Atomic layers of hexagonal boron nitride(h-BN)crystal are excellent candidates for structural materials as enabling ultrathin,two-dimensional(2D)nanoelectromechanical systems(NEMS)due to the outstanding mechanical pro...Atomic layers of hexagonal boron nitride(h-BN)crystal are excellent candidates for structural materials as enabling ultrathin,two-dimensional(2D)nanoelectromechanical systems(NEMS)due to the outstanding mechanical properties and very wide bandgap(5.9 eV)of h-BN.In this work,we report the experimental demonstration of h-BN 2D nanomechanical resonators vibrating at high and very high frequencies(from~5 to~70 MHz),and investigations of the elastic properties of h-BN by measuring the multimode resonant behavior of these devices.First,we demonstrate a dry-transferred doubly clamped h-BN membrane with~6.7 nm thickness,the thinnest h-BN resonator known to date.In addition,we fabricate circular drumhead h-BN resonators with thicknesses ranging from~9 to 292 nm,from which we measure up to eight resonance modes in the range of~18 to 35 MHz.Combining measurements and modeling of the rich multimode resonances,we resolve h-BN’s elastic behavior,including the transition from membrane to disk regime,with built-in tension ranging from 0.02 to 2 N m−1.The Young’s modulus of h-BN is determined to be EY≈392 GPa from the measured resonances.The ultrasensitive measurements further reveal subtle structural characteristics and mechanical properties of the suspended h-BN diaphragms,including anisotropic built-in tension and bulging,thus suggesting guidelines on how these effects can be exploited for engineering multimode resonant functions in 2D NEMS transducers.展开更多
基金We are grateful for support from the National Academy of Engineering(NAE)Grainger Foundation Frontier of Engineering(FOE)Award(FOE2013-005)the National Science Foundation CAREER Award(Grant ECCS-1454570)partial support from the Department of Energy(DOE)EERE Award(Grant DE-EE0006719),a ThinkEnergy Fellowship(X.-Q.Zheng),and the Case School of Engineering.A portion of the device fabrication was performed at the Cornell NanoScale Science and Technology Facility(CNF),a member of the National Nanotechnology Infrastructure Network(NNIN)supported by the National Science Foundation(Grant ECCS-0335765).
文摘Atomic layers of hexagonal boron nitride(h-BN)crystal are excellent candidates for structural materials as enabling ultrathin,two-dimensional(2D)nanoelectromechanical systems(NEMS)due to the outstanding mechanical properties and very wide bandgap(5.9 eV)of h-BN.In this work,we report the experimental demonstration of h-BN 2D nanomechanical resonators vibrating at high and very high frequencies(from~5 to~70 MHz),and investigations of the elastic properties of h-BN by measuring the multimode resonant behavior of these devices.First,we demonstrate a dry-transferred doubly clamped h-BN membrane with~6.7 nm thickness,the thinnest h-BN resonator known to date.In addition,we fabricate circular drumhead h-BN resonators with thicknesses ranging from~9 to 292 nm,from which we measure up to eight resonance modes in the range of~18 to 35 MHz.Combining measurements and modeling of the rich multimode resonances,we resolve h-BN’s elastic behavior,including the transition from membrane to disk regime,with built-in tension ranging from 0.02 to 2 N m−1.The Young’s modulus of h-BN is determined to be EY≈392 GPa from the measured resonances.The ultrasensitive measurements further reveal subtle structural characteristics and mechanical properties of the suspended h-BN diaphragms,including anisotropic built-in tension and bulging,thus suggesting guidelines on how these effects can be exploited for engineering multimode resonant functions in 2D NEMS transducers.
