Molecular dynamics method is applied to study the machining mechanisms of polishing based on coupling vibrations of liquid. The physical phenomena of abrasive particles bombarding on silicon monocrystal surface are si...Molecular dynamics method is applied to study the machining mechanisms of polishing based on coupling vibrations of liquid. The physical phenomena of abrasive particles bombarding on silicon monocrystal surface are simulated using Tersoff potentials. The effects of vibration parameters, particle size, incident angle and particle material are analyzed and discussed. Material removal mechanisms are studied. Deformation and embedment phenomena are found in the simulations, Bombardment will destroy the crystal structures near the impact point, and adhesion effect is responsible for final removal of material.展开更多
Long-lasting constant loading commonly exists in silicon-based microelectronic contact and can lead to the appearance of plastic deformation.Stress relaxation behaviors of monocrystalline silicon coated with amorphous...Long-lasting constant loading commonly exists in silicon-based microelectronic contact and can lead to the appearance of plastic deformation.Stress relaxation behaviors of monocrystalline silicon coated with amorphous SiO_(2)film during nanoindentation are probed using molecular dynamics simulation by varying the indenter’s size.The results show that the indentation force(stress)declines sharply at the initial and decreases almost linearly toward the end of holding for tested samples.The amount of stress relaxation of SiO_(2)/Si samples indented with different indenters during holding increases with growing indenter size,and the corresponding plastic deformation characteristics are carefully analyzed.The deformation mechanism for confined amorphous SiO_(2)film is depicted based on the amorphous plasticity theories,revealing that the more activated shear transformation zones(STZs)and free volume within indented SiO_(2)film promote stress relaxation.The phase transformation takes place to monocrystalline silicon,the generated atoms of Si-II and bct-5 phases within monocrystalline silicon substrate during holding are much higher than those for smaller indenter.展开更多
A method of simulation of vibrational spectra by using the "internal coordinatecorrelation" based on molecular dynamics algorithms and auto-correlation function has been developed.The in-ternal coordinates,s...A method of simulation of vibrational spectra by using the "internal coordinatecorrelation" based on molecular dynamics algorithms and auto-correlation function has been developed.The in-ternal coordinates,such as bond stretching,bond angle bending,out-of-plane bending and torsion,are treatedas the dynamic variables to obtain a density spectrum or the "internal coordinate correlation" spectrum Theadvantages of this method are as follows:i)it is easier to assign vibration modes for the density spectra;ii)itsimply connects the Fourier transformed "internal coordinate correlation" function to the eigenvectors innormal coordinate analysis;iii)it is a basis for simulating IR and Raman active spectra of a large molecularsystem.展开更多
Long-lasting constant loading commonly exists in silicon-based microelectronic contact,as well as the chemical mechanical polishing area.In this work,the stress relaxation analysis of single crystal silicon coated wit...Long-lasting constant loading commonly exists in silicon-based microelectronic contact,as well as the chemical mechanical polishing area.In this work,the stress relaxation analysis of single crystal silicon coated with an amorphous SiO_(2) film is performed by varying the maximum indentation depth using molecular dynamics simulation.It is found that during holding,the applied indentation force declines sharply at the beginning and then steadily towards the end of the holding period.The stress relaxation amount of bilayer composites increases as the maximum indentation depth increases.It is also found that the deformation features of SiO_(2) film and silicon substrate during holding are inherited from the loading process.The SiO_(2) film during holding is further densified when the maximum indentation depth is equal to or less than a certain value(5.5 nm for the 0.8-nm film).The amount of generated phases and phase distributions of silicon substrate during holding are affected by the plastic deformation of silicon during loading.展开更多
Nanobeams have promising applications in areas such as sensors,actuators,and resonators in nanoelectromechanical systems(NEMS).Considering the effects of gyration inertia,surface layer mass,surface residual stress,and...Nanobeams have promising applications in areas such as sensors,actuators,and resonators in nanoelectromechanical systems(NEMS).Considering the effects of gyration inertia,surface layer mass,surface residual stress,and surface Young's modulus,this study develops the vibration equations of the Timoshenko nanobeam.The generalized differential quadrature(GDQ)method and molecular dynamics(MD)simulation are used to study the surface effect on vibration.For a rectangular cross section,surface residual stress and surface Young's modulus are all affected by the height of the cross section rather than by the length-height ratio.If surface layer mass is considered,then the first three natural frequencies all decrease relative to their counterparts in the case in which surface layer mass is ignored.Results show that the effect of gyration inertia on resonance frequency is negligible.Longitudinal vibration does not easily occur relative to the bending and rotation vibrations of nanobeams.In addition,the results obtained by the GDQ method fit those obtained by MD simulation for beams with length-height ratios of 4-8.This study provides insights into the mechanism of the vibration of short and deep nanobeams and sheds light on the quantitative design of the elements in NEMSs.展开更多
The investigation results of the bonding structure of CaO-SiO<sub>2</sub> slag by means of molecular dynamics simulation are presented. The characteristics of partial radial distribution function g<sub&...The investigation results of the bonding structure of CaO-SiO<sub>2</sub> slag by means of molecular dynamics simulation are presented. The characteristics of partial radial distribution function g<sub>ij</sub> (r) are in good agreement with the measurement of X-ray diffraction, and the variation of Q<sub>n</sub> with different SiO<sub>4</sub> tefrahedra following the change of X<sub>CaO</sub> is consistent with the results of Raman spectroscopy. The partial vibrational density of states F<sub>Si</sub>(ω) shows that two bands appear in the range of 636-737 cm<sup>-1</sup> and 800-1200 cm<sup>-1</sup> respectively which are also consistent with Raman spectroscopy.展开更多
Black phosphorus nanotubes(BPNTs)may have good properties and potential applications.Determining thevibration property of BPNTs is essential for gaining insight into the mechanical behaviour of BPNTs and designingopti...Black phosphorus nanotubes(BPNTs)may have good properties and potential applications.Determining thevibration property of BPNTs is essential for gaining insight into the mechanical behaviour of BPNTs and designingoptimized nanodevices.In this paper,the mechanical behaviour and vibration property of BPNTs are studied viaorthotropic cylindrical shell model and molecular dynamics(MD)simulation.The vibration frequencies of twochiral BPNTs are analysed systematically.According to the results of MD calculations,it is revealed that thenatural frequencies of two BPNTs with approximately equal sizes are unequal at each order,and that the naturalfrequencies of armchair BPNTs are higher than those of zigzag BPNTs.In addition,an armchair BPNTs witha stable structure is considered as the object of research,and the vibration frequencies of BPNTs of differentsizes are analysed.When comparing the MD results,it is found that both the isotropic cylindrical shell modeland orthotropic cylindrical shell model can better predict the thermal vibration of the lower order modes of thelonger BPNTs better.However,for the vibration of shorter and thinner BPNTs,the prediction of the orthotropiccylindrical shell model is obviously superior to the isotropic shell model,thereby further proving the validity ofthe shell model that considers orthotropic for BPNTs.展开更多
Free transverse vibration of monolayer graphene, boron nitride (BN), and silicon carbide (SiC) sheets is investigated by using molecular dynamics finite element method. Eigenfrequencies and eigenmodes of these three s...Free transverse vibration of monolayer graphene, boron nitride (BN), and silicon carbide (SiC) sheets is investigated by using molecular dynamics finite element method. Eigenfrequencies and eigenmodes of these three sheets in rectangular shape are studied with different aspect ratios with respect to various boundary conditions. It is found that aspect ratios and boundary conditions affect in a similar way on natural frequencies of graphene, BN, and SiC sheets. Natural frequencies in all modes decrease with an increase of the sheet’s size. Graphene exhibits the highest natural frequencies, and SiC sheet possesses the lowest ones. Missing atoms have minor effects on natural frequencies in this study.展开更多
基金This project is supported by National Natural Science Foundation of China (No.50375029)Provincial Natural Science Foundation of Guangdong,China(No.4009486).
文摘Molecular dynamics method is applied to study the machining mechanisms of polishing based on coupling vibrations of liquid. The physical phenomena of abrasive particles bombarding on silicon monocrystal surface are simulated using Tersoff potentials. The effects of vibration parameters, particle size, incident angle and particle material are analyzed and discussed. Material removal mechanisms are studied. Deformation and embedment phenomena are found in the simulations, Bombardment will destroy the crystal structures near the impact point, and adhesion effect is responsible for final removal of material.
基金the National Natural Science Foundation of China(Nos.51375364,51575372)Doctor Funds of Taiyuan University of Science and Technology(No.20202004)。
文摘Long-lasting constant loading commonly exists in silicon-based microelectronic contact and can lead to the appearance of plastic deformation.Stress relaxation behaviors of monocrystalline silicon coated with amorphous SiO_(2)film during nanoindentation are probed using molecular dynamics simulation by varying the indenter’s size.The results show that the indentation force(stress)declines sharply at the initial and decreases almost linearly toward the end of holding for tested samples.The amount of stress relaxation of SiO_(2)/Si samples indented with different indenters during holding increases with growing indenter size,and the corresponding plastic deformation characteristics are carefully analyzed.The deformation mechanism for confined amorphous SiO_(2)film is depicted based on the amorphous plasticity theories,revealing that the more activated shear transformation zones(STZs)and free volume within indented SiO_(2)film promote stress relaxation.The phase transformation takes place to monocrystalline silicon,the generated atoms of Si-II and bct-5 phases within monocrystalline silicon substrate during holding are much higher than those for smaller indenter.
基金the National Natural Scienoe Foundation of China
文摘A method of simulation of vibrational spectra by using the "internal coordinatecorrelation" based on molecular dynamics algorithms and auto-correlation function has been developed.The in-ternal coordinates,such as bond stretching,bond angle bending,out-of-plane bending and torsion,are treatedas the dynamic variables to obtain a density spectrum or the "internal coordinate correlation" spectrum Theadvantages of this method are as follows:i)it is easier to assign vibration modes for the density spectra;ii)itsimply connects the Fourier transformed "internal coordinate correlation" function to the eigenvectors innormal coordinate analysis;iii)it is a basis for simulating IR and Raman active spectra of a large molecularsystem.
基金The authors thank Zhi Chen for his help in radial distribution function.This study was supported by the National Natural Science Foundation of China(Grant Numbers 51375364,51475359,and 51505479)Natural Science Foundation of Jiangsu Province of China(BK20150184).
文摘Long-lasting constant loading commonly exists in silicon-based microelectronic contact,as well as the chemical mechanical polishing area.In this work,the stress relaxation analysis of single crystal silicon coated with an amorphous SiO_(2) film is performed by varying the maximum indentation depth using molecular dynamics simulation.It is found that during holding,the applied indentation force declines sharply at the beginning and then steadily towards the end of the holding period.The stress relaxation amount of bilayer composites increases as the maximum indentation depth increases.It is also found that the deformation features of SiO_(2) film and silicon substrate during holding are inherited from the loading process.The SiO_(2) film during holding is further densified when the maximum indentation depth is equal to or less than a certain value(5.5 nm for the 0.8-nm film).The amount of generated phases and phase distributions of silicon substrate during holding are affected by the plastic deformation of silicon during loading.
基金This study was supported by the National Natural Science Foundation of China(Grand Number 11672334).
文摘Nanobeams have promising applications in areas such as sensors,actuators,and resonators in nanoelectromechanical systems(NEMS).Considering the effects of gyration inertia,surface layer mass,surface residual stress,and surface Young's modulus,this study develops the vibration equations of the Timoshenko nanobeam.The generalized differential quadrature(GDQ)method and molecular dynamics(MD)simulation are used to study the surface effect on vibration.For a rectangular cross section,surface residual stress and surface Young's modulus are all affected by the height of the cross section rather than by the length-height ratio.If surface layer mass is considered,then the first three natural frequencies all decrease relative to their counterparts in the case in which surface layer mass is ignored.Results show that the effect of gyration inertia on resonance frequency is negligible.Longitudinal vibration does not easily occur relative to the bending and rotation vibrations of nanobeams.In addition,the results obtained by the GDQ method fit those obtained by MD simulation for beams with length-height ratios of 4-8.This study provides insights into the mechanism of the vibration of short and deep nanobeams and sheds light on the quantitative design of the elements in NEMSs.
基金Project supported by Shanghai Natural Science Foundation
文摘The investigation results of the bonding structure of CaO-SiO<sub>2</sub> slag by means of molecular dynamics simulation are presented. The characteristics of partial radial distribution function g<sub>ij</sub> (r) are in good agreement with the measurement of X-ray diffraction, and the variation of Q<sub>n</sub> with different SiO<sub>4</sub> tefrahedra following the change of X<sub>CaO</sub> is consistent with the results of Raman spectroscopy. The partial vibrational density of states F<sub>Si</sub>(ω) shows that two bands appear in the range of 636-737 cm<sup>-1</sup> and 800-1200 cm<sup>-1</sup> respectively which are also consistent with Raman spectroscopy.
基金supported by the National Science Fund for Distin-guished Young Scholars(Grants No.11925205)the National Natural Science Foundation of China(Grant Nos.51921003 and U2341230).
文摘Black phosphorus nanotubes(BPNTs)may have good properties and potential applications.Determining thevibration property of BPNTs is essential for gaining insight into the mechanical behaviour of BPNTs and designingoptimized nanodevices.In this paper,the mechanical behaviour and vibration property of BPNTs are studied viaorthotropic cylindrical shell model and molecular dynamics(MD)simulation.The vibration frequencies of twochiral BPNTs are analysed systematically.According to the results of MD calculations,it is revealed that thenatural frequencies of two BPNTs with approximately equal sizes are unequal at each order,and that the naturalfrequencies of armchair BPNTs are higher than those of zigzag BPNTs.In addition,an armchair BPNTs witha stable structure is considered as the object of research,and the vibration frequencies of BPNTs of differentsizes are analysed.When comparing the MD results,it is found that both the isotropic cylindrical shell modeland orthotropic cylindrical shell model can better predict the thermal vibration of the lower order modes of thelonger BPNTs better.However,for the vibration of shorter and thinner BPNTs,the prediction of the orthotropiccylindrical shell model is obviously superior to the isotropic shell model,thereby further proving the validity ofthe shell model that considers orthotropic for BPNTs.
文摘Free transverse vibration of monolayer graphene, boron nitride (BN), and silicon carbide (SiC) sheets is investigated by using molecular dynamics finite element method. Eigenfrequencies and eigenmodes of these three sheets in rectangular shape are studied with different aspect ratios with respect to various boundary conditions. It is found that aspect ratios and boundary conditions affect in a similar way on natural frequencies of graphene, BN, and SiC sheets. Natural frequencies in all modes decrease with an increase of the sheet’s size. Graphene exhibits the highest natural frequencies, and SiC sheet possesses the lowest ones. Missing atoms have minor effects on natural frequencies in this study.
基金Project (51101022) supported by the National Natural Science Foundation of ChinaProject (CHD2012JC096) supported by the Fundamental Research Funds for the Central Universities,China