Nanolithography plays crucial roles in the miniaturization of dense integrated circuit,which extremely depends on innovative resist materials.Recently,metal-containing resists have been explored due to their higher sh...Nanolithography plays crucial roles in the miniaturization of dense integrated circuit,which extremely depends on innovative resist materials.Recently,metal-containing resists have been explored due to their higher short-wavelength photon absorption than traditional polymer resists.Herein,for the first time,the patterning performance of non-alkyl tin-oxo clusters has been evaluated.Meanwhile,the influence of structural characteristics on resolution and sensitivity has been investigated.To evaluate the surface ligand effect,three non-alkyl Sn_(10)-oxo clusters with the same core were functionalized with pyrazole,3-methylpyrazole and 4-methylpyrazole,respectively.Furthermore,another Sn_(14)-oxo cluster with similar core configuration was also prepared using 4-methylpyrazole ligand to study the influence of Sn nuclearity.Spin-coating method was then applied to fabricate thin films of these non-alkyl tin-oxo clusters on Si substrate,which showed various thicknesses and roughnesses.More interestingly,electron beam lithography(EBL)patterning studies indicated that for the same Sn_(10)core,the 4-methylpyrazoledecorated clusters showed the best performance.As for the different cluster cores with the same 4-methylpyrazole ligand,the patterns of Sn_(10)with the higher ligand:Sn ratio are also better than those of Sn_(14).Finally,distinguishable 50 nm resolution was achieved by 4-methylpyrazole-decorated Sn_(10)at expose energy of 100μC/cm2which can be significantly improved by increasing expose energy to 1,000μC/cm2as confirmed by atomic force microscopy(AFM)images.This work not only opens the nanolithography applications of non-alkyl tin-oxo clusters,but also provides an effective structural methodology for improving their patterning performance in future.展开更多
AIM: The synthesis and antiaggregation activity of a series of compounds with p amidinophenyl group and tyrosine methyl esters as their terminals were studied. METHODS and RESULTS: A series of O (4 aminoiminomethylphe...AIM: The synthesis and antiaggregation activity of a series of compounds with p amidinophenyl group and tyrosine methyl esters as their terminals were studied. METHODS and RESULTS: A series of O (4 aminoiminomethylphenyloxy)alkyl N substituted L tyrosine methyl esters were prepared from 4 cyanophenol, L tyrosine and different dihalo alkanes. All compounds (IVa～i) were new compounds. Their in vitro activity against ADP induced platelet aggregation were tested. The structure activity relationships were discussed. CONCLUSION: Some of the compounds showed antiaggregation activity on platelet rich plasma at the final concerntration of 1×10 -6 mol·L -1 . The potency of IVa～i showed that compounds with three methylene groups are better than those with four methylene groups on the same R substituent in the above series of compounds.展开更多
基金supported by the National Natural Science Foundation of China(21922111,91961108)。
文摘Nanolithography plays crucial roles in the miniaturization of dense integrated circuit,which extremely depends on innovative resist materials.Recently,metal-containing resists have been explored due to their higher short-wavelength photon absorption than traditional polymer resists.Herein,for the first time,the patterning performance of non-alkyl tin-oxo clusters has been evaluated.Meanwhile,the influence of structural characteristics on resolution and sensitivity has been investigated.To evaluate the surface ligand effect,three non-alkyl Sn_(10)-oxo clusters with the same core were functionalized with pyrazole,3-methylpyrazole and 4-methylpyrazole,respectively.Furthermore,another Sn_(14)-oxo cluster with similar core configuration was also prepared using 4-methylpyrazole ligand to study the influence of Sn nuclearity.Spin-coating method was then applied to fabricate thin films of these non-alkyl tin-oxo clusters on Si substrate,which showed various thicknesses and roughnesses.More interestingly,electron beam lithography(EBL)patterning studies indicated that for the same Sn_(10)core,the 4-methylpyrazoledecorated clusters showed the best performance.As for the different cluster cores with the same 4-methylpyrazole ligand,the patterns of Sn_(10)with the higher ligand:Sn ratio are also better than those of Sn_(14).Finally,distinguishable 50 nm resolution was achieved by 4-methylpyrazole-decorated Sn_(10)at expose energy of 100μC/cm2which can be significantly improved by increasing expose energy to 1,000μC/cm2as confirmed by atomic force microscopy(AFM)images.This work not only opens the nanolithography applications of non-alkyl tin-oxo clusters,but also provides an effective structural methodology for improving their patterning performance in future.
文摘AIM: The synthesis and antiaggregation activity of a series of compounds with p amidinophenyl group and tyrosine methyl esters as their terminals were studied. METHODS and RESULTS: A series of O (4 aminoiminomethylphenyloxy)alkyl N substituted L tyrosine methyl esters were prepared from 4 cyanophenol, L tyrosine and different dihalo alkanes. All compounds (IVa～i) were new compounds. Their in vitro activity against ADP induced platelet aggregation were tested. The structure activity relationships were discussed. CONCLUSION: Some of the compounds showed antiaggregation activity on platelet rich plasma at the final concerntration of 1×10 -6 mol·L -1 . The potency of IVa～i showed that compounds with three methylene groups are better than those with four methylene groups on the same R substituent in the above series of compounds.
