Scheduling a Single-Arm Multi-Cluster Tool With a Condition-Based Cleaning Operation

As wafer circuit widths shrink less than 10 nm,stringent quality control is imposed on the wafer fabrication processes. Therefore, wafer residency time constraints and chamber cleaning operations are widely required in chemical vapor deposition, coating processes, etc. They increase scheduling complexity in cluster tools. In this paper, we focus on scheduling single-arm multi-cluster tools with chamber cleaning operations subject to wafer residency time constraints. When a chamber is being cleaned, it can be viewed as processing a virtual wafer. In this way, chamber cleaning operations can be performed while wafer residency time constraints for real wafers are not violated. Based on such a method, we present the necessary and sufficient conditions to analytically check whether a single-arm multi-cluster tool can be scheduled with a chamber cleaning operation and wafer residency time constraints. An algorithm is proposed to adjust the cycle time for a cleaning operation that lasts a long cleaning time.Meanwhile, algorithms for a feasible schedule are also derived.And an algorithm is presented for operating a multi-cluster tool back to a steady state after the cleaning. Illustrative examples are given to show the application and effectiveness of the proposed method.

Scheduling Dual-Arm Multi-Cluster Tools With Regulation of Post-Processing Time

As wafer circuit width shrinks down to less than ten nanometers in recent years,stringent quality control in the wafer manufacturing process is increasingly important.Thanks to the coupling of neighboring cluster tools and coordination of multiple robots in a multi-cluster tool,wafer production scheduling becomes rather complicated.After a wafer is processed,due to high-temperature chemical reactions in a chamber,the robot should be controlled to take it out of the processing chamber at the right time.In order to ensure the uniformity of integrated circuits on wafers,it is highly desirable to make the differences in wafer post-processing time among the individual tools in a multicluster tool as small as possible.To achieve this goal,for the first time,this work aims to find an optimal schedule for a dual-arm multi-cluster tool to regulate the wafer post-processing time.To do so,we propose polynomial-time algorithms to find an optimal schedule,which can achieve the highest throughput,and minimize the total post-processing time of the processing steps.We propose a linear program model and another algorithm to balance the differences in the post-processing time between any pair of adjacent cluster tools.Two industrial examples are given to illustrate the application and effectiveness of the proposed method.

Polynomial Approach to Optimal One-wafer Cyclic Scheduling of Treelike Hybrid Multi-Cluster Tools via Petri Nets

A treelike hybrid multi-cluster tool is composed of both single-arm and dual-arm cluster tools with a treelike topology. Scheduling such a tool is challenging. For a hybrid treelike multi-cluster tool whose bottleneck individual tool is process-bound, this work aims at finding its optimal one-wafer cyclic schedule. It is modeled with Petri nets such that a onewafer cyclic schedule is parameterized as its robots' waiting time.Based on the model, this work proves the existence of its onewafer cyclic schedule that features with the ease of industrial implementation. Then, computationally efficient algorithms are proposed to find the minimal cycle time and optimal onewafer cyclic schedule. Multi-cluster tool examples are given to illustrate the proposed approach. The use of the found schedules enables industrial multi-cluster tools to operate with their highest productivity.

Optimal Integrated Schedule of Entire Process of Dual-blade Multi-cluster Tools From Start-up to Close-down

Multi-cluster tools are widely used in majority of wafer fabrication processes in semiconductor industry. Smaller lot production, thinner circuit width in wafers, larger wafer size, and maintenance have resulted in a large quantity of their start-up and close-down transient periods. Yet, most of existing efforts have been concentrated on scheduling their steady states.Different from such efforts, this work schedules their transient and steady-state periods subject to wafer residency constraints. It gives the schedulability conditions for the steady-state scheduling of dual-blade robotic multi-cluster tools and a corresponding algorithm for finding an optimal schedule. Based on the robot synchronization conditions, a linear program is proposed to figure out an optimal schedule for a start-up period, which ensures a tool to enter the desired optimal steady state. Another linear program is proposed to find an optimal schedule for a closedown period that evolves from the steady state period. Finally,industrial cases are presented to illustrate how the provided method outperforms the existing approach in terms of system throughput improvement.

Fractures interaction and propagation mechanism of multi-cluster fracturing on laminated shale oil reservoir

The continental shale reservoirs of Jurassic Lianggaoshan Formation in Sichuan Basin contain thin lamina,which is characterized by strong plasticity and developed longitudinal shell limestone interlayer.To improve the production efficiency of reservoirs by multi-cluster fracturing,it is necessary to consider the unbalanced propagation of hydraulic fractures and the penetration effect of fractures.This paper constructed a numerical model of multi-fracture propagation and penetration based on the finite element coupling cohesive zone method;considering the construction cluster spacing,pump rate,lamina strength and other parameters studied the influencing factors of multi-cluster fracture interaction propagation;combined with AE energy data and fracture mode reconstruction method,quantitatively characterized the comprehensive impact of the strength of thin interlayer rock interfaces on the initiation and propagation of fractures that penetrate layers,and accurately predicted the propagation pattern of hydraulic fractures through laminated shale oil reservoirs.Simulation results revealed that in the process of multi-cluster fracturing,the proportion of shear damage is low,and mainly occurs in bedding fractures activated by outer fractures.Reducing the cluster spacing enhances the fracture system's penetration ability,though it lowers the activation efficiency of lamina.The high plasticity of the limestone interlayer may impact the vertical propagation distance of the main fracture.Improving the interface strength is beneficial to the reconstruction of the fracture height,but the interface communication effect is limited.Reasonable selection of layers with moderate lamina strength for fracturing stimulation,increasing the pump rate during fracturing and setting the cluster spacing reasonably are beneficial to improve the effect of reservoir stimulation.

Simulation Method and Feature Analysis of Shutdown Pressure Evolution During Multi-Cluster Fracturing Stimulation

Multistage multi-cluster hydraulic fracturing has enabled the economic exploitation of shale reservoirs,but the interpretation of hydraulic fracture parameters is challenging.The pressure signals after pump shutdown are influenced by hydraulic fractures,which can reflect the geometric features of hydraulic fracture.The shutdown pressure can be used to interpret the hydraulic fracture parameters in a real-time and cost-effective manner.In this paper,a mathematical model for shutdown pressure evolution is developed considering the effects of wellbore friction,perforation friction and fluid loss in fractures.An efficient numerical simulation method is established by using the method of characteristics.Based on this method,the impacts of fracture half-length,fracture height,opened cluster and perforation number,and filtration coefficient on the evolution of shutdown pressure are analyzed.The results indicate that a larger fracture half-length may hasten the decay of shutdown pressure,while a larger fracture height can slow down the decay of shutdown pressure.A smaller number of opened clusters and perforations can significantly increase the perforation friction and decrease the overall level of shutdown pressure.A larger filtration coefficient may accelerate the fluid filtration in the fracture and hasten the drop of the shutdown pressure.The simulation method of shutdown pressure,as well as the analysis results,has important implications for the interpretation of hydraulic fracture parameters.

Fracture propagation law of temporary plugging and diversion fracturing in shale reservoirs under completion experiments of horizontal well with multi-cluster sand jetting perforation

This study conducted temporary plugging and diversion fracturing(TPDF)experiments using a true triaxial fracturing simulation system within a laboratory setting that replicated a lab-based horizontal well completion with multi-cluster sand jetting perforation.The effects of temporary plugging agent(TPA)particle size,TPA concentration,single-cluster perforation number and cluster number on plugging pressure,multi-fracture diversion pattern and distribution of TPAs were investigated.A combination of TPAs with small particle sizes within the fracture and large particle sizes within the segment is conducive to increasing the plugging pressure and promoting the diversion of multi-fractures.The addition of fibers can quickly achieve ultra-high pressure,but it may lead to longitudinal fractures extending along the wellbore.The temporary plugging peak pressure increases with an increase in the concentration of the TPA,reaching a peak at a certain concentration,and further increases do not significantly improve the temporary plugging peak pressure.The breaking pressure and temporary plugging peak pressure show a decreasing trend with an increase in single-cluster perforation number.A lower number of single-cluster perforations is beneficial for increasing the breaking pressure and temporary plugging peak pressure,and it has a more significant control on the propagation of multi-cluster fractures.A lower number of clusters is not conducive to increasing the total number and complexity of artificial fractures,while a higher number of clusters makes it difficult to achieve effective plugging.The TPAs within the fracture is mainly concentrated in the complex fracture areas,especially at the intersections of fractures.Meanwhile,the TPAs within the segment are primarily distributed near the perforation cluster apertures which initiated complex fractures.

基于Ladybug Tools对日光温室的方位角与光照模拟

日光温室是重要的农业基础设施,温室的方位角是评判温室结构设计是否合理的基础之一。选择较好的温室方位角拥有更优的采光性能是本文研究的意义。为此,选择三维可视化技术模拟分析日光温室的光照值,为更好地研究分析日光温室采光性能及光照变化提供较为直观的途径和方法,为优化设计高产、高效、节能的日光温室提供一定的辅助作用。通过实测数据和模拟数据的对比,说明Ladybug Tools软件模拟不同方位角的变化及和田日光温室的光照的对比准确度较高,误差不超过5%,为研究日光温室在光照方面的设计提供了一定的理论依据和参考。

Nutritional Assessment Tools for Patients with Cancer:A Narrative Review

Cancer patients are at high risk of malnutrition,which can lead to adverse health outcomes such as prolonged hospitalization,increased complications,and increased mortality.Accurate and timely nutritional assessment plays a critical role in effectively managing malnutrition in these patients.However,while many tools exist to assess malnutrition,there is no universally accepted standard.Although different tools have their own strengths and limitations,there is a lack of narrative reviews on nutritional assessment tools for cancer patients.To address this knowledge gap,we conducted a non-systematic literature search using PubMed,Embase,Web of Science,and the Cochrane Library from their inception until May 2023.A total of 90 studies met our selection criteria and were included in our narrative review.We evaluated the applications,strengths,and limitations of 4 commonly used nutritional assessment tools for cancer patients:the Subjective Global Assessment(SGA),Patient-Generated Subjective Global Assessment(PG-SGA),Mini Nutritional Assessment(MNA),and Global Leadership Initiative on Malnutrition(GLIM).Our findings revealed that malnutrition was associated with adverse health outcomes.Each of these 4 tools has its applications,strengths,and limitations.Our findings provide medical staff with a foundation for choosing the optimal tool to rapidly and accurately assess malnutrition in cancer patients.It is essential for medical staff to be familiar with these common tools to ensure effective nutritional management of cancer patients.

Digital Twin Modeling Enabled Machine Tool Intelligence:A Review

Machine tools,often referred to as the“mother machines”of the manufacturing industry,are crucial in developing smart manufacturing and are increasingly becoming more intelligent.Digital twin technology can promote machine tool intelligence and has attracted considerable research interest.However,there is a lack of clear and systematic analyses on how the digital twin technology enables machine tool intelligence.Herein,digital twin modeling was identified as an enabling technology for machine tool intelligence based on a comparative study of the characteristics of machine tool intelligence and digital twin.The review then delves into state-of-the-art digital twin modelingenabled machine tool intelligence,examining it from the aspects of data-based modeling and mechanism-data dual-driven modeling.Additionally,it highlights three bottleneck issues facing the field.Considering these problems,the architecture of a digital twin machine tool(DTMT)is proposed,and three key technologies are expounded in detail:Data perception and fusion technology,mechanism-data-knowledge hybrid-driven digital twin modeling and virtual-real synchronization technology,and dynamic optimization and collaborative control technology for multilevel parameters.Finally,future research directions for the DTMT are discussed.This work can provide a foundation basis for the research and implementation of digital-twin modeling-enabled machine tool intelligence,making it significant for developing intelligent machine tools.

Novel Batch Polishing Method of Ceramic Cutting Inserts for Reducing Tool Wear

Ceramic cutting inserts are a type of cutting tool commonly used in high-speed metal cutting applications.However,the wear of these inserts caused by friction between the workpiece and cutting inserts limits their overall effectiveness.In order to improve the tool life and reduce wear,this study introduces an emerging method called magnetic field-assisted batch polishing(MABP)for simultaneously polishing multiple ceramic cutting inserts.Several polishing experiments were conducted under different conditions,and the wear characteristics were clarified by cutting S136H steel.The results showed that after 15 min of polishing,the surface roughness at the flank face,edge,and nose of the inserts was reduced to below 2.5 nm,6.25 nm,and 45.8 nm,respectively.Furthermore,the nose radii of the inserts did not change significantly,and there were no significant changes in the weight percentage of elements before and after polishing.Additionally,the tool life of the batch polished inserts was found to be up to 1.75 times longer than that of unpolished inserts.These findings suggest that the MABP method is an effective way to mass polish ceramic cutting inserts,resulting in significantly reduced tool wear.Furthermore,this novel method offers new possibilities for polishing other tools.

基于IT Tools平台的高中信息技术深度学习实践研究

It Tools平台是一个建立在网络上的信息技术教学辅助平台,教师和学生都可以通过这一平台进行学习,当前这一平台在教育教学中已经取得一定应用效果。本次阐述了基于It Tools平台的高中信息技术教学,以“编程计算”单元教学为例分析了基于It Tools平台的高中信息技术深度学习实践策略。

SCtool:识别复杂性状和疾病间遗传关联的工具

识别复杂性状和疾病间遗传关联可以提供有用的病因学见解,并有助于确定可能的因果关系的优先级。尽管已有很多工具可以实现复杂性状和疾病间遗传关联,但是某些工具代码可读性差、并且不同工具基于不同的计算机语言、工具间的串联性较差。因此,本研究基于全基因组关联研究(GWAS)数据,提出了SCtool,一个开源、跨平台和用户友好的软件工具。SCtool整合了ldsc,TwosampleMR和MR-BMA三种软件,其主要功能是基于GWAS汇总水平的数据,识别复杂性状和疾病、复杂性状和复杂性状以及疾病与疾病间的遗传相关性并探究其间潜在的因果关联。最后,使用SCtool揭示了全身性铁状态(铁蛋白,血清铁,转铁蛋白,转铁蛋白饱和度)与表观遗传时钟GrimAge之间的遗传关联。

On dry machining of AZ31B magnesium alloy using textured cutting tool inserts

Magnesium alloys have many advantages as lightweight materials for engineering applications,especially in the fields of automotive and aerospace.They undergo extensive cutting or machining while making products out of them.Dry cutting,a sustainable machining method,causes more friction and adhesion at the tool-chip interface.One of the promising solutions to this problem is cutting tool surface texturing,which can reduce tool wear and friction in dry cutting and improve machining performance.This paper aims to investigate the impact of dimple textures(made on the flank face of cutting inserts)on tool wear and chip morphology in the dry machining of AZ31B magnesium alloy.The results show that the cutting speed was the most significant factor affecting tool flank wear,followed by feed rate and cutting depth.The tool wear mechanism was examined using scanning electron microscope(SEM)images and energy dispersive X-ray spectroscopy(EDS)analysis reports,which showed that at low cutting speed,the main wear mechanism was abrasion,while at high speed,it was adhesion.The chips are discontinuous at low cutting speeds,while continuous at high cutting speeds.The dimple textured flank face cutting tools facilitate the dry machining of AZ31B magnesium alloy and contribute to ecological benefits.

Geometric Error Identification of Gantry-Type CNC Machine Tool Based on Multi-Station Synchronization Laser Tracers

Laser tracers are a three-dimensional coordinate measurement system that are widely used in industrial measurement.We propose a geometric error identification method based on multi-station synchronization laser tracers to enable the rapid and high-precision measurement of geometric errors for gantry-type computer numerical control(CNC)machine tools.This method also improves on the existing measurement efficiency issues in the single-base station measurement method and multi-base station time-sharing measurement method.We consider a three-axis gantry-type CNC machine tool,and the geometric error mathematical model is derived and established based on the combination of screw theory and a topological analysis of the machine kinematic chain.The four-station laser tracers position and measurement points are realized based on the multi-point positioning principle.A self-calibration algorithm is proposed for the coordinate calibration process of a laser tracer using the Levenberg-Marquardt nonlinear least squares method,and the geometric error is solved using Taylor’s first-order linearization iteration.The experimental results show that the geometric error calculated based on this modeling method is comparable to the results from the Etalon laser tracer.For a volume of 800 mm×1000 mm×350 mm,the maximum differences of the linear,angular,and spatial position errors were 2.0μm,2.7μrad,and 12.0μm,respectively,which verifies the accuracy of the proposed algorithm.This research proposes a modeling method for the precise measurement of errors in machine tools,and the applied nature of this study also makes it relevant both to researchers and those in the industrial sector.

A Systematic Review and Performance Evaluation of Open-Source Tools for Smart Contract Vulnerability Detection

With the rise of blockchain technology,the security issues of smart contracts have become increasingly critical.Despite the availability of numerous smart contract vulnerability detection tools,many face challenges such as slow updates,usability issues,and limited installation methods.These challenges hinder the adoption and practicality of these tools.This paper examines smart contract vulnerability detection tools from 2016 to 2023,sourced from the Web of Science(WOS)and Google Scholar.By systematically collecting,screening,and synthesizing relevant research,38 open-source tools that provide installation methods were selected for further investigation.From a developer’s perspective,this paper offers a comprehensive survey of these 38 open-source tools,discussing their operating principles,installation methods,environmental dependencies,update frequencies,and installation challenges.Based on this,we propose an Ethereum smart contract vulnerability detection framework.This framework enables developers to easily utilize various detection tools and accurately analyze contract security issues.To validate the framework’s stability,over 1700 h of testing were conducted.Additionally,a comprehensive performance test was performed on the mainstream detection tools integrated within the framework,assessing their hardware requirements and vulnerability detection coverage.Experimental results indicate that the Slither tool demonstrates satisfactory performance in terms of system resource consumption and vulnerability detection coverage.This study represents the first performance evaluation of testing tools in this domain,providing significant reference value.

Selection of media tools for community planning:A study from the perspective of communicative planning

In community planning,due to the lack of evidence regarding the selection of media tools,this study examines how a common but differentiated ideal speech situation can be created as well as how more appropriate media tools can be defined and selected in the community planning process.First,this study describes the concept and theoretical basis of media used in community planning from the perspectives of the multiple effects of media evolution on communicative planning.Second,the classification criteria and typical characteristics of media tools used to support community planning are clarified from three dimensions:acceptability,cost effectiveness,and applicability.Third,strategies for applying media tools in the four phases of communicative planning-namely,state analysis,problem identification,contradictory solution and optimization-are described.Finally,trends in the development of media tools for community planning are explored in terms of multistakeholder engagement,supporting scientific decision-making and multiple-type media integration.The results provide a reference for developing more inclusive,effective,and appropriate media tools for enhancing decision-making capacity and modernizing governance in community planning and policy-making processes.

Research Progress of Measuring Tools for Patient Medication Compliance

This paper introduced the content, compilation process, reliability and validity, scoring method of the evaluation tool for patients’ medication compliance at home and abroad, and reviewed the research progress of the tool. The evaluation method, dimension, scoring method, evaluation content and application scope of the tool were compared, so as to provide reference for nurses to comprehensively and accurately evaluate patients’ medication status.

Phosphorylated protein chip combined with artificial intelligence tools for precise drug screening

We have developed a protein array system,named"Phospho-Totum",which reproduces the phosphorylation state of a sample on the array.The protein array contains 1471 proteins from 273 known signaling pathways.According to the activation degrees of tyrosine kinases in the sample,the corresponding groups of substrate proteins on the array are phosphorylated under the same conditions.In addition to measuring the phosphorylation levels of the 1471 substrates,we have developed and performed the artificial intelligence-assisted tools to further characterize the phosphorylation state and estimate pathway activation,tyrosine kinase activation,and a list of kinase inhibitors that produce phosphorylation states similar to that of the sample.The Phospho-Totum system,which seamlessly links and interrogates the measurements and analyses,has the potential to not only elucidate pathophysiological mechanisms in diseases by reproducing the phosphorylation state of samples,but also be useful for drug discovery,particularly for screening targeted kinases for potential drug kinase inhibitors.

A review on the multi-scaled structures and mechanical/thermal properties of tool steels fabricated by laser powder bed fusion additive manufacturing

The laser powder bed fusion(LPBF) process can integrally form geometrically complex and high-performance metallic parts that have attracted much interest,especially in the molds industry.The appearance of the LPBF makes it possible to design and produce complex conformal cooling channel systems in molds.Thus,LPBF-processed tool steels have attracted more and more attention.The complex thermal history in the LPBF process makes the microstructural characteristics and properties different from those of conventional manufactured tool steels.This paper provides an overview of LPBF-processed tool steels by describing the physical phenomena,the microstructural characteristics,and the mechanical/thermal properties,including tensile properties,wear resistance,and thermal properties.The microstructural characteristics are presented through a multiscale perspective,ranging from densification,meso-structure,microstructure,substructure in grains,to nanoprecipitates.Finally,a summary of tool steels and their challenges and outlooks are introduced.