The use of atomic force microscope(AFM)as a nanomanipulator has been evolving for various kinds of nano-manipulation tasks.Due to the bow effect of the piezo scanner of the AFM, the AFM space is different from the Car...The use of atomic force microscope(AFM)as a nanomanipulator has been evolving for various kinds of nano-manipulation tasks.Due to the bow effect of the piezo scanner of the AFM, the AFM space is different from the Cartesian space.Traditional nanomanipulation based on AFM is only a 2-D operation and does not consider the bow effect of the piezotube.In this paper,different 3-D nanomanipulation tasks using AFM such as nanolithography,pushing and cutting have been discussed. 3-D path planning is performed directly in the AFM space and the 3-D paths are generated based on the 3-D topography information of the surface represented in the AFM space.This approach can avoid the mappings between the AFM space and Cartesian space in planning.By following the generated motion paths,the tip can either follow the topography of the surface or move across the surface by avoiding collision with bumps.Nanomanipulation using this method can be considered as the'true' 3-D operations since the cantilever tip can be controlled to follow any desired 3-D trajectory within the range of AFM space.The experimental study shows the effectiveness of the planning and control scheme.展开更多
Nano-manipulation technology is an emerging field in the development of modern science and technology. Atomic force microscope （AFM）, a sharp weapon for nano imaging and nanomanipulation, which is honored as ＂eye＂...Nano-manipulation technology is an emerging field in the development of modern science and technology. Atomic force microscope （AFM）, a sharp weapon for nano imaging and nanomanipulation, which is honored as ＂eye＂ and ＂hand＂ of nano-technology. However, due to the hysteresis, creep and other nonlinearity of piezoelectric ceramics tube （PZT） as well as the probe＇s tip deviations caused by cantilever deformation, AFM has larger error of relative displacement between probe and sample, which creates enormous inconvenience to the nano-manipulation and repositioning. As to improve positioning accuracy, this dissertation presents a novel AFM＇s X-Y dimensional nano-positioning control system with large-scale based on H∞ control. Through careful research on variety of influence factors on AFM＇s precise nano-manipulation, a composite control strategy based on feedforward compensation control of cantilever probe tip＇s offset and H∞ control of piezoelectric scanner is presented in this paper. In the end, simulation results can also testify the tracking ability and better nano-positioning performance of the system.展开更多
基金The project supported by the National Natural Science Foundation (IIS-9796300,IIS-9796287 and EIA-9911077)
文摘The use of atomic force microscope(AFM)as a nanomanipulator has been evolving for various kinds of nano-manipulation tasks.Due to the bow effect of the piezo scanner of the AFM, the AFM space is different from the Cartesian space.Traditional nanomanipulation based on AFM is only a 2-D operation and does not consider the bow effect of the piezotube.In this paper,different 3-D nanomanipulation tasks using AFM such as nanolithography,pushing and cutting have been discussed. 3-D path planning is performed directly in the AFM space and the 3-D paths are generated based on the 3-D topography information of the surface represented in the AFM space.This approach can avoid the mappings between the AFM space and Cartesian space in planning.By following the generated motion paths,the tip can either follow the topography of the surface or move across the surface by avoiding collision with bumps.Nanomanipulation using this method can be considered as the'true' 3-D operations since the cantilever tip can be controlled to follow any desired 3-D trajectory within the range of AFM space.The experimental study shows the effectiveness of the planning and control scheme.
基金Project supported by the Shanghai Science and Technology Nano-tech Special Foundation(Grant No.0852nm06800)
文摘Nano-manipulation technology is an emerging field in the development of modern science and technology. Atomic force microscope （AFM）, a sharp weapon for nano imaging and nanomanipulation, which is honored as ＂eye＂ and ＂hand＂ of nano-technology. However, due to the hysteresis, creep and other nonlinearity of piezoelectric ceramics tube （PZT） as well as the probe＇s tip deviations caused by cantilever deformation, AFM has larger error of relative displacement between probe and sample, which creates enormous inconvenience to the nano-manipulation and repositioning. As to improve positioning accuracy, this dissertation presents a novel AFM＇s X-Y dimensional nano-positioning control system with large-scale based on H∞ control. Through careful research on variety of influence factors on AFM＇s precise nano-manipulation, a composite control strategy based on feedforward compensation control of cantilever probe tip＇s offset and H∞ control of piezoelectric scanner is presented in this paper. In the end, simulation results can also testify the tracking ability and better nano-positioning performance of the system.
