A Monolithic Integrated CMOS Thermal Vacuum Sensor

The monolithic integrated micro sensor is an important direction in the fields of integrated circuits and micro sensors. In this paper,a monolithic thermal vacuum sensor based on a micro-hotplate （MHP） and operating under constant bias voltage conditions was designed. A new monolithic integrating mode was proposed,in which the dielectric and passiva- tion layers in standard CMOS processes were used as sensor structure layers,gate polysilicon as the sacrificial layer,and the second polysilicon layer as the sensor heating resistor. Then, the fabricating processes were designed and the monolithic thermal vacuum sensor was fabricated with a 0. 6μm mixed signal CMOS process followed by sacrificial layer etching technology. The measurement results show that the fabricated monolithic vacuum sensor can measure the pressure range of 2- 10^5 Pa and the output voltage is adjustable.

Integrated Design and Accuracy Analysis of Star Sensor and Gyro on the Same Benchmark for Satellite Attitude Determination System

As an important sensor in the navigation systems,star sensors and the gyro play important roles in spacecraft attitude determination system.Complex environmental factors are the main sources of error in attitude determination.The error influence of different benchmarks and the disintegration mode between the star sensor and the gyro is analyzed in theory.The integrated design of the star sensor and the gyro on the same benchmark can effectively avoid the error influence and improves the spacecraft attitude determination accuracy.Simulation results indicate that when the stars sensor optical axis vectors overlap the reference coordinate axis of the gyro in the same benchmark,the attitude determination accuracy improves.

A novel voltage output integrated circuit temperature sensor

The novel integrated circuit (IC) temperature sensor presented in this paper works similarly as a two terminal Zener, has breakdown voltage directly proportional to Kelvin temperature at 10 mV/℃, with typical error of less than ±1.0℃ over a temperature range from -50℃ to +125℃. In addition to all the features that conventional IC temperature sensors have, the new device also has very low static power dissipation ( 0.5 mW ) , low output impedance ( less than 1Ω), excellent stability, high reproducibility, and high precision. The sensor's circuit design and layout are discussed in detail. Applications of the sensor include almost any type of temperature sensing over the range of -50℃-+125℃. The low impedance and linear output of the device make interfacing the readout or control circuitry especially easy. Due to the excellent performance and low cost of this sensor, more applications of the sensor over wide temperature range are expected.

High-Performance and Flexible Co-Planar Integrated Microsystem of Carbon-Based All-Solid-State Micro-Supercapacitor and Real-Time Temperature Sensor

With the rapid development of flexible and portable microelectronics,the extreme demand for miniaturized,mechanically flexible,and integrated microsystems are strongly stimulated.Here,biomass-derived carbons(BDCs)are prepared by KOH activation using Qamgur precursor,exhibiting three-dimensional(3D)hierarchical porous structure.Benefiting from unobstructed 3D hierarchical porous structure,BDCs provide an excellent specific capacitance of 433 F g^(-1)and prominent cyclability without capacitance degradation after 50000 cycles at 50 A g^(-1).Furthermore,BDC-based planar micro-supercapacitors(MSCs)without metal collector,prepared by mask-assisted coating,exhibit outstanding areal-specific capacitance of 84 mF cm^(-2)and areal energy density of 10.6μWh cm^(-2),exceeding most of the previous carbon-based MSCs.Impressively,the MSCs disclose extraordinary flexibility with capacitance retention of almost 100%under extreme bending state.More importantly,a flexible planar integrated system composed of the MSC and temperature sensor is assembled to efficiently monitor the temperature variation,providing a feasible route for flexible MSC-based functional micro-devices.

Polyimide Humidity Integrated Sensor Fabricated Using the MEMS Process

This paper reports on the fabrication and sensing characteristics of Polyimide-based humidity sensor,based on that,a new integrated circuit of humidity measurement has been designed.It is a novel capacitive-type systems on a chip structure using the MEMS process.The results show that the new sensor presents sensing characteristics over a humidity range from 10%～70% RH at 20℃,and the sensor is able to fabricated together with ICs technology.The result shows that integration of humidity sensor with integrated circuit of humidity measurement is considerably easier when they are built in sensing groove.The appeal of a new structure like this brings the possibility of applications that would require the flexibility of simple screen printing.

Integrated outburst detector sensor-model tests

Outbursts of methane and rocks are, similarly to rock bursts, the biggest hazards in deep mines and are equally difficult to predict. The violent process of the outburst itself, along with the scale and range of hazards following the rapid discharge of gas and rocks, requires solutions which would enable quick and unambiguous detection of the hazard, immediate power supply cut-off and evacuation of personnel from potentially hazardous areas. For this purpose, an integrated outburst detector was developed. Assumed functions of the sensor which was equipped with three measuring and detection elements： a chamber for constant measurement of methane concentration, pressure sensor and microphone. Tests of the sensor model were carried out to estimate the parameters which characterize the dynamic properties of the sensor. Given the impossibility of carrying out the full scale experimental outburst, the sensor was tested during the methane and coal dust explosions in the testing gallery at KD Barbara. The obtained results proved that the applied solutions have been appropriate.

Tightly-coupled model for INS/WSN integrated navigation based on Kalman filter

Aiming at the problem of poor observability of measurement information in the loosely-coupled integration of the inertial navigation system （INS） and the wireless sensor network （WSN）, this paper presents a tightly-coupled integration based on the Kalman filter （KF）. When the WSN is available, the difference between the distances from the blind node（BN） to the reference nodes （RNs） measured by the INS and those measured by the WSN are used as measurement information for the KF due to its better observability and independence, which can effectively improve the accuracy of the KF. Simulations show that the proposed approach reduces the mean error of the position by about 50% compared with loosely-coupled integration, while the mean error of the velocity is a little higher than that of loosely-coupled integration.

ACTIVE VIBRATION CONTROL AND SUPPRESSION FOR INTEGRATED STRUCTURES

The finite element dynamic model for integrated structures containing distributed piezoelectric sensors and actuators ( S/As ) is formulated with a new piezoelectric plate bending element in this paper. The problem of active vibration control and suppression of integrated structures is investigated under constant gain negative velocity feedback control law. A general method for active vibration control and suppression of integrated structures is presented. Finally, numerical example is given to illustrate the validity of the method proposed in this paper.

Fuzzy adaptive Kalman filter for indoor mobile target positioning with INS/WSN integrated method

Pure inertial navigation system(INS) has divergent localization errors after a long time. In order to compensate the disadvantage, wireless sensor network(WSN) associated with the INS was applied to estimate the mobile target positioning. Taking traditional Kalman filter(KF) as the framework, the system equation of KF was established by the INS and the observation equation of position errors was built by the WSN. Meanwhile, the observation equation of velocity errors was established by the velocity difference between the INS and WSN, then the covariance matrix of Kalman filter measurement noise was adjusted with fuzzy inference system(FIS), and the fuzzy adaptive Kalman filter(FAKF) based on the INS/WSN was proposed. The simulation results show that the FAKF method has better accuracy and robustness than KF and EKF methods and shows good adaptive capacity with time-varying system noise. Finally, experimental results further prove that FAKF has the fast convergence error, in comparison with KF and EKF methods.

Investigating Approaches of Data Integrity Preservation for Secure Data Aggregation in Wireless Sensor Networks

Wireless Sensor Networks (WSNs) typically use in-network processing to reduce the communication overhead. Due to the fusion of data items sourced at different nodes into a single one during in-network processing, the sanctity of the aggregated data needs to be ensured. Especially, the data integrity of the aggregated result is critical as any malicious update to it can jeopardize not one, but many sensor readings. In this paper, we analyse three different approaches to providing integrity support for SDA in WSNs. The first one is traditional MAC, in which each leaf node and intermediate node share a key with parent (symmetric key). The second is aggregate MAC (AMAC), in which a base station shares a unique key with all the other sensor nodes. The third is homomorphic MAC (Homo MAC) that is purely symmetric key-based approach. These approaches exhibit diverse trade-off in resource consumption and security assumptions. Adding together to that, we also propose a probabilistic and improved variant of homomorphic MAC that improves the security strength for secure data aggregation in WSNs. We carry out simulations in TinyOS environment to experimentally evaluate the impact of each of these on the resource consumption in WSNs.

PIR-based data integrity verification method in sensor network

Since a sensor node handles wireless communication in data transmission and reception and is installed in poor environment, it is easily exposed to certain attacks such as data transformation and sniffing. Therefore, it is necessary to verify data integrity to properly respond to an adversary's ill-intentioned data modification. In sensor network environment, the data integrity verification method verifies the final data only, requesting multiple communications. An energy-efficient private information retrieval(PIR)-based data integrity verification method is proposed. Because the proposed method verifies the integrity of data between parent and child nodes, it is more efficient than the existing method which verifies data integrity after receiving data from the entire network or in a cluster. Since the number of messages for verification is reduced, in addition, energy could be used more efficiently. Lastly, the excellence of the proposed method is verified through performance evaluation.

In-Pixel Charge Addition Scheme Applied in Time-Delay Integration CMOS Image Sensors

An addition scheme applicable to time-delay integration (TDI) CMOS image sensor is proposed,which adds signals in the charge domain in the pixel array.A two-shared pixel structure adopting two-stage charge transfer is introduced,together with the rolling shutter with an undersampling readout timing.Compared with the conventional TDI addition methods,the proposed scheme can reduce the addition operations by half in the pixel array,which decreases the power consumption of addition circuits outside the pixel array.The timing arrangement and pixel structure are analyzed in detail.The simulation results show that the proposed pixel structure can achieve the charge addition with negligible nonlinearity,therefore the power consumption of the periphery addition circuits can be reduced by half theoretically.

Fully On-Chip Integrated Photodetector Front-End Dedicated to Real-Time Portable Optical Brain Imaging

Optical brain imaging using functional near infra-red spectroscopy (fNIRS) offers a portable and noninvasive tool for monitoring of blood oxygenation. In this paper we have introduced a new miniaturized photodetector front-end on achip to be applied in a portable fNIRS system. It includes silicon avalanche photodiodes (SiAPD), Transimpedance amplifier (TIA) front-end and Quench-Reset circuitry to operate in both linear and Geiger modes. So it can be applied for both continuous-wave fNIRS (CW-fNIRS) and also single-photon counting. Proposed SiAPD exhibits high-avalanche gain (>100), low-breakdown voltage ( V) and high photon detection efficiency accompanying with low dark count rates. The proposed TIA front-end offer a low power consumption ( mW), high-transimpedance gain (up to 250 MV/A), tunable bandwidth (1 kHz - 1 GHz) and very low input and output noise (~few fA/√Hz and few μV/√Hz). The Geiger-mode photon counting front-end also exhibits a controllable hold-off and rest time with an ultra fast quench-reset time (few ns). This integrated system has been implemented using submicron (0.35 μm) standard CMOS technology.

Microarrow sensor array with enhanced skin adhesion for transdermal continuous monitoring of glucose and reactive oxygen species

Conventional blood sampling for glucose detection is prone to cause pain and fails to continuously record glucose fluctuations in vivo.Continuous glucose monitoring based on implantable electrodes could induce pain and potential tissue inflammation,and the presence of reactive oxygen species(ROS)due to inflammationmay affect glucose detection.Microneedle technology is less invasive,yet microneedle adhesion with skin tissue is limited.In this work,we developed a microarrow sensor array(MASA),which provided enhanced skin surface adhesion and enabled simultaneous detection of glucose and H_(2)O_(2)(representative of ROS)in interstitial fluid in vivo.The microarrows fabricated via laser micromachining were modified with functional coating and integrated into a patch of a three-dimensional(3D)microneedle array.Due to the arrow tip mechanically interlocking with the tissue,the microarrow array could better adhere to the skin surface after penetration into skin.The MASA was demonstrated to provide continuous in vivo monitoring of glucose and H_(2)O_(2) concentrations,with the detection of H_(2)O_(2) providing a valuable reference for assessing the inflammation state.Finally,the MASA was integrated into a monitoring system using custom circuitry.This work provides a promising tool for the stable and reliable monitoring of blood glucose in diabetic patients.

Concealed Integrity Monitoring for Wireless Sensor Networks

Nowadays, sensor networks are widely installed around the world. Typical sensors provide data for healthcare, energy management, environmental monitoring, etc. In the future sensors will become a part of critical infrastructures. In such a scenario the network operator has to monitor the integrity of the network devices, otherwise the trustworthiness of the whole system is questionable. The problem is that every integrity protocol needs a secure channel between the devices. Therefore, we will introduce a covert channel for hidden transportation of integrity monitoring messages. The covert channel enables us to hide integrity check messages embedded into regular traffic without giving potential attackers a hint on the used integrity protocol.

NOISE EFFECT ON CHARACTERISTICS OF FLIP FLOP SENSOR

This paper presents a new class of semiconductor integrated sensor which consists of sensitive components and flip flop circuit. The sensors have high sensitivity and digital output. This paper describes the operating principle and structure of the sensor. And noise effect on characteristics of the sensor is analysed in detail. The modulated effect of the triangular wave voltage is quantified. As an example, an integrated pressure sensor is introduced and the experimental results agree with the theoretical analyses.

Smart Sensor与MEMS

讨论了SmartSensor与MEMS的全新概念。结合微机械加工技术的发展，概述了现代传感器技术智能化、功能集成化的新趋势，及其对现代微电子、微型电子机械乃至整个信息技术领域的深远影响。

All polymer asymmetric Mach-Zehnder interferometer waveguide sensor by imprinting bonding and laser polishing

We present an all polymer asymmetric Mach-Zehnder interferometer （AMZI） waveguide sensor based on imprinting bonding and laser polishing method. The fabrication methods are compatible with high accuracy waveguide sensing structure. The rectangle waveguide structure of this sensor has three sensing surfaces contacting the test media, and its sensing accuracy can be increased 5 times compared with that of one surface sensing structure. An AMZI device structure is designed. The single mode condition, the length of the sensing arm, and the length deviation between the sensing arm and the reference arm are optimized. The length deviation is optimized to be 19.8 μm in a refractive index range between 1.470 and 1.545. We fabricate the AMZI waveguide by lithography and wet etching method. The imprinting bonding and laser polishing method is proposed and investigated. The insertion loss is between-80.36 dB and-10.63 dB. The average and linear sensitivity are 768.1 dB/RIU and 548.95 dB/RIU, respectively. And the average and linear detection resolution of the sensor are 1.3010-6 RIU （RIU：refractive index unit） and 1.8210-5 RIU, respectively. This sensor has a fast and cost-effective fabrication process which can be used in the cases of requiring portability and disposability.

Modeling the photon counting and photoelectron counting characteristics of quanta image sensors

A signal chain model of single-bit and multi-bit quanta image sensors(QISs)is established.Based on the proposed model,the photoresponse characteristics and signal error rates of QISs are investigated,and the effects of bit depth,quantum efficiency,dark current,and read noise on them are analyzed.When the signal error rates towards photons and photoelectrons counting are lower than 0.01,the high accuracy photon and photoelectron counting exposure ranges are determined.Furthermore,an optimization method of integration time to ensure that the QIS works in these high accuracy exposure ranges is presented.The trade-offs between pixel area,the mean value of incident photons,and integration time under different illuminance level are analyzed.For the 3-bit QIS with 0.16 e-/s dark current and 0.21 e-r.m.s.read noise,when the illuminance level and pixel area are 1 lux and 1.21μm^(2),or 10000 lux and 0.21μm^(2),the recommended integration time is 8.8 to 30 ms,or 10 to21.3μs,respectively.The proposed method can guide the design and operation of single-bit and multi-bit QISs.

A Hybrid Encryption Algorithm for Security Enhancement of Wireless Sensor Networks:A Supervisory Approach to Pipelines

Transmission pipelines are vulnerable to various accidents and acts of vandalism.Therefore,a reliable monitoring system is needed to secure the transmission pipelines.A wireless sensor network is a wireless network consisting of distributed devices distributed at various distances,which monitors the physical and environmental conditions using sensors.Wireless sensor networks have many uses,including the built-in sensor on the outside of the pipeline or installed to support bridge structures,robotics,healthcare,environmental monitoring,etc.Wireless Sensor networks could be used to monitor the temperature,pressure,leak detection and sabotage of transmission lines.Wireless sensor networks are vulnerable to various attacks.Cryptographic algorithms have a good role in information security for wireless sensor networks.Now,various types of cryptographic algorithms provide security in networks,but there are still some problems.In this research,to improve the power of these algorithms,a new hybrid encryption algorithm for monitoring energy transmission lines and increasing the security of wireless sensor networks is proposed.The proposed hybrid encryption algorithm provides the security and timely transmission of data in wireless sensor networks to monitor the transmission pipelines.The proposed algorithm fulfills three principles of cryptography:integrity,confidentiality and authentication.The details of the algorithm and basic concepts are presented in such a way that the algorithm can be operational.