We describe the fabrication of metal nanogaps of sub-20nm in feature size using the proximity effect in electron beam lithography （EBL）. The proximity effect is extended to develop a flexible and practical method fo...We describe the fabrication of metal nanogaps of sub-20nm in feature size using the proximity effect in electron beam lithography （EBL）. The proximity effect is extended to develop a flexible and practical method for preparing metal （e. g. Au or Ag） nanogaps and arrays in combination with a transfer process （e. g., deposition/lift-off）. Different from the direct gap-writing process,the nanogap precursor structures （nanoconnections） were designed by GDSII software and then written by electron beam. Following a deposition and lift-off process, the metal nanogaps were obtained and the nanogap size can be lowered to -10nm by controlling the exposure dose in EBL.展开更多
Here we demonstrate the fabrication of nanometer-sized gaps by assembling single coreshell nanoparticles between metallic nanoelectrodes. Protein coated SiO2@Au coreshell nanopar- tides arc synthesized and positioned ...Here we demonstrate the fabrication of nanometer-sized gaps by assembling single coreshell nanoparticles between metallic nanoelectrodes. Protein coated SiO2@Au coreshell nanopar- tides arc synthesized and positioned between fluorescent molecules-covered electrodes in a controllable way using dielectrophoretic trapping, forming nanogaps sandwiched between nanoparticle and manoelectrodes. Preliminary photoluminescence measurements show that enhanced molecular fluorescence could be detected from the fluorescent molecules inside the nanogaps. These results pave the way for realizing electrically driven molecular fluorescence based on nanogap electrodes.展开更多
Uniform silver-containing metal nanostructures with well-defined nanogaps hold great promise for ultrasensitive surface-enhanced Raman scattering （SERS） analyses. Nevertheless, the direct synthesis of such nanostruc...Uniform silver-containing metal nanostructures with well-defined nanogaps hold great promise for ultrasensitive surface-enhanced Raman scattering （SERS） analyses. Nevertheless, the direct synthesis of such nanostructures with strong and stable SERS signals remains extremely challenging. Here, we report a DNA-mediated approach for the direct synthesis of gold-silver nano-mushrooms with interior nanogaps. The SERS intensities of these nano-mushrooms were critically dependent on the area of the nanogap between the gold head and the silver cap. We found that the formation of nanogaps was finely tunable by controlling the surface density of 6-carboxy-X-rhodamine （ROX） labeled single-stranded DNA （ssDNA） on the gold nanoparticles. We obtained nano-mushrooms in high yield with a high SERS signal enhancement factor of -1.0×109, much higher than that for Au-Ag nanostructures without nanogaps. Measurements for single nano- mushrooms show that these structures have both sensitive and reproducible SERS signals.展开更多
A lithography-independent and wafer scale method to fabricate a metal nanogap structure is demonstrated. Polysilicon was first dry etched using photoresist （PR） as the etch mask patterned by photolithography. Then, ...A lithography-independent and wafer scale method to fabricate a metal nanogap structure is demonstrated. Polysilicon was first dry etched using photoresist （PR） as the etch mask patterned by photolithography. Then, by depositing conformal SiO2 on the polysilicon pattern, etching back SiO2 anisotropically in the perpendicular direction and removing the polysilicon with KOH, a sacrificial SiO2 spacer was obtained. Finally, after metal evaporation and lifting-off of the SiO2 spacer, an 82 nm metal-gap structure was achieved. The size of the nanogap is not determined by the photolithography, but by the thickness of the SiO2. The method reported in this paper is compatible with modern semiconductor technology and can be used in mass production.展开更多
The fabrication of surface enhanced Raman spectroscopy(SERS)substrates with controlled high density hot spots still remains challenging.Herein,we report highly effective SERS substrates containing the self-generating(...The fabrication of surface enhanced Raman spectroscopy(SERS)substrates with controlled high density hot spots still remains challenging.Herein,we report highly effective SERS substrates containing the self-generating(SG)nanogaps from polystyrene nanosphere monolayer through isotropic plasma etching.The emergence of multimode hot spots,i.e.,metal film over nanosphere(MFON)-like hot spots(closed gaps,0 nm),individual self-aligned hot spots(discrete gaps,>20 nm)and threedimensional(3D)hot spots(nanogaps,1-10 nm),makes the SG SERS substrates superior as compared to the traditional MFON or the well-ordered self-aligned SERS substrates in terms of enhancement,uniformity,and reproducibility.The SG SERS substrates can function as the excellent SERS platforms for trace molecule detection in the practical application fields.展开更多
Plasmonic grating structures have been shown effective at increasing near-field optical enhancement. A doublewidth plasmonic grating design is introduced, where each period has two alternating metal widths separated b...Plasmonic grating structures have been shown effective at increasing near-field optical enhancement. A doublewidth plasmonic grating design is introduced, where each period has two alternating metal widths separated by a nanogap. With this new design, analysis has shown that plasmonic resonances couple between each metal section,resulting in even greater optical enhancement compared with single-width gratings. The geometry that gives the greatest optical enhancement has been determined with a computational model. This work demonstrates that the increased enhancement is due to hybridized modes that couple between the two grating segments.展开更多
Nanogap plasmonic structures with strong coupling between separated components have different responses to orthogonal-polarized light, giving rise to giant optical chirality. Here, we proposed a three-dimensional(3D) ...Nanogap plasmonic structures with strong coupling between separated components have different responses to orthogonal-polarized light, giving rise to giant optical chirality. Here, we proposed a three-dimensional(3D) nanostructure that consists of two vertically and twistedly aligned nanogaps, showing the hybridized charge distribution within 3D structures.It is discovered that the structure twisted by 60° exhibits plasmonic coupling behavior with/without gap modes for different circular-polarized plane waves, showing giant chiral response of 60% at the wavelength of 1550 nm. By controlling the disk radius and the insulator layer, the circular dichroism signal can be further tuned between 1538 and 1626 nm.展开更多
Graphene has the advantages of high electrical conductivity,high heat conductivity,and low noise,which makes it a potential option for integrated circuits interconnection and nanoelectrodes.In this paper,we present a ...Graphene has the advantages of high electrical conductivity,high heat conductivity,and low noise,which makes it a potential option for integrated circuits interconnection and nanoelectrodes.In this paper,we present a novel fabrication method for graphene nanoeletrodes with nanogap.First,graphene grown by chemical vapor deposition(CVD)is assembled to a chip with microelectrodes.Second,an atomic force microscopy(AFM)based mechanical cutting method is developed to cut the graphene into nanoribbons and nanoeletrodes with nanogap.Then the electronic property of a single nanodot is characterized using the garphene nanoelectrodes,demonstrating the effectiveness of the graphene nanoelectrodes.The fabricated graphene nanoeletrode pairs can be used as probes to detect single molecule in micro-environment,and show an attractive prospect for future molecular electronics applications.展开更多
基金the National Natural Science Foundation of China(No.20704042)the Shanghai Pujiang Talent Plan(No.07PJ14095)+1 种基金the CAS Knowledge Innovation Programthe Committee of Science and Technology of Shanghai(Nos.06XD14020,07JC14058,0752nm016)~~
文摘We describe the fabrication of metal nanogaps of sub-20nm in feature size using the proximity effect in electron beam lithography （EBL）. The proximity effect is extended to develop a flexible and practical method for preparing metal （e. g. Au or Ag） nanogaps and arrays in combination with a transfer process （e. g., deposition/lift-off）. Different from the direct gap-writing process,the nanogap precursor structures （nanoconnections） were designed by GDSII software and then written by electron beam. Following a deposition and lift-off process, the metal nanogaps were obtained and the nanogap size can be lowered to -10nm by controlling the exposure dose in EBL.
文摘Here we demonstrate the fabrication of nanometer-sized gaps by assembling single coreshell nanoparticles between metallic nanoelectrodes. Protein coated SiO2@Au coreshell nanopar- tides arc synthesized and positioned between fluorescent molecules-covered electrodes in a controllable way using dielectrophoretic trapping, forming nanogaps sandwiched between nanoparticle and manoelectrodes. Preliminary photoluminescence measurements show that enhanced molecular fluorescence could be detected from the fluorescent molecules inside the nanogaps. These results pave the way for realizing electrically driven molecular fluorescence based on nanogap electrodes.
基金We thank the National Basic Research Program of China （973 program） （Nos. 2013CB932802 and 2012CB932600）,Alexander von Humboldt Foundation, and the National Natural Science Foundation of China （Nos. 91127037 and 91123037） for financial support.
文摘Uniform silver-containing metal nanostructures with well-defined nanogaps hold great promise for ultrasensitive surface-enhanced Raman scattering （SERS） analyses. Nevertheless, the direct synthesis of such nanostructures with strong and stable SERS signals remains extremely challenging. Here, we report a DNA-mediated approach for the direct synthesis of gold-silver nano-mushrooms with interior nanogaps. The SERS intensities of these nano-mushrooms were critically dependent on the area of the nanogap between the gold head and the silver cap. We found that the formation of nanogaps was finely tunable by controlling the surface density of 6-carboxy-X-rhodamine （ROX） labeled single-stranded DNA （ssDNA） on the gold nanoparticles. We obtained nano-mushrooms in high yield with a high SERS signal enhancement factor of -1.0×109, much higher than that for Au-Ag nanostructures without nanogaps. Measurements for single nano- mushrooms show that these structures have both sensitive and reproducible SERS signals.
基金Project supported by the National High-Tech Research and Development Program of China (No.2008AA031402)
文摘A lithography-independent and wafer scale method to fabricate a metal nanogap structure is demonstrated. Polysilicon was first dry etched using photoresist （PR） as the etch mask patterned by photolithography. Then, by depositing conformal SiO2 on the polysilicon pattern, etching back SiO2 anisotropically in the perpendicular direction and removing the polysilicon with KOH, a sacrificial SiO2 spacer was obtained. Finally, after metal evaporation and lifting-off of the SiO2 spacer, an 82 nm metal-gap structure was achieved. The size of the nanogap is not determined by the photolithography, but by the thickness of the SiO2. The method reported in this paper is compatible with modern semiconductor technology and can be used in mass production.
基金This work was supported by the National Natural Science Foundation of China(Nos.51821002 and 21790053)the China Postdoctoral Science Foundation(No.2016M591908).
文摘The fabrication of surface enhanced Raman spectroscopy(SERS)substrates with controlled high density hot spots still remains challenging.Herein,we report highly effective SERS substrates containing the self-generating(SG)nanogaps from polystyrene nanosphere monolayer through isotropic plasma etching.The emergence of multimode hot spots,i.e.,metal film over nanosphere(MFON)-like hot spots(closed gaps,0 nm),individual self-aligned hot spots(discrete gaps,>20 nm)and threedimensional(3D)hot spots(nanogaps,1-10 nm),makes the SG SERS substrates superior as compared to the traditional MFON or the well-ordered self-aligned SERS substrates in terms of enhancement,uniformity,and reproducibility.The SG SERS substrates can function as the excellent SERS platforms for trace molecule detection in the practical application fields.
基金Arkansas Biosciences Institute(ABI)Iraqi Ministry of Higher Education and Scientific ResearchSPIE
文摘Plasmonic grating structures have been shown effective at increasing near-field optical enhancement. A doublewidth plasmonic grating design is introduced, where each period has two alternating metal widths separated by a nanogap. With this new design, analysis has shown that plasmonic resonances couple between each metal section,resulting in even greater optical enhancement compared with single-width gratings. The geometry that gives the greatest optical enhancement has been determined with a computational model. This work demonstrates that the increased enhancement is due to hybridized modes that couple between the two grating segments.
基金the National Natural Science Foundation of China (Nos. U1704253 and 51471045)the Zhejiang Provincial Foundation for Distinguished Young Scholars (No. LR18E010001)+1 种基金the Zhejiang Provincial Key Research and Development Program (No. 2019C01121)the start-up funding supported from the Hangzhou Dianzi University。
文摘Nanogap plasmonic structures with strong coupling between separated components have different responses to orthogonal-polarized light, giving rise to giant optical chirality. Here, we proposed a three-dimensional(3D) nanostructure that consists of two vertically and twistedly aligned nanogaps, showing the hybridized charge distribution within 3D structures.It is discovered that the structure twisted by 60° exhibits plasmonic coupling behavior with/without gap modes for different circular-polarized plane waves, showing giant chiral response of 60% at the wavelength of 1550 nm. By controlling the disk radius and the insulator layer, the circular dichroism signal can be further tuned between 1538 and 1626 nm.
基金supported by the National Natural Science Foundation of China(Grant Nos.61106109,61304251)the CAS/SAFEA Internaional Partnership Program for Creative Research Teams
文摘Graphene has the advantages of high electrical conductivity,high heat conductivity,and low noise,which makes it a potential option for integrated circuits interconnection and nanoelectrodes.In this paper,we present a novel fabrication method for graphene nanoeletrodes with nanogap.First,graphene grown by chemical vapor deposition(CVD)is assembled to a chip with microelectrodes.Second,an atomic force microscopy(AFM)based mechanical cutting method is developed to cut the graphene into nanoribbons and nanoeletrodes with nanogap.Then the electronic property of a single nanodot is characterized using the garphene nanoelectrodes,demonstrating the effectiveness of the graphene nanoelectrodes.The fabricated graphene nanoeletrode pairs can be used as probes to detect single molecule in micro-environment,and show an attractive prospect for future molecular electronics applications.
