The continental shale reservoirs of Jurassic Lianggaoshan Formation in Sichuan Basin contain thin lamina,which is characterized by strong plasticity and developed longitudinal shell limestone interlayer.To improve the...The continental shale reservoirs of Jurassic Lianggaoshan Formation in Sichuan Basin contain thin lamina,which is characterized by strong plasticity and developed longitudinal shell limestone interlayer.To improve the production efficiency of reservoirs by multi-cluster fracturing,it is necessary to consider the unbalanced propagation of hydraulic fractures and the penetration effect of fractures.This paper constructed a numerical model of multi-fracture propagation and penetration based on the finite element coupling cohesive zone method;considering the construction cluster spacing,pump rate,lamina strength and other parameters studied the influencing factors of multi-cluster fracture interaction propagation;combined with AE energy data and fracture mode reconstruction method,quantitatively characterized the comprehensive impact of the strength of thin interlayer rock interfaces on the initiation and propagation of fractures that penetrate layers,and accurately predicted the propagation pattern of hydraulic fractures through laminated shale oil reservoirs.Simulation results revealed that in the process of multi-cluster fracturing,the proportion of shear damage is low,and mainly occurs in bedding fractures activated by outer fractures.Reducing the cluster spacing enhances the fracture system's penetration ability,though it lowers the activation efficiency of lamina.The high plasticity of the limestone interlayer may impact the vertical propagation distance of the main fracture.Improving the interface strength is beneficial to the reconstruction of the fracture height,but the interface communication effect is limited.Reasonable selection of layers with moderate lamina strength for fracturing stimulation,increasing the pump rate during fracturing and setting the cluster spacing reasonably are beneficial to improve the effect of reservoir stimulation.展开更多
This study conducted temporary plugging and diversion fracturing(TPDF)experiments using a true triaxial fracturing simulation system within a laboratory setting that replicated a lab-based horizontal well completion w...This study conducted temporary plugging and diversion fracturing(TPDF)experiments using a true triaxial fracturing simulation system within a laboratory setting that replicated a lab-based horizontal well completion with multi-cluster sand jetting perforation.The effects of temporary plugging agent(TPA)particle size,TPA concentration,single-cluster perforation number and cluster number on plugging pressure,multi-fracture diversion pattern and distribution of TPAs were investigated.A combination of TPAs with small particle sizes within the fracture and large particle sizes within the segment is conducive to increasing the plugging pressure and promoting the diversion of multi-fractures.The addition of fibers can quickly achieve ultra-high pressure,but it may lead to longitudinal fractures extending along the wellbore.The temporary plugging peak pressure increases with an increase in the concentration of the TPA,reaching a peak at a certain concentration,and further increases do not significantly improve the temporary plugging peak pressure.The breaking pressure and temporary plugging peak pressure show a decreasing trend with an increase in single-cluster perforation number.A lower number of single-cluster perforations is beneficial for increasing the breaking pressure and temporary plugging peak pressure,and it has a more significant control on the propagation of multi-cluster fractures.A lower number of clusters is not conducive to increasing the total number and complexity of artificial fractures,while a higher number of clusters makes it difficult to achieve effective plugging.The TPAs within the fracture is mainly concentrated in the complex fracture areas,especially at the intersections of fractures.Meanwhile,the TPAs within the segment are primarily distributed near the perforation cluster apertures which initiated complex fractures.展开更多
Multistage multi-cluster hydraulic fracturing has enabled the economic exploitation of shale reservoirs,but the interpretation of hydraulic fracture parameters is challenging.The pressure signals after pump shutdown a...Multistage multi-cluster hydraulic fracturing has enabled the economic exploitation of shale reservoirs,but the interpretation of hydraulic fracture parameters is challenging.The pressure signals after pump shutdown are influenced by hydraulic fractures,which can reflect the geometric features of hydraulic fracture.The shutdown pressure can be used to interpret the hydraulic fracture parameters in a real-time and cost-effective manner.In this paper,a mathematical model for shutdown pressure evolution is developed considering the effects of wellbore friction,perforation friction and fluid loss in fractures.An efficient numerical simulation method is established by using the method of characteristics.Based on this method,the impacts of fracture half-length,fracture height,opened cluster and perforation number,and filtration coefficient on the evolution of shutdown pressure are analyzed.The results indicate that a larger fracture half-length may hasten the decay of shutdown pressure,while a larger fracture height can slow down the decay of shutdown pressure.A smaller number of opened clusters and perforations can significantly increase the perforation friction and decrease the overall level of shutdown pressure.A larger filtration coefficient may accelerate the fluid filtration in the fracture and hasten the drop of the shutdown pressure.The simulation method of shutdown pressure,as well as the analysis results,has important implications for the interpretation of hydraulic fracture parameters.展开更多
A treelike hybrid multi-cluster tool is composed of both single-arm and dual-arm cluster tools with a treelike topology. Scheduling such a tool is challenging. For a hybrid treelike multi-cluster tool whose bottleneck...A treelike hybrid multi-cluster tool is composed of both single-arm and dual-arm cluster tools with a treelike topology. Scheduling such a tool is challenging. For a hybrid treelike multi-cluster tool whose bottleneck individual tool is process-bound, this work aims at finding its optimal one-wafer cyclic schedule. It is modeled with Petri nets such that a onewafer cyclic schedule is parameterized as its robots' waiting time.Based on the model, this work proves the existence of its onewafer cyclic schedule that features with the ease of industrial implementation. Then, computationally efficient algorithms are proposed to find the minimal cycle time and optimal onewafer cyclic schedule. Multi-cluster tool examples are given to illustrate the proposed approach. The use of the found schedules enables industrial multi-cluster tools to operate with their highest productivity.展开更多
Multi-cluster tools are widely used in majority of wafer fabrication processes in semiconductor industry. Smaller lot production, thinner circuit width in wafers, larger wafer size, and maintenance have resulted in a ...Multi-cluster tools are widely used in majority of wafer fabrication processes in semiconductor industry. Smaller lot production, thinner circuit width in wafers, larger wafer size, and maintenance have resulted in a large quantity of their start-up and close-down transient periods. Yet, most of existing efforts have been concentrated on scheduling their steady states.Different from such efforts, this work schedules their transient and steady-state periods subject to wafer residency constraints. It gives the schedulability conditions for the steady-state scheduling of dual-blade robotic multi-cluster tools and a corresponding algorithm for finding an optimal schedule. Based on the robot synchronization conditions, a linear program is proposed to figure out an optimal schedule for a start-up period, which ensures a tool to enter the desired optimal steady state. Another linear program is proposed to find an optimal schedule for a closedown period that evolves from the steady state period. Finally,industrial cases are presented to illustrate how the provided method outperforms the existing approach in terms of system throughput improvement.展开更多
As wafer circuit widths shrink less than 10 nm,stringent quality control is imposed on the wafer fabrication processes. Therefore, wafer residency time constraints and chamber cleaning operations are widely required i...As wafer circuit widths shrink less than 10 nm,stringent quality control is imposed on the wafer fabrication processes. Therefore, wafer residency time constraints and chamber cleaning operations are widely required in chemical vapor deposition, coating processes, etc. They increase scheduling complexity in cluster tools. In this paper, we focus on scheduling single-arm multi-cluster tools with chamber cleaning operations subject to wafer residency time constraints. When a chamber is being cleaned, it can be viewed as processing a virtual wafer. In this way, chamber cleaning operations can be performed while wafer residency time constraints for real wafers are not violated. Based on such a method, we present the necessary and sufficient conditions to analytically check whether a single-arm multi-cluster tool can be scheduled with a chamber cleaning operation and wafer residency time constraints. An algorithm is proposed to adjust the cycle time for a cleaning operation that lasts a long cleaning time.Meanwhile, algorithms for a feasible schedule are also derived.And an algorithm is presented for operating a multi-cluster tool back to a steady state after the cleaning. Illustrative examples are given to show the application and effectiveness of the proposed method.展开更多
Geological exploration cores obtained from shale gas wells several kilometers deep often show different height-diameter ratios(H/D)because of complex geological conditions(core disking or developed fractures),which ma...Geological exploration cores obtained from shale gas wells several kilometers deep often show different height-diameter ratios(H/D)because of complex geological conditions(core disking or developed fractures),which makes further standard specimen preparation for mechanical evaluation of reservoirs difficult.In multi-cluster hydraulic fracturing,shale reservoirs between planes of hydraulic fractures with different lengths could be simplified to have different H/D ratios.Discovering the effect of H/D on the mechanical characteristics of shale specimens with different bedding orientations will support mechanical evaluation tests of reservoirs based on disked geological cores and help to optimize multicluster fracturing programs.In this study,we performed uniaxial compression tests and acoustic emission(AE)monitoring on cylindrical Longmaxi shale specimens under five bedding orientations and four H/D ratios.The experimental results showed that both the H/D-dependent mechanical properties and AE parameters demonstrated significant anisotropy.Increasing H/D did not change the uniaxial compressive strength(UCS)evolution versus bedding orientation,demonstrating a V-shaped relationship,but enhanced the curve shape.The stress level of crack damage for the specimens significantly increased with increasing H/D,excluding the specimens with a bedding orientation of 0°.With increasing H/D,the cumulative AE counts of the specimens with each bedding orientation tended to exhibit a stepped jump against the loading time.The proportion of low-average-frequency AE signals(below 100 kHz)in specimens with bedding orientations of 45°and 60°increased to over 70%by increasing H/D,but it only increased to 40%in specimens with bedding orientations of 0°,30°,and 90°.Finally,an empirical model that can reveal the effect of H/D on anisotropic UCS of shale reservoir was proposed,the anisotropic proportion of tensile and shear failure cracks in specimens under four H/D ratios was classified based on the AE data,and the effect of H/D on the anisotropic crack growth of specimens was discussed.展开更多
基金financial support by the National Key Research and Development Program of China (No.2022YFE0129800)the National Natural Science Foundation of China (No.52074311)。
文摘The continental shale reservoirs of Jurassic Lianggaoshan Formation in Sichuan Basin contain thin lamina,which is characterized by strong plasticity and developed longitudinal shell limestone interlayer.To improve the production efficiency of reservoirs by multi-cluster fracturing,it is necessary to consider the unbalanced propagation of hydraulic fractures and the penetration effect of fractures.This paper constructed a numerical model of multi-fracture propagation and penetration based on the finite element coupling cohesive zone method;considering the construction cluster spacing,pump rate,lamina strength and other parameters studied the influencing factors of multi-cluster fracture interaction propagation;combined with AE energy data and fracture mode reconstruction method,quantitatively characterized the comprehensive impact of the strength of thin interlayer rock interfaces on the initiation and propagation of fractures that penetrate layers,and accurately predicted the propagation pattern of hydraulic fractures through laminated shale oil reservoirs.Simulation results revealed that in the process of multi-cluster fracturing,the proportion of shear damage is low,and mainly occurs in bedding fractures activated by outer fractures.Reducing the cluster spacing enhances the fracture system's penetration ability,though it lowers the activation efficiency of lamina.The high plasticity of the limestone interlayer may impact the vertical propagation distance of the main fracture.Improving the interface strength is beneficial to the reconstruction of the fracture height,but the interface communication effect is limited.Reasonable selection of layers with moderate lamina strength for fracturing stimulation,increasing the pump rate during fracturing and setting the cluster spacing reasonably are beneficial to improve the effect of reservoir stimulation.
基金Supported by the National Natural Science Foundation of China(51974332).
文摘This study conducted temporary plugging and diversion fracturing(TPDF)experiments using a true triaxial fracturing simulation system within a laboratory setting that replicated a lab-based horizontal well completion with multi-cluster sand jetting perforation.The effects of temporary plugging agent(TPA)particle size,TPA concentration,single-cluster perforation number and cluster number on plugging pressure,multi-fracture diversion pattern and distribution of TPAs were investigated.A combination of TPAs with small particle sizes within the fracture and large particle sizes within the segment is conducive to increasing the plugging pressure and promoting the diversion of multi-fractures.The addition of fibers can quickly achieve ultra-high pressure,but it may lead to longitudinal fractures extending along the wellbore.The temporary plugging peak pressure increases with an increase in the concentration of the TPA,reaching a peak at a certain concentration,and further increases do not significantly improve the temporary plugging peak pressure.The breaking pressure and temporary plugging peak pressure show a decreasing trend with an increase in single-cluster perforation number.A lower number of single-cluster perforations is beneficial for increasing the breaking pressure and temporary plugging peak pressure,and it has a more significant control on the propagation of multi-cluster fractures.A lower number of clusters is not conducive to increasing the total number and complexity of artificial fractures,while a higher number of clusters makes it difficult to achieve effective plugging.The TPAs within the fracture is mainly concentrated in the complex fracture areas,especially at the intersections of fractures.Meanwhile,the TPAs within the segment are primarily distributed near the perforation cluster apertures which initiated complex fractures.
基金The work is supported by the Sub-Project of“Research on Key Technologies and Equipment of Reservoir Stimulation”of China National Petroleum Corporation Post–14th Five-Year Plan Forward-Looking Major Science and Technology Project“Research on New Technology of Monitoring and Diagnosis of Horizontal Well Hydraulic Fracture Network Distribution Pattern”(2021DJ4502).
文摘Multistage multi-cluster hydraulic fracturing has enabled the economic exploitation of shale reservoirs,but the interpretation of hydraulic fracture parameters is challenging.The pressure signals after pump shutdown are influenced by hydraulic fractures,which can reflect the geometric features of hydraulic fracture.The shutdown pressure can be used to interpret the hydraulic fracture parameters in a real-time and cost-effective manner.In this paper,a mathematical model for shutdown pressure evolution is developed considering the effects of wellbore friction,perforation friction and fluid loss in fractures.An efficient numerical simulation method is established by using the method of characteristics.Based on this method,the impacts of fracture half-length,fracture height,opened cluster and perforation number,and filtration coefficient on the evolution of shutdown pressure are analyzed.The results indicate that a larger fracture half-length may hasten the decay of shutdown pressure,while a larger fracture height can slow down the decay of shutdown pressure.A smaller number of opened clusters and perforations can significantly increase the perforation friction and decrease the overall level of shutdown pressure.A larger filtration coefficient may accelerate the fluid filtration in the fracture and hasten the drop of the shutdown pressure.The simulation method of shutdown pressure,as well as the analysis results,has important implications for the interpretation of hydraulic fracture parameters.
基金supported in part by Science and Technology Development Fund(FDCT)of Macao(106/2016/A3)the National Natural Science Foundation of China(U1401240)the Delta Electronics Inc and the National Research Foundation(NRF)Singapore under the Corp Lab@University Scheme
文摘A treelike hybrid multi-cluster tool is composed of both single-arm and dual-arm cluster tools with a treelike topology. Scheduling such a tool is challenging. For a hybrid treelike multi-cluster tool whose bottleneck individual tool is process-bound, this work aims at finding its optimal one-wafer cyclic schedule. It is modeled with Petri nets such that a onewafer cyclic schedule is parameterized as its robots' waiting time.Based on the model, this work proves the existence of its onewafer cyclic schedule that features with the ease of industrial implementation. Then, computationally efficient algorithms are proposed to find the minimal cycle time and optimal onewafer cyclic schedule. Multi-cluster tool examples are given to illustrate the proposed approach. The use of the found schedules enables industrial multi-cluster tools to operate with their highest productivity.
基金the National Natural Science Foundation of China(61673123,61803397)the Science and Technology Development Fund(FDCT)of Macao(106/2016/A3,005/2018/A1,011/2017/A,0017/2019/A1)
文摘Multi-cluster tools are widely used in majority of wafer fabrication processes in semiconductor industry. Smaller lot production, thinner circuit width in wafers, larger wafer size, and maintenance have resulted in a large quantity of their start-up and close-down transient periods. Yet, most of existing efforts have been concentrated on scheduling their steady states.Different from such efforts, this work schedules their transient and steady-state periods subject to wafer residency constraints. It gives the schedulability conditions for the steady-state scheduling of dual-blade robotic multi-cluster tools and a corresponding algorithm for finding an optimal schedule. Based on the robot synchronization conditions, a linear program is proposed to figure out an optimal schedule for a start-up period, which ensures a tool to enter the desired optimal steady state. Another linear program is proposed to find an optimal schedule for a closedown period that evolves from the steady state period. Finally,industrial cases are presented to illustrate how the provided method outperforms the existing approach in terms of system throughput improvement.
基金supported in part by the Natural Science Foundation of Guangdong Province,China (2022A1515011310)。
文摘As wafer circuit widths shrink less than 10 nm,stringent quality control is imposed on the wafer fabrication processes. Therefore, wafer residency time constraints and chamber cleaning operations are widely required in chemical vapor deposition, coating processes, etc. They increase scheduling complexity in cluster tools. In this paper, we focus on scheduling single-arm multi-cluster tools with chamber cleaning operations subject to wafer residency time constraints. When a chamber is being cleaned, it can be viewed as processing a virtual wafer. In this way, chamber cleaning operations can be performed while wafer residency time constraints for real wafers are not violated. Based on such a method, we present the necessary and sufficient conditions to analytically check whether a single-arm multi-cluster tool can be scheduled with a chamber cleaning operation and wafer residency time constraints. An algorithm is proposed to adjust the cycle time for a cleaning operation that lasts a long cleaning time.Meanwhile, algorithms for a feasible schedule are also derived.And an algorithm is presented for operating a multi-cluster tool back to a steady state after the cleaning. Illustrative examples are given to show the application and effectiveness of the proposed method.
基金funded by the National Natural Science Foundation of China(Grant Nos.51927808,52174098 and 52374151).
文摘Geological exploration cores obtained from shale gas wells several kilometers deep often show different height-diameter ratios(H/D)because of complex geological conditions(core disking or developed fractures),which makes further standard specimen preparation for mechanical evaluation of reservoirs difficult.In multi-cluster hydraulic fracturing,shale reservoirs between planes of hydraulic fractures with different lengths could be simplified to have different H/D ratios.Discovering the effect of H/D on the mechanical characteristics of shale specimens with different bedding orientations will support mechanical evaluation tests of reservoirs based on disked geological cores and help to optimize multicluster fracturing programs.In this study,we performed uniaxial compression tests and acoustic emission(AE)monitoring on cylindrical Longmaxi shale specimens under five bedding orientations and four H/D ratios.The experimental results showed that both the H/D-dependent mechanical properties and AE parameters demonstrated significant anisotropy.Increasing H/D did not change the uniaxial compressive strength(UCS)evolution versus bedding orientation,demonstrating a V-shaped relationship,but enhanced the curve shape.The stress level of crack damage for the specimens significantly increased with increasing H/D,excluding the specimens with a bedding orientation of 0°.With increasing H/D,the cumulative AE counts of the specimens with each bedding orientation tended to exhibit a stepped jump against the loading time.The proportion of low-average-frequency AE signals(below 100 kHz)in specimens with bedding orientations of 45°and 60°increased to over 70%by increasing H/D,but it only increased to 40%in specimens with bedding orientations of 0°,30°,and 90°.Finally,an empirical model that can reveal the effect of H/D on anisotropic UCS of shale reservoir was proposed,the anisotropic proportion of tensile and shear failure cracks in specimens under four H/D ratios was classified based on the AE data,and the effect of H/D on the anisotropic crack growth of specimens was discussed.