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Significantly Improved High-Temperature Energy Storage Performance of BOPP Films by Coating Nanoscale Inorganic Layer 被引量:3
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作者 Tiandong Zhang Hainan Yu +5 位作者 Young Hoon Jung Changhai Zhang Yu Feng Qingguo Chen Keon Jae Lee Qingguo Chi 《Energy & Environmental Materials》 SCIE EI CAS CSCD 2024年第2期30-38,共9页
Biaxially oriented polypropylene(BOPP)is one of the most commonly used commercial capacitor films,but its upper operating temperature is below 105℃due to the sharply increased electrical conduction loss at high tempe... Biaxially oriented polypropylene(BOPP)is one of the most commonly used commercial capacitor films,but its upper operating temperature is below 105℃due to the sharply increased electrical conduction loss at high temperature.In this study,growing an inorganic nanoscale coating layer onto the BOPP film's surface is proposed to suppress electrical conduction loss at high temperature,as well as increase its upper operating temperature.Four kinds of inorganic coating layers that have different energy band structure and dielectric property are grown onto the both surface of BOPP films,respectively.The effect of inorganic coating layer on the high-temperature energy storage performance has been systematically investigated.The favorable coating layer materials and appropriate thickness enable the BOPP films to have a significant improvement in high-temperature energy storage performance.Specifically,when the aluminum nitride(AIN)acts as a coating layer,the AIN-BOPP-AIN sandwich-structured films possess a discharged energy density of 1.5 J cm^(-3)with an efficiency of 90%at 125℃,accompanying an outstandingly cyclic property.Both the discharged energy density and operation temperature are significantly enhanced,indicating that this efficient and facile method provides an important reference to improve the high-temperature energy storage performance of polymer-based dielectric films. 展开更多
关键词 coating layer energy storage interfacial barrier polymer films
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Biopolymer Films and Coatings in Packaging Applications--A Review of Recent Developments 被引量:5
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作者 Jari Vartiainen Mika Vaha-Nissi Ali Harlin 《Materials Sciences and Applications》 2014年第10期708-718,共11页
This review covers the recent developments in the field of biobased packaging materials. Special emphasis is placed on the barrier properties, which are crucial in terms of food packaging. The state-of-the-art of seve... This review covers the recent developments in the field of biobased packaging materials. Special emphasis is placed on the barrier properties, which are crucial in terms of food packaging. The state-of-the-art of several biopolymers including pectin, starch, chitosan, xylan, galactoglucomannan, lignin and cellulose nanofibrils is discussed. As in most cases the packaging related properties of single layer biopolymer films are inadequate, the thin film coatings, such as sol-gel and ALD (atomic layer deposition), as well as the multilayer coatings are also briefly touched. 展开更多
关键词 Biopolymers PACKAGING films and coatings Barrier Properties
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Preparation of CuInSe_2 thin films by paste coating
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作者 NIE Hongbo WANG Yanlai +1 位作者 NI Peiran GUO Shiju 《Rare Metals》 SCIE EI CAS CSCD 2008年第6期591-597,共7页
Precursor pastes were obtained by milling Cu-In alloys and Se powders. CulnSe2 thin films were successfully prepared by precursor layers, which were coated using these pastes, and were annealed in a H2 atmosphere. The... Precursor pastes were obtained by milling Cu-In alloys and Se powders. CulnSe2 thin films were successfully prepared by precursor layers, which were coated using these pastes, and were annealed in a H2 atmosphere. The pastes were tested by laser particle diameter analyzer, simultaneous thermogravimetric and differential thermal analysis instruments (TG-DTA), and X-ray diffractometry (XRD). Selenized films were characterized by XRD, scanning electron microscopy (SEM), and energy dispersive spectroscopy (EDS). The results indicate that chalcopyrite CuInSe2 is formed at 180℃ and the crystallinity of this phase is improved as the temperature rises. All the CuInSe2 thin films, which were annealed at various temperatures, exhibit the preferred orientation along the (112) plane. The compression of precursor layers before selenization step is one of the most essential factors for the preparation of perfect CuInSe2 thin films. 展开更多
关键词 inorganic non-metal material CulnSe2 thin films SELENIZATION coating Cu-In alloys
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Preparation and optical properties of Nb-NbN multilayer films as solar selective absorptive coatings
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作者 WANG Cong DU Xinkang WANG Tianmin ZHOU Long RU Ning CHEN Buliang 《Rare Metals》 SCIE EI CAS CSCD 2006年第z1期355-359,共5页
Based on the cermet double layer structure, Nb-NbN multi-layer films for solar selective coatings were deposited by direct current reactive magnetron sputtering. The Nb/Nb-NbN/Al2O3 trilayered structure was deposited ... Based on the cermet double layer structure, Nb-NbN multi-layer films for solar selective coatings were deposited by direct current reactive magnetron sputtering. The Nb/Nb-NbN/Al2O3 trilayered structure was deposited on a stainless steel (SS) substrate by using a single niobium target. The expected components were adjusted by changing the gas flowing ratios of Ar: N2. The Al2O3 antireflective layer on the top of the film was produced by r. f. magnetron sputtering using Al2O3 ceramic target. A solar absorptivity of 0.94 and a normal emissivity of 0.16 at room temperature have been achieved for the coating. Thermal vacuum aging to the samples was carried out at 350 and 500 ℃ for 1 h. The results show a good thermal stability. Microstructure and its dependence on temperature of the Nb, NbN and Nb-NbN single layers were investigated, respectively. 展开更多
关键词 Nb-NbN cermet film solar selective coating magnetron sputtering
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Structure distortion, optical and electrical properties of ZnO thin films co-doped with Al and Sb by sol-gel spin coating 被引量:1
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作者 钟文武 刘发民 +3 位作者 蔡鲁刚 周传仓 丁芃 张嬛 《Chinese Physics B》 SCIE EI CAS CSCD 2010年第10期515-519,共5页
ZnO thin films co-doped with A1 and Sb with different concentrations and a fixed molar ratio of AlCl3 to SbCl3 at 1:2, are prepared by a sol-gel spin-coating method on glass annealed at 550 ℃ for 2 h in air. The x-r... ZnO thin films co-doped with A1 and Sb with different concentrations and a fixed molar ratio of AlCl3 to SbCl3 at 1:2, are prepared by a sol-gel spin-coating method on glass annealed at 550 ℃ for 2 h in air. The x-ray diffraction results confirm that the ZnO thin films co-doped with Al distortion, and the biaxial stresses are 1.03× 10^8. 3.26× 10^8 and Sb are of wurtzite hexagonal ZnO with a very small 5.23 × 10^8, and 6.97× 10^8 Pa, corresponding to those of the ZnO thin films co-doped with Al and Sb in concentrations of 1.5, 3.0, 4.5, 6.0 at% respectively. The optical properties reveal that the ZnO thin films co-doped with Al and Sb have obviously enhanced transmittance in the visible region. The electrical properties show that ZnO thin film co-doped with Al and Sb in a concentration of 1.5 at% has a lowest resistivity of 2.5 Ω·cm. 展开更多
关键词 ZnO thin films co-doped with Al and Sb sol-gel spin-coating method structure distortion optical and electrical properties
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Electrochemical Properties of Poly(ethylene oxide)(PEO) Doped TiO_2-PEO Films Prepared by Sol-gel Dip Coating Technique
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作者 袁坚 《Journal of Wuhan University of Technology(Materials Science)》 SCIE EI CAS 2001年第2期6-8,12,共4页
PEO modified Ti02 -PEO organic-inorganic hybrid thin films were prepared via, sol-gel dipping process on glass substrate pre-coated with ITO. The preparation parameters were studied. Electrochemical and optical proper... PEO modified Ti02 -PEO organic-inorganic hybrid thin films were prepared via, sol-gel dipping process on glass substrate pre-coated with ITO. The preparation parameters were studied. Electrochemical and optical properties of the films were characterized by cyclic voltammetric response and visible transmittance. X-ray diffraction (XRD) was used to determined the crystalline structure of the gel. The results show the sols added with PEO have acceptable stable periods for practical use. The PEO modified optical transitivity of the hybrid films has heavy effects on the crystallization of TiO2 during structural evolution because of the interaction between PEO and Ti02 . PEO-TiO2 films have better electrochemical activity than the TiO2 equivalent behaved as higher Li + insertion/extraction current density and cyclic reversibility. 展开更多
关键词 sol-gel dip-coating films electrochromic materials PEO TI02
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MgO and ZnO Composite Thin Films Using the Spin Coating Method on Microscope Glasses
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作者 Ayse Kaya Balta Ozlem Ertek +1 位作者 Nail Eker Ibrahim Okur 《Materials Sciences and Applications》 2015年第1期40-47,共8页
In this study, a new route to produce pure and composite ZnO-MgO thin films has been presented. In the process the pure ZnO thin films were the starting point, ending up with MgO by doping various percentages (from 0%... In this study, a new route to produce pure and composite ZnO-MgO thin films has been presented. In the process the pure ZnO thin films were the starting point, ending up with MgO by doping various percentages (from 0% to 100%) of Mg with the help of sol-gel spin coating technique. The crystal phases in all doping levels have been obtained when the samples annealed at 600℃ for a duration of 6 hours. The X-ray diffraction (XRD) spectra, the scanning electron microscopy (SEM) micrographs and UV-Vis absorption spectra have been performed to elucidate the composed film structures. 展开更多
关键词 ZnO MGO DOPING Microscope Glass Spin coating Thin film
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Suppression of flux avalanches in YBCO superconducting thin films by coating metal investigated using magneto-optical imaging
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作者 Qianting Ran Ze Jing +4 位作者 Lei Shen Jun Zhou Cong Liu Zhiwei Zhang Xingyi Zhang 《Superconductivity》 2024年第3期4-13,共10页
Flux avalanches,prevalently existing in superconducting thin films,can cause catastrophic breakdowns of electromagnetic properties and even irreversible damage to superconducting materials.Metal coating is an effectiv... Flux avalanches,prevalently existing in superconducting thin films,can cause catastrophic breakdowns of electromagnetic properties and even irreversible damage to superconducting materials.Metal coating is an effective way to suppress the flux avalanches in superconducting thin films.Nevertheless,it is difficult to reveal the suppression mechanisms due to the challenge of effectively separating the simultaneous eddy currents and heat exchange in the metal coating.In this work,the eddy currents and heat exchange in the Ag metal coating are separated by setting a thermal insulation layer,and its inhibiting effect on the flux avalanches of the YBCO superconducting thin films is elucidated.The results indicate that eddy currents play an important part in suppressing magnetic flux avalanches,and their effect strengthens with increasing Ag thickness.Meanwhile,employing the double-exposure method,the flux avalanche velocity of YBCO superconducting thin films was measured,revealing a significant decrease in the magnetic flux avalanche velocity due to suppression by eddy currents.Moreover,a theoretical model was established to investigate the influence of eddy currents on the motion of a single vortex,and the calculated results showed good agreement with the experiments.These findings provide a better understanding of the flux avalanches and their suppression in YBCO superconducting thin films. 展开更多
关键词 YBCO superconducting thin films Flux avalanches Metal coating Eddy currents Double-exposure method
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Structural and optical properties of nano-spin coated sol-gel porous TiO_2 films 被引量:1
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作者 M.M.El-NAHASS M.H.ALI A.El-DENGLAWEY 《Transactions of Nonferrous Metals Society of China》 SCIE EI CAS CSCD 2012年第12期3003-3011,共9页
Three thicknesses of TiO2 films, 174, 195, and 229 nm, were deposited onto quartz substrates by sol–gel spin coating method. The as-deposited thin films were characterized by nano-crystallite with different sizes (19... Three thicknesses of TiO2 films, 174, 195, and 229 nm, were deposited onto quartz substrates by sol–gel spin coating method. The as-deposited thin films were characterized by nano-crystallite with different sizes (19–46 nm) and relatively high porous structure. Optical constants were determined and showed the lowest refractive index of 1.66 for the as-prepared films that ever reported till now. Obtained results were discussed through current theoretical ideas. 展开更多
关键词 TiO2 films optical properties NANOSTRUCTURE electron microscopy thin films spin coating technique
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Structural, Optical and Luminescence Properties of ZnO Thin Films Prepared by Sol-Gel Spin-Coating Method: Effect of Precursor Concentration 被引量:1
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作者 R.Amari A.Mahroug +2 位作者 A.Boukhari B.Deghfel N.Selmi 《Chinese Physics Letters》 SCIE CAS CSCD 2018年第1期63-67,共5页
Transparent zinc oxide(ZnO) thin films are fabricated by a simple sol-gel spin-coating technique on glass substrates with different solution concentrations(0.3-1.2 M) using zinc acetate dehydrate [Zn(CH_3COO)_2&... Transparent zinc oxide(ZnO) thin films are fabricated by a simple sol-gel spin-coating technique on glass substrates with different solution concentrations(0.3-1.2 M) using zinc acetate dehydrate [Zn(CH_3COO)_2·2H_2O] as precursor and isopropanol and monoethanolamine(MEA) as solvent and stabilizer, respectively. The molar ratio of zinc acetate dehydrate to MEA is 1.0. X-ray diffraction, ultraviolet-visible spectroscopy and photoluminescence spectroscopy are employed to investigate the effect of solution concentration on the structural and optical properties of the ZnO thin films. The obtained results of all thin films are discussed in detail and are compared with other experimental data. 展开更多
关键词 ZnO Optical and Luminescence Properties of ZnO Thin films Prepared by Sol-Gel Spin-coating Method Structural
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Interfacial Interaction Between Polyurethane/Poly(Methacrylateco-Styrene) Coating and the Regenerated Cellulose Film 被引量:1
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作者 Gong Ping, Yang Guang, Zhang Lina(Department of Chemistry, Wuhan University, Wuhan 430072, China) 《Wuhan University Journal of Natural Sciences》 EI CAS 1998年第1期92-97,共6页
Water-resistant films were prepared by coating the surface of regenerated cellulose films with castor oil-based polyurethane (PU)/ poly-(methacrylate-co-styrene) [P (MA-St)]. The effects of the ratio of PU to P (MA-St... Water-resistant films were prepared by coating the surface of regenerated cellulose films with castor oil-based polyurethane (PU)/ poly-(methacrylate-co-styrene) [P (MA-St)]. The effects of the ratio of PU to P (MA-St) copolymer on tensile strength (dry and wet states), vapor permeability, size stability, and water resistivity of the coated films were studied. The interfacial interaction between cellulose and the PU/P (MA-St) coating was analyzed using infrared (IR), ultraviolet (UV), scanning electron microscopy (SEM), transmission electron microscopy (TEM), differential thermal analysis (DTA), and electron probe microanalysis (EPMA). The results indicated that the mechanical properties and water resistivity of the coated films significantly enhanced, and the biodegradability was displayed, when the ratio of PU to P (MA-St) was 8∶2 by weight. The chemical bonds and hydrogen bonds between the cellulose, PU, and the copolymer exist in the coated films. It is regarded that PU/P (MA-St) semi-interpenetrating polymer networks (IPNs) were formed, and a shared network of PU with both the cellulose and the coating in the coated film occurred simultaneously resulting in a strong bonding between the coating layer and the film. 展开更多
关键词 Key words regenerated cellulose films water resistivity interfacial interaction coating IPNS
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Magnetic Properties of Nanometer-Scale NiZnCu Ferrite Thin Films Fabricated by Spray-Spin-Heating-Coating Method
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作者 Yulan JING, Huaiwu ZHANG, lijun JIA, Yu SHI and Yingli LIUInstitute of Information and Materials, University of Electronic Science and Technology of China, Chengdu 610054, China 《Journal of Materials Science & Technology》 SCIE EI CAS CSCD 2004年第1期35-37,共3页
A new nanometer-scale ferrite thin film with excellent high-frequency characteristics has been developed by the spray-spin-heating-coating method. The effects of the ion synthesis mechanism, chemical stoichiometry, fa... A new nanometer-scale ferrite thin film with excellent high-frequency characteristics has been developed by the spray-spin-heating-coating method. The effects of the ion synthesis mechanism, chemical stoichiometry, fabrication method, and doping content on the magnetic properties and microstructure of the thin films have been analyzed. The films formed between 75℃ and 90℃ by spray-spin-heating-coating methods was discovered with fine grain size of about 21 nm, high saturation magnetization (4πMs) of about 6.5 kGs, coercivity of about 9.8 Oe, as well as initial permeability of about 14.0. These films can be widely used in radio-frequency integrated circuit devices. 展开更多
关键词 Nanometer materials Ferrite thin film Spray-spin-heating-coating
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Influence of Sn Low Doping on the Morphological, Structural and Optical Properties of ZnO Films Deposited by Sol Gel Dip-Coating
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作者 Chewki Zegadi Khalil Abdelkebir +2 位作者 Denis Chaumont Mohamed Adnane Saad Hamzaoui 《Advances in Materials Physics and Chemistry》 2014年第5期93-104,共12页
In this work, Undoped Zinc Oxide (ZnO) and Sndoped Zinc Oxide (ZnO:Sn) films have been deposited by sol-gel dip coating method, where the Sn/Zn atomic ratio was 3% and 5% in the solution. The effects of Sn incorporati... In this work, Undoped Zinc Oxide (ZnO) and Sndoped Zinc Oxide (ZnO:Sn) films have been deposited by sol-gel dip coating method, where the Sn/Zn atomic ratio was 3% and 5% in the solution. The effects of Sn incorporation on morphological, structural and optical properties of ZnO films were investigated. The Scanning Electron Microscopy (SEM) showed that the morphological surface of the films was affected by Sn low doping. The X-Ray Diffraction (XRD) patterns showed that all films have polycrystalline structures, and the doping incorporation has not lead to substantial changes in the structural characteristics of ZnO films. The crystallite size was calculated using the well-known Scherrer’s formula and found to be in the range of 23 - 40 nm. The measurements from UV-Visible Spectrophotometer (U-Vis) indicated that the highest average optical transmittance in the visible region was related to Undoped ZnO film, then the optical band gap and Urbach energy values of thin films were calculated. The X-Ray Photoelectron Spectroscopy (XPS) has demonstrated that Sn is incorporated in ZnO lattice. 展开更多
关键词 Sol-Gel DIP-coating ZnO films SN Low Doping SEM MICROGRAPHS X-Rays Patterns Optical Properties XPS Spectrum
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SnS thin films deposited by chemical bath deposition, dip coating and SILAR techniques 被引量:2
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作者 Sunil H.Chaki Mahesh D.Chaudhary M.P.Deshpande 《Journal of Semiconductors》 EI CAS CSCD 2016年第5期10-18,共9页
The SnS thin films were synthesized by chemical bath deposition (CBD), dip coating and successive ionic layer adsorption and reaction (SILAR) techniques. In them, the CBD thin films were deposited at two tem- pera... The SnS thin films were synthesized by chemical bath deposition (CBD), dip coating and successive ionic layer adsorption and reaction (SILAR) techniques. In them, the CBD thin films were deposited at two tem- peratures: ambient and 70℃. The energy dispersive analysis of X-rays (EDAX), X-ray diffraction (XRD), Raman spectroscopy, scanning electron microscopy (SEM) and optical spectroscopy techniques were used to characterize the thin films. The electrical transport properties studies on the as-deposited thin films were done by measuring the I-V characteristics, DC electrical resistivity variation with temperature and the room temperature Hall effect. The obtained results are deliberated in this paper. 展开更多
关键词 SNS thin films chemical bath deposition dip coating SILAR
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Carbon Film Coating Used in CdZnTe Crystal Growth
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作者 侯清润 高炬 +1 位作者 王金义 陈纪安 《Rare Metals》 SCIE EI CAS CSCD 1997年第2期35-37,共3页
A simple method of carbon film coating used in CdZnTe crystal growth was developed. The optimum parameters were selected. Breakdown of carbon film was commonly seen if Cd reservoir was not used in the crystal growth. ... A simple method of carbon film coating used in CdZnTe crystal growth was developed. The optimum parameters were selected. Breakdown of carbon film was commonly seen if Cd reservoir was not used in the crystal growth. The carbon film was in good condition when the vapor pressure of Cd was kept around 0.1 MPa during crystal growth. 展开更多
关键词 Carbon film coating CDZNTE Crystal growth
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Thin film dynamics in coating problems using Onsager principle
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作者 邸亚娜 许现民 +1 位作者 周嘉嘉 Masao Doi 《Chinese Physics B》 SCIE EI CAS CSCD 2018年第2期51-55,共5页
A new variational method is proposed to investigate the dynamics of the thin film in a coating flow where a liquid is delivered through a fixed slot gap onto a moving substrate. A simplified ODE system has also been d... A new variational method is proposed to investigate the dynamics of the thin film in a coating flow where a liquid is delivered through a fixed slot gap onto a moving substrate. A simplified ODE system has also been derived for the evolution of the thin film whose thickness hf is asymptotically constant behind the coating front. We calculate the phase diagram as well as the film profiles and approximate the film thickness theoretically, and agreement with the well-known scaling law as Ca2/3 is found. 展开更多
关键词 Onsager principle thin films coating flows interfacial flows
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Effect of substrate curvature on thickness distribution of polydimethylsiloxane thin film in spin coating process
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作者 Ying Yan Ping Zhou +2 位作者 Shang-Xiong Zhang Xiao-Guang Guo Dong-Ming Guo 《Chinese Physics B》 SCIE EI CAS CSCD 2018年第6期479-487,共9页
The polymer spin coating is critical in flexible electronic manufaction and micro-electro-mechanical system(MEMS)devices due to its simple operation, and uniformly coated layers. Some researchers focus on the effect... The polymer spin coating is critical in flexible electronic manufaction and micro-electro-mechanical system(MEMS)devices due to its simple operation, and uniformly coated layers. Some researchers focus on the effects of spin coating parameters such as wafer rotating speed, the viscosity of the coating liquid and solvent evaporation on final film thickness.In this work, the influence of substrate curvature on film thickness distribution is considered. A new parameter which represents the edge bead effect ratio(re) is proposed to investigate the influence factor of edge bead effect. Several operation parameters including the curvature of the substrate and the wafer-spin speed are taken into account to study the effects on the film thickness uniformity and edge-bead ratio. The morphologies and film thickness values of the spin-coated PDMS films under various substrate curvatures and coating speeds are measured with laser confocal microscopy. According to the results, both the convex and concave substrate will help to reduce the edge-bead effect significantly and thin film with better surface morphology can be obtained at high spin speed. Additionally, the relationship between the edge-bead ratio and the thin film thickness is like parabolic curve instead of linear dependence. This work may contribute to the mass production of flexible electronic devices. 展开更多
关键词 spin coating non-planar substrate film thickness distribution edge-bead effect
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Phase Transformation and Optimized Growth of TFA-MOD REBa_2Cu_3O_(7-x) Films for Coated Conductors 被引量:1
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作者 Zhi-Yong Liu Bo Gao +5 位作者 Li-Liang Ying Feng Fan Yu-Ming Lu Chuan-Bing Cai T. Thersleff B. Elke 《Journal of Electronic Science and Technology of China》 2008年第2期147-151,共5页
Several types of REBa2Cu3O7-x (REBCO, RE=Y, Ho etc.) films are prepared on single crystal substrate LaAIO3 by TFA-MOD method. The phase transformation and optimized growth conditions in the crystallization are studi... Several types of REBa2Cu3O7-x (REBCO, RE=Y, Ho etc.) films are prepared on single crystal substrate LaAIO3 by TFA-MOD method. The phase transformation and optimized growth conditions in the crystallization are studied. Compared with SmBCO and GdBCO, high quality YBCO and HoBCO films are relatively easy to produce. It is revealed that the YBCO grains can form at low temperatures such as 730 ℃ during the initial heating ramp. With a high heating rate of 20 K/min and a low oxygen pressure of 100 ppm, the optimum growth temperature is around 780℃, at which the films show a Jc value of 2.88 MMcm2. Further decrease of the heating rate may produce the highquality YBCO Film with a higher Jc of 3.65 MA/cm2. The temperature dependence of resistances in various magnetic fields up to 9 T shows that the present TFAMOD YBCO and HoBCO films have similar superonducting transition temperature and magnetotransport properties. 展开更多
关键词 coated conductor REBCO films TFA-MOD.
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Study progression in application of process analytical technologies on film coating
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作者 Tingting Peng Ying Huang +4 位作者 Liling Mei Linna Wu Longkai Chen Xin Pan Chuanbin Wu 《Asian Journal of Pharmaceutical Sciences》 SCIE CAS 2015年第3期176-185,共10页
Film coating is an important unit operation to produce solid dosage forms,thereby,the monitoring of this process is helpful to find problems in time and improve the quality of coated products.Traditional methods adopt... Film coating is an important unit operation to produce solid dosage forms,thereby,the monitoring of this process is helpful to find problems in time and improve the quality of coated products.Traditional methods adopted to monitor this process include measurement of coating weight gain,performance of disintegration and dissolution test,etc.However,not only do these methods cause destruction to the samples,but also consume time and energy.There have recently emerged the applications of process analytical technologies(PAT)on film coating,especially some novel spectroscopic and imaging technologies,which have the potential to real-time track the progress in film coating and optimize production efficiency.This article gives an overview on the application of such technologies for film coating,with the goal to provide a reference for the further researches. 展开更多
关键词 film coating Process analytical technologies (PAT) Spectroscopic techniques Imaging techniques
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Diamond Like Carbon Film Deposited on Porous Silicon as Passivation Coating
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作者 QU Jian-hua XIA Yi-ben +3 位作者 WANG Lin-jun MO Yao-wu TANG Ding-yuan (College of Material Science and Engineering, Shanghai University, Shanghai 201800, CHN National lab. of Infrared Physics, Chinese Academy of Sciences, Shanghai 200083, CHN) 《Semiconductor Photonics and Technology》 CAS 2000年第2期100-104,共5页
By depositing diamond like carbon (DLC) film with radio frequency plasma chemical vapor deposition (RFPCVD) method, a new surface passivation technique for photoluminescence porous silicon (PS) has been studied. The s... By depositing diamond like carbon (DLC) film with radio frequency plasma chemical vapor deposition (RFPCVD) method, a new surface passivation technique for photoluminescence porous silicon (PS) has been studied. The surface microstructure and photoelectric properties of both porous silicon and DLC coated PS have been analyzed by using AFM, FTIR and PL spectrotrieters. The results show the DLC film with dense and homogenous nanometer grains can be deposited on the PS used as passivation coating as it can terminate oxide reaction on the surface of the PS. Furthermore, certain ratio of hydrogen existed in the DLC film can be improved to form hydride species on the DLC/PS interface as the centers of the luminescence so that the DLC coating is of benefit not only to the passivation of the PS but also to the improvement of its luminescent intensity. 展开更多
关键词 Diamond like carbon film Passivation coating Porous silicon PHOTOLUMINESCENCE
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