Residual stress modeling of mitigated fused silica damage sites with CO_(2)laser annealing

A numerical model based on measured fictive temperature distributions is explored to evaluate the residual stress fields of CO_(2)laser-annealed mitigated fused silica damage sites.The proposed model extracts the residual strain from the differences in thermoelastic contraction of fused silica with different fictive temperatures from the initial frozen-in temperatures to ambient temperature.The residual stress fields of mitigated damage sites for the CO_(2)laser-annealed case are obtained by a finite element analysis of equilibrium equations and constitutive equations.The simulated results indicate that the proposed model can accurately evaluate the residual stress fields of laser-annealed mitigated damage sites with a complex thermal history.The calculated maximum hoop stress is in good agreement with the reported experimental result.The estimated optical retardance profiles from the calculated radial and hoop stress fields are consistent with the photoelastic measurements.These results provide sufficient evidence to demonstrate the suitability of the proposed model for describing the residual stresses of mitigated fused silica damage sites after CO_(2)laser annealing.

Mitigation of laser damage growth in fused silica by using a non-evaporative technique

A non-evaporative technique is used to mitigate damage sites with lateral sizes in a range from 50 μm to 400 μm and depths smaller than 100 μm.The influence of the pulse frequency of a CO 2 laser on the mitigation effect is studied.It is found that a more symmetrical and smooth mitigation crater can be obtained by increasing the laser pulse frequency form 0.1 to 20 kHz.Furthermore,the sizes of laser-affected and distorted zones decrease with the increase of the laser pulse frequency,leading to less degradation of the wave-front quality of the conditioned sample.The energy density of the CO 2 laser beam is introduced for selecting the mitigation parameters.The damage sites can be successfully mitigated by increasing the energy density in a ramped way.Finally,the laser-induced damage threshold（LIDT） of the mitigated site is tested using 355 nm laser beam with a small spot（0.23 mm 2） and a large spot（3.14 mm 2）,separately.It is shown that the non-evaporative mitigation technique is a successful method to stop damage re-initiation since the average LIDTs of mitigated sites tested with small or large laser spots are higher than that of pristine material.

Two localized CO_2 laser treatment methods for mitigation of UV damage growth in fused silica

Two methods：high-power,short-time,single-shot irradiation（Method A） and low-power,long-time,multi-shot irradiation（Method B） are investigated to mitigate the UV damage growth in fused silica by using a 10.6-μm CO2 laser.To verify the mitigation effect of the two methods,the laser induced damage thresholds（LIDTs） of the mitigated sites are tested with a 355-nm,6.4-ns Nd：YAG laser,and the light modulation of the mitigation sites are tested with a 351-nm continuous Nd：YLF laser.The mitigated damaged sites treated with the two methods have almost the same LIDTs,which can recover to the level of pristine material.Compared with Method A,Method B produces mitigated sites with low crater depth and weak light modulation.In addition,there is no raised rim or re-deposited debris formed around the crater edge for Method B.Theoretical calculation is utilized to evaluate the central temperature of the CO2 laser beam irradiated zone and the radius of the crater.It is indicated that the calculated results are consistent with the experimental results.

MICROSTRUCTURE IN LASER FUSED HIGH SPEED STEEL W6Mo5Cr4V2(M2)

Microstructure of the deepest zone of high speed steel W6Mo5Cr4V2(M2)melt after laser fu-sion was found to be so fine as the ehill zone of a solidified ingot.When narrower chill zoneformed,the long columnar dendrites grow into the melt and then the fine equiaxed cellularstructure appears in upper melt region nearly surface.The substructure of cellular grains anddendrites was observed to consist of martensite and retained austenile,while the carbides asM_6C_■ Cr_7C_3 and MC distributed at their boundaries.It is believed that the highermicrohardness up to HV_(0.1)=865-960 of the laser fused structure of the alloy is due to the oc-currence of martensite.

Influence of secondary treatment with CO_2 laser irradiation for mitigation site on fused silica surface

The ablation debris and raised rim, as well as residual stress and deep crater will be formed during the mitigation of damage site with a CO2 laser irradiation on fused silica surface, which greatly affects the laser damage resistance of optics. In this study, the experimental study combined with numerical simulation is utilized to investigate the effect of the secondary treatment on a mitigated site by CO2laser irradiation. The results indicate that the ablation debris and the raised rim can be completely eliminated and the depth of crater can be reduced. Notable results show that the residual stress of the mitigation site after treatment will reduce two-thirds of the original stress. Finally, the elimination and the controlling mechanism of secondary treatment on the debris and raised rim, as well as the reasons for changing the profile and stress are analyzed. The results can provide a reference for the optimization treatment of mitigation sites by CO2laser secondary treatment.

Irradiation effects of CO_2 laser parameters on surface morphology of fused silica

To understand the surface morphology evolution of fused silica induced by 10.6μm CO2 laser irradiation at different parameters, this paper reports that optical microscopy, profilometry, and hydrophilicity tests are utilized to characterize the surface structure and roughness of the laser irradiated area. The results show that three typical surface morphologies and two typical hydrophilicity test images are observed at different laser powers and pulse durations. The correlations between surface temperature and surface morphology as well as hydrophilicity behaviours are presented. The different hydrophilicity behaviours are related to surface structures of the laser-induced crater and thermal diffusion area. The thermal diffusion length monotonously increases with increasing laser power and pulse duration. The crater width is almost determined by the laser beam size. The crater depth is more sensitive to the laser power and pulse duration than the crater width.

Improvement of laser damage thresholds of fused silica by ultrasonic-assisted hydrofluoric acid etching

Polished fused silica samples were etched for different durations by using hydrofluoric（HF） acid solution with HF concentrations in an ultrasonic field. Surface and subsurface polishing residues and molecular structure parameters before and after the etching process were characterized by using a fluorescence microscope and infrared（IR） spectrometer, respectively. The laser induced damage thresholds（LIDTs） of the samples were measured by using pulsed nanosecond laser with wavelength of 355 nm. The results showed that surface and subsurface polishing residues can be effectively reduced by the acid etching process, and the LIDTs of fused silica are significantly improved. The etching effects increased with the increase of the HF concentration from 5 wt.% to 40 wt.%. The amount of polishing residues decreased with the increase of the etching duration and then kept stable. Simultaneously, with the increase of the etching time, the mechanical strength and molecular structure were improved.

Heavy-ion and pulsed-laser single event effects in 130-nm CMOS-based thin/thick gate oxide anti-fuse PROMs

Single event effects of 1-T structure programmable read-only memory(PROM) devices fabricated with a 130-nm complementary metal oxide semiconductorbased thin/thick gate oxide anti-fuse process were investigated using heavy ions and a picosecond pulsed laser. The cross sections of a single event upset(SEU) for radiationhardened PROMs were measured using a linear energy transfer(LET) ranging from 9.2 to 95.6 MeV cm^2mg^(-1).The result indicated that the LET threshold for a dynamic bit upset was ～ 9 MeV cm^2mg^(-1), which was lower than the threshold of ～ 20 MeV cm^2mg^(-1) for an address counter upset owing to the additional triple modular redundancy structure present in the latch. In addition, a slight hard error was observed in the anti-fuse structure when employing209 Bi ions with extremely high LET values(～ 91.6 MeV cm^2mg^(-1)) and large ion fluence(～ 1×10~8 ions cm^(-2)). To identify the detailed sensitive position of a SEU in PROMs, a pulsed laser with a 5-μm beam spot was used to scan the entire surface of the device.This revealed that the upset occurred in the peripheral circuits of the internal power source and I/O pairs rather than in the internal latches and buffers. This was subsequently confirmed by a ^(181)Ta experiment. Based on the experimental data and a rectangular parallelepiped model of the sensitive volume, the space error rates for the used PROMs were calculated using the CRèME-96 prediction tool. The results showed that this type of PROM was suitable for specific space applications, even in the geosynchronous orbit.

Optical modulation of repaired damage site on fused silica produced by CO2 laser rapid ablation mitigation

CO2 laser rapid ablation mitigation(RAM)of fused silica has been used in high-power laser systems owing to its advantages of high efficiency,and ease of implementing batch and automated repairing.In order to study the effect of repaired morphology of RAM on laser modulation and to improve laser damage threshold of optics,an finite element method(FEM)mathematical model of 351 nm laser irradiating fused silica optics is developed based on Maxwell electromagnetic field equations,to explore the 3D near-field light intensity distribution inside optics with repaired site on its surface.The influences of the cone angle and the size of the repaired site on incident laser modulation are studied as well.The results have shown that for the repaired site with a cone angle of 73.3°,the light intensity distribution has obvious three-dimensional characteristics.The relative light intensity on z-section has a circularly distribution,and the radius of the annular intensification zone increases with the decrease of z.While the distribution of maximum relative light intensity on y-section is parabolical with the increase of y.As the cone angle of the repaired site decreases,the effect of the repaired surface on light modulation becomes stronger,leading to a weak resistance to laser damage.Moreover,the large size repaired site would also reduce the laser damage threshold.Therefore,a repaired site with a larger cone angle and smaller size is preferred in practical CO2 laser repairing of surface damage.This work will provide theoretical guidance for the design of repaired surface topography,as well as the improvement of RAM process.

Time-dependent photothermal characterization on damage of fused silica induced by pulsed 355-nm laser with high repetition rate

Time-dependent damage to fused silica induced by high frequency ultraviolet laser is investigated.Photothermal spectroscopy(PTS) and optical microscopy(OM) are utilized to characterize the evolution of damage pits with irradiation time.Experimental results describe that in the pre-damage stage of fused silica sample irradiated by 355-nm laser,the photothermal spectrum signal undergoes a process from scratch to metamorphism due to the absorption of laser energy by defects.During the visible damage stage of fused siliea sample,the photothermal spectrum signal decreases gradually from the maximum value because of the aggravation of the damage and the splashing of the material.This method can be used to estimate the operation lifetime of optical elements in engineering.

Numerical simulation of modulation to incident laser by submicron to micron surface contaminants on fused silica

Modulation caused by surface/subsurface contaminants is one of the important factors for laser-induced damage of fused silica. In this work, a three-dimensional finite-difference time-domain （3D-FDTD） method is employed to simulate the electric field intensity distribution in the vicinity of particulate contaminants on fused silica surface. The simulated results reveal that the contaminant on both the input and output surfaces plays an important role in the electric field mod- ulation of the incident laser. The influences of the shape, size, embedded depth, dielectric constant （er）, and the number of contaminant particles on the electric field distribution are discussed in detail. Meanwhile, the corresponding physical mechanism is analyzed theoretically.

Subsurface defect characterization and laser-induced damage performance of fused silica optics polished with colloidal silica and ceria

This paper mainly focuses on the influence of colloidal silica polishing on the damage performance of fused silica optics. In this paper, nanometer sized colloidal silica and micron sized ceria are used to polish fused silica optics. The colloidal silica polished samples and ceria polished samples exhibit that the root-mean-squared （RMS） average surface roughness values are 0.7 nm and 1.0 rim, respectively. The subsurface defects and damage performance of the polished optics are analyzed and discussed. It is revealed that colloidal silica polishing will introduce much fewer absorptive con- taminant elements and subsurface damages especially no trailing indentation fracture. The 355-nm laser damage test reveals that each of the fused silica samples polished with colloidal silica has a much higher damage threshold and lower damage density than ceria polished samples. Colloidal silica polishing is potential in manufacturing high power laser optics.

Incident laser modulation of a repaired damage site with a rim in fused silica rear subsurface

Local CO2 laser treatment has proved to be an effective method to prevent the 351-nm laser-induced damage sites in a fused silica surface from exponentially growing, which is responsible for limiting the lifetime of optics in high fluence laser systems. However, the CO2 laser induced ablation crater is often surrounded by a raised rim at the edge, which can also result in the intensification of transmitted ultraviolet light that may damage the downstream optics. In this work, the three-dimensional finite-difference time-domain method is developed to simulate the distribution of electrical field intensity in the vicinity of the CO2 laser mitigated damage site located in the exit subsurface of fused silica. The simulated results show that the repaired damage sites with raised rims cause more notable modulation to the incident laser than those without rims.Speeifically,we present a theoretical model of using dimpled patterning to control the rim structure around the edge of repaired damage sites to avoid damage to downstream optics. The calculated results accord well with previous experimental results and the underlying physical mechanism is analysed in detail

Numerical simulation of the modulation to incident laser by the repaired damage site in a fused silica subsurface

One of the main factors of laser induced damage is the modulation to incident laser which is caused by the defect in the subsurface of the fused silica. In this work, the repaired damage site irradiated by CO2 laser is simplified to a Gaussian rotation according to the corresponding experimental results. Then, the three-dimensional finite-difference time-domain method is employed to simulate the electric field intensity distribution in the vicinity of this kind of defect in fused silica front subsurface. The simulated results show that the modulation is notable, the Emax is about 2.6 times the irradiated electric field intensity in the fused silica with the damage site （the width is 1.5 μm and depth is 2.3 μm） though the damage site is repaired by CO2 laser. The phenomenon and the theoretical result of the annular laser enhancement existed on the rear surface are first verified effectively, which agrees well with the corresponding experimental results. The relations between the maximal electric field intensity in fused silica with defect depth and width are given respectively. Meanwhile, the corresponding physical mechanism is analysed theoretically in detail.

Damage characteristics of laser plasma shock wave on rear surface of fused silica glass

The damage to the rear surface of fused silica under the action of high power laser is more severe than that incurred by the front surface,which hinders the improvement in the energy of the high power laser device.For optical components,the ionization breakdown by laser is a main factor causing damage,particularly with laser plasma shock waves,which can cause large-scale fracture damage in fused silica.In this study,the damage morphology is experimentally investigated,and the characteristics of the damage point are obtained.In the theoretical study,the coupling and transmission of the shock wave in glass are investigated based on the finite element method.Thus,both the magnitude and the orientation of stress are obtained.The damage mechanism of the glass can be explained based on the fracture characteristics of glass under different stresses and also on the variation of the damage zone’s Raman spectrum.In addition,the influence of the glass thickness on the damage morphology is investigated.The results obtained in this study can be used as a reference in understanding the characteristics and mechanism of damage characteristics induced by laser plasma shock waves.

ATR-FTIR spectroscopic studies on density changes of fused silica induced by localized CO_2 laser treatment

The surface density changes of the central region of the sites treated by using the CO_2 laser-based non-evaporative damage mitigation for fused silica are investigated by attenuated total reflectance-Fourier transform infrared spectroscopy（ATR-FTIR）.The ATR-FTIR peak shifts of the treated sites of fused silica are monitored to determine the changes of the corresponding density.For the quenching treated sites,the surface density is increased by（0.24±0.01）%compared with the initial density but the laser annealing by the exposure of a power ramp down after damage mitigation effectively suppresses the structural changes of treated sites,which could reduce the increase of the corresponding density to（0.08±0.01）%.The results provide sufficient evidence that the laser annealing by a power ramp down after damage mitigation has a positive effect on the control of the structural change induced by CO_2 laser-based damage mitigation.

Methodology for the Determination of Trace and Minor Elements in Minerals and Fused Rock Glasses with Laser Ablation Associated with Quadrupole Inductively Coupled Plasma Mass Spectrometry (LA-Q-ICPMS)

The laser ablation technique, coupled with the use of quadrupole ICPMS equipment, proved a powerful tool for determination of trace elements in minerals. At the University of S?o Paulo, the technique was implemented for the study of minerals such as olivines, pyroxenes and biotites. The main problem to be tackled is the availability of proper multi-element reference materials usually prepared synthetically as glasses with various compositions by NIST and fused rock glasses by the Max Planck Institute (MPI) and USGS (basalts, andesite, quartz diorite, komatiites). The best tested ones are the NIST glasses, with good homogeneity and reliable compositional data for over 40 elements. Results are here presented that test additional RM’s. NIST 612 and 610 were used for calibration purposes. The best results were obtained for rock glasses USGS basalts BHVO-2G, BIR- 1G and BCR-2G (better homogeneity and recommended values). Our contribution tests especially the MPI komatiites glasses GOR-128 and GOR-132G, basalts KL-2G and ML-3BG, andesite StHs-6/ 80G and quartz diorite T-1G, discussing homogeneity issues and providing new data. There is a need for additional preparation of reliable reference materials.

Surface defects,stress evolution,and laser damage enhancement mechanism of fused silica under oxygen-enriched condition

Oxygen ions(O;)were implanted into fused silica at a fixed fluence of 1×10^(17) ions/cm^(2) with different ion energies ranging from 10 ke V to 60 ke V.The surface roughness,optical properties,mechanical properties and laser damage performance of fused silica were investigated to understand the effect of oxygen ion implantation on laser damage resistance of fused silica.The ion implantation accompanied with sputtering effect can passivate the sub-/surface defects to reduce the surface roughness and improve the surface quality slightly.The implanted oxygen ions can combine with the structural defects(ODCs and E′centers)to reduce the defect densities and compensate the loss of oxygen in fused silica surface under laser irradiation.Furthermore,oxygen ion implantation can reduce the Si-O-Si bond angle and densify the surface structure,thus introducing compressive stress in the surface to strengthen the surface of fused silica.Therefore,the laser induced damage threshold of fused silica increases and the damage growth coefficient decreases when ion energy up to30 ke V.However,at higher ion energy,the sputtering effect is weakened and implantation becomes dominant,which leads to the surface roughness increase slightly.In addition,excessive energy aggravates the breaking of Si-O bonds.At the same time,the density of structural defects increases and the compressive stress decreases.These will degrade the laser laser-damage resistance of fused silica.The results indicate that oxygen ion implantation with appropriate ion energy is helpful to improve the damage resistance capability of fused silica components.

Correlation of polishing-induced shallow subsurface damages with laser-induced gray haze damages in fused silica optics

Laser-induced damage in fused silica optics greatly restricts the performances of laser facilities. Gray haze damage,which is always initiated on ceria polished optics, is one of the most important damage morphologies in fused silica optics.In this paper, the laser-induced gray haze damages of four fused silica samples polished with CeO2, Al2O3, ZrO2, and colloidal silica slurries are investigated. Four samples all present gray haze damages with much different damage densities.Then, the polishing-induced contaminant and subsurface damages in four samples are analyzed. The results reveal that the gray haze damages could be initiated on the samples without Ce contaminant and are inclined to show a tight correlation with the shallow subsurface damages.

Cooling rate calibration and mapping of ultra-short pulsed laser modifications in fused silica by Raman and Brillouin spectroscopy

This paper focuses on the preparation of a new extended set of calibrations of cooling rate(fictive temperature)in fused silica determined by inelastic light scattering and its subsequent use to characterize the local cooling rate distribution in ultra-short pulsed(USP)laser modification.In order to determine the thermal history(e.g.cooling rate and fictive temperature)of fused silica,high-resolution inelastic light-scattering experiments(Raman and Brillouin spectroscopy)were investigated.Calibrations were performed and compared to the existing literature to quantify structural changes due to a change of fictive temperature.Compared to existing calibrations,this paper provides an extension to lower and higher cooling rates.Using this new set of calibrations,we characterized a USP laser modification in fused silica and calculated the local fictive temperature distribution.An equation relating the fictive temperature(Tf)to cooling rates is given.A maximum cooling rate of 3000 K min-1 in the glass transition region around 1200℃ was deduced from the Raman analysis.The Brillouin observations are sensitive to both the thermal history and the residual stress.By comparing the Raman and Brillouin observations,we extracted the local residual stress distribution with high spatial resolution.For the first time,combined Raman and Brillouin inelastic light scattering experiments show the local distribution of cooling rates and residual stresses(detailed behavior of the glass structure)in the interior and the surrounding of an USP laser modified zone.