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Structures and optical properties of tungsten oxide thin films deposited by magnetron sputtering of WO_3 bulk:Effects of annealing temperatures 被引量:1
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作者 张锋 王海千 +3 位作者 王松 汪竟阳 钟志成 金叶 《Chinese Physics B》 SCIE EI CAS CSCD 2014年第9期509-514,共6页
Tungsten oxide thin films were deposited on glass substrates by the magnetron sputtering of WO3 bulk at room temperature. The deposited films were annealed at different temperatures in air. The structural measurements... Tungsten oxide thin films were deposited on glass substrates by the magnetron sputtering of WO3 bulk at room temperature. The deposited films were annealed at different temperatures in air. The structural measurements indicate that the films annealed below 300℃ were amorphous, while the films annealed at 400 ℃ were mixed crystalline with hexagonal and triclinic phases of WO3. It was observed that the crystallization of the annealed films becomes more and more distinct with an increase in the annealing temperature. At 400 ℃, nanorod-like structures were observed on the film surface when the annealing time was increased from 60 min to 180 min. The presence of W=O stretching, W-O-W stretching, W-O-W bending and various lattice vibration modes were observed in Raman measurements. The optical absorption behaviors of the films in the range of 450-800 nm are very different with changing annealing temperatures from the room temperature to 400 ℃. After annealing at 400 ℃, the film becomes almost transparent. Increasing annealing time at 400 ℃ can lead to a small blue shift of the optical gap of the film. 展开更多
关键词 tungsten oxide film magnetron sputtering structure optical property
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Structural,Morphological and Electrical Properties of In-Doped Zinc Oxide Nanostructure Thin Films Grown on p-Type Gallium Nitride by Simultaneous Radio-Frequency Direct-Current Magnetron Co-Sputtering
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作者 R.Perumal Z.Hassan R.Saravanan 《Chinese Physics Letters》 SCIE CAS CSCD 2016年第6期77-80,共4页
Zinc oxide (ZnO) is one of the most promising and frequently used semiconductor materials. In-doped nanos- tructure ZnO thin films are grown on p-type gallium nitride substrates by employing the simultaneous rf and ... Zinc oxide (ZnO) is one of the most promising and frequently used semiconductor materials. In-doped nanos- tructure ZnO thin films are grown on p-type gallium nitride substrates by employing the simultaneous rf and dc magnetron co-sputtering technique. The effect of In-doping on structural, morphological and electrical properties is studied. The different dopant concentrations are accomplished by varying the direct current power of the In target while keeping the fixed radio frequency power of the ZnO target through the co-sputtering deposition technique by using argon as the sputtering gas at ambient temperature. The structural analysis confirms that all the grown thin films preferentially orientate along the c-axis with the wurtzite hexagonal crystal structure without having any kind of In oxide phases. The presenting Zn, 0 and In elements' chemical compositions are identified with EDX mapping analysis of the deposited thin films and the calculated M ratio has been found to decrease with the increasing In power. The surface topographies of the grown thin films are examined with the atomic force microscope technique. The obtained results reveal that the grown film roughness increases with the In power. The Hall measurements ascertain that all the grown films have n-type conductivity and also the other electrical parameters such as resistivity,mobility and carrier concentration are analyzed. 展开更多
关键词 ZnO of structural Morphological and Electrical Properties of In-Doped Zinc oxide Nanostructure Thin films Grown on p-Type Gallium Nitride by Simultaneous Radio-Frequency Direct-Current Magnetron Co-Sputtering that by were been In EDX on
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Morphology and Structure of SiO_2 Film Using Thermal Oxidation Process on(111)Silicon Crystals in Dry Oxygen Atmosphere
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作者 TaokaT. 《Rare Metals》 SCIE EI CAS CSCD 1989年第1期32-38,共7页
By means of scanning electron microscope(SEM)and high voltage electron microscope(HVEM)we have observed and analysed morphology and micro-structure of silicon oxide film with different thickness formed on(111)silicon ... By means of scanning electron microscope(SEM)and high voltage electron microscope(HVEM)we have observed and analysed morphology and micro-structure of silicon oxide film with different thickness formed on(111)silicon monocrystal under dry oxygen atmosphere at 1100℃.Compared with their oxidation kinetic curves consisted of three stages,we suggested a mechanism on forming silicon oxide film.According to electron and X-ray diffraction analyses the silicon oxide films consisted of silica with different crystal structure.We also have discussed a stacking fault and a dislocation formed in the Si-Sio_2 interface region simulaneously forming silicon oxide film. 展开更多
关键词 Silicon Crystals in Dry Oxygen Atmosphere Morphology and structure of SiO2 film Using Thermal oxidation Process on SIO
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Preparation and Structural Properties of Sprayed Lanthanum Oxide Films from an Aqueous Precursor
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作者 Mohamed K. Zayed Mostaf A. Mostafa Mohamed Ebaid 《材料科学与工程(中英文A版)》 2011年第1X期1-8,共8页
关键词 水合氯化镧 氧化镧 薄膜 结构特性 化学 扫描电子显微镜 退火温度 无定形结构
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Effect of surfactants on the structure and photoelectric properties of ITO films by sol-gel method 被引量:4
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作者 LIU Jiaxiang, WU Da, ZHANG Nan, and WANG Yue College of Materials Science and Engineering, Beijing University of Chemical Technology, Beijing 100029, China 《Rare Metals》 SCIE EI CAS CSCD 2010年第2期143-148,共6页
The Indium tin oxide(ITO) thin film possesses excellent photoelectric properties that enable it to act as an ideal transparent conductor.To obtain high-quality ITO films through sol-gel method, the ionic surfactant ... The Indium tin oxide(ITO) thin film possesses excellent photoelectric properties that enable it to act as an ideal transparent conductor.To obtain high-quality ITO films through sol-gel method, the ionic surfactant monoethanolamine and the non-ionic surfactant polyethylene glycol(PEG) were added to the ITO precursor slurry.The influences of surfactants on the structural and photoelectric properties of ITO film samples were investigated.XRD patterns indicated that surfactant monoethanolamine contributed to film predominant grain orientation along the(400) plane.The high transmittance(over 95%) was attributed to the preferred orientation and the grain size expansion of ITO films.SEM showed that the surface particle size and the morphology of ITO films were strongly dependent on the kind of surfactants used.Moving to the shortwave region, the absorption edge of the films exhibited the Burstein-Moss shift. 展开更多
关键词 surfactants indium tin oxide films sol-gel structure photoelectricity
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Structural characteristics of BaTiO_3 films prepared by microarc oxidation 被引量:3
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作者 李文芳 韩冰 +2 位作者 杜军 彭继华 高引慧 《中国有色金属学会会刊:英文版》 EI CSCD 2006年第5期1041-1044,共4页
BaTiO3 ferroelectric films were prepared on titanium substrate by microarc oxidation(MAO) technology. The effects of current density and electrolytic concentration on chemical composition, crystal phase, and surface m... BaTiO3 ferroelectric films were prepared on titanium substrate by microarc oxidation(MAO) technology. The effects of current density and electrolytic concentration on chemical composition, crystal phase, and surface morphologies of the films were characterized by XRD, SEM and EDS. The results show that the films made by MAO technology have a two layer structure with a good combinability between them and with the substrate. The inner layer is composed of Ti oxide without Ba, and the outer layer is mainly composed of BaTiO3 and Ti oxide. The compactability of the films decreases and the surface roughness of the films increases with the increase of current density and electrolytic concentration. Films with a high content of primitive tetragonal and end-centered orthorhombic BaTiO3 are obtained in 0.2 mol/LBa(OH)2 solution with current density of 5A/cm2 after 18 min. 展开更多
关键词 微弧氧化 铁电薄膜 BATIO3 结构特征
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Insitu for mation of titania film on NiTi alloy treated with hydrogen peroxide solution at low temperature 被引量:2
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作者 储成林 周俊 +2 位作者 钟志源 浦跃朴 林萍华 《中国有色金属学会会刊:英文版》 EI CSCD 2005年第4期834-838,共5页
Chemically polished NiTi shape memory alloy(SMA) substrate was treated with a boiling aqueous solution containing hydrogen peroxide to form titania film in situ at low temperature. The surface characterizations of t... Chemically polished NiTi shape memory alloy(SMA) substrate was treated with a boiling aqueous solution containing hydrogen peroxide to form titania film in situ at low temperature. The surface characterizations of titania film on NiTi substrate were investigated by scanning electron microscopy, X-ray diffractometry and X-ray photoelectron spectroscopy. The results show that titania film is successfully fabricated in situ on NiTi SMA by this surface oxidation method. It is mainly composed of rutile and anatase, whose surface compositions and morphologies are sensitive to H2O2 content. In situ formation mechanism of titania film on NiTi substrate was discussed based on the experimental results. 展开更多
关键词 二氧化钛 NITI合金 过氧化氢 温度 薄膜
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Evolution of Surface Oxide Film of Typical Aluminum Alloy During Medium-Temperature Brazing Process 被引量:1
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作者 程方杰 赵海微 +2 位作者 王颖 肖兵 姚俊峰 《Transactions of Tianjin University》 EI CAS 2014年第1期54-59,共6页
The evolution of the surface oxide film along the depth direction of typical aluminum alloy under mediumtemperature brazing was investigated by means of X-ray photoelectron spectroscopy(XPS). For the alloy with Mg con... The evolution of the surface oxide film along the depth direction of typical aluminum alloy under mediumtemperature brazing was investigated by means of X-ray photoelectron spectroscopy(XPS). For the alloy with Mg content below 2.0wt%, whether under cold rolling condition or during medium-temperature brazing process, the enrichment of Mg element on the surface was not detected and the oxide film was pure Al2O3. However, the oxide film grew obviously during medium-temperature brazing process, and the thickness was about 80 nm. For the alloy with Mg content above 2.0wt%, under cold rolling condition, the original surface oxide film was pure Al2O3. However, the Mg element was significantly enriched on the outermost surface during medium-temperature brazing process, and MgO-based oxide film mixed with small amount of MgAl2O4 was formed with a thickness of about 130 nm. The alloying elements of Mn and Si were not enriched on the surface neither under cold rolling condition nor during mediumtemperature brazing process for all the selected aluminum alloy, and the surface oxide film was similar to that of pure aluminum, which was almost entire Al2O3. 展开更多
关键词 表面氧化膜 钎焊工艺 铝合金 中温 演变 X射线光电子能谱 MGAL2O4 Al2O3
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Improvement in the electrical performance and bias-stress stability of dual-active-layered silicon zinc oxide/zinc oxide thin-film transistor
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作者 刘玉荣 赵高位 +1 位作者 黎沛涛 姚若河 《Chinese Physics B》 SCIE EI CAS CSCD 2016年第8期452-457,共6页
Si-doped zinc oxide(SZO) thin films are deposited by using a co-sputtering method,and used as the channel active layers of ZnO-based TFTs with single and dual active layer structures.The effects of silicon content o... Si-doped zinc oxide(SZO) thin films are deposited by using a co-sputtering method,and used as the channel active layers of ZnO-based TFTs with single and dual active layer structures.The effects of silicon content on the optical transmittance of the SZO thin film and electrical properties of the SZO TFT are investigated.Moreover,the electrical performances and bias-stress stabilities of the single- and dual-active-layer TFTs are investigated and compared to reveal the effects of the Si doping and dual-active-layer structure.The average transmittances of all the SZO films are about 90% in the visible light region of 400 nm-800 nm,and the optical band gap of the SZO film gradually increases with increasing Si content.The Si-doping can effectively suppress the grain growth of ZnO,revealed by atomic force microscope analysis.Compared with that of the undoped ZnO TFT,the off-state current of the SZO TFT is reduced by more than two orders of magnitude and it is 1.5 × 10^-12 A,and thus the on/off current ratio is increased by more than two orders of magnitude.In summary,the SZO/ZnO TFT with dual-active-layer structure exhibits a high on/off current ratio of 4.0 × 10^6 and superior stability under gate-bias and drain-bias stress. 展开更多
关键词 thin film transistor (TFT) silicon-doped zinc oxide dual-active-layer structure bias-stress stability
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Double-layer indium doped zinc oxide for silicon thin-film solar cell prepared by ultrasonic spray pyrolysis
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作者 焦宝臣 张晓丹 +3 位作者 魏长春 孙建 倪牮 赵颖 《Chinese Physics B》 SCIE EI CAS CSCD 2011年第3期407-415,共9页
Indium doped zinc oxide (ZnO:In) thin films were prepared by ultrasonic spray pyrolysis on corning eagle 2000 glass substrate. 1 and 2 at.% indium doped single-layer ZnO:In thin films with different amounts of ace... Indium doped zinc oxide (ZnO:In) thin films were prepared by ultrasonic spray pyrolysis on corning eagle 2000 glass substrate. 1 and 2 at.% indium doped single-layer ZnO:In thin films with different amounts of acetic acid added in the initial solution were fabricated. The 1 at.% indium doped single-layers have triangle grains. The 2 at.% indium doped single-layer with 0.18 acetic acid adding has the resistivity of 6.82 × 10^-3 Ω. cm and particle grains. The doublelayers structure is designed to fabricate the ZnO:In thin film with low resistivity (2.58 × 10^-3 Ω. cm) and good surface morphology. It is found that the surface morphology of the double-layer ZnO:In film strongly depends on the substratelayer, and the second-layer plays a large part in the resistivity of the doublewlayer ZnO:In thin film. Both total and direct transmittances of the double-layer ZnO:In film are above 80% in the visible light region. Single junction a-Si:H solar cell based on the double-layer ZnO:In as front electrode is also investigated. 展开更多
关键词 indium doped zinc oxide thin film ultrasonic spray pyrolysis double-layer structure solar cell
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Influence of oxygen gas content on the structural and optical properties of ZnO thin films deposited by RF magnetron sputtering at room temperature 被引量:6
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作者 LIU Baoting ZHOU Yang +4 位作者 ZHENG Hongfang LI Mana GUO Zhe HAO Qingxun PENG Yingcai 《Rare Metals》 SCIE EI CAS CSCD 2011年第2期170-174,共5页
Zinc oxide (ZnO) thin films were deposited on sapphire (0001) substrates at room temperature by radiofrequency (RF) magnetron sputtering at oxygen gas contents of 0%, 25%, 50% and 75%, respectively. The influenc... Zinc oxide (ZnO) thin films were deposited on sapphire (0001) substrates at room temperature by radiofrequency (RF) magnetron sputtering at oxygen gas contents of 0%, 25%, 50% and 75%, respectively. The influence of oxygen gas content on the structural and optical properties of ZnO thin films was studied by a surface profile measuring system, X-ray diffraction analysis, atomic force microscopy, and UV spectro- photometry. It is found that the size of ZnO crystalline grains increases first and then decreases with the increase of oxygen gas content, and the maximum grain size locates at the 25% oxygen gas content. The crystalline quality and average optical transmittance (〉90%) in the visi- ble-light region of the ZnO film prepared at an oxygen gas content of 25% are better than those of ZnO films at the other contents. The obtained results can be attributed to the resputtefing by energetic oxygen anions in the growing process. 展开更多
关键词 thin films zinc oxide magnetron sputtering OXYGEN structural properties optical properties
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Structural properties of a-SiO_x:H films studied by an improved infrared-transmission analysis method 被引量:1
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作者 王烁 张晓丹 +1 位作者 熊绍珍 赵颖 《Chinese Physics B》 SCIE EI CAS CSCD 2014年第9期578-584,共7页
An improved method of fitting point-by-point is proposed to determine the absorption coefficient from infrared (IR) transmittance. With no necessity of empirical correction factors, the absorption coefficient can be... An improved method of fitting point-by-point is proposed to determine the absorption coefficient from infrared (IR) transmittance. With no necessity of empirical correction factors, the absorption coefficient can be accurately determined for the films with thin thicknesses. Based on this method, the structural properties of the hydrogenated amorphous silicon oxide materials (a-SiOx:H) are investigated. The oxygen-concentration-dependent variation of the Si-O-Si and the Si-H related modes in a-SiOx:H materials is discussed in detail. 展开更多
关键词 amorphous silicon oxide film thin thickness infrared transmission structural properties
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Interface structure and formation mechanism of vacuum-free vibration liquid phase diffusion-bonded joints of SiC_p/ZL101A composites 被引量:3
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作者 闫久春 许惠斌 +2 位作者 许志武 李大成 杨士勤 《中国有色金属学会会刊:英文版》 EI CSCD 2005年第5期993-996,共4页
The vacuum-free vibration liquid phase(VLP) diffusion-bonding of SiC_p/ZL101A composites was investigated. The effects of vibration on the interface structure, the phase transformation and the tensile strength of bond... The vacuum-free vibration liquid phase(VLP) diffusion-bonding of SiC_p/ZL101A composites was investigated. The effects of vibration on the interface structure, the phase transformation and the tensile strength of bonded joints were examined. Experimental results show that the oxide film on the surface of the composites is a key factor affecting the tensile strength of boned joints. The distribution of the oxide layers at the interface changes from a continuous line to a discontinuous one during vibration. The tensile strength of the VLP diffusion-bonded joints increases with the vibration time, and is up to the maximum of 172MPa when the vibration time is 30s. The phase structure of the bond region changes from the Zn-Al-Cu hyper-eutectic (η+(β+η)+(β+η+ε)) phases to Al-rich Al-base solid solution (α-Al) with increasing the vibration time. 展开更多
关键词 氧化膜 液体振动相 焊接工艺 加压焊 复合材料 界面结构
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The effect of anodizing temperature on the structure and electrical properties of Al-Ti composite oxide film 被引量:2
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作者 CHEN Jinju YANG Bangchao +1 位作者 JIANG Meilian FENG Zhesheng 《Science China(Technological Sciences)》 SCIE EI CAS 2005年第6期612-621,共10页
The Al-Ti composite oxide films with high dielectric constant were prepared by hydrolysis precipitation and anodizing. The growth, structure and electrical properties of the Al-Ti composite oxide films formed at diffe... The Al-Ti composite oxide films with high dielectric constant were prepared by hydrolysis precipitation and anodizing. The growth, structure and electrical properties of the Al-Ti composite oxide films formed at different anodizing temperatures from 25℃ to 85℃ have been studied by dissolution of anodic oxide films, Auger electron spectroscopy (AES), and electrical measurements. With the anodizing temperature increasing, the film growth rate increases, the structure of two layers in the Al-Ti composite oxide film converts into three layers, I-V characteristics change evidently, and the specific capacitance achieves a peak value at about 75℃. The local breakdown in the composite oxide films formed at 50℃ occurs obviously, which may be contributed to the lowest leakage current and the highest withstanding voltage. 展开更多
关键词 ANODIZING TEMPERATURE Al-Ti composite oxide film structure electrical properties
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建筑铝材在不同电解液体系中阳极氧化及氧化膜性能比较
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作者 刘阳 宋晓吉 刘卓群 《电镀与精饰》 CAS 北大核心 2024年第6期17-24,共8页
为进一步提高建筑行业常用6063铝合金的耐腐蚀性能,从而延长建筑构件的使用寿命,分别在纯硫酸电解液、硫酸与硼酸混合电解液、硫酸与柠檬酸混合电解液、硫酸与甘油混合电解液以及硫酸与硼酸、柠檬酸和甘油混合电解液体系中对6063铝合金... 为进一步提高建筑行业常用6063铝合金的耐腐蚀性能,从而延长建筑构件的使用寿命,分别在纯硫酸电解液、硫酸与硼酸混合电解液、硫酸与柠檬酸混合电解液、硫酸与甘油混合电解液以及硫酸与硼酸、柠檬酸和甘油混合电解液体系中对6063铝合金进行阳极氧化,并比较不同氧化膜的形貌特征、厚度、物相结构和耐腐蚀性能。结果表明:不同氧化膜都具有多孔密布的形貌特征,厚度相近并且由ɑ-Al_(2)O_(3)相和γ-Al_(2)O_(3)相组成,但孔隙率和表面致密性明显不同,导致耐腐蚀性能存在差异。在混合酸电解液体系中制备的氧化膜孔隙率最低,仅为12.1%,表面致密性最好并且具有最正的腐蚀电位−0.511 V、最低的腐蚀电流密度1.15×10^(-6)A/cm^(2)和最高的极化电阻22.05 kΩ·cm^(2),经过96 h盐雾实验后其腐蚀程度较轻。添加适量硼酸、柠檬酸和甘油具有协同缓蚀效果,因此混合酸电解液体系对氧化膜的溶解能力弱,能明显改善氧化膜表面致密性进一步提高其耐腐蚀性能,作为表面改性层可以更好地保护铝合金基体,延缓腐蚀。 展开更多
关键词 6063铝合金 不同电解液体系 阳极氧化 氧化膜 物相结构 耐腐蚀性能
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基于聚酰亚胺的柔性湿度传感器制备及研究
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作者 张海力 谢光忠 +1 位作者 刘太君 代静 《仪表技术与传感器》 CSCD 北大核心 2024年第4期11-18,47,共9页
文中以聚酰胺酸(PAA)为前驱体,通过热处理工艺可得聚酰亚胺(PI)薄膜,添加氧化石墨烯(GO)合成PI/GO复合薄膜及后续电极制备得到基于聚酰亚胺的平行板电容式柔性湿度传感器。在此基础上深入研究了叉指电极式和平行板式构型、PAA旋涂转速、... 文中以聚酰胺酸(PAA)为前驱体,通过热处理工艺可得聚酰亚胺(PI)薄膜,添加氧化石墨烯(GO)合成PI/GO复合薄膜及后续电极制备得到基于聚酰亚胺的平行板电容式柔性湿度传感器。在此基础上深入研究了叉指电极式和平行板式构型、PAA旋涂转速、PAA酰亚胺化温度、GO喷涂量对湿度传感器性能的影响,最终得到的湿度传感器具有良好重复性、快速的响应恢复时间,最大湿滞仅为3.8%RH,且具有优异的柔性性能,在可穿戴柔性电子器件领域具有广泛的应用前景。 展开更多
关键词 柔性 湿度传感器 聚酰亚胺(PI) 氧化石墨烯(GO) PI/GO复合薄膜 平行板电容结构 湿敏特性
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纳米氧化锌对钙钛矿薄膜本征性能和光谱性能的影响研究
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作者 于嫚 谢国鑫 +1 位作者 赵肖娟 李兆 《光谱学与光谱分析》 SCIE EI CAS CSCD 北大核心 2024年第5期1482-1486,共5页
有机-无机杂化钙钛矿太阳能电池因其优异的光电特性、低廉的制备成本、高效的转换效率等优越特性,成为光伏领域的研究热点。电子传输层作为钙钛矿电池的核心层,主要起到提取和传输光生载流子的作用,且能够作为空穴阻挡层,抑制钙钛矿活... 有机-无机杂化钙钛矿太阳能电池因其优异的光电特性、低廉的制备成本、高效的转换效率等优越特性,成为光伏领域的研究热点。电子传输层作为钙钛矿电池的核心层,主要起到提取和传输光生载流子的作用,且能够作为空穴阻挡层,抑制钙钛矿活性层中电荷复合,所以优异性能的电子传输层对钙钛矿太阳能电池的发展至关重要。可目前钙钛矿光伏器件常用的刚性电子传输层(介孔层或致密层)均需要高温烧结,这限制了其在柔性钙钛矿器件方面的应用。因此,开发一种可应用于钙钛矿光伏领域的柔性电子传输层成为当前亟待解决的问题之一。纳米ZnO具有合适的能级和较高的电子迁移率,且可以通过低温制备,被广泛应用在光伏器件中作为电子传输层。因此,通过旋涂法和静电纺丝法分别制备了刚性纳米ZnO和柔性纳米ZnO电子传输层,确定了静电纺丝法制备柔性纳米ZnO的最佳制备工艺。利用扫描电子显微镜、X射线衍射仪、紫外可见分光光度计和稳态/瞬态荧光光谱系统研究了刚性和柔性纳米ZnO对钙钛矿薄膜形貌、结构和光谱性能的影响。结果表明,钙钛矿薄膜的形貌对基底纳米ZnO的形貌依赖性很强。而基于刚性和柔性纳米ZnO的钙钛矿薄膜几乎呈现相同的结构和光谱吸收范围,荧光发射峰均在770 nm附近,且柔性纳米ZnO的荧光猝灭效率为82%,几乎和刚性纳米ZnO的荧光猝灭效率(85%)相媲美。进一步,根据瞬态荧光动力学数据计算获得刚性和柔性纳米ZnO的界面电荷分离效率分别为61%和41%,这表明通过静电纺丝法制备的柔性纳米ZnO具备一定的界面电荷分离能力,有望成为新型的柔性电子传输层。这对柔性基底钙钛矿太阳能电池的设计具有重要参考价值,对促进钙钛矿光伏应用具有现实意义。 展开更多
关键词 纳米氧化锌 钙钛矿薄膜 形貌结构 光谱性能
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顶栅共面结构非晶氧化物薄膜晶体管的低成本制备及性能研究
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作者 岳兰 孟繁新 《半导体光电》 CAS 北大核心 2024年第2期242-246,共5页
将溶液法制备的不含镓的非晶InAlZnO薄膜和有机聚甲基丙烯酸甲酯薄膜分别作为沟道层和介质层,制备了顶栅共面结构的非晶氧化物薄膜晶体管(TFT)器件,探讨了沟道层中Al含量对器件性能的影响。结果表明:Al对InZnO薄膜中氧空位的形成能起到... 将溶液法制备的不含镓的非晶InAlZnO薄膜和有机聚甲基丙烯酸甲酯薄膜分别作为沟道层和介质层,制备了顶栅共面结构的非晶氧化物薄膜晶体管(TFT)器件,探讨了沟道层中Al含量对器件性能的影响。结果表明:Al对InZnO薄膜中氧空位的形成能起到一定抑制作用,增加Al含量即可降低沟道层中的电子载流子浓度,使得InAlZnO TFT器件阈值电压正向移动、关态电流减小,以有利于器件开关比的提升。此外,基于沟道层中Al含量的调整可通过优化沟道层/介质层界面状态来促进器件阈值电压滞回稳定性的提升。当沟道层中Al含量为30%时,制备的器件具有最佳综合性能。 展开更多
关键词 薄膜晶体管 铟铝锌氧化物 溶液法 顶栅共面结构 低成本
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生物接触氧化耦合生物活性炭工艺处理高盐污水实验总结
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作者 杨菊 胡建东 +1 位作者 王刚 高会杰 《炼油技术与工程》 CAS 2024年第1期46-50,共5页
针对炼化企业废水盐含量高、稳定达标处理难、能耗高等问题,提出了生物接触氧化-生物活性炭工艺。通过梯度提高进水盐含量的方法成功驯化出耐盐菌,启动了生物接触氧化单元,池中生物挂膜良好,脱氮除碳效果显著,出水COD(化学需氧量)可稳... 针对炼化企业废水盐含量高、稳定达标处理难、能耗高等问题,提出了生物接触氧化-生物活性炭工艺。通过梯度提高进水盐含量的方法成功驯化出耐盐菌,启动了生物接触氧化单元,池中生物挂膜良好,脱氮除碳效果显著,出水COD(化学需氧量)可稳定控制在90 mg/L以下,总氮在15 mg/L以下。菌群分析结果表明,在高盐含量(高盐)废水环境中,接触氧化单元生物膜中菌群数量和多样性较接种污泥发生明显改变,主要功能菌为Thiovirga、Thauera、Flavobacterium、Gemmobacter、Hydrogenophaga等。在生物活性炭单元,通过耐盐高效菌剂与活性炭的有机结合,提高了该单元对进水COD波动的抗冲击能力,活性炭表面形成生物膜,系统运行稳定,可控制出水COD基本在60 mg/L以下,氨氮质量浓度在2 mg/L以下,总氮在15 mg/L以下。全流程以生物降解为核心,工艺流程短、运行成本低,为高盐污水的稳定达标处理提供了技术支撑。 展开更多
关键词 生物接触氧化 生物活性炭 炼化高盐污水 菌群结构 COD 氨氮 总氮 填料挂膜
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Production of HfO_2 thin films using different methods: chemical bath deposition, SILAR and sol–gel process 被引量:1
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作者 Ì.A.Kariper 《International Journal of Minerals,Metallurgy and Materials》 SCIE EI CAS CSCD 2014年第8期832-838,共7页
Hafnium oxide thin films (HOTFs) were successfully deposited onto amorphous glasses using chemical bath deposition, successive ionic layer absorption and reaction (SILAR), and sol-gel methods. The same reactive pr... Hafnium oxide thin films (HOTFs) were successfully deposited onto amorphous glasses using chemical bath deposition, successive ionic layer absorption and reaction (SILAR), and sol-gel methods. The same reactive precursors were used for all of the methods, and all of the films were annealed at 300℃ in an oven (ambient conditions). After this step, the optical and structural properties of the films produced by using the three different methods were compared. The structures of the films were analyzed by X-ray diffTaction (XRD). The optical properties are investigated using the ultraviolet-visible (UV-VIS) spectroscopic technique. The film thickness was measured via atomic force microscopy (AFM) in the tapping mode. The surface properties and elemental ratios of the films were investigated and measured by scanning electron microscopy and energy-dispersive X-ray spectroscopy (EDX). The lowest transmittance and the highest reflectance values were observed for the films produced using the SILAR method. In addition, the most intense characteristic XRD peak was observed in the diffraction pattern of the film produced using the SILAR method, and the greatest thickness and average grain size were calculated for the film produced using the SILAR method. The films produced using SILAR method contained fewer cracks than those produced using the other methods. In conclusion, the SILAR method was observed to be the best method for the production of HOTFs. 展开更多
关键词 hafnium oxide thin films optical properties structural properties chemical deposition absorption sol-gel process
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