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Ti/(Ti,Cr)N/CrN multilayer coated 316L stainless steel by arc ion plating as bipolar plates for proton exchange membrane fuel cells 被引量:20
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作者 Shengli Wang Ming Hou +5 位作者 Qing Zhao Yongyi Jiang Zhen Wang Huizhe Li Yu Fu Zhigang Shao 《Journal of Energy Chemistry》 SCIE EI CAS CSCD 2017年第1期168-174,共7页
Arc ion plating (AIP) is applied to form Ti/(Ti,Cr)N/CrN multilayer coating on the surface of 316L stainless steel (SS316L) as bipolar plates for proton exchange membrane fuel cells (PEMFCs). The characterizations of ... Arc ion plating (AIP) is applied to form Ti/(Ti,Cr)N/CrN multilayer coating on the surface of 316L stainless steel (SS316L) as bipolar plates for proton exchange membrane fuel cells (PEMFCs). The characterizations of the coating are analyzed by scanning electron microscopy (SEM) and X-ray diffraction (XRD). Interfacial contact resistance (ICR) between the coated sample and carbon paper is 4.9 m Omega cm(2) under 150 N/cm(2), which is much lower than that of the SS316L substrate. Potentiodynamic and potentiostatic tests are performed in the simulated PEMFC working conditions to investigate the corrosion behaviors of the coated sample. Superior anticorrosion performance is observed for the coated sample, whose corrosion current density is 0.12 mu A/cm(2). Surface morphology results after corrosion tests indicate that the substrate is well protected by the multilayer coating. Performances of the single cell with the multilayer coated SS316L bipolar plate are improved significantly compared with that of the cell with the uncoated SS316L bipolar plate, presenting a great potential for PEMFC application. (C) 2016 Science Press and Dalian Institute of Chemical Physics, Chinese Academy of Sciences. Published by Elsevier B.V. and Science Press. All rights reserved. 展开更多
关键词 Stainless steel bipolar plate Proton exchange membrane fuel cell arc ion plating multilayer coating
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Microstructure and mechanical properties of TiN/TiAlN multilayer coatings deposited by arc ion plating with separate targets 被引量:13
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作者 魏永强 李春伟 +2 位作者 巩春志 田修波 杨士勤 《Transactions of Nonferrous Metals Society of China》 SCIE EI CAS CSCD 2011年第5期1068-1073,共6页
TiN/TiAlN multilayer coatings were prepared by arc ion plating with separate targets. In order to decrease the unfavorable macroparticles, a straight magnetized filter was used for the low melting aluminium target. Th... TiN/TiAlN multilayer coatings were prepared by arc ion plating with separate targets. In order to decrease the unfavorable macroparticles, a straight magnetized filter was used for the low melting aluminium target. The results show that the output plasmas of titanium target without filter and aluminium target with filter reach the substrate with the same order of magnitude. Meanwhile, the number of macropartieles in TiN/TiAlN multilayer coatings deposited with separate targets is only 1/10-1/3 of that deposited with alloy target reported in literature. Al atom addition may lead to the decrease of peak at (200) lattice plane and strengthening of peak at (111) and (220) lattice planes. The measured hardness of TiN/TiAlN multilayer coatings accords with the mixture principle and the maximum hardness is HV2495. The adhesion strength reaches 75 N. 展开更多
关键词 arc ion plating TiN/TiAlN coatings M2 high speed steel MACROPARTICLES HARDNESS bilayer modulation
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STUDY ON HIGH TEMPERATURE PERFORMANCES OF MCrAlX COATINGS DEPOSITED BY MULTI-ARC ION PLATING 被引量:2
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作者 J. Zhang, J.B. Li, Q.Heng and X.H.Zhang Shenyang University,Shenyang 110044,China L.Q.Qi LiMing Aeroengine Manufacfruing Corperation, Shenyang 110043,China 《Acta Metallurgica Sinica(English Letters)》 SCIE EI CAS CSCD 1999年第5期1019-1024,共6页
NCoCrAlSiYHf and CoNiCrAlTaY coatings which belong to protective Al 2O 3 scale forming type were deposited by multi arc ion plating technique . The effect of deposition process parameters on qualities of the coat... NCoCrAlSiYHf and CoNiCrAlTaY coatings which belong to protective Al 2O 3 scale forming type were deposited by multi arc ion plating technique . The effect of deposition process parameters on qualities of the coatings was discussed. The high temperature oxidation performances isothermal oxidation with 950℃ / 500h and 1100℃ / 100h were studied. And also, the hot corrosion performances at 700℃ and 800℃, with molten mixed salt composed of 75%wt Na 2SO 4 and 25%wt NaCl were investigated. Then the high temperature protection decaying mechanisms were proposed. 展开更多
关键词 multi arc ion plating superalloy coating isothermal oxidation hotcorrosion
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EXPERIMENTAL STUDY ON SUPERFICIAL COAT OF GEARS OF NITRIDED 32Cr2MoV COATED WITH TiN FILM BY MULTI-ARC ION PLATING 被引量:2
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作者 LI Hui LI Runfang +1 位作者 XU Hongbin ZHANG Jin 《Chinese Journal of Mechanical Engineering》 SCIE EI CAS CSCD 2007年第4期52-56,共5页
After 32CrMoV is selected to manufacture nitrided gears coated with TiN by multi-arc ion plating, all of these uncoated gears and coated gears run in the gearbox under the same initial conditions so as to compare thei... After 32CrMoV is selected to manufacture nitrided gears coated with TiN by multi-arc ion plating, all of these uncoated gears and coated gears run in the gearbox under the same initial conditions so as to compare their difference concerning properties and microstructure. Experiment results indicate that tooth surface of the coated-TiN gears does not suffer surface abnormalities in meshed zone. Instead, the gears with nitrided case exhibit an abrasion mark on the meshed zone of tooth surface, which results in more weight loss of nitrided gears. The morphology of the surface suggests TiN film with more than 2 000 HV is so dense and smooth that coated-TiN gears have higher wear resistance compared with the uncoated gears. The microstructure of coated-TiN gears is finer, hardness is higher and its distribution of coated-TiN gears is more reliable than uncoated ones, which makes nitride layer combined with TiN film tightly. Consequently, the wear-resistance of gears has been dramatically promoted. 展开更多
关键词 GEAR multi-arc ion plating TiN Wear-resistance
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Structure and Tribological Properties of CrTiAlN Coatings Deposited by Multi-Arc Ion Plating 被引量:1
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作者 田灿鑫 杨兵 +4 位作者 何俊 王红军 王泽松 王广甫 付德君 《Plasma Science and Technology》 SCIE EI CAS CSCD 2011年第1期55-60,共6页
CrTiAIN coatings were prepared by using a home-made industrial scale multi-arc ion plating system. The coatings were found to be composites of face-center-cubic CrN and TiN. The surface roughness, microhardness, and t... CrTiAIN coatings were prepared by using a home-made industrial scale multi-arc ion plating system. The coatings were found to be composites of face-center-cubic CrN and TiN. The surface roughness, microhardness, and tribological properties of the films were significantly affected by the nitrogen pressure and dc-pulsed bias voltage applied to the substrate. The CrTiA1N coatings with the smoothest surfaces were obtained at optimum conditions of nitrogen pressure of 5.0 Pa and bias voltage of -200 V. The samples were found to exhibit a hardness of 2900 HV0.05 with an average friction coefficient of 0.16 and wear rate of 1.5× 10^-16 m^3/N.m against cemented carbide. 展开更多
关键词 multi-arc ion plating CrTiAIN MICROHARDNESS surface morphology friction coellicient wear rate
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STUDIES OF Cr-O THIN FILNS DEPOSITED BY MULTI-ARC ION PLATING
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作者 WANG Xjangdong, Beijing Vacuum Electronics Research Institute,Beijing 100016, China, and YUAN Lei Beijing Laboratory of Vacuum Physics, Academia Sinica, Beijing 100080, China 《真空科学与技术学报》 EI CAS CSCD 1992年第Z1期107-110,共4页
This paper presents the formation of Cr-O thin films on an iron substrate by multi-arc ion plating, which are intended to be used as a thermal radiation absorbent in electronic vacuum devices. Only oxygen was used as ... This paper presents the formation of Cr-O thin films on an iron substrate by multi-arc ion plating, which are intended to be used as a thermal radiation absorbent in electronic vacuum devices. Only oxygen was used as a reaction gas during deposition, the Cr-O thin film, must have high adhesion and low outgassing rate. The scratch test shows that the critical load, for an applicable Cr-O thin film deposited in oxygen atmosphere alone at a pressure of 8×10<sup>-1</sup> Pa, was as high as 6kg. 展开更多
关键词 CR ion STUDIES OF Cr-O THIN FILNS DEPOSITED BY multi-arc ion plating arc
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Effect of Rare Earth Element Cerium on Mechanical Properties and Morphology of TiN Coating Prepared by Arc Ion Plating 被引量:9
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作者 黄拿灿 胡社军 +2 位作者 谢光荣 曾鹏 汝强 《Journal of Rare Earths》 SCIE EI CAS CSCD 2003年第3期380-383,共4页
TiN coatings were deposited on polished substrates of W18Cr4V high speed steel by means of vacuum arc ion plating. The effect of cerium on adhesion between TiN coating and substrate was studied. The microstructures an... TiN coatings were deposited on polished substrates of W18Cr4V high speed steel by means of vacuum arc ion plating. The effect of cerium on adhesion between TiN coating and substrate was studied. The microstructures and composition of TiN coatings were also investigated by means of scanning electron microscope (SEM), Auger electron spectroscopy (AES), and X ray diffraction (XRD) technique. It was found that cerium is an effective modifying agent and the addition of suitable amount of cerium to TiN coatings can produce relatively excellent properties such as micro hardness, wear resistance, oxidation resistance and porosity. The experimental results show that the added cerium in TiN coatings makes a contribution to form the preferred direction along with a (111) or (222) close packed face, which may be one of the reasons that improves some properties mentioned above. 展开更多
关键词 metal materials arc ion plating TiN coatings ADHESion rare earths
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Experimental Verification of the Physical Model for Droplet-Particles Cleaning in Pulsed Bias Arc Ion Plating 被引量:5
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作者 YanhuiZHAO GuoqiangLIN +1 位作者 ChuangDONG LishiWEN 《Journal of Materials Science & Technology》 SCIE EI CAS CSCD 2005年第3期423-426,共4页
It has been reported that application of pulsed biases in arc ion plating could effectively eliminate droplet particles. The present paper aims at experimental verification of a physical model proposed previously by u... It has been reported that application of pulsed biases in arc ion plating could effectively eliminate droplet particles. The present paper aims at experimental verification of a physical model proposed previously by us which is based on particle charging and repulsion in the pulsed plasma sheath. An orthogonal experiment was designed for this purpose, using the electrical parameters of the pulsed bias for the deposition of TiN films on stainless steel substrates. The effect of these parameters on the amount and the size distribution of the particles were analyzed, and the results provided sufficient evidence for the physical model. 展开更多
关键词 arc ion plating Pulsed bias TiN fllm Droplet-particles
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THE EFFECTS OF PULSE BIAS VOLTAGE AND N_2 PARTIAL PRESSURE ON TiAlN FILMS OF ARC ION PLATING (AIP) 被引量:4
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作者 M.S. Li, S.L. Zhu, Fuhui Wang, C. Sun and L.S. Wen (Institute of Metal Research, The Chinese Academy of Sciences, Shenyang l10016, China) 《Acta Metallurgica Sinica(English Letters)》 SCIE EI CAS CSCD 2001年第6期520-524,共5页
Owing to the characteristics of arc ion plating(AIP) technique, the structure and composition of TiAlN films can be tailored by controlling of various parameters such as compositions of target materials, N2 partial pr... Owing to the characteristics of arc ion plating(AIP) technique, the structure and composition of TiAlN films can be tailored by controlling of various parameters such as compositions of target materials, N2 partial pressure, substrate bias and so on. In this study, several titanium aluminum nitride films were deposited on 1Cr11Ni2W2MoV steel for compressor blade of areo-engine under different d.c pulse bias voltage and nitrogen partial pressure. The effects of substrate pulse bias and nitrogen partial pressure on the deposition rate, droplet formation, microstruture and elemental component of the films were investigated. 展开更多
关键词 TiAlN film pulse bias voltage nitrogen partial pressure arc ion plating
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Microstructure and residual stress of TiN films deposited at low temperature by arc ion plating 被引量:6
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作者 Hai-juan MEI Sheng-sheng ZHAO +2 位作者 Wei CHEN Qi-min WANG Hai-feng LIANG 《Transactions of Nonferrous Metals Society of China》 SCIE EI CAS CSCD 2018年第7期1368-1377,共10页
The TiN films were deposited on 316 L stainless steel substrates at low temperature by arc ion plating. The influences of substrate bias voltage and temperature on microstructure, residual stress and mechanical proper... The TiN films were deposited on 316 L stainless steel substrates at low temperature by arc ion plating. The influences of substrate bias voltage and temperature on microstructure, residual stress and mechanical properties of the films were investigated by EDS, SEM, XRD and nanoindenter tester, respectively. The results showed that the TiN films were highly oriented in(111) orientation with a face-centered cubic structure. With the increase of substrate bias voltage and temperature, the diffraction peak intensity increased sharply with simultaneous peak narrowing, and the small grain sizes increased from 6.2 to 13.8 nm. As the substrate temperature increased from 10 to 300℃, the residual compressive stress decreased sharply from 10.2 to 7.7 GPa, which caused the hardness to decrease from 33.1 to 30.6 GPa, while the adhesion strength increased sharply from 9.6 to 21 N. 展开更多
关键词 TiN film arc ion plating residual stress low temperature bias voltage
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Formation of nanocrystalline microstructure in arc ion plated CrN films 被引量:4
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作者 Qi-min WANG Se-Hun KWON Kwang-Ho KIM 《Transactions of Nonferrous Metals Society of China》 SCIE EI CAS CSCD 2011年第A01期73-77,共5页
Applying negative bias voltages caused significant microstructure changes in arc ion plated CrN films. Nanocrystalline microstructures were obtained by adjusting the negative bias voltage. Structural characterizations... Applying negative bias voltages caused significant microstructure changes in arc ion plated CrN films. Nanocrystalline microstructures were obtained by adjusting the negative bias voltage. Structural characterizations of the films were carried out using X-ray diffractometry (XRD) and high-resolution transmission electron microscopy (HR-TEM). The results indicated that increasing ion bombardment by applying negative bias voltages resulted in the formation of defects in the CrN films, inducing microstructure evolution from micro-columnar to nanocrystalline. The microhardness and residual stresses of the films were also affected. Based on the experimental results, the evolution mechanisms of the film microstructure and properties were discussed by considering ion bombardment effects. 展开更多
关键词 CRN thin films DEPOSITion microstructure arc ion plating ion bombardment
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Composition demixing effect on cathodic arc ion plating 被引量:3
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作者 Jun Zhang Li Li +2 位作者 Lipeng Zhang Shilu Zhao Qiang Guo 《Journal of University of Science and Technology Beijing》 CSCD 2006年第2期125-130,共6页
The composition demixing effect has been found often in alloy coatings deposited by cathodic arc ion plating using various alloy cathode targets. The characteristics of composition demixing phenomena were summarized. ... The composition demixing effect has been found often in alloy coatings deposited by cathodic arc ion plating using various alloy cathode targets. The characteristics of composition demixing phenomena were summarized. Beginning with the ionization zone near the surface of the cathode target, a physical model in terms of the ions generated in the ionization zone and their movement in the plating room modified by bias electric field was proposed. Based on the concept of electric charge state, the simulation calculation of the composition demixing effect was carried out. The percentage of atoms of an element in coating and from the alloy target was demonstrated by direct comparison. The influences of the composition change of the alloy target and the bias electric field on the composition demixing effect were discussed in detail. It is also proposed that the average charge states of the elements may be used to calculate the composition demixing effect and to design the composition of the alloy target. 展开更多
关键词 cathodic arc ion plating alloy coating COMPOSITion DEMIXING
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Influences of nitrogen flow rate on the structures and properties of Ti and N co-doped diamond-like carbon films deposited by arc ion plating 被引量:1
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作者 张林 马国佳 +2 位作者 林国强 马贺 韩克昌 《Chinese Physics B》 SCIE EI CAS CSCD 2014年第4期616-621,共6页
In this paper, Ti-C-N nanocomposite films are deposited under different nitrogen flow rates by pulsed bias arc ion plating using Ti and graphite targets in the Ar/N2 mixture gas. The surface morphologies, compositions... In this paper, Ti-C-N nanocomposite films are deposited under different nitrogen flow rates by pulsed bias arc ion plating using Ti and graphite targets in the Ar/N2 mixture gas. The surface morphologies, compositions, microstructures, and mechanical properties of the Ti-C-N films are investigated systematically by field emission scanning electron mi- croscopy (FE-SEM), x-ray photoelectron spectroscopy (XPS), grazing incident x-ray diffraction (GIXRD), Raman spectra, and nano-indentation. The results show that the nanocrystalline Ti(C,N) phase precipitates in the film from GIXRD and XPS analysis, and Raman spectra prove the presence of diamond-like carbon, indicating the formation of nanocomposite film with microstructures comprising nanocrystalline Ti(C,N) phase embedded into a diamond-like matrix. The nitrogen flow rate has a significant effect on the composition, structure, and properties of the film. The nano-hardness and elastic modulus first increase and then decrease as nitrogen flow rate increases, reaching a maximum of 34.3 GPa and 383.2 GPa, at a nitrogen flow rate of 90 sccm, respectively. 展开更多
关键词 arc ion plating Ti-C-N film nitrogen flow rate microstructure
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High temperature oxidation behavior of (Ti, Al)N coating deposited by arc ion plating 被引量:1
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作者 刘爱东 杨世伟 《中国有色金属学会会刊:英文版》 CSCD 2005年第S3期398-401,共4页
(Ti, Al)N gradient nano-coating was deposited on the surface of 1Cr11Ni2W2MoV stainless steel by the MTP-8-800 arc ion plating equipment. And the oxidation performance at high temperature for 500h was tested under t... (Ti, Al)N gradient nano-coating was deposited on the surface of 1Cr11Ni2W2MoV stainless steel by the MTP-8-800 arc ion plating equipment. And the oxidation performance at high temperature for 500h was tested under the condition of the surrounding air temperature 700℃. The test results show that, because of the structural features of the (Ti, Al)N coating, the coating becomes the compact and continuous Al2O3 film, which can protect the basis material effectively in the process of the high temperature oxidizing. The oxidation kinetics of the coating accord with parabolic law. 展开更多
关键词 arc ion plating (Ti Al)N gradient nano-coating oxidation resistant
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Friction and Wear Performances of Cathodic Arc Ion Plated TiAlSiN Coating under Oil Lubricated Condition 被引量:1
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作者 沈辉 KONG Weicheng +2 位作者 TANG Chengjian LI Baomin 孔德军 《Journal of Wuhan University of Technology(Materials Science)》 SCIE EI CAS 2017年第6期1301-1305,共5页
TiAlSiN coating was deposited on H13 hot work mould steel using cathodic arc ion plating(CAIP). The surface-interface morphologies and phases of the obtained coating were analyzed using field emission scanning elect... TiAlSiN coating was deposited on H13 hot work mould steel using cathodic arc ion plating(CAIP). The surface-interface morphologies and phases of the obtained coating were analyzed using field emission scanning electron microscopy(FESEM) and X-ray diffraction(XRD), respectively, and the morphologies, distributions of chemical elements and profiles of worn tracks were also researched using scanning electron microscopy(SEM), energy disperse spectroscopy(EDS), and optical microscope(OM), respectively. The friction-wear performances of TiAlSiN coating under oil lubricated and dry fiction conditions were investigated, and the wear mechanisms of TiAlSiN coating were discussed. The experimental results show that the coating is primarily composed of(Ti, Al)N, AlTiN, and TiN hard phases, Si_3N_4 exists between the(Ti, Al)N crystal grains, increasing the coating microhardness to 3200 HV. The TiAlSiN coating has excellent performances of reducing friction and wear resistance, the average coefficient of friction(COF) of TiAlSiN coating under oil lubricated condition is only 0.05, lowered than the average COF of 0.211 under dry friction condition, the wear rate decreases by about 81.2% compared with that under dry friction condition. The wear mechanism of TiAlSiN coating under oil lubricated and dry friction conditions is composed of abrasive wear, fatigue wear, and abrasive wear, respectively. The internal friction of oil lubrication is a main factor of decreasing fatigue wear. 展开更多
关键词 cathodic arc ion plating (CAIP) TiAISiN coating coefficient of friction (COF) oillubrication dry friction
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Effect of deposition parameters on mechanical properties of TiN films coated on 2A12 aluminum alloys by arc ion plating (AIP) 被引量:1
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作者 AWAD Samir Hamid 《Journal of Chongqing University》 CAS 2005年第1期28-32,共5页
TiN films were deposited on 2A12 aluminum alloy by arc ion plating (AIP). The Vickers hardness of the films deposited at different bias voltages and different nitrogen gas pressures, and that of the substrate were mea... TiN films were deposited on 2A12 aluminum alloy by arc ion plating (AIP). The Vickers hardness of the films deposited at different bias voltages and different nitrogen gas pressures, and that of the substrate were measured. The surface roughness of the TiN films diposited at –30 V and –80 V respectively and at different nitrogen gas pressure was measured also. The mass loss of TiN films deposited at 0 V, –30 V and –80 V respectively were analyzed in dry sand rubber wheel abrasive wear tests and wet ones in comparison with uncoated Al alloy and austenitic stainless steel (AISI 316L). It is revealed that the highest hardness of the TiN film is obtained at a bias voltage of –30 V and a N2 gas pressure of 0.5 Pa. The surface roughness of the film is larger at –80 V than that at –30 V and reduces as the increase of the N2 gas pressure. The mass loss of TiN-film coated 2A12 aluminum alloy is remarkably less than that of uncoated Al alloy and also that of AISI 316L, which indicates that the abrasive wear rate is greatly reduced by the application of TiN coating. TiN coating deposited by arc ion plating (AIP) technique on aluminum alloy can be a potential coating for machine parts requiring preciseness and lightness. 展开更多
关键词 aluminum alloys arc ion plating HARDNESS wear resistance TiN film.
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Effect of partial pressure of reactive gas on chromium nitride and chromium oxide deposited by arc ion plating 被引量:1
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作者 李明升 冯长杰 王福会 《中国有色金属学会会刊:英文版》 CSCD 2006年第B01期276-279,共4页
The effects of reactive gas partial pressure on droplet formation, deposition rate and change of preferred orientation of CrN and Cr2O3 coatings were studied. For CrN coatings, as nitrogen partial pressure increases, ... The effects of reactive gas partial pressure on droplet formation, deposition rate and change of preferred orientation of CrN and Cr2O3 coatings were studied. For CrN coatings, as nitrogen partial pressure increases, the number and size of droplets increases, the deposition rate initially increases obviously and then slowly, and the preferred orientation of CrN changes from high-index plane to low-index one. For Cr2O3 coatings, with the increase of oxygen partial pressure, the number and size of droplets decreases, the deposition rate decreases and the (300) becomes the preferred orientation. These differences are ascribed to the formation of CrN (with a lower melting point) and Cr2O3 (with a higher melting point) on the surface of Cr target during the deposition of CrN and Cr2O3. Complete coatings CrN or Cr2O3 film can be formed when reactive gas partial pressure gets up to 0.1 Pa. The optimized N2 partial pressure for CrN deposition is about 0.1?0.2 Pa in order to suppress the formation of droplets and the suitable O2 partial pressure for Cr2O3 deposition is approximately 0.1 Pa for the attempt to prevent the peel of the coating. 展开更多
关键词 电弧离子镀 反应气体 分压强 氮化铬镀层 氧化铬镀层 钢材
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Deposition of photocatalytic TiO_2 and N-doped TiO_2 films by arc ion plating 被引量:1
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作者 李明升 张淑娟 +5 位作者 娄瑾 刘庭芝 周泽华 杨干兰 胡长员 李文魁 《中国有色金属学会会刊:英文版》 CSCD 2007年第A02期827-830,共4页
TiO2 and N-doped TiO2 films were deposited on the glass substrates by arc ion plating method. The results show that the deposition rate does not change with the increasing deposition time. The increase of mass flow ra... TiO2 and N-doped TiO2 films were deposited on the glass substrates by arc ion plating method. The results show that the deposition rate does not change with the increasing deposition time. The increase of mass flow rate of N2 gives rise to the increase of deposition rate. All as-deposited TiO2 and N-doped TiO2 films are amorphous. The anatase TiO2 phase with preferred orientation(101) is acquired by post-annealing at 400 ℃ for 2 h. The incorporation of N into the TiO2 films and the heat treatment extensively shift the band edge to the visible light region. 展开更多
关键词 电弧离子电镀法 光催化性能 二氧化钛薄膜 氮掺杂
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STRUCTURE, MECHANICAL PROPERTIES AND THERMAL STABILITY OF DIAMOND-LIKE CARBON FILMS PREPARED BY ARC ION PLATING
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作者 Y.S.Zou J.D.Zheng +3 位作者 J.Gong C.Sun R.F.Huang L.S.Wen 《Acta Metallurgica Sinica(English Letters)》 SCIE EI CAS CSCD 2005年第3期331-338,共8页
Diamond-like Carbon (DLC) films have been prepared on Si(100) substrates by arc ion plating in conjunction with pulse bias voltage under H2 atmosphere. The depo sited films have been characterized by scanning electron... Diamond-like Carbon (DLC) films have been prepared on Si(100) substrates by arc ion plating in conjunction with pulse bias voltage under H2 atmosphere. The depo sited films have been characterized by scanning electron microscopy and atomic f orce microscopy. The results show that the surface of the film is smooth and den se without any cracks, and the surface roughness is low. The bonding characteris tic of the films has been studied by X-ray photoelectron spectroscopy (XPS) and Raman spectroscopy. It shows the sp3 bond content of the film deposited at -200V is 26.7%. The hardness and elastic modulus of the film determined by nanoindent ation technique are 30.8 and 250.1GPa, respectively. The tribological characteri stic of the films reveals that they have low friction coefficient and good wear- resistance. After deposition, the films have been annealed in the range of 350-7 00℃ for 1h in vacuum to investigate the thermal stability. Raman spectra indica te that the ID/IG ratio and G peak position have few detectable changes below 50 0℃. Further increasing the annealing temperature, the hydrogen can be released, the structure rearranges, and the phase transition of sp3 configured carbon to sp2 configured carbon appears. 展开更多
关键词 diamond-like carbon arc ion plating MICROSTRUCTURE MECHANICAL
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Effect of Sample Configuration on Droplet-Particles of TiN Films Deposited by Pulse Biased Arc Ion Plating
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作者 Yanhui Zhao Guoqiang Lin +2 位作者 Jinquan Xiao Chuang Dong Lishi Wen 《Journal of Materials Science & Technology》 SCIE EI CAS CSCD 2009年第5期681-686,共6页
Orthogonal experiments are used to design the pulsed bias related parameters, including bias magnitude, duty cycle and pulse frequency, during arc ion deposition of TiN films on stainless steel substrates in the case ... Orthogonal experiments are used to design the pulsed bias related parameters, including bias magnitude, duty cycle and pulse frequency, during arc ion deposition of TiN films on stainless steel substrates in the case of samples placing normal to the plasma flux. The effect of these parameters on the amount and the size distribution of droplet-particles are investigated, and the results have provided sufficient evidence for the physical model, in which particles reduction is due to the case that the particles are negatively charged and repulsed from negative pulse electric field. The effect of sample configuration on amount and size distribution of the particles are analyzed. The results of the amount and size distribution of the particles are compared to those in the case of samples placing parallel to the plasma flux. 展开更多
关键词 arc ion plating Pulsed bias TiN film Droplet-particles
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