique we propose, the delay affecting the plant to be controlled is treated as an unmodeled uncertainty（in form of multiplicative uncertainty）. That uncertainty is approximated and then an H∞based controller, for the plant represented by the multiplicative uncertainty and the nominal model, is calculated. The obtained H∞controller is used to control the LTI systems with varying time delays. Simulation examples are given to illustrate the effectiveness of the proposed method.

H_∞ SYNCHRONIZATION CONTROL OF LINEAR SYSTEMS AND ITS APPLICATION TO WAFER-RETICAL STAGE

For the outputs of two nth-order linear control systems to work insynchronization and meanwhile to track their commands, a H_(infinity) synchronization control schemeis presented. In terms of two uncoupled single variable linear systems, a multivariable coupledsystem is established by choosing one output and the difference of the two outputs as a new outputvector, so that both command tracking and synchronization properties can be demonstrated by aH_(infinity) performance index. To improve the synchronization and trailing performance and toguarantee the system robust stability, the mixed sensitivity H_(infinity), design methodology isadopted. The presented synchronization scheme is then extended to the case where one of the twosystems include two input variables, and then applied to the position synchronization control of awafer-retical stage. The wafer-reticle stage consists of a wafer stage, a reticle coarse stage, anda reticle fine stage. The reticle coarse stage picks up the reticle fine stage. The three stagesought to tack their commands, but synchronization between the wafer stage and the reticle fine stagemust be stressed in the tracking process. In the application, by appropriately determining theweighting matrices for the sensitivity function and the complementary sensitivity function, asatisfactory KL synchronization controller is obtained to realize highly accurate positionsynchronization, and to guarantee tracking performance. The above results are verified by simulationexperiments.

Soft initial-rotation and H_∞ robust constant rotational speed control for rotational MEMS gyro

A novel soft initiai-rotation control system and an H∞ robust constant rotational speed controller （RCRSC） for a rotational MEMS （micro-electro-mechanical system） gyro are presented. The soft initial-rotation control system can prevent the possible tumbling down of the suspended rotor and ensure a smooth and fast initial-rotation process. After the initial-rotation process, in order to maintain the rotational speed accurately constant, the RCRSC is acquired through the mixed sensitivity design approach. Simulation results show that the actuation voltage disturbances from the internal carrier waves in the gyro is reduced by more than 15.3 dB, and the speed fluctuations due to typical external vibrations ranging from 10 Hz to 200 Hz can also be restricted to 10^-3 rad/s order.

H_∞ control design for unstable plants

For the control of unstable plants,it is required that the Nyquist locus of the system should encircle anticlockwise the point-1+j0,and the performance weighting function must be selected based on the specific requirement of the mid-frequency gain. Besides,the performance limitation imposed by the Bode's integral also must be considered. Therefore the H∞ design for unstable plants is different from that in the regular case. It is pointed out that the sensitivity function for unstable plants must remain constant over the mid-frequency range to ensure a robust design. The selection of weighting functions to meet these requirements in the H∞ design is discussed in detail in the paper. A mixed sensitivity H∞ design example is also given to demonstrate the special considerations of the design.