从能量平衡的角度建立了静电驱动柔性振膜微泵的平衡方程,基于对压缩过程中振膜动能的考虑,改进了最小能量法压缩模型,结合均匀压力载荷下圆薄膜大挠度形变理论对静电驱动柔性振膜微泵进行理论分析。对振膜与腔体壁面贴合的压缩过程中...从能量平衡的角度建立了静电驱动柔性振膜微泵的平衡方程,基于对压缩过程中振膜动能的考虑,改进了最小能量法压缩模型,结合均匀压力载荷下圆薄膜大挠度形变理论对静电驱动柔性振膜微泵进行理论分析。对振膜与腔体壁面贴合的压缩过程中各能量相互转化的关系进行分析,并与最小能量法模型进行了对比。结果表明,能量平衡法考虑了薄膜振动过程中的动能,故薄膜与腔体具有更大的贴合面积,且以薄膜与腔体完全贴合时作为零应力参考状态降低压缩过程中的薄膜形变势能,计算得到的静电微泵的压缩效率更高,在驱动电压为300 V时,改进的双腔模型中振膜贴合半径为4.06 mm,所得最大压升为87.08 k Pa。基于改进的模型,对双腔微泵压升的影响因素进行讨论,发现降低柔性薄膜厚度会使输出压力有所上升,并且减小腔体表面介电层厚度、减小腔体深度与半径可以有助于提高微泵的压升。展开更多
Micro-droplet jetting belongs to the field of precision fluid dispensing techniques.Unlike traditional subtraction manufacture process,micro-droplet jetting as an additive fabrication technique with features of non-co...Micro-droplet jetting belongs to the field of precision fluid dispensing techniques.Unlike traditional subtraction manufacture process,micro-droplet jetting as an additive fabrication technique with features of non-contact and data-driven represents a new development trend of modern manufacturing process.In this paper,the design,fabrication and performance of a multi-materials drop-on-demand (DOD) inkjet system based on pneumatic diaphragm actuator were described.For capturing the droplet ejection process and measuring the droplet dimension,a self-made in situ imaging system based on time delayed external trigger was set up.The performance of the generator was studied by adjusting the structure and control parameters.Furthermore,the influence of fluid properties on the droplet ejection process was experimentally investigated.Micro-solderballs of 160.5 μm in diameter and UV curing adhesive micro-bumps of 346.94 μm in contact diameter with the substrate were produced.The results demonstrated that the DOD inkjet generator possesses characteristics of robust,easy to operate and maintain,and able to withstand high temperature as well as applicability to a wide variety of materials including polymers,low melting point resin and high melting point metal.The system has a great potential of being used in the fields of IC and MEMS packaging,3D printing,organic semiconductor fabrication,and biological and chemical analysis.展开更多
文摘从能量平衡的角度建立了静电驱动柔性振膜微泵的平衡方程,基于对压缩过程中振膜动能的考虑,改进了最小能量法压缩模型,结合均匀压力载荷下圆薄膜大挠度形变理论对静电驱动柔性振膜微泵进行理论分析。对振膜与腔体壁面贴合的压缩过程中各能量相互转化的关系进行分析,并与最小能量法模型进行了对比。结果表明,能量平衡法考虑了薄膜振动过程中的动能,故薄膜与腔体具有更大的贴合面积,且以薄膜与腔体完全贴合时作为零应力参考状态降低压缩过程中的薄膜形变势能,计算得到的静电微泵的压缩效率更高,在驱动电压为300 V时,改进的双腔模型中振膜贴合半径为4.06 mm,所得最大压升为87.08 k Pa。基于改进的模型,对双腔微泵压升的影响因素进行讨论,发现降低柔性薄膜厚度会使输出压力有所上升,并且减小腔体表面介电层厚度、减小腔体深度与半径可以有助于提高微泵的压升。
基金supported by the National Natural Science Foundation of China (Grant No. 50775087)
文摘Micro-droplet jetting belongs to the field of precision fluid dispensing techniques.Unlike traditional subtraction manufacture process,micro-droplet jetting as an additive fabrication technique with features of non-contact and data-driven represents a new development trend of modern manufacturing process.In this paper,the design,fabrication and performance of a multi-materials drop-on-demand (DOD) inkjet system based on pneumatic diaphragm actuator were described.For capturing the droplet ejection process and measuring the droplet dimension,a self-made in situ imaging system based on time delayed external trigger was set up.The performance of the generator was studied by adjusting the structure and control parameters.Furthermore,the influence of fluid properties on the droplet ejection process was experimentally investigated.Micro-solderballs of 160.5 μm in diameter and UV curing adhesive micro-bumps of 346.94 μm in contact diameter with the substrate were produced.The results demonstrated that the DOD inkjet generator possesses characteristics of robust,easy to operate and maintain,and able to withstand high temperature as well as applicability to a wide variety of materials including polymers,low melting point resin and high melting point metal.The system has a great potential of being used in the fields of IC and MEMS packaging,3D printing,organic semiconductor fabrication,and biological and chemical analysis.
