The development of InGaAs/InP single-photon avalanche photodiodes(SPADs)necessitates the utiliza-tion of a two-element diffusion technique to achieve accurate manipulation of the multiplication width and the dis-tribu...The development of InGaAs/InP single-photon avalanche photodiodes(SPADs)necessitates the utiliza-tion of a two-element diffusion technique to achieve accurate manipulation of the multiplication width and the dis-tribution of its electric field.Regarding the issue of accurately predicting the depth of diffusion in InGaAs/InP SPAD,simulation analysis and device development were carried out,focusing on the dual diffusion behavior of zinc atoms.A formula of X_(j)=k√t-t_(0)+c to quantitatively predict the diffusion depth is obtained by fitting the simulated twice-diffusion depths based on a two-dimensional(2D)model.The 2D impurity morphologies and the one-dimensional impurity profiles for the dual-diffused region are characterized by using scanning electron micros-copy and secondary ion mass spectrometry as a function of the diffusion depth,respectively.InGaAs/InP SPAD devices with different dual-diffusion conditions are also fabricated,which show breakdown behaviors well consis-tent with the simulated results under the same junction geometries.The dark count rate(DCR)of the device de-creased as the multiplication width increased,as indicated by the results.DCRs of 2×10^(6),1×10^(5),4×10^(4),and 2×10^(4) were achieved at temperatures of 300 K,273 K,263 K,and 253 K,respectively,with a bias voltage of 3 V,when the multiplication width was 1.5µm.These results demonstrate an effective prediction route for accu-rately controlling the dual-diffused zinc junction geometry in InP-based planar device processing.展开更多
采用分层吸收渐变电荷倍增(SAGCM)结构,通过两次扩散、多层介质淀积、AuZn p 型欧姆接触、AuGeNi n 型欧姆接触等工艺,设计制造了正面入射平面 InP/InGaAs 雪崩光电二极管,器件利用 InGaAs做吸收层,InP 做增益层,光敏面直径50μm;测试...采用分层吸收渐变电荷倍增(SAGCM)结构,通过两次扩散、多层介质淀积、AuZn p 型欧姆接触、AuGeNi n 型欧姆接触等工艺,设计制造了正面入射平面 InP/InGaAs 雪崩光电二极管,器件利用 InGaAs做吸收层,InP 做增益层,光敏面直径50μm;测试结果表明器件有正常的光响应特性,击穿电压32～42 V,在低于击穿电压2 V 左右可以得到大约10 A/W 的光响应度,在0到小于击穿电压1 V 的偏压范围内,暗电流只有1 nA 左右;器件在2.7 GHz 以下有平坦的增益。展开更多
Single-photon detectors(SPDs)are the most sensitive instruments for light detection.In the near-infrared range,SPDs based on III–V compound semiconductor avalanche photodiodes have been extensively used during the pa...Single-photon detectors(SPDs)are the most sensitive instruments for light detection.In the near-infrared range,SPDs based on III–V compound semiconductor avalanche photodiodes have been extensively used during the past two decades for diverse applications due to their advantages in practicality including small size,low cost and easy operation.In the past decade,the rapid developments and increasing demands in quantum information science have served as key drivers to improve the device performance of single-photon avalanche diodes and to invent new avalanche quenching techniques.This Review aims to introduce the technology advances of InGaAs/InP single-photon detector systems in the telecom wavelengths and the relevant quantum communication applications,and particularly to highlight recent emerging techniques such as high-frequency gating at GHz rates and free-running operation using negative-feedback avalanche diodes.Future perspectives of both the devices and quenching techniques are summarized.展开更多
Avalanche-photodiode-based near-infrared single-photon detectors have seen rapid development in the last two decades because of their enormous internal gain,high sensitivity,fast response,small vol-ume,and ease of int...Avalanche-photodiode-based near-infrared single-photon detectors have seen rapid development in the last two decades because of their enormous internal gain,high sensitivity,fast response,small vol-ume,and ease of integration.The InGaAs/InP near-infrared single-photon detector is the most widely used avalanche diode at present.Its device performance is still being continuously improved through the optimization of device structure and external quenching circuits.This paper analyzes the latest development and application of these InGaAs/InP photodiodes,then briefly re views other near-infrared single-photon detection technologies based on new materials and new mechanisms.展开更多
Using InGaAs/InP avalanche photodiodes as sensors and coaxial cables as reflection lines to reject spike signals, we have firstly employed the ＂timing filtering＂ gates to pick out avalanche signals and have realized...Using InGaAs/InP avalanche photodiodes as sensors and coaxial cables as reflection lines to reject spike signals, we have firstly employed the ＂timing filtering＂ gates to pick out avalanche signals and have realized the single photon detection at 1550nm in the temperature range of thermoelectric cooling. A ratio of the dark count rate to the detection efficiency was obtained to be 9 × 10^-5 at 223K. When the detector is applied to a practical quantum key distribution system, the transmission distance can reach 89.5km and the repetition rate can reach 0.33 MHz.展开更多
基金Supported by Shanghai Natural Science Foundation(22ZR1472600).
文摘The development of InGaAs/InP single-photon avalanche photodiodes(SPADs)necessitates the utiliza-tion of a two-element diffusion technique to achieve accurate manipulation of the multiplication width and the dis-tribution of its electric field.Regarding the issue of accurately predicting the depth of diffusion in InGaAs/InP SPAD,simulation analysis and device development were carried out,focusing on the dual diffusion behavior of zinc atoms.A formula of X_(j)=k√t-t_(0)+c to quantitatively predict the diffusion depth is obtained by fitting the simulated twice-diffusion depths based on a two-dimensional(2D)model.The 2D impurity morphologies and the one-dimensional impurity profiles for the dual-diffused region are characterized by using scanning electron micros-copy and secondary ion mass spectrometry as a function of the diffusion depth,respectively.InGaAs/InP SPAD devices with different dual-diffusion conditions are also fabricated,which show breakdown behaviors well consis-tent with the simulated results under the same junction geometries.The dark count rate(DCR)of the device de-creased as the multiplication width increased,as indicated by the results.DCRs of 2×10^(6),1×10^(5),4×10^(4),and 2×10^(4) were achieved at temperatures of 300 K,273 K,263 K,and 253 K,respectively,with a bias voltage of 3 V,when the multiplication width was 1.5µm.These results demonstrate an effective prediction route for accu-rately controlling the dual-diffused zinc junction geometry in InP-based planar device processing.
文摘采用分层吸收渐变电荷倍增(SAGCM)结构,通过两次扩散、多层介质淀积、AuZn p 型欧姆接触、AuGeNi n 型欧姆接触等工艺,设计制造了正面入射平面 InP/InGaAs 雪崩光电二极管,器件利用 InGaAs做吸收层,InP 做增益层,光敏面直径50μm;测试结果表明器件有正常的光响应特性,击穿电压32～42 V,在低于击穿电压2 V 左右可以得到大约10 A/W 的光响应度,在0到小于击穿电压1 V 的偏压范围内,暗电流只有1 nA 左右;器件在2.7 GHz 以下有平坦的增益。
基金We acknowledge Wen-Hao Jiang for technical assistance.This work has been financially supported by the National Basic Research Program of China(Grant No.2013CB336800)the National High-Tech R&D Program(Grant No.2011AA010802)+1 种基金the National Natural Science Foundation of China(Grant No.61275121)the Innovative Cross-disciplinary Team Program of CAS.HZ acknowledges the financial support from the Swiss NCCR QSIT.
文摘Single-photon detectors(SPDs)are the most sensitive instruments for light detection.In the near-infrared range,SPDs based on III–V compound semiconductor avalanche photodiodes have been extensively used during the past two decades for diverse applications due to their advantages in practicality including small size,low cost and easy operation.In the past decade,the rapid developments and increasing demands in quantum information science have served as key drivers to improve the device performance of single-photon avalanche diodes and to invent new avalanche quenching techniques.This Review aims to introduce the technology advances of InGaAs/InP single-photon detector systems in the telecom wavelengths and the relevant quantum communication applications,and particularly to highlight recent emerging techniques such as high-frequency gating at GHz rates and free-running operation using negative-feedback avalanche diodes.Future perspectives of both the devices and quenching techniques are summarized.
基金supported by the Major Science and Technology Project of Yunnan province(Grant No.2018ZI002)。
文摘Avalanche-photodiode-based near-infrared single-photon detectors have seen rapid development in the last two decades because of their enormous internal gain,high sensitivity,fast response,small vol-ume,and ease of integration.The InGaAs/InP near-infrared single-photon detector is the most widely used avalanche diode at present.Its device performance is still being continuously improved through the optimization of device structure and external quenching circuits.This paper analyzes the latest development and application of these InGaAs/InP photodiodes,then briefly re views other near-infrared single-photon detection technologies based on new materials and new mechanisms.
基金Supported by the National Pundamental Research Programme of China under Grant No 2001CB309301, the National Natural Science Foundation of China under Grant Nos 60121503 and 60537020, and the Knowledge Innovation Project of Chinese Academy of Sciences.
文摘Using InGaAs/InP avalanche photodiodes as sensors and coaxial cables as reflection lines to reject spike signals, we have firstly employed the ＂timing filtering＂ gates to pick out avalanche signals and have realized the single photon detection at 1550nm in the temperature range of thermoelectric cooling. A ratio of the dark count rate to the detection efficiency was obtained to be 9 × 10^-5 at 223K. When the detector is applied to a practical quantum key distribution system, the transmission distance can reach 89.5km and the repetition rate can reach 0.33 MHz.
