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XTEM STUDY ON ION PLATED STAINLESS STEEL MULTI-LAYER FILMS
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作者 Z.M. Gu Shanghai Maritime University, Shanghai 200135, China 《Acta Metallurgica Sinica(English Letters)》 SCIE EI CAS CSCD 1999年第5期962-967,共6页
In this paper, the cross sectional microstructure and crystal structure of ion plated multi layer films of stainless steel (1Cr18Ni9Ti ) were studied by cross sectional transmission electron microscopy (XTEM). The re... In this paper, the cross sectional microstructure and crystal structure of ion plated multi layer films of stainless steel (1Cr18Ni9Ti ) were studied by cross sectional transmission electron microscopy (XTEM). The results show that ion plated stainless steel multi layer films are fine grained double phase steel films of austenites and ferrites.Cross section film growing microstructures can be divided into three zones: fine equiaxed crystals, fine columnar crystals and coarse columnar crystals. Interfaces in multi layer films can promote fine grained growing and interrupt columnar grained growing,and improve properties of film materials. 展开更多
关键词 stainless steel XTEM multi layer films ion plating
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Toluene Sensing Properties of P4VP/Multi-Walled Carbon Nanotubes Multi-Layer Film Sensors
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作者 Jian Liao Guang-Zhong Xie +4 位作者 Hui-Ling Tai Ya-Dong Jiang Wei-Zhi Li Yong Zhou Fang Xu 《Journal of Electronic Science and Technology》 CAS 2013年第3期317-321,共5页
Abstract--Poly4-vinylphenol (P4VP)/multi-wan carbon nanotubes (MWNTs) multi-layer sensitive films were deposited on interdigitated electrodes by airbrush technology to detect toluene vapor at room temperature. The... Abstract--Poly4-vinylphenol (P4VP)/multi-wan carbon nanotubes (MWNTs) multi-layer sensitive films were deposited on interdigitated electrodes by airbrush technology to detect toluene vapor at room temperature. The surface and section morphologies of the multi-layer films were observed by a scanning electron microscope (SEM). It is found that the resistance of the sensor increases when it is exposed to toluene vapor and the response has a good linearity with the concentration of toluene. The results show that the P4VP/MWNTs three-layer film sensors have better sensing properties compared with the two-layer film sensors. The related sensing mechanism is studied in detail. 展开更多
关键词 Index Terms-Gas sensor multi-wall carbonnanotubes multi-layer film poly4-vinylphenol toluene.
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Study on Properties of Ti(C,N)/TiN Multi-Element-layer Films Plus Nanometer Lubrication Dry Films
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作者 HUANGYuan-lin MAShi-ning LIChang-qing ZHUYou-li 《材料热处理学报》 EI CAS CSCD 北大核心 2004年第05B期909-912,共4页
Ti(C,N)/TiN multi-element-layer films was deposited on aluminium alloy substrates by using multi-arc ion plating. The microhardness of the films was 2000HV0.i which was nearly 21 times of that of the substrates. XRD a... Ti(C,N)/TiN multi-element-layer films was deposited on aluminium alloy substrates by using multi-arc ion plating. The microhardness of the films was 2000HV0.i which was nearly 21 times of that of the substrates. XRD analysis show that the main composition of the composite films system were Ti(C,N), TiN, Al3Ti, Al and a little Ti2N. The presence of MjTi new phase in the interface of the films/substrates indicated some metallurgical bonding between them, which implies higher adhesive strength of the films/substrates system. Pin-on-disc tests showed that the wear resistance of the substrates was improved substantially. However, the coefficient of friction of the films/substrate system was high (u=0.66), which resulted in the wear of the counterparts. To reduce the coefficient of friction, nanometer lubrication dry films was applied on top of the multi-element-layer films to form composite films system and subsequent wear tests showed that the resulting composite films led to reduction of the coefficient of friction from 0.66 to 0.16. Meanwhile, wear mass loss of the counterpart was reduced from 1.29 mg to 0.02 mg, so that increased wear resistance and reduced friction effects were achieved. 展开更多
关键词 多电弧离子电镀法 铝合金 摩擦学 纳米薄膜
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Hydrogen storage properties of preferentially orientated Mg-Ni multilayer film prepared by magnetron sputtering
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作者 YE Suyun OUYANG Liuzhang ZHU Min 《Rare Metals》 SCIE EI CAS CSCD 2006年第z1期295-299,共5页
Mg-Ni multi-layer thin film was deposited on (001) Si wafer by magnetron sputtering with dual-target. X-ray diffraction (XRD) and scanning electron microscopy (SEM) analysis reveal that the microstructure of the Mg-Ni... Mg-Ni multi-layer thin film was deposited on (001) Si wafer by magnetron sputtering with dual-target. X-ray diffraction (XRD) and scanning electron microscopy (SEM) analysis reveal that the microstructure of the Mg-Ni multilayer thin film is composed of fine-crystalline Ni layer and crystalline [001] Mg layer. Hydrogenation process of the films were carried out by using the automatic gas reaction controller. The films undergone hydrogenation for different time were analyzed by XRD. The results show that hydrogenation properties of Mg with different preferential orientations are different. (002) diffraction peak of Mg disappears in compensating the appearing of the peaks of Mg2NiH4 and MgH2 in hydrogenation at 533 K, while the (101) peak still remains. The result reveals that the Mg film with (001) preferential orientation absorbs hydrogen at certain temperature easier than that of the Mg film with (101) orientation. This phenomenon can be explained in the view point of the energy change for the nucleation and growth of hydride in different crystal plane. 展开更多
关键词 hydrogen storage Mg-Ni film multi-layerS magnetron sputtering
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Improving wear resistance of magnesium alloy AZ91D by TiN-CrN multilayer coating
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作者 缪强 崔彩娥 +1 位作者 潘俊德 张平则 《中国有色金属学会会刊:英文版》 CSCD 2006年第A03期1802-1805,共4页
Applying a novel method of arc-glow plasma depositing, a 2μm-thick coating with 12 sub-layers of TiN and CrN was deposited alternately on the surface of magnesium alloy AZ91D to improve its wear resistance. The wear ... Applying a novel method of arc-glow plasma depositing, a 2μm-thick coating with 12 sub-layers of TiN and CrN was deposited alternately on the surface of magnesium alloy AZ91D to improve its wear resistance. The wear behavior was investigated by test of ball on disc sliding. The composition and microstructure of the coating were also analyzed by means of X-ray diffraction (XRD) and glow discharge spectrum (GDS), and the morphology of TiN-CrN film was surveyed through scanning electronic microscopy (SEM) and atom force microscopy (AFM).The adhesion strength between film and matrix was evaluated by ways of stick-peeling test. The surface micro-hardness of the coating is above HK0.011 433, and the specific wear ratio of specimens coated with TiN-CrN films tested decreases greatly compared to that of the bare metal. 展开更多
关键词 镁合金 等离子体 涂层 有色金属 强度
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高等级化学防护服用多层膜面料的阻燃性能和热防护性能
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作者 王俊胜 金星 +1 位作者 张杰 商珂 《消防科学与技术》 CAS 北大核心 2024年第3期389-392,共4页
以芳纶织物、聚酯织物和腈纶织物为骨架层,聚烯烃膜为成型层,聚卤代烯烃膜为阻隔层,试制高等级化学防护服用多层膜面料。采用电子织物强力机、极限氧指数仪、锥形量热仪和热防护性能测试仪,研究织物种类及聚烯烃母粒和阻燃剂种类对多层... 以芳纶织物、聚酯织物和腈纶织物为骨架层,聚烯烃膜为成型层,聚卤代烯烃膜为阻隔层,试制高等级化学防护服用多层膜面料。采用电子织物强力机、极限氧指数仪、锥形量热仪和热防护性能测试仪,研究织物种类及聚烯烃母粒和阻燃剂种类对多层膜面料力学性能、阻燃性能、燃烧行为和热防护性能的影响。结果表明:以芳纶织物和聚酯织物为骨架层的多层膜面料具有更好的力学性能;以B/C型聚烯烃母粒和Y型阻燃剂为原料的多层膜面料具有更高的阻燃性能;以腈纶织物为骨架层的多层膜面料具有更低的热释放和较高的残炭含量,但是由于在测试过程中会出现严重熔融现象,其热防护性能较差。综上,以芳纶织物为骨架层,C型母粒和Y型阻燃剂制备的聚烯烃膜为成型层,试制的多层膜面料综合性能最佳。 展开更多
关键词 高等级化学防护服 多层膜面料 阻燃性能 力学性能 热防护性能
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高精度薄厚膜异构HTCC基板制备工艺
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作者 张鹤 杨鑫 +2 位作者 谢岳 杨振涛 刘林杰 《微纳电子技术》 CAS 2024年第7期150-155,共6页
针对高温共烧陶瓷(HTCC)基板高平整度、高密度封装需求,提出了一种高精度薄厚膜异构HTCC基板的制备方法,并对其关键工艺进行研究。结合陶瓷基板精密研磨工艺与薄膜制备工艺,该方法在大幅降低原有HTCC基板的平面度、粗糙度的同时,实现HTC... 针对高温共烧陶瓷(HTCC)基板高平整度、高密度封装需求,提出了一种高精度薄厚膜异构HTCC基板的制备方法,并对其关键工艺进行研究。结合陶瓷基板精密研磨工艺与薄膜制备工艺,该方法在大幅降低原有HTCC基板的平面度、粗糙度的同时,实现HTCC表面精密布线。测量结果表明,薄厚膜HTCC基板的平面度低至15μm,表面布线最小线宽低至10μm,与传统陶瓷基板平面度(30μm)与最小线宽(50μm)相比均有较大改善。在此基础上,研究了不同种子层厚度对薄厚膜异构HTCC基板结合力的影响。结果表明当钛钨层厚度为150 nm时,薄膜层和陶瓷基板结合力高达9.27 gf(1 gf=0.0098 N)。 展开更多
关键词 多层共烧陶瓷 薄膜金属化 封装基板 异构集成 键合强度
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共固化多层阻尼夹嵌复合材料梁的自由振动分析
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作者 孙兴帅 梁森 杨功先 《应用力学学报》 CAS CSCD 北大核心 2024年第2期297-308,共12页
为获得大阻尼复合材料结构,开展了共固化多层阻尼膜夹嵌复合材料梁的动力学性能研究。基于一阶剪切变形理论和Hamilton原理,提出并推导了该结构的动力学方程,运用变分原理和伽辽金法求解了,在固支边界条件下的自由振动特性理论解,通过... 为获得大阻尼复合材料结构,开展了共固化多层阻尼膜夹嵌复合材料梁的动力学性能研究。基于一阶剪切变形理论和Hamilton原理,提出并推导了该结构的动力学方程,运用变分原理和伽辽金法求解了,在固支边界条件下的自由振动特性理论解,通过仿真和试验对理论可行性进行了验证,揭示了参数变化对一阶固有频率和阻尼比的影响,为多层阻尼膜在复合材料结构中的优化设计提供了理论依据。 展开更多
关键词 多层阻尼膜夹嵌复合材料梁 固支边界 固有振动 伽辽金法 模态试验
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用于MLCC叠层工艺的设备设计与实现
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作者 杨志 马红雷 《电子工业专用设备》 2024年第4期36-40,共5页
简述了MLCC发展背景、制备流程,并基于叠层工序进行工艺需求分析,为满足这些需求设计了一种MLCC叠层机,包括收\放卷传输机构、剥离工作台、膜片搬运机械手、加压机构和收/放料机械手,探讨了叠层机的控制原理和主要逻辑动作,完成设备的... 简述了MLCC发展背景、制备流程,并基于叠层工序进行工艺需求分析,为满足这些需求设计了一种MLCC叠层机,包括收\放卷传输机构、剥离工作台、膜片搬运机械手、加压机构和收/放料机械手,探讨了叠层机的控制原理和主要逻辑动作,完成设备的电气控制与人机交互系统的设计实现,设备已取得了良好的实际应用效果。 展开更多
关键词 片式多层陶瓷电容器 叠层机 剥离工作台 膜片搬运机械手
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两种不同影像学检查方式在急性肠梗阻诊断中的比较分析
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作者 邸春雪 王悦琪 张士朋 《智慧健康》 2024年第4期15-18,共4页
目的 探究急性肠梗阻应用腹部X线平片与多层螺旋电子计算机断层扫描(CT)的诊断价值。方法 选取2021年10月—2022年10月本院收治的80例疑似急性肠梗阻患者的临床资料进行回顾性分析,所有的患者均行腹部X线平片、多层螺旋CT检查及病理组... 目的 探究急性肠梗阻应用腹部X线平片与多层螺旋电子计算机断层扫描(CT)的诊断价值。方法 选取2021年10月—2022年10月本院收治的80例疑似急性肠梗阻患者的临床资料进行回顾性分析,所有的患者均行腹部X线平片、多层螺旋CT检查及病理组织活检,以病理学结果作为金标准。比较腹部X线平片与多层螺旋CT检查对急性肠梗阻的检出结果、符合率及诊断效能;并对其中的典型病例进行分析。结果 80例疑似急性肠梗阻患者中阳性为62例,阴性为18例;经腹部X线平片检查真阳性为29例,真阴性为7例,假阳性11例,假阴性33例;经多层螺旋CT检查真阳性为53例,真阴性为16,假阳性2例,假阴性9例;多层螺旋CT检查的符合率、特异度、灵敏度、准确度、阳性预测值、阴性预测值均高于腹部X线平片,组间比较差异显著有统计学意义(P<0.05)。结论 与腹部X线平片检查相比,在急性肠梗阻患者中应用多层螺旋CT检查的符合率、特异度、灵敏度、准确度、阳性预测值、阴性预测值均较高,有利于临床对急性肠梗阻患者进行及时、准确的诊断,并实施有效的针对性治疗及干预,进而改善患者预后。 展开更多
关键词 急性肠梗阻 腹部X线平片 多层螺旋电子计算机断层扫描
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PERFORMANCE OF LUBRICATING OIL FILMIN ALUMINIUM FOIL ROLLING 被引量:1
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作者 Mao, Daheng Wang, Weijuan +1 位作者 Cheng, Jun Tan, Jianping 《中国有色金属学会会刊:英文版》 EI CSCD 1999年第1期32-37,共6页
1INTRODUCTIONTheapplicationoftechnologicallubricantinmetalrolingcandecreasethefrictiononthesurfaceofcontact... 1INTRODUCTIONTheapplicationoftechnologicallubricantinmetalrolingcandecreasethefrictiononthesurfaceofcontactarcinthedeformati... 展开更多
关键词 ALUMINUM FOIL ORDERED multi layer MOLECULE film ROLLING DEFORMATION
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Observation of Magnetic Domain Structures of Magnetic Thin Films by the Lorentz Electron Microscopy 被引量:1
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作者 A. Okada M Chimura +2 位作者 K Hamada M Arita I. Ishida(Advanced Materials Science Laboratory, Division of Electronics and information Engineering, Graduate School of Engineering, Hokkaido University,Sapporo 060-8628, Japan) 《International Journal of Minerals,Metallurgy and Materials》 SCIE EI CAS CSCD 1999年第2期119-124,共6页
The microstructure change in thin NiFe/Cu/NiFe films during the magnetization process was observed by the Lorentz electronmicroscopy. TWo types of films were prepared: (1) one NiFe layer with anisotropy and the other ... The microstructure change in thin NiFe/Cu/NiFe films during the magnetization process was observed by the Lorentz electronmicroscopy. TWo types of films were prepared: (1) one NiFe layer with anisotropy and the other layer without, and (2) both NiFe layershave anisotropy normal each other. The domain wall migration and magnetization rotation processes in each of NiFe layers could be observed separately. The presence of magnetic anisotropy in the magnetic layer effectively controls the behavior of magnetic domains. Theinteraction between the two NiFe layers of the film could be observed not so strong in the present experiment. 展开更多
关键词 magnetic domain domain wall Lorentz microscopy multi-layers thin films hysteresis loop permalloy film
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Structure and micro-tribological properties of PTFE/Al_2O_3 micro-assembling film
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作者 汤卉 贾会娟 邵俊鹏 《中国有色金属学会会刊:英文版》 CSCD 2003年第6期1381-1384,共4页
In order to improve the wear resistance of elastic metallic-plastic thrust bearing pad, micro-assembling PTFE/Al2O3 multi-layer film was developed by alternating radio frequency(RF) magnetron sputtering PTFE and Al2... In order to improve the wear resistance of elastic metallic-plastic thrust bearing pad, micro-assembling PTFE/Al2O3 multi-layer film was developed by alternating radio frequency(RF) magnetron sputtering PTFE and Al2O3 targets. For enhancing the adhesion of the interfaces between PTFE and Al2O3 film, N+ implantation was employed. The structure, mechanical and micro-tribological properties were studied by XPS, X-ray photoelectron spectrometer and atomic force and friction force microscope (AFM/FFM). The results show that the multi-layer consists of Al2O3 component and crystalline PTFE. The hardness of the multi-layer modified by ion implantation is less than that of Al2O3,but its toughness is greatly improved. The friction coefficient of PTFE/ Al2O3 multi-layer modified by ion implantation is much lower than that of Al2O3 film, and its resistance to wear is much greater than that of PTFE film. Therefore the wear resistance of elastic metallic-plastic thrust bearing pad is greatly improved. 展开更多
关键词 PTFE/Al2O3 复合材料 摩擦学性能 PTFE 铝合金 显微结构
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Microwave Magnetic Properties of Laminates with Thin FeCoBSi Films
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作者 陆海鹏 《Journal of Wuhan University of Technology(Materials Science)》 SCIE EI CAS 2011年第5期857-860,共4页
The microwave permeability of laminated composites based on thin FeCoBSi films was under study.The level of permeability increased with increasing of the ferromagnetic inclusions in the laminates.The intrinsic permeab... The microwave permeability of laminated composites based on thin FeCoBSi films was under study.The level of permeability increased with increasing of the ferromagnetic inclusions in the laminates.The intrinsic permeability spectra of ferromagnetic inclusion are parametrically reconstructed.The obtained parameters of magnetic resonance were specially analyzed.To avoid the effect of eddy current and to obtain large-volume fractions of ferromagnetic constituent,laminates consisting of alternating FeCoBSi/SiO2 multi-layers and mylar substrates were also investigated.For the same volume fractions of ferromagnetic constituent (8.7%),laminates based on multi-layered films are found to possess higher values of permeability than those based on one-layered films. 展开更多
关键词 microwave permeability resonance frequency multi-layer magnetic films
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多层高反膜的应力研究 被引量:2
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作者 李波 王超 +1 位作者 闫涛 钱锋 《真空与低温》 2023年第2期146-152,共7页
采用激光干涉仪对激光雷达用多层高反膜的应力变化进行了研究,讨论了离子源加速电压、离子源辐照角度、界面层与基底匹配以及后处理等工艺条件对多层薄膜面型变化的影响。试验结果表明,低的离子源功率下,氧化钛薄膜表现为张应力,随着离... 采用激光干涉仪对激光雷达用多层高反膜的应力变化进行了研究,讨论了离子源加速电压、离子源辐照角度、界面层与基底匹配以及后处理等工艺条件对多层薄膜面型变化的影响。试验结果表明,低的离子源功率下,氧化钛薄膜表现为张应力,随着离子源功率增加,逐渐转变为压应力。合理调整离子源辐照角度与界面层结构,可以降低应力,减小应力引起的面型变化量,改善位于工件盘中心与边缘的样品面型变化的不均匀性。在深入研究的基础上,综合耐候性的要求优化了薄膜生产沉积工艺,批量生产出了满足产品要求的应用于激光雷达的多层高反射薄膜器件。 展开更多
关键词 应力 PV 面型变化 激光雷达 多层薄膜
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多层PET/PE复合膜热封特性试验及结构表征
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作者 王琳 刘言松 +3 位作者 张怡辉 王特栋 薛宇飞 刘文乡 《塑料》 CAS CSCD 北大核心 2023年第5期157-161,共5页
为分析热封工艺对多层PET/PE复合膜热封质量及其结构的影响作用,采用直接酯化法制备了PET薄膜,通过胶黏剂将各层薄膜粘接得到了三层PET/PE复合膜,在不同参数条件下进行单因素试验,分析了温度、压强、时间对复合膜热封强度的影响,并观察... 为分析热封工艺对多层PET/PE复合膜热封质量及其结构的影响作用,采用直接酯化法制备了PET薄膜,通过胶黏剂将各层薄膜粘接得到了三层PET/PE复合膜,在不同参数条件下进行单因素试验,分析了温度、压强、时间对复合膜热封强度的影响,并观察了材料在不同参数下的微表面结构。结果表明,热封温度对热封强度影响较显著,薄膜表面形貌随温度的升高由平整状态转变为凹坑状,满足热封强度的最佳温度范围为160~170℃,当热封时间为0.3 s,热封压强为0.5 MPa时的热封最优强度为65 N/15 mm;绘制了压强一定下,热封强度对温度、时间的响应曲面,确定了生产实际满足热封强度要求的参数范围,为复合膜在食品、药品等包装上的应用提供了重要参数依据。 展开更多
关键词 多层PET/PE复合包装膜 热封三要素 热封强度 参数范围 结构表征
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多层结构聚丙烯薄膜储能特性的研究
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作者 郭璞 《化工管理》 2023年第3期71-73,共3页
为了改善聚合物电池的储存性能,文章从理论上探讨了多层膜的存储效应,并在一定程度上对其进行分析研究。研究采用热轧工艺制备的多层聚丙烯膜,并测定其导电特性,发现在170℃下,三种不同的PP膜的能量存储能力最强,其中,较单一的单体的能... 为了改善聚合物电池的储存性能,文章从理论上探讨了多层膜的存储效应,并在一定程度上对其进行分析研究。研究采用热轧工艺制备的多层聚丙烯膜,并测定其导电特性,发现在170℃下,三种不同的PP膜的能量存储能力最强,其中,较单一的单体的能量存储能力可增加20%,采用多层结构可以改善PVA的储存性能。 展开更多
关键词 多层结构 聚丙烯薄膜 储能特性
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飞秒脉冲激光对硅基多层膜损伤特性 被引量:8
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作者 郑长彬 邵俊峰 +5 位作者 李雪雷 王化龙 王春锐 陈飞 王挺峰 郭劲 《中国光学》 EI CAS CSCD 北大核心 2019年第2期371-381,共11页
为了明确超快激光损伤典型成像探测器膜层结构的物理机制,对飞秒脉冲激光辐照硅基多层膜的损伤特性,以及各种损伤效应对应的激光能量通量范围和阈值条件进行研究。利用波长为800 nm、脉冲宽度为100 fs的脉冲激光和金相显微镜研究了硅基... 为了明确超快激光损伤典型成像探测器膜层结构的物理机制,对飞秒脉冲激光辐照硅基多层膜的损伤特性,以及各种损伤效应对应的激光能量通量范围和阈值条件进行研究。利用波长为800 nm、脉冲宽度为100 fs的脉冲激光和金相显微镜研究了硅基多层膜在不同激光能量通量和不同脉冲累积下的损伤效应。在能量通量为1. 01~24. 7 J/cm^2的激光单脉冲辐照下,激光作用区域可观察到氧化/无定形化、非热烧蚀和激光诱导等离子体烧蚀所引起的表面损伤,其损伤效应与激光能量通量有明显联系,激光作用区域尺寸随能量通量线性增大。在2. 42 J/cm^2到24. 7 J/cm^2激光能量通量范围内,可在辐照表面观察到激光诱导压力导致的多层损伤,损伤概率随激光能量通量的增加由1%增大到51%。在激光能量通量为1. 01 J/cm^2的连续多脉冲辐照下,烧蚀区域尺寸几乎不变,但烧蚀深度逐渐增加,其多层损伤机制为表面损伤的累积效应。通过单脉冲损伤实验数据拟合计算确定,飞秒激光诱导硅基多层膜表面损伤阈值为0. 543 J/cm^2,应力多层损伤阈值为2. 16 J/cm^2。低激光能量通量(≤1. 01 J/cm^2)多脉冲辐照累积作用同样可造成硅基多层膜深层损伤。 展开更多
关键词 激光烧蚀 激光损伤 硅基多层膜 损伤阈值
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调制周期对CrAl/CrAlN多层薄膜结构及耐腐蚀性能的影响 被引量:4
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作者 吕艳红 吉利 +4 位作者 刘流 李红轩 刘晓红 陈建敏 周惠娣 《中国表面工程》 EI CAS CSCD 北大核心 2013年第5期18-23,共6页
采用中频非平衡磁控溅射技术制备CrAl/CrAlN多层薄膜,研究了调制周期对CrAl/CrAlN多层薄膜的微观结构、机械性能和耐腐蚀性能的影响。研究表明:CrAl/CrAlN多层薄膜具有致密的层状结构。随着调制周期的增大,薄膜应力由拉应力转变为压应力... 采用中频非平衡磁控溅射技术制备CrAl/CrAlN多层薄膜,研究了调制周期对CrAl/CrAlN多层薄膜的微观结构、机械性能和耐腐蚀性能的影响。研究表明:CrAl/CrAlN多层薄膜具有致密的层状结构。随着调制周期的增大,薄膜应力由拉应力转变为压应力,当调制周期为285.7nm时,CrAl/CrAlN多层薄膜的硬度出现了极大值。此外,调制周期对薄膜的耐腐蚀性能有显著的影响。经过96h盐雾(3.5%NaCl)试验,调制周期为142.8nm的CrAl/CrAlN多层薄膜依然没有发生腐蚀现象,表明此条件下CrAl/CrAlN薄膜具有优异的耐腐蚀性能。 展开更多
关键词 磁控溅射 CrAI CrAIN 多层薄膜 微观结构 耐腐蚀性能
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耐冲刷薄膜铂电阻热流传感器研制 被引量:11
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作者 李强 刘济春 孔荣宗 《电子测量与仪器学报》 CSCD 北大核心 2017年第4期623-629,共7页
薄膜铂电阻热流传感器是激波风洞气动热环境试验的主要测量手段,其缺点是不耐冲刷、易损坏,影响风洞试验效率。为增强铂薄膜热流传感器的耐冲刷能力,以厚度0.06μm的铬薄膜作为底衬,既能增强铂薄膜在玻璃基体上的附着力,又不会影响铂薄... 薄膜铂电阻热流传感器是激波风洞气动热环境试验的主要测量手段,其缺点是不耐冲刷、易损坏,影响风洞试验效率。为增强铂薄膜热流传感器的耐冲刷能力,以厚度0.06μm的铬薄膜作为底衬,既能增强铂薄膜在玻璃基体上的附着力,又不会影响铂薄膜的电阻温度系数,并覆盖厚度0.2μm的二氧化硅薄膜作为保护膜,制作了3层膜结构和两种两层膜结构的热流传感器样品。分析了铬膜及二氧化硅膜对热流传感器电阻温度系数的影响,对3层膜和单层膜热流传感器的一维传热过程进行对比仿真计算,证明二氧化硅膜不会对激波风洞热流测量结果带来明显的影响。通过开展热流传感器的对比验证试验,证明多层膜热流传感器热流测量结果的可靠性,其热流测量精度和耐冲刷能力都得到一定程度提升。 展开更多
关键词 激波风洞 热流传感器 耐冲刷 多层膜
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