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Plasma induced by pulsed laser and fabrication of silicon nanostructures
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作者 黄伟其 董泰阁 +5 位作者 王刚 刘世荣 黄忠梅 苗信建 吕泉 秦朝建 《Chinese Physics B》 SCIE EI CAS CSCD 2015年第8期340-345,共6页
It is interesting that in preparing process of nanosilicon by pulsed laser, the periodic diffraction pattern from plasmonic lattice structure in the Purcell cavity due to interaction between plasmons and photons is ob... It is interesting that in preparing process of nanosilicon by pulsed laser, the periodic diffraction pattern from plasmonic lattice structure in the Purcell cavity due to interaction between plasmons and photons is observed. This kind of plasmonic lattice structure confined in the cavity may be similar to the Wigner crystal structure. Emission manipulation on Si nanostructures fabricated by the plasmonic wave induced from pulsed laser is studied by using photoluminescence spectroscopy.The electronic localized states and surface bonding are characterized by several emission bands peaked near 600nm and 700nm on samples prepared in oxygen or nitrogen environment. The electroluminescence wavelength is measured in the telecom window on silicon film coated by ytterbium. The enhanced emission originates from surface localized states in band gap due to broken symmetry from some bonds on surface bulges produced by plasmonic wave in the cavity. 展开更多
关键词 nanosilicon pulsed laser plasmon photon
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Periodic surface structures on Ni–Fe film induced by a single femtosecond laser pulse with diffraction rings 被引量:1
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作者 周侃 贾鑫 +5 位作者 郗慧霞 刘聚坤 冯东海 张诗按 孙真荣 贾天卿 《Chinese Optics Letters》 SCIE EI CAS CSCD 2017年第2期63-67,共5页
This Letter reports the formation of periodic surface structures on Ni–Fe film irradiated by a single femtosecond laser pulse. A concave lens with a focus length of-150 mm is placed in front of an objective(100×... This Letter reports the formation of periodic surface structures on Ni–Fe film irradiated by a single femtosecond laser pulse. A concave lens with a focus length of-150 mm is placed in front of an objective(100×, NA=0.9),which transforms the Gaussian laser field into a ring distribution by the Fresnel diffraction. Periodic ripples form on the ablation area after the irradiation of a single femtosecond laser pulse, which depends on the laser polarization and laser fluence. We propose that the ring structure of the laser field leads to a similar transient distribution of the permittivity on the sample surface, which further launches the surface plasmon polaritons. The interaction of the incident laser with surface plasmon polaritons dominates the formation of periodic surface structures. 展开更多
关键词 DIFFRACTION Electromagnetic wave polarization Iron laser ablation laser optics laser pulses Metallic films Nickel Particle optics Periodic structures PHONONS photonS plasmonS Quantum theory Surface plasmon resonance Surface structure Ultrafast lasers
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超短脉冲激光加工在微电/光互连领域的应用研究进展 被引量:4
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作者 孙小燕 梁昶 +4 位作者 张伟 孔德键 冯玉婷 胡友旺 段吉安 《中国激光》 EI CAS CSCD 北大核心 2022年第10期119-142,共24页
超短脉冲激光凭借其脉宽窄、峰值功率高的特点,可以实现高精度材料生长、改性和去除等形式的加工,具有良好的材料适应性和工艺兼容性,在微电/光互连领域取得了开拓性应用进展,已成为近年来先进制造的新兴关键技术。本文简要介绍超短脉... 超短脉冲激光凭借其脉宽窄、峰值功率高的特点,可以实现高精度材料生长、改性和去除等形式的加工,具有良好的材料适应性和工艺兼容性,在微电/光互连领域取得了开拓性应用进展,已成为近年来先进制造的新兴关键技术。本文简要介绍超短脉冲激光实现微光电子器件制造的基本机制,包括多光子还原、表面等离子体共振和双光子聚合等,重点阐述超短脉冲激光加工在微光/电互连领域的应用研究进展,并对超短脉冲激光加工在该领域的发展方向进行总结和展望。 展开更多
关键词 激光技术 超短脉冲激光 多光子还原 表面等离子体共振 双光子聚合 光波导
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