The ion line of 434.8 nm and atom line of 419.8 nm of Ar plasma produced by an inductively coupled plasma （ICP） were measured by optical emission spectroscopy and the influences from the working gas pressure, radio-...The ion line of 434.8 nm and atom line of 419.8 nm of Ar plasma produced by an inductively coupled plasma （ICP） were measured by optical emission spectroscopy and the influences from the working gas pressure, radio-frequency （RF） power and different positions in the discharge chamber on the line intensities were investigated in this study. It was found that the intensity of Ar atom line increased firstly and then saturated with the increase of the pressure. The line intensity of Ar^＋, on the other hand, reached a maximum value and then decreased along with the pressure. The intensity of the line in an RF discharge also demonstrated a jumping mode and a hysteresis phenomenon with the RF power. When the RF power increased to 400 W, the discharge jumped from the E-mode to the H-mode where the line intensity of Ar atom demonstrated a sudden increase, while the intensity of Ar^＋ ion only changed slightly. If the RF power decreased from a high value, e.g., 1000 W, the discharge would jump from the H-mode back to the E-mode at a power of 300 W. At this time the intensities of Ar and Ar^＋ lines would also decrease sharply. It was also noticed in this paper that the intensity of the ion line depended on the detective location in the chamber, namely at the bottom of the chamber the line was more intense than that in the middle of the chamber, but less intense than at the top, which is considered to be related to the capacitance coupling ability of the ICP plasma in different discharge areas.展开更多
Electrical and optical properties of an argon plasma jet were characterized. In particular, effects of an additive gas, namely nitrogen or oxygen, on these properties were studied in detail. The plasma jet was found t...Electrical and optical properties of an argon plasma jet were characterized. In particular, effects of an additive gas, namely nitrogen or oxygen, on these properties were studied in detail. The plasma jet was found to be of a glow-like discharge, which scarcely changed upon the injection of an additive gas, either directly or through a glass capillary. Optical emission spectroscopy characterization revealed that excited argon atoms were the predominant active species in this plasma jet. Metastable argon atoms were highly quenched, and N2（C3yIu） became the main energy carrier following nitrogen injection. When oxygen was added to the afterglow zone through a glass capillary, no significant quenching effect was observed and the number of oxygen atoms decreased with the increase in oxygen concentration. Finally, to demonstrate an application of this plasma jet, a high-density polyethylene surface was treated with argon, argon/nitrogen, and argon/oxygen plasmas.展开更多
Measurement of the oxygen dissociation fraction in RF low pressure oxygen/argon plasma using optical emission spectrometry is presented. The oxygen dissociation fraction and its evolutions as functions of operational ...Measurement of the oxygen dissociation fraction in RF low pressure oxygen/argon plasma using optical emission spectrometry is presented. The oxygen dissociation fraction and its evolutions as functions of operational parameters were determined using argon as the actinometer. At a pressure of 30 Pa, the oxygen dissociation fraction decreased from 13.4% to 9.5% as the input power increased from 10 W to 70 W. At an input power of 50 W, the oxygen dissociation fraction decreased from 12.3% to 7.7% when the gas pressure increased from 10 Pa to 40 Pa. The influences of operational parameters on the generation of atomic oxygen were also discussed.展开更多
基金supported by National Natural Science Foundation of China (Nos.50277003,10505005)
文摘The ion line of 434.8 nm and atom line of 419.8 nm of Ar plasma produced by an inductively coupled plasma （ICP） were measured by optical emission spectroscopy and the influences from the working gas pressure, radio-frequency （RF） power and different positions in the discharge chamber on the line intensities were investigated in this study. It was found that the intensity of Ar atom line increased firstly and then saturated with the increase of the pressure. The line intensity of Ar^＋, on the other hand, reached a maximum value and then decreased along with the pressure. The intensity of the line in an RF discharge also demonstrated a jumping mode and a hysteresis phenomenon with the RF power. When the RF power increased to 400 W, the discharge jumped from the E-mode to the H-mode where the line intensity of Ar atom demonstrated a sudden increase, while the intensity of Ar^＋ ion only changed slightly. If the RF power decreased from a high value, e.g., 1000 W, the discharge would jump from the H-mode back to the E-mode at a power of 300 W. At this time the intensities of Ar and Ar^＋ lines would also decrease sharply. It was also noticed in this paper that the intensity of the ion line depended on the detective location in the chamber, namely at the bottom of the chamber the line was more intense than that in the middle of the chamber, but less intense than at the top, which is considered to be related to the capacitance coupling ability of the ICP plasma in different discharge areas.
文摘Electrical and optical properties of an argon plasma jet were characterized. In particular, effects of an additive gas, namely nitrogen or oxygen, on these properties were studied in detail. The plasma jet was found to be of a glow-like discharge, which scarcely changed upon the injection of an additive gas, either directly or through a glass capillary. Optical emission spectroscopy characterization revealed that excited argon atoms were the predominant active species in this plasma jet. Metastable argon atoms were highly quenched, and N2（C3yIu） became the main energy carrier following nitrogen injection. When oxygen was added to the afterglow zone through a glass capillary, no significant quenching effect was observed and the number of oxygen atoms decreased with the increase in oxygen concentration. Finally, to demonstrate an application of this plasma jet, a high-density polyethylene surface was treated with argon, argon/nitrogen, and argon/oxygen plasmas.
基金supported by the Beijing Municipal Education Commission of China(No.KM201010015005)Beijing Key Laboratory of Printing & Packaging Materials and Technology of Beijing Institute of Graphic Communication of China(No.KF201005)
文摘Measurement of the oxygen dissociation fraction in RF low pressure oxygen/argon plasma using optical emission spectrometry is presented. The oxygen dissociation fraction and its evolutions as functions of operational parameters were determined using argon as the actinometer. At a pressure of 30 Pa, the oxygen dissociation fraction decreased from 13.4% to 9.5% as the input power increased from 10 W to 70 W. At an input power of 50 W, the oxygen dissociation fraction decreased from 12.3% to 7.7% when the gas pressure increased from 10 Pa to 40 Pa. The influences of operational parameters on the generation of atomic oxygen were also discussed.
