The objective of this research is to prepare specially designed surface texture on hard steel surface by electrochemical micromachining (EM) and to incorporate electroless plated Ag/MoS2 solid lubricant coating into t...The objective of this research is to prepare specially designed surface texture on hard steel surface by electrochemical micromachining (EM) and to incorporate electroless plated Ag/MoS2 solid lubricant coating into the dimples of EM textured steel surface to effectively reduce friction and wear of steel-steel contacts. The friction and wear behavior of the Ag/MoS2 solid lubricant coating on EM textured steel surface was evaluated in relation to the size and spacing of the dimples thereon. The microstructure of as-plated Ag/MoS2 solid lubricant coating and the morphology and elemental composition of the worn coating surface and counterface steel surface were analyzed by means of optical microscopy, scanning electron microscopy, and energy dispersive spectrometry. It is found that electroless plated Ag/MoS2 coating is able to greatly reduce the friction and wear of the EM textured steel disc coupled with GCr15 steel ring, mainly because of the formation of solid self-lubricating layer on the EM textured steel surface and of transferred lubricating film on counterface steel surface. The diameter and spacing of the dimples are suggested as 500 μm for acquiring the best wear resistance of the hard steel discs after electrochemical micromachining treatment and electroless plating of Ag/MoS2 solid lubricating coating.展开更多
Traditional MEMS （microelectromechanical system） design methodology is not a structured method and has become an obstacle for MEMS creative design. In this paper, a novel method of mask synthesis and verification fo...Traditional MEMS （microelectromechanical system） design methodology is not a structured method and has become an obstacle for MEMS creative design. In this paper, a novel method of mask synthesis and verification for surface micro-machined MEMS is proposed, which is based on the geometric model of a MEMS device. The emphasis is focused on synthesizing the masks at the basis of the layer model generated from the geometric model of the MEMS device. The method is comprised of several steps： the correction of the layer model, the generation of initial masks and final masks including multi-layer etch masks, and mask simulation. Finally some test resuhs are given.展开更多
A modified buffered-HF solution with NH4 F ： glycerol ： HF（4 ： 2 ： 1）is studied. With the implementation of a heating and agitating mechanism, this method is applied in a sacrificial layer etching scheme that in...A modified buffered-HF solution with NH4 F ： glycerol ： HF（4 ： 2 ： 1）is studied. With the implementation of a heating and agitating mechanism, this method is applied in a sacrificial layer etching scheme that increases the selectivity between silicon dioxide and aluminum. The etching rates of SiO2 and Al as a function of solution temperature are determined. Moreover,the effects of adding glycerol and agitating the etchant are examined and compared with this method. Finally, this method is tested on an actual device, and its efficiency is scrutinized.展开更多
The application of surface textures has been employed to improve the tribological performance of various mechanical components. Various techniques have been used for the application of surface textures such as micro-d...The application of surface textures has been employed to improve the tribological performance of various mechanical components. Various techniques have been used for the application of surface textures such as micro-dimple arrays, but the fabrication of such arrays on cylindrical inner surfaces remains a challenge. In this study, a dry-film photoresist is used as a mask during through-mask electrochemical micromachining to successfully prepare micro-dimple arrays with dimples 94 lm in diameter and 22.7 lm deep on cylindrical inner surfaces, with a machining time of 9 s and an applied voltage of 8 V. The versatility of this method is demonstrated, as are its potential low cost and high efficiency. It is also shown that for a fixed dimple depth, a smaller dimple diameter can be obtained using a combination of lower current density and longer machining time in a passivating sodium nitrate electrolyte.展开更多
Surface geometrical features and their function- ality depend on the manufacturing process which is employed for fabrication of surface structures. Maskless electrochemical micromachining （EMM） is used to generate v...Surface geometrical features and their function- ality depend on the manufacturing process which is employed for fabrication of surface structures. Maskless electrochemical micromachining （EMM） is used to generate various surface structures for diminishing and controlling friction and wear to increase the lifetime, reliability, and efficiency of mechanical systems. This paper presents a method for the generation of structured surfaces on stainless steel （SS-304） surfaces by using maskless EMM. The micropatterned tool is composed of 800 μm diameter circular holes in a 5 × 5 matrix form. The indigenously developed EMM set up consists of an EMM cell, electrical power supply system, and a controlled vertical cross-flow electrolyte circulation arrangement to control the influence of process parameters during the generation of the micro features of structured surfaces. The single structured cathode tool is used for the mass production of structured surfaces with a short fabrication time in the industrial context by avoiding the use of an individual masking process for each workpiece. The process has been characterized in terms of the effects of predominant process parameters such as machining voltage, electrolyte concentration, duty ratio, pulsed frequency, and machining time on the machined surface characteristics such as current efficiency, machining accuracy, and depth of the circular pattern on the stainless steel surfaces. A mathematical model is also developed to determine the theoretical depth of the dimple pattern and correlate the theoretical depths with actual depths as obtained by experimentation. Moreover, an effort has been made to study the structuringcharacteristics on the basis of micrographs obtained duringthe EMM.展开更多
Electrochemical micromachining （EMM） technology for fabricating micro structures is presented in this article. By applying ultra short pulses, dissolution of a workpiece can be restricted to the region very close to...Electrochemical micromachining （EMM） technology for fabricating micro structures is presented in this article. By applying ultra short pulses, dissolution of a workpiece can be restricted to the region very close to the electrode. First, an EMM system for meeting the requirements of the EMM process is established. Second, sets of experiments is carried out to investigate the influence of some of the predominant electrochemical process parameters such as electrical parameters, feed rate, electrode geometry features and electrolyte composition on machining quality, especially the influences of pulse on time on shape precision and working end shape of electrode on machined surface quality. Finally, after the preliminary experiments, a complex microstructure with good shape precision and surface quality is successfully obtained.展开更多
基金supported by the the National NaturalScience Foundation of China(No.51205001)Foundation for Young Talents in College of Anhui Province(No.2012SQRL083ZD)the Talent Innovation Fund of An-hui Polytechnic University(No.S05305)
文摘The objective of this research is to prepare specially designed surface texture on hard steel surface by electrochemical micromachining (EM) and to incorporate electroless plated Ag/MoS2 solid lubricant coating into the dimples of EM textured steel surface to effectively reduce friction and wear of steel-steel contacts. The friction and wear behavior of the Ag/MoS2 solid lubricant coating on EM textured steel surface was evaluated in relation to the size and spacing of the dimples thereon. The microstructure of as-plated Ag/MoS2 solid lubricant coating and the morphology and elemental composition of the worn coating surface and counterface steel surface were analyzed by means of optical microscopy, scanning electron microscopy, and energy dispersive spectrometry. It is found that electroless plated Ag/MoS2 coating is able to greatly reduce the friction and wear of the EM textured steel disc coupled with GCr15 steel ring, mainly because of the formation of solid self-lubricating layer on the EM textured steel surface and of transferred lubricating film on counterface steel surface. The diameter and spacing of the dimples are suggested as 500 μm for acquiring the best wear resistance of the hard steel discs after electrochemical micromachining treatment and electroless plating of Ag/MoS2 solid lubricating coating.
基金Project supported by the National Natural Science Foundation of China (Nos. 60273057 and 60403049) and the National Basic Re-search Program (973) of China (No. 2002CB312106)
文摘Traditional MEMS （microelectromechanical system） design methodology is not a structured method and has become an obstacle for MEMS creative design. In this paper, a novel method of mask synthesis and verification for surface micro-machined MEMS is proposed, which is based on the geometric model of a MEMS device. The emphasis is focused on synthesizing the masks at the basis of the layer model generated from the geometric model of the MEMS device. The method is comprised of several steps： the correction of the layer model, the generation of initial masks and final masks including multi-layer etch masks, and mask simulation. Finally some test resuhs are given.
基金the National Natural Science Foundation of China(No.50575001)~~
文摘A modified buffered-HF solution with NH4 F ： glycerol ： HF（4 ： 2 ： 1）is studied. With the implementation of a heating and agitating mechanism, this method is applied in a sacrificial layer etching scheme that increases the selectivity between silicon dioxide and aluminum. The etching rates of SiO2 and Al as a function of solution temperature are determined. Moreover,the effects of adding glycerol and agitating the etchant are examined and compared with this method. Finally, this method is tested on an actual device, and its efficiency is scrutinized.
基金supported by the Joint Funds of the National Natural Science Foundation of China and Guangdong Province(No.U1134003)
文摘The application of surface textures has been employed to improve the tribological performance of various mechanical components. Various techniques have been used for the application of surface textures such as micro-dimple arrays, but the fabrication of such arrays on cylindrical inner surfaces remains a challenge. In this study, a dry-film photoresist is used as a mask during through-mask electrochemical micromachining to successfully prepare micro-dimple arrays with dimples 94 lm in diameter and 22.7 lm deep on cylindrical inner surfaces, with a machining time of 9 s and an applied voltage of 8 V. The versatility of this method is demonstrated, as are its potential low cost and high efficiency. It is also shown that for a fixed dimple depth, a smaller dimple diameter can be obtained using a combination of lower current density and longer machining time in a passivating sodium nitrate electrolyte.
文摘Surface geometrical features and their function- ality depend on the manufacturing process which is employed for fabrication of surface structures. Maskless electrochemical micromachining （EMM） is used to generate various surface structures for diminishing and controlling friction and wear to increase the lifetime, reliability, and efficiency of mechanical systems. This paper presents a method for the generation of structured surfaces on stainless steel （SS-304） surfaces by using maskless EMM. The micropatterned tool is composed of 800 μm diameter circular holes in a 5 × 5 matrix form. The indigenously developed EMM set up consists of an EMM cell, electrical power supply system, and a controlled vertical cross-flow electrolyte circulation arrangement to control the influence of process parameters during the generation of the micro features of structured surfaces. The single structured cathode tool is used for the mass production of structured surfaces with a short fabrication time in the industrial context by avoiding the use of an individual masking process for each workpiece. The process has been characterized in terms of the effects of predominant process parameters such as machining voltage, electrolyte concentration, duty ratio, pulsed frequency, and machining time on the machined surface characteristics such as current efficiency, machining accuracy, and depth of the circular pattern on the stainless steel surfaces. A mathematical model is also developed to determine the theoretical depth of the dimple pattern and correlate the theoretical depths with actual depths as obtained by experimentation. Moreover, an effort has been made to study the structuringcharacteristics on the basis of micrographs obtained duringthe EMM.
基金National Natural Science Foundation of China (50635040)National High-tech Research and Development Program (2009AA04Z302)Jiangsu Provincial Natural Science Foundation (BK2008043)
文摘Electrochemical micromachining （EMM） technology for fabricating micro structures is presented in this article. By applying ultra short pulses, dissolution of a workpiece can be restricted to the region very close to the electrode. First, an EMM system for meeting the requirements of the EMM process is established. Second, sets of experiments is carried out to investigate the influence of some of the predominant electrochemical process parameters such as electrical parameters, feed rate, electrode geometry features and electrolyte composition on machining quality, especially the influences of pulse on time on shape precision and working end shape of electrode on machined surface quality. Finally, after the preliminary experiments, a complex microstructure with good shape precision and surface quality is successfully obtained.
